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Cymer Llc patents

Recent patent applications related to Cymer Llc. Cymer Llc is listed as an Agent/Assignee. Note: Cymer Llc may have other listings under different names/spellings. We're not affiliated with Cymer Llc, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "C" | Cymer Llc-related inventors




Date Cymer Llc patents (updated weekly) - BOOKMARK this page
08/17/17Gas optimization in a gas discharge light source
08/10/17Gas mixture control in a gas discharge light source
07/13/17Gas mixture control in a gas discharge light source
06/22/17Online calibration for repetition rate dependent performance variables
06/08/17Pulsed light beam spectral feature control
05/04/17Polarization control of pulsed light beam
04/27/17Controller for an optical system
12/29/16Pulsed light beam spectral feature control
11/24/16Spectral feature metrology of a pulsed light beam
10/13/16Wavelength stabilization for an optical source
06/23/16Faceted euv optical element
06/09/16Compensation for a disturbance in an optical source
05/05/16Corrosion resistant electrodes for laser chambers
05/05/16Apparatus for and supplying target material
12/10/15Estimation of spectral feature of pulsed light beam
09/24/15Apparatus for and active cleaning of euv optic with rf plasma field
08/13/15Methods and laser produced plasma euv light source
08/06/15Nozzle and making same
06/04/15Apparatus for and source material delivery in a laser produced plasma euv light source
05/21/15System and correcting the focus of a laser beam
05/21/15Systems and methods to more accurately estimate a fluorine concentration in a source laser
03/26/15System and creating and utilizing dual laser curtains from a single laser in an lpp euv light source
03/12/15Transport system for an extreme ultraviolet light source
03/12/15Wafer-based light source parameter control
03/05/15Apparatus for and temperature compensation in high power focusing system for euv lpp source
02/12/15System and return beam metrology with optical switch
05/29/14Euv light source with subsystem(s) for maintaining lpp drive laser output during euv non-output periods
05/29/14Master oscillator-power amplifier drive laser with pre-pulse for euv light source
04/24/14Systems and methods for optics cleaning in an euv light source
04/17/14System, aligning and synchronizing target material for optimum extreme ultraviolet light output
04/17/14Radioactive ray shield or absorption sheet with flexibility and restorability, clothes made of the same, and manufacturing method thereof
03/20/14Drive laser delivery systems for euv light source
02/20/14System, laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror
02/13/14Laser produced plasma euv light source
12/05/13Drive laser for euv light source







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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Cymer Llc in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Cymer Llc with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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