Real Time Touch



new TOP 200 Companies filing patents this week

new Companies with the Most Patent Filings (2010+)




Real Time Touch

Axcelis Technologies Inc patents


Recent patent applications related to Axcelis Technologies Inc. Axcelis Technologies Inc is listed as an Agent/Assignee. Note: Axcelis Technologies Inc may have other listings under different names/spellings. We're not affiliated with Axcelis Technologies Inc, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "A" | Axcelis Technologies Inc-related inventors


Implantation using solid aluminum iodide (ali3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products

An ion implantation system is provided having an ion source configured to form an ion beam from aluminum iodide. A beamline assembly selectively transports the ion beam to an end station configured to accept the ion beam for implantation of aluminum ions into a workpiece. The ion source has a... Axcelis Technologies Inc

Implantation using solid aluminum iodide (ali3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products

An ion implantation system is provided having an ion source configured to form an ion beam from aluminum iodide. A beamline assembly selectively transports the ion beam to an end station configured to accept the ion beam for implantation of aluminum ions into a workpiece. The ion source has a... Axcelis Technologies Inc

Wafer cooling method

An ion implantation system has a first chamber and a process chamber with a heated chuck. A controller transfers the workpiece between the heated chuck and first chamber and selectively energizes the heated chuck first and second modes. In the first and second modes, the heated chuck is heated to... Axcelis Technologies Inc

Lanthanated tungsten ion source and beamline components

An ion implantation system is provided having one or more conductive components comprised of one or more of lanthanated tungsten and a refractory metal alloyed with a predetermined percentage of a rare earth metal. The conductive component may be a component of an ion source, such as one or more... Axcelis Technologies Inc

Ion source repeller shield

An arc chamber has a liner operably coupled to body. The liner has a second surface recessed from a first surface and a hole having a first diameter. The liner has a liner lip extending upwardly from the second surface toward the first surface that surrounds the hole and has... Axcelis Technologies Inc

Ion source cathode shield

An ion source has an arc chamber having an arc chamber body. An electrode extends into an interior region of the arc chamber body, and a cathode shield has a body that is cylindrical having an axial hole. The axial hole is configured to pass the electrode therethrough. First and... Axcelis Technologies Inc

Multi-piece electrode aperture

An optics plate for an ion implantation system, the optics plate comprising a pair of aperture assemblies. Each pair of aperture assemblies respectively comprises a first aperture member, a second aperture member; and an aperture fastener, wherein the aperture fastener fastens the first aperture member to the second aperture member.... Axcelis Technologies Inc

High throughput serial wafer handling end station

An ion implantation apparatus, system, and method are provided for transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an... Axcelis Technologies Inc

Ion source liner having a lip for ion implantation systems

An ion source has an arc chamber having a body defining and interior region. A liner defined an exposure surface of the interior region that is exposed to a plasma generated within the arc chamber. An electrode has a shaft with a first diameter that passes through the body and... Axcelis Technologies Inc

High throughput cooled ion implantation system and method

An ion implantation system has a process chamber having a process environment, and an ion implantation apparatus configured to implant ions into a workpiece supported by a chuck within the process chamber. A load lock chamber isolates the process (vacuum) environment from an atmospheric environment, wherein a load lock workpiece... Axcelis Technologies Inc








ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009



###

This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Axcelis Technologies Inc in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Axcelis Technologies Inc with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

###