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Entegris Inc patents

Recent patent applications related to Entegris Inc. Entegris Inc is listed as an Agent/Assignee. Note: Entegris Inc may have other listings under different names/spellings. We're not affiliated with Entegris Inc, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "E" | Entegris Inc-related inventors




Date Entegris Inc patents (updated weekly) - BOOKMARK this page
12/07/17Vapor phase etching of hafnia and zirconia
11/30/17Solid vaporizer
11/23/17Gas purifier
11/23/17Ion implantation processes and apparatus
11/23/17Alon coated substrate with optional yttria overlayer
11/23/17Formulations for the removal of particles generated by cerium-containing solutions
11/23/17Ion implanter comprising integrated ventilation system
11/16/17Fluorinated compositions for ion source performance improvements in nitrogen ion implantation
11/16/17Method and enhanced lifetime and performance of ion source in an ion implantation system
10/12/17Fluid delivery system and method
10/12/17Substrate container with window retention spring
10/12/17Substrate container
10/12/17Wafer shipper with purge capability
09/28/17High torque polymer fittings
09/21/17Substrate container valve assemblies
09/14/17Point of use or point of dispense filter wiht multiple pleat packs
09/14/17Compositions and methods for selectively etching titanium nitride
09/07/17Packaging for dip tubes
08/31/17Pressure-regulated gas supply vessel
08/31/17Phosphorus or arsenic ion implantation utilizing enhanced source techniques
08/17/17Wafer container with door guide and seal
07/13/17Aqueous and semi-aqueous cleaners for the removal of post-etch residues with tungsten and cobalt compatibility
07/13/17Anti-reflective coating cleaning and post-etch residue removal composition having metal, dielectric and nitride compatibility
05/04/17Adsorbent-based pressure stabilization of pressure-regulated fluid storage and dispensing vessels
04/27/17Cobalt precursors for low temperature ald or cvd of cobalt-based thin films
04/27/17Anti-backlash mechanism for motor-driven components in precision systems and applications
04/20/17System and operation of a pump with feed and dispense sensors, filtration and dispense confirmation, and reduced pressure priming of filter
04/13/17Amine catalysts for low temperature ald/cvd sio2 deposition using hexachlorodisilane/h2o
04/06/17System and removing airborne molecular contaminants from gas streams
04/06/17Chemical mechanical planarization pad conditioner with elongated cutting edges
04/06/17Electrostatic chuck
03/09/17Carbon materials for carbon implantation
03/02/17Thin wafer shipper
02/09/17High purity gas purifier
02/09/17Solid precursor-based delivery of fluid utilizing controlled solids morphology
02/02/17Method and apparatus to help promote contact of gas with vaporized material
02/02/17Surface coating for chamber components used in plasma systems
02/02/17Cobalt cvd
01/19/17Nodule ratios for targeted enhanced cleaning performance
01/05/17Carbon monoliths for adsorption refrigeration and heating applications
12/22/16Cobalt precursors
12/15/16Cyclopentadienyl titanium alkoxides with ozone activated ligands for ald of tio2
12/15/16Wet based formulations for the selective removal of noble metals
12/15/16Wafer shipper with stacked support rings
12/08/16Front opening wafer container with robotic flange
12/01/16Non-amine post-cmp compositions and use
11/24/16Formulations to selectively etch silicon and germanium
11/24/16Doping of zro2 for dram applications
11/17/16Electrostatic chuck and making same
11/03/16Use of non-oxidizing strong acids for the removal of ion-implanted resist
10/27/16Ni:nige:ge selective etch formulations and using same
10/20/16Ventilation gas management systems and processes
10/06/16Fitment and fitment adapter for dispensing manufacturing same
09/29/16Tpir monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same
09/22/16Articles coated with fluoro-annealed films
09/22/16Dopant precursors for mono-layer doping
09/22/16Towers for substrate carriers
09/08/16Microporous polyamide-imide membranes
09/08/16Anti-rotation device for hydraulic connectors
09/01/16Wafer carrier
08/11/16Refillable ampoule with purge capability
08/04/16Precursors for silicon dioxide gap fill
07/28/16Liquid-free sample traps and analytical measuring trace level acidic and basic amc
07/21/16Silicon implantation in substrates and provision of silicon precursor compositions therefor
07/14/16Substrate containment with enhanced solid getter
Patent Packs
06/16/16Remote delivery of chemical reagents
05/26/16Non-dewetting porous membranes
05/19/16Front opening wafer container with weight ballast
04/21/16Apparatus and preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates
04/14/16Sensor with protective layer
03/31/16Pvdf pyrolyzate adsorbent and gas storage and dispensing system utilizing same
03/24/16Preparation of high pressure bf3/h2 mixtures
03/17/16Chemical mechanical planarization pad conditioner
02/18/16Enriched silicon precursor compositions and apparatus and processes for utilizing same
02/11/16Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
02/04/16Carbon pyrolyzate adsorbent having utility for co2 capture and methods of making and using the same
01/21/16Carbon dopant gas and co-flow for implant beam and source life performance improvement
01/21/16Carbon dopant gas and co-flow for implant beam and source life performance improvement
01/21/16Post-cmp removal using compositions and use
01/14/16Isotopically-enriched boron-containing compounds, and methods of making and using same
Patent Packs
01/07/16Fluid monitoring apparatus
12/31/15Ion implantation compositions, systems, and methods
12/31/15Vacuum chuck with polymeric embossments
12/17/15Adsorbent having utility for co2 capture from gas mixtures
12/17/15Ald processes for low leakage current and low equivalent oxide thickness bitao films
12/10/15Ion implantation system and method
12/03/15Organic solvent purifier and using
12/03/15Compositions for cleaning iii-v semiconductor materials and methods of using same
12/03/15Porous barrier for evenly distributed purge gas in a microenvironment
11/26/15Method and apparatus to help promote contact of gas with vaporized material
11/05/15Composition and low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride films
11/05/15In-situ oxidized nio as electrode surface for high k mim device
10/29/15Rectangular parallelepiped fluid storage and dispensing vessel
10/29/15Endpoint determination for capillary-assisted flow control
10/22/15Gas purification filter unit
10/22/15Single use dispense head with key code
10/15/15Wafer container with particle shield
10/15/15Substrate container with purge ports
10/15/15Electrostatic chuck with photo-patternable soft protrusion contact surface
10/08/15Apparatus for preventing microparticle and dust migration in layered bed purification devices
10/01/15Purification system
10/01/15Opto-electronic inspection quality assurance system for fluid dispensing valves
10/01/15Double self-aligned phase change memory device structure
09/24/15Reticle pod with cover to baseplate alignment system
09/10/15Cmp brush packaging
09/10/15Fluorine free tungsten ald/cvd process
09/03/15Cobalt precursors for low temperature ald or cvd of cobalt-based thin films
09/03/15Connection system and method
09/03/15Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels
08/13/15Method and enhanced lifetime and performance of ion source in an ion implantation system
Social Network Patent Pack
08/06/15Method and apparatus to help promote contact of gas with vaporized material
07/30/15Ultra-high purity storage and dispensing of liquid reagents
07/23/15Carbon pyrolyzate adsorbent having utility for co2 capture and methods of making and using the same
07/09/15Source reagent-based delivery of fluid with high material flux for batch deposition
07/09/15I/o systems, methods and devices for interfacing a pump controller
07/02/15Systems and methods for managing material storage vessels having information storage elements
07/02/15Methods and materials for making a monolithic porous pad cast onto a rotatable base
07/02/15Systems and methods for managing material storage vessels having information storage elements
06/18/15Composition and process for stripping photoresist from a surface including titanium nitride
05/28/15Organic solvent purifier and using
Patent Packs
05/14/15Replaceable wafer support backstop
05/07/15Wafer container with door interface seal
04/02/15Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal composition
03/26/15Wafer container with door mounted shipping cushions
03/26/15Methods and large diameter wafer handling
03/26/15Cmp conditioner pads with superabrasive grit enhancement
03/19/15Methods for the selective removal of ashed spin-on glass
03/12/15Wafer shipper
03/12/15Wafer shipper
02/26/15Gas purifier
02/19/15Removal of lead from solid materials
02/12/15Wafer carrier
02/12/15Substrate container with fluid-sealing flow passageway
02/12/15Wafer container with tubular environmental control components
02/12/15Post-cmp formulation having improved barrier layer compatibility and cleaning performance
01/01/15Porous composite membrane including microporous membrane layers and nanofiber layer
01/01/15A pressurized system for dispensing fluids
11/20/14Multilayer porous membrane and process of manufacture
10/09/14System and detecting air in a fluid
09/25/14Method and treating fluids to reduce microbubbles
09/25/14Nanotube and finely milled carbon fiber polymer composite compositions and methods of making
09/18/14Substrate carriers and articles formed from compositions comprising carbon nanotubes
09/04/14Modular filter cassette
08/28/14Modular filtration system
08/21/14Method and system for high viscosity pump
08/07/14Method and system for controlling operation of a pump based on filter information in a filter information tag
07/03/14Reticle pod
06/26/14Alon coated substrate with optional yttria overlayer
06/12/14Molded rotatable base for a porous pad
05/08/14System and position control of a mechanical piston in a pump
Patent Packs
04/24/14Chemical mechanical planarization conditioner
04/03/14Purifier cassette
02/20/14Atmospheric pressure microwave plasma treated porous membranes
02/13/14System and a pump with onboard electronics
01/23/14Method and materials for making a monolithic porous pad cast onto a rotatable base
12/05/13Wafer container with door guide and seal
11/21/13Porous metal body of sintered metal powders and metal fibers
11/14/13Front opening wafer container with wafer cushion
10/24/13Front opening wafer container with door deflection minimization
10/17/13Front opening wafer container with robotic flange
08/29/13Liquid flow controller and precision dispense apparatus and system
06/20/13High conductivity electrostatic chuck
05/30/13Composite substrate carrier
05/16/13Electrostatic chuck with photo-patternable soft protrusion contact surface
05/02/13Coated graphite article and reactive ion etch manufacturing and refurbishment of graphite article
04/25/13Customizable dispense system with smart controller
04/18/13Fluid filter with polymeric membrane and metal supports
03/21/13High surface resistivity electrostatic chuck
03/07/13Thin wafer shipper
03/07/13Substrate transport carrier
Social Network Patent Pack
02/28/13Post-cmp cleaning brush
01/24/13Reticle pod
01/03/13Universal disk shipper
01/03/13System and monitoring operation of a pump
11/29/12Porous barrier for evenly distributed purge gas in a microenvironment
10/18/12Purifier for removing hydrogen fluoride from electrolytic solution
05/24/12Method and system for pump priming
05/17/12Non-dewetting porous membranes
04/19/12Liquid flow controller and precision dispense apparatus and system
04/19/12System and correcting for pressure variations using a motor
03/29/12Molded rotatable base for a porous pad
03/22/12System and pressure compensation in a pump
03/15/12Composite substrate carrier
03/08/12System and a pump with reduced form factor
11/17/11Methods and materials for making a monolithic porous pad cast onto a rotatable base
10/20/11Filter apparatus capable of releasing air
09/01/11Method and system for controlling operation of a pump based on filter information in a filter information tag
09/01/11Method and system for optimizing operation of a pump
09/01/11I/o systems, methods and devices for interfacing a pump controller
08/25/11I/o systems, methods and devices for interfacing a pump controller
Social Network Patent Pack
07/14/11Network interface device
07/07/11O-ringless seal couplings
06/23/11Cmp retaining ring
06/09/11Front opening wafer contaner with path to ground effectuated by door
05/19/11Methods and apparatuses for controlling contamination of substrates
05/19/11Wafer container with tubular environmental control components
01/13/11Methods and apparatuses for large diameter wafer handling
12/09/10Reusable resilient cushion for wafer container
12/09/10Integral face seal
11/25/10System for purging reticle storage
11/04/10Identification tag for fluid containment drum
09/23/10Composite substrate carrier
02/18/10Cmp retaining ring
01/07/10Filter apparatus capable of releasing air
12/31/09Filtering system for a semiconductor processing tool
12/10/09Reticle pod
11/19/09Low-profile surface mount filter
11/19/09Electrostatic chuck
10/15/09Valve manifold assembly
10/01/09Welded diaphragm valve
09/03/09Fluid handling device with directionally-biased wetting surface
09/03/09Shock absorbing substrate container
08/06/09Wafer cassette
08/06/09System and liquid filtration with reduced hold-up volume
07/23/09Apparatus and reducing particle contamination in a vacuum chamber
05/21/09Fluid handling device with isolating chamber
05/21/09System and a variable home position dispense system
05/07/09Fluid flow measuring and proportional fluid flow control device
05/07/09Method for controlled mixing of fluids via temperature
03/05/09Method and dispensing fluids
Social Network Patent Pack
02/19/09Molded rotatable base for a porous pad
02/19/09Method and system for high viscosity pump







ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009



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