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Advanced Ion Beam Technology Inc patents

Recent patent applications related to Advanced Ion Beam Technology Inc. Advanced Ion Beam Technology Inc is listed as an Agent/Assignee. Note: Advanced Ion Beam Technology Inc may have other listings under different names/spellings. We're not affiliated with Advanced Ion Beam Technology Inc, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "A" | Advanced Ion Beam Technology Inc-related inventors




Date Advanced Ion Beam Technology Inc patents (updated weekly) - BOOKMARK this page
05/04/17Method of cleaning electrostatic chuck
04/20/17Ion implantation system and process
03/09/17Plasma-based processing system and operation method thereof
10/06/16Forming punch-through stopper regions in finfet devices
08/11/16Plasma-based material modification with neutral beam
08/04/16Magnetic field fluctuation for beam smoothing
07/28/16Ion implanter and ion implantation
07/14/16Method and ion implanter for low temperature implantation
05/12/16Method for ion implantation
04/21/16Electrode assembly having pierce electrodes for controlling space charge effects
03/17/16Deposition apparatus and deposition method using the same
12/31/15Single bend energy filter for controlling deflection of charged particle beam
12/24/15Lower dose rate ion implantation using a wider ion beam
09/10/15Plasma-based material modification using a plasma source with magnetic confinement
05/21/15Deceleration ribbon and spot beams
04/16/15Medium current ribbon beam for ion implantation
02/26/15Ion source of an ion implanter
01/29/15Replacement source/drain finfet fabrication
12/18/14Scan head and scan arm using the same
09/18/14Beam control assembly for ribbon beam of ions for ion implantation
07/31/14Magnetic field fluctuation for beam smoothing
06/26/14Replacement source/drain finfet fabrication
06/12/14Implant method and implanter by using a variable aperture
06/05/14Gas mixture generating ion beam
06/05/14Multi-energy ion implantation
04/10/14Plasma doping a non-planar semiconductor device
02/27/14Doping a non-planar semiconductor device
09/19/13Beam control assembly for ribbon beam of ions for ion implantation
07/25/13Replacement source/drain finfet fabrication
07/25/13Scan head and scan arm using the same
05/23/13Ion implanter and ion implant method thereof
03/07/13Apparatus and measuring ion beam current
01/31/13Extremely low temperature rotary union
01/31/13Replacement source/drain finfet fabrication
01/03/13Real time monitoring ion beam
12/20/12Apparatus and controlling workpiece temperature
11/08/12Temperature-controllable electrostatic chuck
08/02/12Determining relative scan velocity to control ion implantation of work piece
07/26/12Apparatus for adjusting ion beam by bended bar magnets
05/24/12Ion implantation method and ion implanter
05/10/12Method for low temperature ion implantation
04/26/12Deceleration ribbon and spot beams
04/12/12Method for monitoring ion implantation
03/15/12Ion implanting system
01/26/12Apparatus and measuring ion beam current
10/06/11Method for low temperature ion implantation
09/22/11Method for low temperature ion implantation
04/21/11Ion implanter with variable aperture and ion implant method thereof
03/24/11Beam control assembly for ribbon beam of ions for ion implantation
03/03/11Ion implanter and ion implant method thereof
02/17/11Method and uniformly implanting a wafer with an ion beam
09/17/09Ion implantation method
08/06/09Method and device of ion source generation
07/30/09Apparatus and methods for ion beam implantation using ribbon and spot beams
04/09/09Implant beam utilization in an ion implanter







ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009



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