CYMI - Cymer Inc. patents

This listing is of recent patents (patent applications) which may be related to Cymer Inc. according to a patent app search. In *most* cases, they are listed under Cymer Inc. because the company is listed in the Agent field of the patent application. Note: Cymer Inc. (CYMI) may have other listings under a different name, spelling or agent. If there is another company with a similar name, it's possible their patents could be inadvertantly included here. Notify us of any issues. Also, FreshPatents.com is not affiliated with Cymer Inc., we're just tracking patents related to them as published publically by the USPTO. Full list of Stock Symbols and Company RSS Feeds

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Symbol	Company	Application #	Date	Title
CYMI	Cymer	20120092746	20120419	Oscillator-amplifier drive laser with seed protection for an euv light source
CYMI	Cymer	20120087386	20120412	Laser system
CYMI	Cymer	20120019826	20120126	Alignment of light source focus
CYMI	Cymer	20120002687	20120105	Laser system
CYMI	Cymer	20110317256	20111229	Master oscillator-power amplifier drive laser with pre-pulse for euv light source
CYMI	Cymer	20110253349	20111020	Systems and methods for cooling an optic
CYMI	Cymer	20110248191	20111013	Systems and methods for target material delivery protection in a laser produced plasma euv light source
CYMI	Cymer	20110249691	20111013	Method and apparatus for controlling light bandwidth
CYMI	Cymer	20110240890	20111006	Extreme ultraviolet light source
CYMI	Cymer	20110233429	20110929	Laser produced plasma euv light source having a droplet stream produced using a modulated disturbance wave
CYMI	Cymer	20110205512	20110825	Active spectral control of optical source
CYMI	Cymer	20110194580	20110811	Line narrowing module
CYMI	Cymer	20110192995	20110811	Lpp euv light source drive laser system
CYMI	Cymer	20110140008	20110616	Beam transport system for extreme ultraviolet light source
CYMI	Cymer	20110141865	20110616	Metrology for extreme ultraviolet light source
CYMI	Cymer	20110122901	20110526	High power high pulse repetition rate gas discharge laser system
CYMI	Cymer	20110102759	20110505	Laser system
CYMI	Cymer	20110079736	20110407	Laser produced plasma euv light source
CYMI	Cymer	20110075253	20110331	Euv optics
CYMI	Cymer	20110069733	20110324	Regenerative ring resonator
CYMI	Cymer	20110058588	20110310	Drive laser for euv light source
CYMI	Cymer	20110051760	20110303	Active spectral control of duv laser light source
CYMI	Cymer	20100327192	20101230	Alignment laser
CYMI	Cymer	20100309939	20101209	Multi-chamber gas discharge laser bandwidth control through discharge timing
CYMI	Cymer	20100294953	20101125	Laser produced plasma euv light source
CYMI	Cymer	20100258750	20101014	System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output
CYMI	Cymer	20100258748	20101014	System, method and apparatus for droplet catcher for prevention of backsplash in a euv generation chamber
CYMI	Cymer	20100258747	20101014	Systems and methods for protecting an euv light source chamber from high pressure source material leaks
CYMI	Cymer	20100258749	20101014	System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror
CYMI	Cymer	20100176313	20100715	Extreme ultraviolet light source
CYMI	Cymer	20100149647	20100617	System method and apparatus for selecting and controlling light source bandwidth
CYMI	Cymer	20100140514	20100610	Gas management system for a laser-produced-plasma euv light source
CYMI	Cymer	20100142582	20100610	Gas discharge laser chamber
CYMI	Cymer	20100127186	20100527	Laser produced plasma euv light source
CYMI	Cymer	20100127191	20100527	Systems and methods for drive laser beam delivery in an euv light source
CYMI	Cymer	20100108913	20100506	Laser system
CYMI	Cymer	20100107870	20100506	Metal fluoride trap
CYMI	Cymer	20100098123	20100422	Method and apparatus for laser control in a two chamber gas discharge laser
CYMI	Cymer	20100098124	20100422	Method and apparatus for laser control in a two chamber gas discharge laser
CYMI	Cymer	20100098122	20100422	Method and apparatus for laser control in a two chamber gas discharge laser
CYMI	Cymer	20100097704	20100422	Line narrowing module
CYMI	Cymer	20100098120	20100422	Very high power laser chamber optical improvements
CYMI	Cymer	20100074295	20100325	Immersion lithography laser light source with pulse stretcher
CYMI	Cymer	20100067983	20100318	Blind motorized coupling arrangements for coupling uv light source subsystem and scanner subsystem in a uv lithography system and methods therefor
CYMI	Cymer	20100066989	20100318	Spectral purity filters and methods therefor
CYMI	Cymer	20100054295	20100304	High pulse repetition rate gas discharge laser
CYMI	Cymer	20100025600	20100204	Systems and methods for heating an euv collector mirror
CYMI	Cymer	20100024980	20100204	Laser produced plasma euv light source

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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Cymer Inc. in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Cymer Inc. with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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