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Fujikin Incorporated
Fujikin Incorporated And Kotohiko Sekoguchi
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Fujikin Incorporated patents


Recent patent applications related to Fujikin Incorporated. Fujikin Incorporated is listed as an Agent/Assignee. Note: Fujikin Incorporated may have other listings under different names/spellings. We're not affiliated with Fujikin Incorporated, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "F" | Fujikin Incorporated-related inventors


Flow control system with build-down system flow monitoring

To provide a flow control system with build-down system flow monitoring that realizes flow monitoring close to real-time monitoring by combining build-down system flow rate measurement with the upstream side of the flow control system without using a thermal type flow sensor by effectively utilizing high pressure fluctuation resistance characteristics... Fujikin Incorporated

Pressure control device

A pressure control device maintains a pressure within a target of pressure control at a set pressure. The pressure control device includes a correction circuit that corrects a pressure signal, which represents the pressure within the target of pressure control that is detected by a pressure sensor, such that the... Fujikin Incorporated

Liquid level indicator and liquid raw material vaporization feeder

[Means for Resolution] The present invention includes a chamber 2 that stores a liquid raw material, at least one protection tube 3 housing a resistance temperature detector for detecting the liquid level L1 in the chamber 2, and a flow controller 4 that controls the flow rate of the gas... Fujikin Incorporated

Optical gas concentration measuring method, and monitoring gas concentration by said method

To provide a concentration measurement method with which the concentrations of predetermined chemical components can be measured non-destructively, accurately, and rapidly by a simple means, up to the concentrations in trace amount ranges, as well as a concentration measurement method with which the concentrations of chemical components in a measurement... Fujikin Incorporated

Multistage piston actuator

A multistage piston actuator exerts a driving pressure against a spring pressure into pressure chambers of piston bodies, fitted into a cylinder body, to operate the push rod. Each piston body is combined with a partition fitted into the cylinder body. Each piston body includes a pressure receiving plate portion,... Fujikin Incorporated

Valve device

A valve device includes a body having a fluid passage formed therein, a valve element configured to open and close the fluid passage, a stem arranged to be configured to move toward and away from the valve element to cause the valve element to open and close the fluid passage,... Fujikin Incorporated

Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container

A liquid level meter includes a first resistive temperature detector; a first temperature measuring body a liquid level detection section a temperature detection section detecting the temperatures of the first resistive temperature detector and the first temperature measuring body; a current control section determining a value of a current to... Fujikin Incorporated

Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve

A piezoelectric element-driven valve includes a body provided with a fluid channel and a valve seat, a valve element which opens and closes the fluid channel by being in contact with and separated from the valve seat of the body, and piezoelectric actuators which drive the valve element to open... Fujikin Incorporated

Fluid controller

Provided is a fluid controller which enables precise flow-rate adjustment while securing the durability. The fluid controller includes a stem vertical-movement-amount upper-limit-value setting means 10 which sets an upper limit value of a vertical movement amount of a stem 8 associated with opening and closing operations. The fluid controller further... Fujikin Incorporated

Fluid controller

Provided is a fluid controller in which reduction of the accuracy caused by the loosening of a screw portion and reduction of the durability caused by torsional stress are prevented. A stem vertical-movement-amount adjustment means 11 is provided with: a handle 41 which has a female screw 41b on an... Fujikin Incorporated

Pressure type flow control system with flow monitoring, and detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same

A pressure type flow control system with flow monitoring includes an inlet, a control valve including a pressure flow control unit connected downstream of the inlet, a thermal flow sensor connected downstream of the control valve, an orifice installed on a fluid passage communicatively connected downstream of the thermal flow... Fujikin Incorporated

Pressure-type flow rate control device

The pressure-type flow controller includes a main body provided with a fluid passage, a control valve for pressure control fixed in a horizontal position to the main body, an on/off valve fixed in a vertical position to the main body on the downstream side of the control valve for pressure... Fujikin Incorporated

Inline concentration measurement device

An inline concentration measurement device comprises: a measurement cell main body with a gas flow path formed; a light incident part with a window member connected to the main body; and a light receiving part with a window member connected to the main body, wherein the gas flow path includes... Fujikin Incorporated

Valve element and high-temperature-oriented valve

A valve element significantly improved in rotation preventing performance of an abutting member formed of a synthetic resin by using a caulking structure and a high-temperature-oriented valve provided with such a valve element. A valve element includes: an abutting member formed of a synthetic resin and configured to close a... Fujikin Incorporated

Fluid controller

A fluid controller that reduces an increase in cost by additional components or additional processes for setting means, and solves the problem that a set value of an upward movable amount of a stem changes is provided. An upper surface of an outer peripheral edge portion of a diaphragm holder... Fujikin Incorporated

Fluid controller heating apparatus and fluid control apparatus

A fluid controller heating apparatus includes a cylindrical heater unit that surrounds a portion of an opening-and-closing valve to be heated, and a heat insulation jacket that surrounds the heater unit. The heater unit includes a pair of heat-transfer members to which plate-shaped heaters are fixed, respectively. The heat-transfer members... Fujikin Incorporated

Diaphragm valve, fluid control device, semiconductor manufacturing apparatus, and semiconductor manufacturing method

The radius of curvature (SR2) of a surface of a diaphragm presser, which surface is in contact with a diaphragm, is at least 30 mm. The taper angle (θ) for a lower surface of a press adapter is no more than 10° relative to a flat portion of a bottom... Fujikin Incorporated

Diaphragm valve, fluid control device, semiconductor manufacturing apparatus, and semiconductor manufacturing method

A flat portion of a bottom surface of a depression of a body is provided with a spot facing so as to include a portion of a fluid outflow channel, which portion is open to the bottom surface of the depression.... Fujikin Incorporated

Bolt-locking apparatus, mounting method thereof and mounting jig

A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members... Fujikin Incorporated

Fixing device for lower stage members and fluid control device equipped with fixing device

Provided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a... Fujikin Incorporated

Flow passage sealing structure

A flow passage sealing structure for omitting a process of welding or caulking an orifice plate and a filter plate to an orifice base and a filter base as base materials and allowing further miniaturization, includes a main block (1) including main flow passages (1a, 1b), recessed portions (12, 13)... Fujikin Incorporated








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