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Advanced Ion Beam Technology Inc patents


Recent patent applications related to Advanced Ion Beam Technology Inc. Advanced Ion Beam Technology Inc is listed as an Agent/Assignee. Note: Advanced Ion Beam Technology Inc may have other listings under different names/spellings. We're not affiliated with Advanced Ion Beam Technology Inc, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "A" | Advanced Ion Beam Technology Inc-related inventors


Apparatus and method for monitoring the relative relationship between the wafer and the chuck

An apparatus and a method for monitoring the relative relationship between the wafer and the chuck is provided, especially for monitoring whether the wafer is sticky on the chuck when the wafer is de-chucked. The lift pins may be extended outside the chuck to separate the wafer and the chuck when the wafer is de-chucked. ... Advanced Ion Beam Technology Inc

Method of cleaning electrostatic chuck

A method of cleaning an electrostatic chuck (esc) is disclosed. An ion beam is delivered to a work surface of an esc where no workpiece is held. ... Advanced Ion Beam Technology Inc

Ion implantation system and process

Ion implantation systems and processes are disclosed. An exemplary ion implantation system may include an ion source, an extraction manipulator, a magnetic analyzer, and an electrode assembly. ... Advanced Ion Beam Technology Inc

Plasma-based processing system and operation method thereof

A plasma-based processing system and a corresponding operation method are proposed. One or more absorbers are positioned between a plasma generation volume inside the plasma chamber and a support structure configured to support the workpiece, and then a portion of plasma delivered from the plasma generation volume to the support structure (or the workpiece) is absorbed by the absorber(s). ... Advanced Ion Beam Technology Inc








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