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Eugene Technology Co Ltd patents


Recent patent applications related to Eugene Technology Co Ltd. Eugene Technology Co Ltd is listed as an Agent/Assignee. Note: Eugene Technology Co Ltd may have other listings under different names/spellings. We're not affiliated with Eugene Technology Co Ltd, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "E" | Eugene Technology Co Ltd-related inventors


Substrate processing cleaning chamber

Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber including a first body part configured to provide a space in which substrates stand by and a second body part configured to provide a space in which a thin film deposition process is performed on each of... Eugene Technology Co Ltd

Equipment for manufacturing semiconductor

Provided is an equipment for manufacturing a semiconductor. The equipment for manufacturing a semiconductor includes a cleaning chamber in which a cleaning process is performed on substrates, an epitaxial chamber in which an epitaxial process for forming an epitaxial layer on each of the substrates is performed, and a transfer... Eugene Technology Co Ltd

Substrate processing apparatus

Provided is a substrate processing apparatus. The substrate processing apparatus includes a first tube defining an inner space, a substrate holder in which a plurality of substrates are vertically stacked in the inner space of the first tube, the substrate holder defining a plurality of processing spaces in which the... Eugene Technology Co Ltd

Substrate processing apparatus

Provided is a substrate processing apparatus. The substrate processing apparatus includes a tube having an inner space, a substrate support on which a plurality of substrates are stacked in multistage within the tube, the substrate support individually defining a plurality of processing spaces in which the plurality of substrates are... Eugene Technology Co Ltd

Multiple gases providing method and multiple gases providing apparatus

Provided is a method for multi-supplying gas, the method comprising: installing a control valve and an flow meter on each of a plurality of branch lines branched from a main supply line, in which one or more gases are supplied, and supplying the gas; and providing the gas by adjusting... Eugene Technology Co Ltd

Method and depositing amorphous silicon film

Provided is a method and apparatus for depositing an amorphous silicon film. The method includes supplying a source gas and an atmospheric gas onto a substrate in a state where the substrate is loaded in a chamber to deposit the amorphous silicon film on the substrate. The atmospheric gas includes... Eugene Technology Co Ltd

Substrate processing apparatus

The present disclosure relates to a substrate processing apparatus, and more particularly, a substrate processing apparatus that is capable of improving process uniformity on an entire surface of a substrate. The substrate processing apparatus includes a substrate boat in which a substrate is loaded, a reaction tube in which a... Eugene Technology Co Ltd

Method for forming polysilicon film

Provided is a method for forming a silicon film, and more particularly, to a method for forming a polycrystalline silicon film including pretreatment process in a process for forming a silicon film. According to an embodiment of the present invention, a method for forming a polycrystalline silicon film by annealing... Eugene Technology Co Ltd

Method for depositing insulating film on recessed portion having high aspect ratio

Provided is a method of depositing an insulation layer on a trench in a substrate, in which the trench having an aspect ratio of 5:1 or more is formed, including: an insulation layer deposition step of performing an adsorption step of adsorbing silicon to the substrate by injecting a silicon... Eugene Technology Co Ltd

Substrate processing apparatus including exhaust ports and substrate processing method

A substrate processing method in which processes with respect to substrates are performed comprises: stacking the substrates on a substrate holder disposed in a staking space formed within a lower chamber through a passage formed in a side of the lower chamber, exhausting the stacking space through an auxiliary exhaust... Eugene Technology Co Ltd

Substrate processing apparatus and substrate processing method using the same

The present disclosure relates to a substrate processing apparatus and a substrate processing method using the same, and more particularly, to a substrate processing apparatus that is capable of improving a flow of a process gas that is participated in a substrate processing process and a substrate processing method using... Eugene Technology Co Ltd

Substrate supporting unit, substrate processing apparatus, and manufacturing substrate supporting unit

Disclosed are a substrate supporting unit, a substrate processing apparatus, and a method of manufacturing the substrate supporting unit. The substrate supporting unit includes a susceptor provided with heaters to heat a substrate placed on the susceptor, and including a first temperature region and a second temperature region having a... Eugene Technology Co Ltd

Substrate processing apparatus

The present invention may include: a tube providing an interior space in which substrates are processed; a substrate support portion stacking a plurality of substrates in the interior space of the tube in multi-level; a gas supply portion supplying a process gas to the plurality of substrates; an exhaust portion... Eugene Technology Co Ltd

Substrate processing apparatus

Provided is a substrate processing apparatus including a tube having an inner space therein, a substrate supporting unit including a plurality of isolation plates configured to vertically stack a plurality of substrates thereon and divide a processing space, in which the plurality of substrates are processed, into a plurality of... Eugene Technology Co Ltd

Substrate processing apparatus

Provided is a substrate processing apparatus, and more particularly, a batch-type substrate processing apparatus where processes can be performed independently on a plurality of substrates. The substrate processing apparatus includes a substrate boat including a plurality of partition plates and a plurality of connection rods, an internal reaction tube, a... Eugene Technology Co Ltd








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