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Fogale Nanotech patents


Recent patent applications related to Fogale Nanotech. Fogale Nanotech is listed as an Agent/Assignee. Note: Fogale Nanotech may have other listings under different names/spellings. We're not affiliated with Fogale Nanotech, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "F" | Fogale Nanotech-related inventors


Device and method for detecting defects in bonding zones between samples such as wafers

A measurement device is provided for inspecting a bonding zone between samples, including a low-coherence interferometer illuminated by a polychromatic light source having a measurement arm crossing the connection zone and a reference arm, at least one optical detector and optical and/or mechanical conditioning apparatus arranged to enable the acquisition of at least two interference measurements having different phase conditions between a measurement optical beam coming from the measurement arm and a reference optical beam coming from the reference arm; and calculation apparatus provided to calculate contrast information relating to the interference and to search, on the basis of the contrast information, for defects in the bonding zone.. . ... Fogale Nanotech

Method for 2d/3d inspection of an object such as a wafer

A method is provided for inspecting the surface of an object such as a wafer having tridimensional structures, using a confocal chromatic device with a plurality of optical measurement channels and a chromatic lens allowing optical wavelengths of a broadband light source to be focused at different axial distances defining a chromatic measurement range. The method includes a step of obtaining an intensity information corresponding to the intensity of the light actually focused on an interface of the object within the chromatic measurement range at a plurality of measurement points on the object by measuring a total intensity over the full spectrum of the light collected by at least some of the optical measurement channels in a confocal configuration.. ... Fogale Nanotech

Integrated chromatic confocal sensor

A confocal chromatic device is provided, including at least one chromatic lens with an extended axial chromatism; at least one broadband light source; at least one optical detector; and at least one measurement channel with a planar y-junction made with a planar waveguide optics technology, and arranged for transferring light from the at least one light source towards the at least one chromatic lens and for transferring light reflected back through the at least one chromatic lens towards the at least one optical detector.. . ... Fogale Nanotech

Fogale Nanotech

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Fogale Nanotech

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ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009



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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Fogale Nanotech in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Fogale Nanotech with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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