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Ebara Corporation
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Ebara Corporation patents

Recent patent applications related to Ebara Corporation. Ebara Corporation is listed as an Agent/Assignee. Note: Ebara Corporation may have other listings under different names/spellings. We're not affiliated with Ebara Corporation, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "E" | Ebara Corporation-related inventors




Date Ebara Corporation patents (updated weekly) - BOOKMARK this page
12/14/17 new patent  Feeder capable of feeding anode and plating apparatus
12/14/17 new patent  Substrate processing apparatus and substrate tranfser method
12/07/17Plating apparatus, substrate holder, plating apparatus controlling method, and storage medium configured to store program for instructing computer to implement plating apparatus controlling method
12/07/17Substrate processing apparatus
11/09/17Substrate holder and plating apparatus using the same
11/09/17Substrate washing device
11/02/17Method of detecting abnormality in polishing of a substrate and polishing apparatus
11/02/17Chemical mechanical polishing polishing workpiece
11/02/17Substrate cleaning roll, substrate cleaning apparatus, and substrate cleaning method
11/02/17Substrate cleaning apparatus and substrate cleaning method
10/19/17Plating apparatus and plating method
10/19/17Information processing system, information processing method, information processing apparatus, terminal apparatus, water supply apparatus, and control water supply apparatus
10/12/17Polishing apparatus and polishing method
10/12/17Substrate processing apparatus
10/05/17Gas-dissolved water production device and production method
10/05/17End point detection method, polishing apparatus, and polishing method
10/05/17Substrate processing apparatus
10/05/17Substrate transport apparatus, substrate processing apparatus, and dew condensation suppression method
10/05/17Teaching device and teaching method
10/05/17Substrate processing apparatus and substrate presence or absence checking method and program
10/05/17Plating apparatus and plating method
10/05/17Plating apparatus and plating method
09/28/17Bearing apparatus and pump
09/28/17Plating method
09/21/17Polishing apparatus and polishing method
09/21/17Substrate polishing method, top ring, and substrate polishing apparatus
09/21/17Substrate cleaning apparatus and substrate cleaning method
09/14/17Polishing apparatus
09/14/17Polishing machine and a polishing a substrate
09/14/17Impeller assembly for centrifugal pumps
09/14/17Substrate cleaning apparatus
09/07/17Seawater desalination system and energy recovery apparatus
09/07/17Polishing apparatus
09/07/17Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
09/07/17Substrate processing apparatus
09/07/17Plating apparatus and plating method
08/24/17Apparatus and regulating surface temperature of polishing pad
08/24/17Polishing apparatus and polishing method
08/17/17Substrate holding module, substrate processing apparatus, and substrate processing method
08/17/17Substrate cleaning apparatus and substrate processing apparatus
08/10/17Apparatus and supplying plating solution to plating tank, plating system, powder container, and plating method
08/10/17Water discharge system, water discharge method, water discharge control apparatus, water discharge control method, substrate processing apparatus and non-transitory computer readable medium recording water discharge control program
08/03/17Polishing apparatus
08/03/17Polishing-amount simulation buffing, and buffing apparatus
07/27/17Cleaning device, manufacturing the same and substrate cleaning apparatus
07/20/17Cleaning apparatus and substrate processing apparatus
07/13/17Vacuum evacuation system
07/13/17Cleaning apparatus
07/06/17Polishing method and polishing apparatus
06/22/17Polishing apparatus, control method and recording medium
06/22/17Plating apparatus
06/22/17Substrate transfer apparatus and substrate transfer method
06/22/17Canned motor and vacuum pump
06/15/17Polishing apparatus and polishing method
06/15/17Cleaning device and roll cleaning member
06/08/17Polishing method and apparatus
06/08/17Plating method and plating apparatus
06/08/17Substrate processing apparatus, detaching substrate from vacuum suction table of substrate processing apparatus, and placing substrate onto vacuum suction table of substrate processing apparatus
06/01/17Calibration apparatus and calibration method
06/01/17Polishing table replacement apparatus, polishing table replacement method, and replacing a component of semiconductor-device manufacturing machine
05/25/17Calibration substrate polishing apparatus, calibration apparatus of the same, and non-transitory computer readable recording medium for recording calibration program of the same
05/25/17Elastic membrane, substrate holding apparatus, and polishing apparatus
05/25/17Polishing method
05/25/17Substrate holding apparatus
05/04/17Energy recovery system
Patent Packs
04/27/17Substrate processing apparatus and pipe cleaning substrate processing apparatus
04/20/17Polishing apparatus
04/20/17Polishing apparatus and polishing method
04/20/17Substrate holding device, substrate polishing apparatus, and manufacturing the substrate holding device
04/13/17Polishing apparatus and polishing method
04/13/17Polishing method and polishing apparatus
04/06/17Polishing apparatus
03/30/17Pressure calibration jig and substrate processing apparatus
03/16/17Polishing apparatus and polishing method
03/16/17Reversing machine and substrate polishing apparatus
03/09/17Substrate processing system and substrate processing method
03/09/17Driving electric motor
03/02/17Polishing apparatus and polishing method
03/02/17Eddy current sensor
03/02/17Plating apparatus, plating method, and substrate holder
Patent Packs
02/23/17Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination substrate holding apparatus, and pressure control substrate holding apparatus
02/16/17Dresser disk cleaning brush, cleaning apparatus, and cleaning method
02/16/17Substrate processing apparatus, substrate processing system. and substrate processing method
01/12/17Fan scrubber and vacuum pump apparatus
01/12/17Cover for component of polishing apparatus, component of polishing apparatus, and polishing apparatus
12/22/16Polishing apparatus, polishing head, and retainer ring
12/22/16Anode holder and plating apparatus
12/22/16Method of adjusting plating apparatus, and measuring apparatus
12/22/16Wafer drying apparatus and wafer drying method
12/08/16Polishing apparatus
12/01/16Table for holding workpiece and processing apparatus with the table
12/01/16Substrate holder, plating apparatus, and plating method
11/10/16Polishing apparatus
11/03/16Abrasive film fabrication method and abrasive film
11/03/16Electrochemical deposition method
11/03/16Electrochemical deposition method
11/03/16Electrochemical deposition method
11/03/16Inspection apparatus
10/27/16Coupling guard
10/27/16Substrate processing detecting abnormality of substrate
10/20/16Substrate processing apparatus and substrate processing method
10/20/16Coupling guard
10/20/16Inspection device
10/13/16Wafer polishing apparatus
10/06/16Condensate demineralization apparatus and condensate demineralization method
09/29/16Plating apparatus
09/29/16Substrate processing apparatus
09/29/16Polishing apparatus and polishing method
09/22/16Polishing apparatus, controlling the same, and outputting a dressing condition
09/15/16Substrate transfer hand
Social Network Patent Pack
09/15/16Method of cleaning substrate holder
09/15/16Vacuum pump
09/08/16Substrate processing apparatus and hand shower gun
09/08/16Coupling mechanism, substrate polishing apparatus, determining position of rotational center of coupling mechanism, program of determining position of rotational center of coupling mechanism, determining maximum pressing load of rotating body, and program of determining maximum pressing load of rotating body
09/08/16Plating apparatus
09/08/16Driving electric motor
09/01/16Seawater desalination system and energy recovery device
09/01/16Polishing apparatus
08/25/16Load measuring apparatus and load measuring method
08/25/16Substrate cleaning apparatus,substrate cleaning method, and substrate processing apparatus
Patent Packs
08/25/16Retainer ring, substrate holding apparatus, and polishing apparatus, and retainer ring maintenance method
08/11/16Workpiece transport device
08/04/16Seawater desalination system
08/04/16Plating method and plating apparatus
07/28/16Apparatus and alleviating and preventing cavitation surge of water supply conduit system
07/21/16Method and monitoring a polishing surface of a polishing pad used in polishing apparatus
07/07/16Substrate holder, a holding a substrate with a substrate holder, and a plating apparatus
06/30/16Method and measuring surface properties of polishing pad
06/30/16Polishing apparatus and controlling the same
06/23/16Polishing apparatus
06/23/16Method and polishing a substrate
06/16/16Substrate processing apparatus
06/09/16Method and conditioning a polishing pad
06/09/16Electroless plating apparatus
05/26/16Cleaning device, manufacturing the same and substrate cleaning apparatus
05/26/16Apparatus for cleaning a polishing surface, polishing apparatus, and manufacturing an cleaning a polishing surface
05/26/16Plating apparatus and plating method
05/19/16Substrate cleaning apparatus, substrate processing apparatus, and substrate cleaning method
05/19/16Substrate holding apparatus
05/12/16Polishing method
05/12/16Method of operating an electroless plating apparatus
05/12/16Magnetic levitated pump
05/12/16Substrate gripping apparatus
05/05/16Polishing apparatus and polishing method
05/05/16Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these
04/28/16Method of detecting abnormality in polishing of a substrate and polishing apparatus
04/28/16Polishing method and polishing apparatus
04/21/16Substrate holder and plating apparatus
04/21/16Pump impeller for submerged pump and submerged pump including same
04/14/16Buffing apparatus and substrate processing apparatus
Patent Packs
04/07/16Adjusting a substrate polishing condition
04/07/16Plating method
04/07/16Substrate processing apparatus and processing method
03/17/16Film thickness signal processing apparatus, polishing apparatus, film thickness signal processing method, and polishing method
03/17/16Processing module, processing apparatus, and processing method
03/17/16Polishing apparatus and polishing method
03/17/16Polishing method
03/03/16Rinsing bath and substrate cleaning method using such rinsing bath
03/03/16Buffing apparatus, and substrate processing apparatus
03/03/16Substrate processing apparatus
03/03/16Rotary electrical machine having permanent magnet rotor
02/25/16Seawater desalination system and energy recovery apparatus
02/25/16Polishing apparatus
02/25/16Polishing method
02/11/16Etching liquid, etching method, and manufacturing solder bump
02/04/16Seawater desalination system and energy recovery apparatus
01/28/16Tape sticking apparatus and tape sticking method
01/21/16Seawater desalination system and energy recovery apparatus
01/14/16Polishing apparatus
01/14/16Canned motor and vacuum pump
Social Network Patent Pack
12/31/15Recovery system using fluid coupling on power generating system
12/24/15Exhaust gas treatment apparatus
12/24/15Substrate electrolytic processing apparatus and paddle for use in such substrate electrolytic processing apparatus
12/24/15Surface processing apparatus
12/17/15Polishing apparatus and wear detection method
12/10/15Substrate cleaning apparatus
12/10/15Polishing apparatus
12/10/15Plating apparatus and plating method
12/10/15Volute pump
12/10/15Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unit
12/10/15Substrate attaching/detaching unit for substrate holder, wet-type substrate processing apparatus including the same, substrate holder conveying method, substrate processing apparatus, and substrate conveying method
12/03/15Polishing apparatus
12/03/15Polishing apparatus
12/03/15Casing liner for sewage pump and sewage pump with the same
12/03/15Method and judging polishing performance of polishing liquid
12/03/15Cleaning apparatus and cleaning method
11/26/15Substrate cleaning apparatus and method executed in the same
11/26/15Inspection apparatus
11/19/15Polishing apparatus
11/19/15Polishing apparatus
Social Network Patent Pack
11/05/15Method and monitoring a polishing surface of a polishing pad used in polishing apparatus
11/05/15Substrate polishing apparatus
10/29/15Substrate processing method
10/29/15Polishing apparatus and polishing method
10/22/15Polishing apparatus and polishing method
10/22/15Substrate treatment device
10/22/15Rotatable apparatus
10/22/15Substrate drying apparatus, storage medium, and substrate drying method
10/15/15Substrate processing apparatus
10/15/15Substrate processing apparatus
10/15/15Rotary joint and polishing apparatus
10/08/15Polishing apparatus
10/08/15Control unit for generating timing signal for imaging unit in inspection sending out timing signal to imaging unit
10/08/15Inspection apparatus
10/08/15Method and cleaning substrate
10/01/15Polishing apparatus
10/01/15Polishing device and polishing method
10/01/15Elastic membrane, substrate holding apparatus, and polishing apparatus
10/01/15Substrate polishing apparatus
10/01/15Anode unit and plating apparatus having such anode unit
10/01/15Reflecting mirror posture adjustment structure, ceiling plate opening and closing mechanism, and inspection device
10/01/15Plating apparatus and determining electric resistance of electric contact of substrate holder
10/01/15Substrate holding mechanism, substrate transporting device, and semiconductor manufacturing apparatus
10/01/15Substrate processing method
09/24/15Polishing apparatus and polishing method
09/24/15Electroless plating method
09/24/15Substrate processing apparatus and resist removing unit
09/24/15Substrate processing apparatus and substrate tranfser method
09/17/15Polishing apparatus and polishing method
09/17/15Film thickness measuring device and polishing device
Social Network Patent Pack
09/17/15Vacuum pump with abatement function
09/17/15Vacuum pump with abatement function
09/17/15Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor
09/10/15Polishing apparatus and polishing method
09/03/15Substrate holder, plating apparatus, and plating method
08/27/15Adjustment adjusting processing units provided in a substrate processing apparatus, and a substrate processing apparatus having such an adjustment apparatus
08/20/15Method and conditioning polishing pad
08/13/15Pressure regulator and polishing apparatus having the pressure regulator
08/13/15Method and polishing a substrate
08/06/15Top opening-closing mechanism and inspection apparatus
08/06/15Substrate cleaning apparatus and substrate processing apparatus
08/06/15Substrate processing apparatus, substrate transfer method and substrate transfer device
08/06/15Polishing method and polishing apparatus
07/23/15Substrate holding apparatus and polishing apparatus
07/23/15Plating method and plating apparatus
07/23/15Calibration device and substrate treatment device
07/16/15Failure detection substrate processing apparatus, and substrate processing apparatus
07/09/15Etching liquid, etching method, and manufacturing solder bump
07/09/15Control device for substrate treatment apparatus, substrate treatment apparatus, and display control device
07/02/15Polishing end point detection method and polishing end point detection apparatus
06/25/15Substrate cleaning apparatus and substrate processing apparatus
06/04/15Polishing apparatus and polishing method
06/04/15Polishing apparatus
06/04/15Polishing apparatus
05/28/15Substrate cleaning apparatus and substrate processing apparatus
05/21/15Erosion prediction method, erosion prediction system, erosion characteristics database used in this prediction, and method constructing the same
05/21/15Sn alloy plating apparatus and sn alloy plating method
05/21/15Electrochemical deposition method
05/21/15Polishing method and polishing apparatus







ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009



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