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Cymer Inc
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Cymer Inc patents

Recent patent applications related to Cymer Inc. Cymer Inc is listed as an Agent/Assignee. Note: Cymer Inc may have other listings under different names/spellings. We're not affiliated with Cymer Inc, we're just tracking patents.

ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "C" | Cymer Inc-related inventors




Date Cymer Inc patents (updated weekly) - BOOKMARK this page
03/26/15System and controlling droplet timing in an lpp euv light source
08/21/14System and adjusting seed laser pulse width to control euv output energy
07/24/14Thermal monitor for an extreme ultraviolet light source
07/10/14Method of timing laser beam pulses to regulate extreme ultraviolet light dosing
07/10/14Method of timing laser beam pulses to regulate extreme ultraviolet light dosing
04/17/14Method of and in-situ repair of reflective optic
04/10/14Harsh environment optical element protection
03/13/14System and seed laser mode stabilization
12/12/13Corrosion resistant electrodes for laser chambers
12/12/13Radiation compensated thermometer
12/05/13System and method to optimize extreme ultraviolet light generation
12/05/13System and separating a main pulse and a pre-pulse beam from a laser source
12/05/13System and protecting a seed laser in an euv light source with a bragg aom
11/21/13Light collector mirror cleaning
07/04/13System and extending gas life in a two chamber gas discharge laser system
06/20/13Droplet generator steering system
06/20/13Filter for material supply apparatus
04/04/13System and high accuracy gas inject in a two chamber gas discharge laser system
03/21/13Euv light source components and methods for producing, using and refurbishing same
02/21/13Energy sensors for light beam alignment
01/03/13System and high accuracy gas refill in a two chamber gas discharge laser system
01/03/13System and automatic gas optimization in a two-chamber gas discharge laser system
11/29/12Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate
11/22/12Filter for material supply apparatus
09/20/12Drive laser delivery systems for euv light source
09/06/12Systems and methods for optics cleaning in an euv light source
07/05/12Multi-pass optical apparatus
06/28/12Coherency reduction for bandwidth measurement
04/19/12Oscillator-amplifier drive laser with seed protection for an euv light source
04/12/12Laser system
01/26/12Alignment of light source focus
01/05/12Laser system
12/29/11Master oscillator-power amplifier drive laser with pre-pulse for euv light source
10/20/11Systems and methods for cooling an optic
10/13/11Method and controlling light bandwidth
10/13/11Systems and methods for target material delivery protection in a laser produced plasma euv light source
10/06/11Extreme ultraviolet light source
09/29/11Laser produced plasma euv light source having a droplet stream produced using a modulated disturbance wave
08/25/11Active spectral control of optical source
08/11/11Lpp euv light source drive laser system
08/11/11Line narrowing module
06/16/11Beam transport system for extreme ultraviolet light source
06/16/11Metrology for extreme ultraviolet light source
05/26/11High power high pulse repetition rate gas discharge laser system
05/05/11Laser system
04/07/11Laser produced plasma euv light source
03/24/11Regenerative ring resonator
03/10/11Drive laser for euv light source
03/03/11Active spectral control of duv laser light source
12/30/10Alignment laser
12/09/10Multi-chamber gas discharge laser bandwidth control through discharge timing
11/25/10Laser produced plasma euv light source
10/14/10Systems and methods for protecting an euv light source chamber from high pressure source material leaks
07/15/10Extreme ultraviolet light source
06/10/10Gas management system for a laser-produced-plasma euv light source
05/27/10Laser produced plasma euv light source
05/27/10Systems and methods for drive laser beam delivery in an euv light source
05/06/10Laser system
04/22/10Line narrowing module
03/25/10Immersion lithography laser light source with pulse stretcher
03/04/10High pulse repetition rate gas discharge laser
02/11/10Debris protection system having a magnetic field for an euv light source
02/04/10Laser produced plasma euv light source
02/04/10Systems and methods for heating an euv collector mirror
12/03/09Laser system
Patent Packs
12/03/09Laser system
10/29/09Drive laser delivery systems for euv light source
10/15/09Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate
10/08/09System and methods for filtering out-of-band radiation in euv exposure tools
09/24/096k pulse repetition rate and above gas discharge laser system solid state pulse power system improvements
09/17/09Systems and methods for target material delivery in a laser produced plasma euv light source
08/13/09Illumination controlling energy of a laser source
06/25/09Euv light source components and methods for producing, using and refurbishing same
06/25/09Drive laser for euv light source
06/18/09System managing gas flow between chambers of an extreme ultraviolet (euv) photolithography apparatus
05/14/09Laser system
05/07/09High power seed/amplifier laser system with beam shaping intermediate the seed and amplifier
04/16/09Lpp euv light source drive laser system
03/26/09Immersion lithography laser light source with pulse stretcher
03/12/09Ultraviolet laser light source pulse energy control system
Patent Packs
03/12/09Laser system
03/05/09Gas management system for a laser-produced-plasma euv light source
12/12/13Radiation compensated thermometer







ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009



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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Cymer Inc in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Cymer Inc with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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