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Eugene Technology Co Ltd patents

Recent patent applications related to Eugene Technology Co Ltd. Eugene Technology Co Ltd is listed as an Agent/Assignee. Note: Eugene Technology Co Ltd may have other listings under different names/spellings. We're not affiliated with Eugene Technology Co Ltd, we're just tracking patents.

ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "E" | Eugene Technology Co Ltd-related inventors




Date Eugene Technology Co Ltd patents (updated weekly) - BOOKMARK this page
04/20/17Substrate supporting unit, substrate processing apparatus, and manufacturing substrate supporting unit
03/16/17Substrate processing apparatus
03/16/17Substrate processing apparatus
01/26/17Substrate processing apparatus
10/06/16Substrate processing apparatus and substrate processing method
10/06/16Substrate processing device
07/21/16Method and depositing amorphous silicon film
07/07/16Substrate treatment apparatus
02/18/16Substrate supporting unit, substrate processing apparatus, and manufacturing substrate supporting unit
01/14/16Substrate processing device
12/31/15Apparatus for processing substrate
12/24/15Apparatus for processing substrate
11/26/15Substrate-processing device
10/22/15Substrate treatment apparatus, and controlling temperature of heater
09/24/15Purge chamber, and substrate-processing apparatus including same
09/10/15Substrate processing apparatus
08/13/15Fume removal device and substrate treatment device
08/13/15Substrate transfer robot and substrate processing apparatus using the same
07/30/15Substrate processing device
07/09/15Substrate processing device
07/02/15Cyclic deposition thin film formation, semiconductor manufacturing method, and semiconductor device
06/25/15Substrate processing apparatus
06/25/15Substrate processing module, substrate processing apparatus including the same, and substrate transferring method
05/21/15Apparatus for processing substrate
05/07/15Apparatus for processing substrate
02/12/15Heater moving type substrate processing apparatus
01/15/15Substrate processing apparatus including auxiliary gas supply port
11/27/14Substrate processing apparatus including processing unit
11/27/14Apparatus for processing substrate for supplying reaction gas having phase difference
11/27/14Substrate processing apparatus including heat-shield plate
11/20/14Substrate processing module and substrate processing apparatus including the same
11/13/14Apparatus for processing apparatus having side pumping type
10/23/14Showerhead having cooling system and substrate processing apparatus including the showerhead
10/23/14Substrate processing apparatus including exhaust ports and substrate processing method
09/18/14Method and manufacturing three-dimensional-structure memory device
07/31/14Equipment for manufacturing semiconductor
07/24/14Shower head unit and chemical vapor deposition apparatus
07/10/14Equipment for manufacturing semiconductor
06/26/14Substrate supporting unit and substrate processing apparatus manufacturing the substrate supporting unit
06/26/14Equipment for manufacturing semiconductor
05/29/14Equipment for manufacturing semiconductor
07/25/13Substrate processing device for supplying reaction gas through symmetry-type inlet and outlet
07/18/13Substrate processing device equipped with semicircle shaped antenna
07/11/13Method and manufacturing three-dimensional-structure memory device
07/04/13Method and manufacturing three-dimensional-structure memory device
06/13/13Substrate-processing apparatus and substrate-transferring method
05/23/13Method for manufacturing a semiconductor device
05/09/13Method for depositing cyclic thin film
04/25/13Method for depositing cyclic thin film
02/03/11Substrate processing apparatus and method
01/27/11Substrate processing apparatus and method
01/20/11Apparatus and processing substrate
01/06/11Apparatus and processing substrate
12/30/10Apparatus and processing substrate
12/23/10Plasma processing apparatus and plasma processing method
12/23/10Substrate supporting unit, substrate processing apparatus, and manufacturing substrate supporting unit
11/04/10Plasma processing apparatus and method
08/19/10Exhaust unit, exhaust method using the exhaust unit, and substrate processing apparatus including the exhaust unit
08/05/10Showerhead, substrate processing apparatus including the showerhead, and plasma supplying method using the showerhead
07/15/10Substrate processing apparatus
02/11/10Method of fabricating polycrystalline silicon thin film
09/03/09Partition-type heating apparatus







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