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Axcelis Technologies Inc patents

Recent patent applications related to Axcelis Technologies Inc. Axcelis Technologies Inc is listed as an Agent/Assignee. Note: Axcelis Technologies Inc may have other listings under different names/spellings. We're not affiliated with Axcelis Technologies Inc, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "A" | Axcelis Technologies Inc-related inventors

Date Axcelis Technologies Inc patents (updated weekly) - BOOKMARK this page
05/11/17Ion source liner having a lip for ion implantation systems
02/09/17High throughput cooled ion implantation system and method
08/25/16Bipolar wafer charge monitor system and ion implantation system comprising same
06/30/16Wafer clamp detection based on vibration or acoustic characteristic analysis
06/30/16Combined electrostatic lens system for ion implantation
06/30/16Combined multipole magnet and dipole scanning magnet
06/30/16Systems and methods for beam angle adjustment in ion implanters with beam decelaration
06/30/16Beam profiling speed enhancement for scanned beam implanters
06/30/16Method of measuring vertical beam profile in an ion implantation system having a vertical beam angle device
06/30/16System and method to improve productivity of hybrid scan ion beam implanters
06/23/16Laser-induced borane production for ion implantation
03/24/16System and electrostatic clamping of workpieces
12/31/15High throughput heated ion implantation system and method
12/10/15Ion implantation source with textured interior surfaces
11/05/15Angular scanning using angular energy filter
08/13/15Multi fluid cooling system for large temperature range chuck
08/13/15Constant mass flow multi-level coolant path electrostatic chuck
08/13/15Variable electrode pattern for versatile electrostatic clamp operation
07/30/15Method for enhancing beam utilization in a scanned beam ion implanter
07/16/15Ion implantation system and method with variable energy control
06/25/15Reduced trace metals contamination ion source for an ion implantation system
01/01/15Multi-resistivity johnsen-rahbek electrostatic clamp
07/03/14Charge integration based electrostatic clamp health monitor
03/06/14Implant-induced damage control in ion implantation
02/06/14In-vacuum high speed pre-chill and post-heat stations
12/05/13Inert atmospheric pressure pre-chill and post-heat
11/21/13Inline capacitive ignition of inductively coupled plasma ion source
11/21/13Method and cleaning residue from an ion source component
07/18/13Beam line design to reduce energy contamination
06/27/13Plasma generating apparatus and process for simultaneous exposure of a workpiece to electromagnetic radiation and plasma
06/13/13System and ion implantation with improved productivity and uniformity
06/06/13Automatic control system for selection and optimization of co-gas flow levels
04/25/13Method and improved uniformity control with dynamic beam shaping
01/31/13System and ion implantation with improved productivity and uniformity
11/29/12Mass analysis variable exit aperture
11/08/12Rf coupled plasma abatement system comprising an integrated power oscillator
10/25/12Vacuum system cold trap filter
10/04/12Method and improved uniformity control with dynamic beam shaping
10/04/12Charged particle cancer therapy patient positioning method and apparatus
10/04/12Uniformity of a scanned ion beam
09/20/12Fluid distribution members and/or assemblies
07/26/12Microwave plasma electron flood
07/26/12Carbon implantation process and carbon ion precursor composition
06/28/12Dose measurement method using calorimeter
05/17/12Hydrogen cogas for carbon implant
05/17/12Implementation of co-gases for germanium and boron ion implants
02/02/12Plasma mediated ashing processes
02/02/12Versatile beam glitch detection system
12/08/11Effective algorithm for warming a twist axis for cold ion implantations
12/08/11Heated electrostatic chuck including mechanical clamp capability at high temperature
12/08/11Heated annulus chuck
12/01/11Post implant wafer heating using light
12/01/11Heated rotary seal and bearing for chilled ion implantation system
12/01/11Active dew point sensing and load lock venting to prevent condensation on workpieces
12/01/11Matched coefficient of thermal expansion for an electrostatic chuck
11/10/11Throughput enhancement for scanned beam ion implanters
11/03/11Magnetic scanning system with improved efficiency
10/27/11Silaborane implantation processes
09/22/11Plasma mediated ashing processes
09/08/11Method for improving implant uniformity during photoresist outgassing
07/28/11Thermal isolation assemblies for wafer transport apparatus and methods of use thereof
07/14/11Aromatic molecular carbon implantation processes
06/09/11Substantially non-oxidizing plasma treatment devices and processes
05/12/11Method and cleaning residue from an ion source component
05/05/11Method and system for increasing beam current above a maximum energy for a charge state
Patent Packs
02/17/11Wide area radio frequency plasma processing multiple substrates
02/03/11Method of doping semiconductors
01/20/11Adjustable louvered plasma electron flood enclosure
01/06/11Use of beam scanning to improve uniformity and productivity of a 2d mechanical scan implantation system
12/09/10System and ion implantation with improved productivity and uniformity
11/18/10Method and system for detection of solid materials in a plasma using an electromagnetic circuit
07/29/10Non-condensing thermos chuck
07/22/10Ion beam angle calibration and emittance measurement system for ribbon beams
07/22/10Enhanced low energy ion beam transport in ion implantation
07/08/10Vapor compression refridgeration chuck for ion implanters
06/24/10Ion implantation with diminished scanning field effects
06/24/10Electrostatic chuck shielding mechanism
06/10/10De-clamping wafers from an electrostatic chuck
06/10/10Electrostatic chuck with compliant coat
05/27/10Front end of line plasma mediated ashing processes and apparatus
Patent Packs
05/06/10Wafer grounding electrostatic clamps
05/06/10Electrostatic chuck ground punch
03/25/10Extraction electrode manipulator
03/18/10Adjustable deflection optics for ion implantation
03/04/10Plasma ashing apparatus and endpoint detection process
02/18/10System and beam energy identification for single wafer ion implantation
01/21/10Method and measurement of beam angle in ion implantation
12/31/09Ion implanter having combined hybrid and double mechanical scan architecture
12/31/09Post-decel magnetic energy filter for ion implantation systems
12/31/09Low-inertia multi-axis multi-directional mechanically scanned ion implantation system
12/31/09System and reducing particles and contamination by matching beam complementary aperture shapes to beam shapes
12/31/09System and controlling broad beam uniformity
12/24/09Methods for implanting b22hx and its ionized lower mass byproducts
12/24/09Patient positioning method and apparatus used in conjunction with a charged particle cancer therapy system
12/24/09Method and intensity control of a charged particle beam extracted from a synchrotron
11/12/09Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing process
11/05/09System and performing uniform dose implantation under adverse conditions
11/05/09Gas bearing electrostatic chuck
10/29/09Ion source with adjustable aperture
10/29/09Low contamination, low energy beamline architecture for high current ion implantation
09/24/09Extraction electrode system for high current ion implanter
08/27/09Processes for curing silicon based low-k dielectric materials
08/13/09Methods for in situ surface treatment in an ion implantation system
07/30/09Remote wafer presence detection with passive rfid
05/07/09Double plasma ion source
02/05/09Elevated temperature rf ion source

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009


This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. is not affiliated or associated with Axcelis Technologies Inc in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Axcelis Technologies Inc with additional patents listed. Browse our Agent directory for other possible listings. Page by