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Beneq Oy
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Beneq Oy patents


Recent patent applications related to Beneq Oy. Beneq Oy is listed as an Agent/Assignee. Note: Beneq Oy may have other listings under different names/spellings. We're not affiliated with Beneq Oy, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "B" | Beneq Oy-related inventors


Nozzle head and coating substrate surface

A nozzle head, apparatus and method for providing a coating on a surface of a substrate by subjecting the surface of the substrate to successive surface reactions of at least two precursors according to principles of atomic layer deposition. The nozzle head comprises an output face provided with at least... Beneq Oy

Apparatus and method

An apparatus and a method for processing a surface of a substrate exposes the surface of the substrate to alternating surface reactions of at least a first starting material and a second starting material according to the principles of atomic layer deposition method. A first starting material is fed on... Beneq Oy

Arrangement for processing substrate and substrate carrier

The invention relates to an arrangement for processing a substrate in a reaction chamber of a gas deposition apparatus by exposing the substrate to alternate, saturated surface reactions of starting materials, the arrangement comprising loading means for loading the substrate into the reaction chamber on a substrate support. In accordance... Beneq Oy

Nozzle head, subjecting surface of substrate to successive surface reactions

The invention relates to a nozzle head, an apparatus and method for subjecting a surface of a substrate to successive surface reactions of at least a first precursor (A) and a second precursor (B). The nozzle head having an output face comprises at least one precursor nozzle for supplying precursor... Beneq Oy








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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Beneq Oy in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Beneq Oy with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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