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Cascade Microtech Inc patents


Recent patent applications related to Cascade Microtech Inc. Cascade Microtech Inc is listed as an Agent/Assignee. Note: Cascade Microtech Inc may have other listings under different names/spellings. We're not affiliated with Cascade Microtech Inc, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "C" | Cascade Microtech Inc-related inventors


Probe head assemblies and probe systems for testing integrated circuit devices

Probe head assemblies and probe systems for testing integrated circuit devices are disclosed herein. In one embodiment, the probe head assemblies include a contacting structure and a space transformer assembly. In another embodiment, the probe head assemblies include a contacting structure, a suspension system, a flex cable interface, and a... Cascade Microtech Inc

Systems and methods for electrically testing electromigration in an electromigration test structure

Systems and methods for electrically testing electromigration in an electromigration test structure are disclosed herein. The systems include a voltage control portion, a current control portion, and a current regulating structure. The systems further include an electric current detector, a first system connection, and a second system connection. The systems... Cascade Microtech Inc

High voltage chuck for a probe station

A chuck for testing an integrated circuit includes an upper conductive layer having a lower surface and an upper surface suitable to support a device under test. An upper insulating layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper conductive layer,... Cascade Microtech Inc

Space transformers, planarization layers for space transformers, methods of fabricating space transformers, and methods of planarizing space transformers

Space transformers, planarization layers for space transformers, methods of fabricating space transformers, and methods of planarizing space transformers are disclosed herein. In one embodiment, the space transformers include a space transformer assembly including a first rigid space transformer layer, a second rigid space transformer layer, and an attachment layer that... Cascade Microtech Inc

Shielded probe systems with controlled testing environments

Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting stack extending from the stage surface, an electrically conductive shielding structure, an isolation... Cascade Microtech Inc

Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges

Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges are disclosed herein. The methods are configured to test a plurality of devices under test (DUTs) present on a substrate. The probe systems are programmed to perform the methods. The storage media include computer-readable instructions that direct... Cascade Microtech Inc

Test standards and methods for impedance calibration of a probe system, and probe systems that include the test standards or utilize the methods

Test standards and methods for impedance calibration of a probe system and probe systems that include the test standards and/or utilize the methods are disclosed herein. The test standards include at least one test structure. In some embodiments, the test standard further includes an alignment structure that is associated with... Cascade Microtech Inc

Probe systems and methods including active environmental control

Probe systems and methods including active environmental control are disclosed herein. The methods include placing a substrate, which includes a device under test (DUT), on a support surface of a chuck. The support surface extends within a measurement environment that is at least partially surrounded by a measurement chamber. The... Cascade Microtech Inc

Probe head assemblies with constrained internal motion and probe systems including the probe head assemblies

Probe head assemblies with constrained internal motion and probe systems including the probe head assemblies are disclosed herein. The probe head assemblies include a contacting structure, an orientation-regulating structure, and a support frame. The contacting structure includes a plurality of conductive probes configured to physically and electrically contact corresponding contact... Cascade Microtech Inc

Probes with fiducial marks, probe systems including the same, and associated methods

Probes with fiducial marks, probe systems including the same, and associated methods. The probes include a beam portion and a probe tip that is configured to contact a device under test (DUT), and further include a fiducial mark formed on the beam portion that is configured to facilitate alignment of... Cascade Microtech Inc

Shielded probe systems

Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The probing assembly includes a... Cascade Microtech Inc

Probe automatically maintaining alignment between a probe and a device under test during a temperature change

Probe systems and methods for automatically maintaining alignment between a probe and a device under test (DUT) during a temperature change. The methods include collecting an initial image of a planar offset fiducial and determining an initial height reference of a height offset fiducial. The methods further include changing a... Cascade Microtech Inc








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