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Advanced Micro fabrication Equipment Inc Shanghai patents


Recent patent applications related to Advanced Micro fabrication Equipment Inc Shanghai. Advanced Micro fabrication Equipment Inc Shanghai is listed as an Agent/Assignee. Note: Advanced Micro fabrication Equipment Inc Shanghai may have other listings under different names/spellings. We're not affiliated with Advanced Micro fabrication Equipment Inc Shanghai, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "A" | Advanced Micro fabrication Equipment Inc Shanghai-related inventors


Coating packaged chamber parts for semiconductor plasma apparatus

An advanced coating for parts used in plasma processing chamber. The advanced coating is formed over an anodized surface that has not been sealed. After the coating is formed, the coated area is masked, and the remaining anodized surface is sealed. The porous and rough structure of the anodized but... Advanced Micro fabrication Equipment Inc Shanghai

Electrode structure for icp etcher

The invention relates to an electrode structure for ICP etcher, including: inductive coils, inductive coil connectors, connect rods and sleeve; in which, inductive coils are set on insulation window and insulation window is set on chamber lid; two ends of the connect rods respectively connect inductive coils and inductive coil... Advanced Micro fabrication Equipment Inc Shanghai

Temperature adjusting a focus ring

The present invention provides a temperature adjusting apparatus for a focus ring, wherein heat radiated from the plasma onto the focus ring is transferred downward to a base through the first heat conducting pad contacting a lower surface of the focus ring, an insulating ring contacting a lower surface of... Advanced Micro fabrication Equipment Inc Shanghai

Multi-zone active-matrix temperature control system and temperature control method, and electrostatic chuck and plasma processing apparatus apply thereof

The present invention discloses a multi-zone active-matrix temperature control system, the control system having a temperature control matrix and a gate driver; the temperature control matrix comprising: N*M temperature control modules forming a N-row M-column matrix, a power supply line, and a power return line; each temperature control module comprising:... Advanced Micro fabrication Equipment Inc Shanghai

Substrate processing method and apparatus thereof

The invention relates to a substrate processing method and relevant apparatus. The method includes: placing the substrate into a reactor consist by several walls; delivering etching gas to the reactor to etch the substrate; receiving optical signal from the reactor with the inspection window arranged on at least one of... Advanced Micro fabrication Equipment Inc Shanghai

Method for mocvd gas showerhead pretreatment

A method for MOCVD gas showerhead pretreatment, which includes: providing a reaction chamber, an evacuating system located at bottom of reaction chamber and a gas showerhead fixed on top of reaction chamber. The gas showerhead includes the cooling plate at the bottom and gas supplying system on the top; the... Advanced Micro fabrication Equipment Inc Shanghai








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