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Gigaphoton Inc patents

Recent patent applications related to Gigaphoton Inc. Gigaphoton Inc is listed as an Agent/Assignee. Note: Gigaphoton Inc may have other listings under different names/spellings. We're not affiliated with Gigaphoton Inc, we're just tracking patents.

ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "G" | Gigaphoton Inc-related inventors




Date Gigaphoton Inc patents (updated weekly) - BOOKMARK this page
03/16/17Extreme ultraviolet light generation apparatus
03/09/17Laser system
03/09/17Laser apparatus, euv light generation system, and controlling laser apparatus
03/02/17System and generating extreme ultraviolet light, and laser apparatus
03/02/17Laser system
03/02/17Laser system
03/02/17Extreme uv light generator
03/02/17Extreme ultraviolet light generation apparatus
02/23/17Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator
02/23/17Extreme ultraviolet light generation apparatus
02/02/17Gas laser device and condenser
01/26/17Extreme ultraviolet light generation system
01/19/17System and generating extreme ultraviolet light
12/29/16Target supply device and euv light generation apparatus
12/22/16Extreme ultraviolet light generation apparatus
12/15/16Laser apparatus and laser apparatus manufacturing method
12/15/16Laser chamber
12/08/16Gas laser device and control method therefor
11/24/16System for generating extreme ultra violet light
11/24/16Lasersystem
11/17/16Laser apparatus
11/03/16Excimer laser apparatus and excimer laser system
11/03/16Target supply apparatus, extreme ultraviolet light generating apparatus, and target supply method
10/27/16Laser system or laser exposure system
10/27/16Mirror device
10/27/16Laser device and extreme ultraviolet light generation system
10/20/16Laser chamber
09/29/16Laser unit and extreme ultraviolet light generating system
09/15/16Target producing apparatus
09/01/16Excimer laser apparatus and excimer laser system
09/01/16Extreme ultraviolet light generation apparatus
09/01/16Extreme ultraviolet light generation apparatus
08/25/16Laser adding chamber to laser apparatus
08/25/16Laser unit and non-transitory computer-readable storage medium
08/25/16Gas laser apparatus
08/25/16Laser apparatus
08/25/16Target supply device
08/11/16Extreme ultraviolet light generation apparatus
08/04/16Filter and target supply apparatus
08/04/16Extreme ultraviolet light generation apparatus and control extreme ultraviolet light generation apparatus
07/14/16Alignment system and extreme ultraviolet light generation system
06/30/16Extreme ultraviolet light source apparatus
06/30/16Exposure apparatus
06/30/16Laser apparatus
06/30/16Extreme ultraviolet light generation apparatus
06/30/16Extreme ultraviolet light generation apparatus
06/16/16Laser unit and extreme ultraviolet light generating system
06/16/16Preliminary ionization discharge device and laser apparatus
06/16/16Laser amplifier, laser apparatus, and extreme ultraviolet light generating system
06/09/16Target supply apparatus and euv light generating apparatus
06/02/16Laser apparatus and extreme ultraviolet light generation system
05/12/16Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system
05/05/16System and generating extreme ultraviolet light
03/24/16Laser system, extreme ultraviolet light generation system, and controlling laser apparatus
03/17/16Light beam measurement device, laser apparatus, and light beam separator
03/10/16Extreme ultraviolet light generation system
03/03/16Extreme ultraviolet light generating system
02/11/16Target generation device and extreme ultraviolet light generation apparatus
02/04/16Laser annealing apparatus
02/04/16Extreme uv light generation apparatus
01/28/16Euv light source apparatus
12/31/15Laser device, and controlling actuator
12/24/15Method of forming semiconductor thin film
12/03/15Mirror unit
12/03/15Laser apparatus and extreme ultraviolet light generation system
Patent Packs
12/03/15System and generating extreme ultraviolet light
12/03/15Extreme ultraviolet light generating apparatus, generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and measuring concentrated pulsed laser light beam
12/03/15System and generating extreme ultraviolet light, and laser apparatus
11/26/15Method of controlling wavelength of laser beam and laser apparatus
11/26/15Laser apparatus and extreme ultraviolet light generation system
11/26/15Extreme ultraviolet light generation apparatus and control laser apparatus in extreme ultraviolet light generation system
11/19/15Device for controlling laser beam and generating extreme ultraviolet light
10/15/15Extreme ultraviolet light generation system and extreme ultraviolet light generation apparatus
09/17/15Laser beam controlling device and extreme ultraviolet light generating apparatus
09/17/15Extreme ultraviolet light generation system
09/03/15Laser chamber and discharge excitation gas laser apparatus
09/03/15Laser processing apparatus and laser processing method
09/03/15Laser chamber and discharge excitation gas laser apparatus
08/27/15Extreme ultraviolet light source apparatus
08/13/15Mirror device
Patent Packs
07/09/15Laser apparatus
07/02/15Method of controlling laser apparatus and laser apparatus
07/02/15Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier
07/02/15Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light
06/25/15Laser apparatus and controlling laser apparatus
06/18/15Light source apparatus and data processing method
05/28/15Target supply device and extreme ultraviolet light generation apparatus
05/21/15Laser apparatus and controlling laser apparatus
05/07/15System and generating extreme ultraviolet light
05/07/15System and generating extreme ultraviolet light
04/16/15Extreme ultraviolet light generation system
03/26/15Extreme ultraviolet light generation device and extreme ultraviolet light generation system
02/26/15Discharge-pumped gas laser device
02/12/15Laser system and extreme ultraviolet light generation system
01/29/15Laser apparatus
01/08/15Extreme ultraviolet light generation apparatus
01/01/15Excimer laser apparatus and excimer laser system
12/25/14Optical device, laser apparatus, and extreme ultraviolet light generation system
12/18/14Two-stage laser system for aligners
12/04/14Extreme ultraviolet light generation apparatus and control laser apparatus in extreme ultraviolet light generation system
11/27/14Laser apparatus
11/20/14Laser system and laser light generation method
10/30/14Laser apparatus and extreme ultraviolet light generation apparatus
09/25/14Target generation device and extreme ultraviolet light generation apparatus
09/25/14Optical device, and laser chamber and gas laser apparatus using the same
09/11/14Chamber for extreme ultraviolet light generation apparatus, and extreme ultraviolet light generation apparatus
09/04/14Device for controlling temperature of cooling water
08/28/14Target supply device and extreme ultraviolet light generation apparatus
08/07/14Gas lock device and extreme ultraviolet light generation apparatus
08/07/14Target supply device
Social Network Patent Pack
08/07/14Chamber and extreme ultraviolet light generation apparatus
07/31/14Target supply device and euv light generation chamber
07/24/14System and generating extreme ultra violet light
07/10/14Alignment system and extreme ultraviolet light generation system
07/03/14System and generating extreme ultraviolet light
06/19/14Method and cleaning collector mirror in euv light generator
05/22/14Target supply device
05/22/14Target supply device
05/15/14Extreme ultraviolet light source apparatus
05/08/14System and generating extreme ultraviolet light, and laser apparatus
Patent Packs
04/24/14Extreme ultraviolet light generation apparatus
04/17/14Discharge-pumped gas laser device
04/10/14Extreme ultraviolet light generation system
03/27/14Extreme ultraviolet light generation system
03/20/14System and generating extreme ultraviolet light
03/13/14Control target supply device, and target supply device
03/06/14Target supply device and extreme ultraviolet light generation apparatus
02/20/14Polarization purity control device and gas laser apparatus provided with the same
02/13/14Control target supply device, and target supply device
02/06/14Target supply device and target supply method
02/06/14Extreme ultraviolet light generation apparatus
02/06/14Target supply apparatus, control system, control apparatus and control circuit thereof
01/23/14Extreme ultra violet light source device
01/09/14Extreme ultraviolet light source apparatus
01/02/14Chamber apparatus and extreme ultraviolet light generation system
12/05/13Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation method
12/05/13Gas discharge chamber
11/28/13Laser apparatus
11/28/13Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system
10/24/13Laser apparatus
10/03/13Extreme ultraviolet light source apparatus
10/03/13Extreme ultraviolet light source apparatus and generating ultraviolet light
09/26/13Laser beam amplifier and laser apparatus using the same
09/19/13Target supply device
09/19/13Extreme ultra violet light source apparatus
09/12/13Transmissive optical device, laser chamber, amplifier stage laser device, oscillation stage laser device and laser apparatus
09/05/13Device for collecting extreme ultraviolet light
09/05/13Gas-filled neutron detectors and imaging system and array of such detectors
09/05/13Target supply device
09/05/13Master oscillator system and laser apparatus
Patent Packs
08/29/13Target supply device, extreme ultraviolet light generation apparatus, and supplying target
08/29/13Collector mirror exchanging extreme ultraviolet light source apparatus
08/29/13Target material refinement device and target supply apparatus
08/22/13Laser apparatus
08/15/13Target supply device
08/15/13Optical device, laser apparatus, and extreme ultraviolet light generation system
08/15/13Excimer laser and laser device
08/15/13Target supply apparatus and target supply method
08/08/13Wavelength converter, wavelength converting device, solid state laser device, and laser system
07/25/13Target supply device
07/25/13Target generation device
07/25/13Extreme ultraviolet light source device and control extreme ultraviolet light source device
07/04/13Wavelength detector and wavelength calibration system
06/27/13Extreme ultraviolet light generation apparatus
06/27/13Solid-state laser amplifier, laser light amplifier, solid-state laser device, and laser device
06/20/13Extreme ultraviolet light generation apparatus
06/13/13Target supply device
06/13/13Laser apparatus, extreme ultraviolet light generation system, controlling the laser apparatus, and generating the extreme ultraviolet light
06/13/13Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and adjusting laser light source device for extreme ultraviolet light source device
05/30/13Holder device, chamber apparatus, and extreme ultraviolet light generation system
Social Network Patent Pack
05/30/13Two-beam interference apparatus and two-beam interference exposure system
05/23/13Optical device, laser apparatus, and extreme ultraviolet light generation system
05/23/13Chamber apparatus and extreme ultraviolet light generation system
05/23/13Extreme ultra violet light source apparatus
05/16/13System and generating extreme ultraviolet light
05/09/13Laser apparatus
05/02/13Apparatus and generating extreme ultraviolet light
05/02/13Extreme ultraviolet light generation apparatus
05/02/13Laser apparatus
04/25/13Laser apparatus, extreme ultraviolet light generation system, and generating laser beam
04/25/13Excimer laser apparatus and excimer laser system
04/18/13Laser device, laser apparatus, and extreme ultraviolet light generation system
04/18/13Laser apparatus, generating laser beam, and extreme ultraviolet light generation system
03/28/13Target supply unit and extreme ultraviolet light generation apparatus
03/14/13Extreme ultraviolet light generation apparatus
03/14/13Apparatus and measuring and controlling target trajectory in chamber apparatus
03/14/13Master oscillator system and laser apparatus
03/14/13Solid-state laser apparatus and laser system
02/28/13Target supply unit
02/28/13Chamber apparatus and extreme ultraviolet (euv) light generation apparatus including the chamber apparatus
Social Network Patent Pack
02/28/13Mirror device
02/28/13Adjustable dressing mirror assembly
02/28/13Laser apparatus, extreme ultraviolet light generation system including the laser apparatus, and controlling the laser apparatus
02/14/13Optical system and extreme ultraviolet (euv) light generation system including the optical system
02/14/13Wavelength conversion device, solid-state laser apparatus, and laser system
02/07/13Laser apparatus and extreme ultraviolet light generation system including the laser apparatus
02/07/13Target supply unit, mechanism for cleaning nozzle thereof, and cleaning the nozzle
02/07/13Slab amplification device, laser apparatus, and extreme ultraviolet light generation system
01/31/13Chamber apparatus, extreme ultraviolet light generation system, and controlling the extreme ultraviolet light generation system
01/24/13Window unit, window device, laser apparatus, and extreme ultraviolet light generation system
01/24/13Mirror, mirror device, laser apparatus, and extreme ultraviolet light generation apparatus
01/17/13Optical device, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
12/20/12Extreme ultraviolet light source device and control extreme ultraviolet light source device
12/06/12Apparatus and generating extreme ultraviolet light
11/29/12Method for cleaning optical element of euv light source device and optical element cleaning device
10/25/12Temperature controller for gas laser
10/25/12Extreme ultraviolet light generation apparatus
10/04/12Chamber apparatus
10/04/12Extreme ultraviolet light generation system
10/04/12Laser system and laser light generation method
10/04/12Laser system and laser light generation method
10/04/12Laser system and laser light generation method
09/27/12System and generating extreme ultraviolet light
09/27/12Target supply unit and extreme ultraviolet light generation apparatus
09/27/12Master oscillator, laser system, and laser light generation method
09/20/12Target supply unit
09/20/12Laser apparatus
09/20/12Laser device for exposure apparatus
09/20/12Wavelength conversion device, solid-state laser apparatus, and laser system
09/13/12System and generating extreme ultraviolet light
Social Network Patent Pack
09/06/12Extreme ultraviolet light generation apparatus
08/30/12Extreme ultraviolet light generation apparatus
07/12/12Extreme ultraviolet light source apparatus, controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon
07/12/12Extreme ultraviolet light source apparatus
07/12/12Polarization purity control device and gas laser apparatus provided with the same
06/28/12Extreme ultraviolet light source apparatus and generating extreme ultraviolet light
05/17/12Extreme ultraviolet light source apparatus
05/17/12Extreme ultraviolet light source system
05/17/12Apparatus for regulating a volume flow in a hose
04/26/12Extreme ultraviolet light source apparatus
04/19/12Extreme ultraviolet light source apparatus
03/22/12Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and controlling saturable absorber used in extreme ultraviolet light source device
12/22/11Spectral purity filter and extreme ultraviolet light generation apparatus provided with the spectral purity filter
11/24/11Target output device and extreme ultraviolet light source apparatus
11/03/11Extreme ultraviolet light source apparatus
07/28/11Extreme ultraviolet light source apparatus
07/21/11Extreme ultraviolet light source apparatus and nozzle protection device
06/30/11Gas discharge chamber
05/05/11Extreme ultraviolet light source device and producing extreme ultraviolet light
08/12/10Extreme ultraviolet light source device
07/22/10Differential evacuation system
05/27/10Polarization purity control device and gas laser apparatus provided with the same
05/13/10Extreme ultraviolet light source device and control extreme ultraviolet light source device
04/01/10Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and adjusting laser light source device for extreme ultraviolet light source device
04/01/10Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and controlling saturable absorber used in extreme ultraviolet light source device
03/04/10Optical element for gas laser and gas laser apparatus using the same
02/04/10Extreme ultraviolet light source device
11/26/09Mirror for extreme ultra violet, manufacturing mirror for extreme ultra violet, and far ultraviolet light source device
10/29/09Semiconductor exposure device using extreme ultra violet radiation







ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009



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