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Carl Zeiss Smt Gmbh patents


      
Recent patent applications related to Carl Zeiss Smt Gmbh. Carl Zeiss Smt Gmbh is listed as an Agent/Assignee. Note: Carl Zeiss Smt Gmbh may have other listings under different names/spellings. We're not affiliated with Carl Zeiss Smt Gmbh, we're just tracking patents.

ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "C" | Carl Zeiss Smt Gmbh-related inventors




Search recent Press Releases: Carl Zeiss Smt Gmbh-related press releases
Count Application # Date Carl Zeiss Smt Gmbh patents (updated weekly) - BOOKMARK this page
12016011664804/28/16  new patent  Optical element comprising a multilayer coating, and optical arrangement comprising same
22016011685104/28/16  new patent  Projection exposure tool for microlithography and microlithographic imaging
32016010967904/21/16 Optical element unit and supporting an optical element
42016010980704/21/16 Optical component
52016010981404/21/16 Lithographic apparatus, positioning system for use in a lithographic apparatus and method
62016011126904/21/16 Mass spectrometer, use thereof, and the mass spectrometric examination of a gas mixture
72016010427504/14/16 Method and device for determining a lateral offset of a pattern on a substrate relative to a desired position
82016009130003/31/16 Method for characterizing a structure on a mask and device for carrying out said method
92016009179803/31/16 Optical assembly
102016008506103/24/16 Projection optical unit for imaging an object field into an image field, and projection exposure apparatus comprising such a projection optical unit
112016007744103/17/16 Euv imaging apparatus
122016007744203/17/16 Optical component
132016007744403/17/16 Method for operating an illumination system of a microlithographic projection exposure apparatus
142016007744603/17/16 Illumination system for a microlithographic projection exposure apparatus
152016007017603/10/16 Illumination system of a microlithographic projection exposure apparatus
162016006224403/03/16 System for producing structures in a substrate
172016006224503/03/16 Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system
182016005466102/25/16 Arrangement for actuating an element in a microlithographic projection exposure apparatus
192016005466202/25/16 Projection exposure apparatus with a highly flexible manipulator
202016004808302/18/16 Reflecting coating with optimized thickness
212016004808802/18/16 Device for controlling temperature of an optical element
222016004136002/11/16 Positioning unit and adjustment of an optical element
232016004147302/11/16 Lens comprising a plurality of optical element disposed in a housing
242016004147502/11/16 Replacement an optical element
252016004148002/11/16 Arrangement for the thermal actuation of a mirror, in particular in a microlithographic projection exposure apparatus
262016003387302/04/16 Projection exposure apparatus with at least one manipulator
272016002555401/28/16 Method for determining the phase angle and/or the thickness of a contamination layer at an optical element and euv lithography apparatus
282016002595201/28/16 Optical module
292016002609101/28/16 Radiation collector, radiation source and lithographic apparatus
302016002609301/28/16 Model-based control of an optical imaging device
312016002609401/28/16 Method and device for the correction of imaging defects
322016001866401/21/16 Polarizer assembly for spatially separation polarization states of a light beam
332016001152001/14/16 Method for measuring an angularly resolved intensity distribution and projection exposure apparatus
342016001152101/14/16 Microlithographic apparatus
352016000416401/07/16 Illumination system for an euv lithography device and facet mirror therefor
362016000416501/07/16 Imaging optical system and projection exposure system for microlithography
372016000416701/07/16 Microlithographic projection exposure apparatus illumination optics
382016000416801/07/16 Measuring an optical symmetry property on a projection exposure apparatus
392016000417001/07/16 Lithographic apparatus and device manufacturing method
402016000417401/07/16 Microlithographic apparatus and varying a light irradiance distribution
412015037017212/24/15 Projection lens with wavefront manipulator
422015037017612/24/15 Actuators and microlithography projection exposure systems and methods using the same
432015036234012/17/15 Position sensor, sensor arrangement and lithography apparatus comprising position sensor
442015036243812/17/15 Magnifying imaging optical unit and euv mask inspection system with such an imaging optical unit
452015036266012/17/15 Optical waveguide for guiding illumination light
462015035505212/10/15 Test object for measuring the point spread function of an optical system
472015035555212/10/15 Optical assembly for increasing the etendue
482015035555512/10/15 Illumination optical unit for projection lithography
492015034659812/03/15 Illumination optical unit for a mask inspection system and mask inspection system with such an illumination optical unit
502015034660412/03/15 Illumination optical unit for projection lithography
512015034660812/03/15 Method for ascertaining distortion properties of an optical system in a measurement system for microlithography
522015034661212/03/15 Optical arrangement in an optical system, in particular in a microlithographic projection exposure apparatus
532015034082911/26/15 Beam reverser module and optical power amplifier having such a beam reverser module
542015032338711/12/15 Polarization measuring device, lithography apparatus, measuring arrangement, and polarization measurement
552015032387311/12/15 Optical projection system
562015032387411/12/15 Euv light source for generating a used output beam for a projection exposure apparatus
572015031685111/05/15 Reflective optical element for euv lithography and manufacturing a reflective optical element
582015031685311/05/15 Support elements for an optical element
592015031685411/05/15 Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations
602015031685511/05/15 Projection exposure semiconductor lithography including an actuator system
612015030930510/29/15 Arrangement for the actuation of at least one element in an optical system
622015030080710/22/15 Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
632015030145510/22/15 Method of lithographically transferring a pattern on a light sensitive surface and illumination system of a microlithographic projection exposure apparatus
642015029335210/15/15 Method for improving the imaging properties of a projection objective, and such a projection objective
652015029345710/15/15 Imaging optical unit and projection exposure projection lithography, having such imaging optical unit
662015028615010/08/15 Illumination system of a microlithographic projection exposure apparatus
672015027723010/01/15 Optical membrane element having a longitudinally adjustable connecting element
682015027723510/01/15 Optical system of a microlithographic projection exposure apparatus
692015025367709/10/15 Optical system of a microlithographic projection exposure apparatus
702015024179208/27/15 Illumination system and lithographic apparatus
712015023428908/20/15 Method for operating a projection exposure apparatus with correction of imaging aberrations induced by the mask
722015023429108/20/15 Illumination system of a microlithographic projection exposure apparatus
732015023582908/20/15 Method for mass spectrometric examination of gas mixtures and mass spectrometer therefor
742015022694808/13/15 Catadioptric projection objective with parallel, offset optical axes
752015022705208/13/15 Projection exposure method, system and objective
762015022705308/13/15 Multi facet mirror of a microlithographic projection exposure apparatus
772015022705508/13/15 Optical apparatus with adjustable action of force on an optical module
782015021987408/06/15 Cooling system for at least one system component of an optical system for euv applications and system component of this type and optical system of this type
792015021999908/06/15 Imaging optics, microlithography projection exposure apparatus having same and related methods
802015021243107/30/15 Projection exposure system for microlithography with a measurement device
812015020508407/23/15 Catadioptric projection objective with intermediate images
822015019843707/16/15 Projection exposure microlithography comprising an optical distance measurement system
832015019843807/16/15 Diffractive optical element and measuring method
842015019889107/16/15 Method for assigning a pupil facet of a pupil facet mirror of an illumination optical unit of a projection exposure apparatus to a field facet of a field facet mirror of the illumination optical unit
852015019889207/16/15 Arrangement for actuating at least one optical element in an optical system
862015019889407/16/15 Monitor system for determining orientations of mirror elements and euv lithography system
872015019286007/09/15 Illumination optical unit for euv projection lithography
882015019423007/09/15 Euv collector
892015018546907/02/15 Method for regulating the tilting of a mirror element
902015018562107/02/15 Illumination system having a beam deflection array for illuminating a mask in a microlithographic projection exposure apparatus
912015018562207/02/15 Illumination system of a microlithographic projection exposure apparatus
922015017762306/25/15 Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation
932015017762606/25/15 Blocking element for protecting optical elements in projection exposure apparatuses
942015016867406/18/15 Mirror arrangement for an euv projection exposure apparatus, operating the same, and euv projection exposure apparatus
952015016884406/18/15 Mirror arrangement for a lithography producing the same
962015016884606/18/15 Optical element unit for exposure processes
972015016884906/18/15 Method of operating a microlithographic apparatus
982015016885306/18/15 Lithography apparatus with restricted movement relative to floor and related method
992015017316306/18/15 Euv light source for generating a usable output beam for a projection exposure apparatus
1002015016056106/11/15 Mirror
1012015016056206/11/15 System correction from long timescales
1022015016056506/11/15 Projection exposure methods and systems
1032015016056606/11/15 Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method
1042015015365006/04/15 Method for operating a microlithographic projection exposure apparatus
1052015015365206/04/15 Method for adjusting an illumination setting
1062015015365406/04/15 Illumination system of a microlithographic projection exposure apparatus
1072015014618305/28/15 Illumination system of a microlithographic projection exposure apparatus
1082015014618405/28/15 Illumination system of a microlithographic projection exposure apparatus
1092015013852005/21/15 Holding device for an optical element in an objective
1102015013701205/21/15 Euv light source
1112015013852105/21/15 Lens module comprising at least one exchangeable optical element
1122015012407505/07/15 Optical imaging device and imaging microscopy
1132015012423305/07/15 Illumination system for an euv projection lithographic projection exposure apparatus
1142015012596805/07/15 Optical system and use
1152015011670304/30/15 Reflective optical element
1162015010959104/23/15 Optical imaging device with thermal attenuation
1172015010332604/16/15 Optical element
1182015010332704/16/15 Lithography apparatus with segmented mirror
1192015010342604/16/15 Method and cooling system for cooling an optical element for euv applications
1202015009806804/09/15 Device for controlling temperature of an optical element
1212015009807104/09/15 Optical arrangement for three-dimensionally patterning a material layer
1222015009807204/09/15 Beam guidance system for the focusing guidance of radiation from a high-power laser light source toward a target and lpp x-ray source comprising a laser light source and such a beam guidance system
1232015009814004/09/15 Optical element unit
1242015009217404/02/15 Illumination optical unit
1252015008527103/26/15 Projection exposure controlling a projection exposure apparatus
1262015008527203/26/15 Optical system of a microlithographic projection exposure apparatus
1272015007067103/12/15 Illumination system of a microlithographic projection exposure apparatus
1282015007067703/12/15 Projection exposure projection lithography
1292015007078903/12/15 Replacement an optical element
1302015006254903/05/15 Assembly for a projection exposure euv projection lithography
1312015006255103/05/15 Optical system, in particular of a microlithographic projection exposure apparatus
1322015006259603/05/15 Optical imaging arrangement with multiple metrology support units
1332015006268203/05/15 Correction of optical elements by correction light irradiated in a flat manner
1342015006272503/05/15 Catadioptric projection objective comprising deflection mirrors and projection exposure method
1352015005510802/26/15 Mirror for the euv wavelength range, producing such a mirror, and projection exposure apparatus comprising such a mirror
1362015005510902/26/15 Projection objective for a microlithographic projection exposure apparatus
1372015005511002/26/15 Illumination optical unit for projection lithography
1382015005511102/26/15 Reflective optical element and euv lithography appliance
1392015005511202/26/15 Lithography producing a mirror arrangement
1402015005521202/26/15 Catadioptric projection objective
1412015005521402/26/15 Catadioptric projection objective
1422015004931902/19/15 Microlithography projection optical system, tool and production
1432015004932002/19/15 Projection exposure method, system and objective
1442015004932102/19/15 Facet mirror
1452015004297402/12/15 Illumination optical unit and optical system for euv projection lithography
1462015004297502/12/15 Projection exposure tool for microlithography and microlithographic imaging
1472015004306002/12/15 Optical elements comprising magnetostrictive material
1482015003611502/05/15 Illumination optical unit for euv projection lithography
1492015002947701/29/15 Optical system for a microlithographic projection exposure apparatus
1502015002947901/29/15 Projection exposure method and projection exposure microlithography
1512015002948001/29/15 Optical system of a microlithographic projection exposure apparatus
1522015002279201/22/15 Microlithographic apparatus and changing an optical wavefront in such an apparatus
1532015002279801/22/15 Illumination system for microlithography
1542015002279901/22/15 Microlithographic imaging optical system including multiple mirrors
1552015001342701/15/15 Method for calibrating a position-measuring system and position-measuring system
1562015001586201/15/15 Illumination optical unit for projection lithography
1572015001586401/15/15 Projection exposure microlithography for the production of semiconductor components
1582015001586501/15/15 Illumination intensity correction device for predefining an illumination intensity over an illumination field of a lithographic projection exposure apparatus
1592015001587501/15/15 Measuring device for measuring an illumination property
1602015001758901/15/15 Apparatus and compensating a defect of a channel of a microlithographic projection exposure system
1612015000821501/08/15 Method and device for connecting an optical element to a frame
1622015000833101/08/15 Charged particle inspection method and charged particle system
1632015000949201/08/15 Measuring system for measuring an imaging quality of an euv lens
1642015000955701/08/15 Gravitation compensation for optical elements in projection exposure apparatuses
1652015000956501/08/15 Optical imaging with reduced immersion liquid evaporation effects
1662015000292501/01/15 Illumination system for euv lithography
1672014037608612/25/14 Catadioptric projection objective with two intermediate images and no more than four lenses between the aperture stop and image plane
1682014037769212/25/14 Mask for microlithography and scanning projection exposure method utilizing the mask
1692014036880112/18/14 Imaging optical unit and projection exposure projection lithography comprising such an imaging optical unit
1702014036880312/18/14 Illumination optical unit for euv projection lithography, and optical system comprising such an illumination optical unit
1712014036893312/18/14 Positioning unit and adjustment of an optical element
1722014033391211/13/14 Microlithographic projection exposure apparatus
1732014031349810/23/14 Polarization-influencing optical arrangement, in particular in a microlithographic projection exposure apparatus
1742014030730810/16/14 Reflective optical element for the euv wavelength range, producing and for correcting such an element, projection lens for microlithography comprising such an element, and projection exposure microlithography comprising such a projection lens
1752014029325310/02/14 Lens comprising a plurality of optical element disposed in a housing
1762014028578309/25/14 Euv-mirror arrangement, optical system with euv-mirror arrangement and associated operating method
1772014026838109/18/14 Optical module for a microlithography objective holding and supporting devices
1782014025403609/11/14 Optical module for an objective
1792014024743709/04/14 Illumination system of a microlithographic projection exposure apparatus
1802014022498508/14/14 Focusing a charged particle imaging system
1812014022614108/14/14 Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
1822014021725708/07/14 Support structure and related assemblies and methods
1832014021870908/07/14 Field facet mirror for an illumination optics of a projection exposure euv microlithography
1842014021117807/31/14 Method for producing a capping layer composed of silicon oxide on an euv mirror, euv mirror, and euv lithography apparatus
1852014021117907/31/14 Euv mirror comprising an oxynitride capping layer having a stable composition, euv lithography apparatus, and operating method
1862014021118707/31/14 Optical module for guiding a radiation beam
1872014021118807/31/14 Microlithographic projection exposure apparatus
1882014019954307/17/14 Reflective optical element and optical system for euv lithography
1892014019021207/10/14 Mirror elements for euv lithography and production methods therefor
1902014019234407/10/14 Method and determining the absorption in a blank
1912014019359107/10/14 Method for producing a reflective optical element for euv-lithography
1922014018502707/03/14 Illumination optics and projection exposure apparatus
1932014017692106/26/14 Optical assembly with suppression of degradation
1942014017693006/26/14 Microlithographic illumination system
1952014016045606/12/14 Optical aperture device
1962014013294105/15/14 Imaging optical system and projection exposure system including the same
1972014011871205/01/14 Measuring system
1982014011871405/01/14 Projection optics for microlithography
1992014010235504/17/14 Producing polarization-modulating optical element for microlithography system
2002014010458804/17/14 Projection objective for microlithography
2012014009835204/10/14 Device for controlling temperature of an optical element
2022014009835504/10/14 Catoptric objectives and systems using catoptric objectives
2032014007848103/20/14 Method for correcting the surface form of a mirror
2042014007848203/20/14 Lithographic projection objective
2052014007848403/20/14 Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type
2062014007851303/20/14 Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device
2072014007856703/20/14 Correction of optical elements by correction light irradiated in a flat manner
2082014007141403/13/14 Microlithography projection system with an accessible diaphragm or aperture stop
2092014006362803/06/14 Device for the low-deformation replaceable mounting of an optical element
2102014006479103/06/14 Optical element unit
2112014004359602/13/14 Arrangement for actuating an element in a microlithographic projection exposure apparatus
2122014003624602/06/14 Imaging optical system and projection exposure system for microlithography
2132014002252401/23/14 Device and the optical measurement of an optical system by using an immersion fluid
2142014002252501/23/14 Deflection mirror and projection exposure microlithography comprising such a deflection mirror
2152014002383501/23/14 Optical device
2162014001610801/16/14 Optical imaging device with image defect determination
2172013034282112/26/13 Imaging optical system
2182013033442612/19/13 Apparatus and the locally resolved measurement of a radiation distribution produced using a lithography mask
2192013033555212/19/13 Method for mask inspection, and mask inspection installation
2202013028647110/31/13 Mirror, projection objective with such mirror, and projection exposure microlithography with such projection objective
2212013025830310/03/13 Method for operating an illumination system of a microlithographic projection exposure apparatus
2222013024872809/26/13 Beam regulating an euv illumination beam
2232013025026109/26/13 Optical system and use
2242013025026409/26/13 Illumination system for illuminating a mask in a microlithographic exposure apparatus
2252013025026509/26/13 Projection exposure euv microlithography and microlithographic exposure
2262013025214609/26/13 Projection exposure tool for microlithography and microlithographic imaging
2272013024227809/19/13 Method of controlling a patterning device in a lithographic apparatus, device manufacturing method and lithographic apparatus
2282013024227909/19/13 Catadioptric projection objective
2292013024228209/19/13 Position manipulator for an optical component
2302013022277808/29/13 Illumination microlithography projection system including polarization-modulating optical element
2312013022278008/29/13 Euv microlithography projection exposure apparatus with a heat light source
2322013020146408/08/13 Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same
2332013019455908/01/13 Method for setting an illumination geometry for an illumination optical unit for euv projection lithography
2342013018643007/25/13 Method for removing a contamination layer from an optical surface and arrangement therefor
2352013018816007/25/13 Optical system of a microlithographic projection exposure apparatus and reducing image placement errors
2362013018816207/25/13 Method for operating a projection exposure tool and control apparatus
2372013018816307/25/13 Mirror and related euv systems and methods
2382013018824607/25/13 Imaging optical system for microlithography
2392013018223407/18/13 Projection exposure system and projection exposure method
2402013018226407/18/13 Projection exposure tool for microlithography and microlithographic exposure
2412013018234407/18/13 Systems for aligning an optical element and same
2422013017654407/11/13 Arrangement for mirror temperature measurement and/or thermal actuation of a mirror in a microlithographic projection exposure apparatus
2432013017654507/11/13 Projection exposure apparatus
2442013017654607/11/13 Illumination optical unit with a movable filter element
2452013017005607/04/13 Substrate for mirrors for euv lithography
2462013015550906/20/13 Lens module comprising at least one exchangeable optical element
2472013014809206/13/13 Illumination system for a microlithographic projection exposure apparatus
2482013014810506/13/13 Method and qualifying optics of a projection exposure tool for microlithography
2492013014820006/13/13 Optical arrangement, in particular projection exposure euv lithography, as well as reflective optical element with reduced contamination



ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009



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