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Ims Nanofabrication Ag patents

Recent patent applications related to Ims Nanofabrication Ag. Ims Nanofabrication Ag is listed as an Agent/Assignee. Note: Ims Nanofabrication Ag may have other listings under different names/spellings. We're not affiliated with Ims Nanofabrication Ag, we're just tracking patents.

ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "I" | Ims Nanofabrication Ag-related inventors

Date Ims Nanofabrication Ag patents (updated weekly) - BOOKMARK this page
11/17/16Multi-beam writing using inclined exposure stripes
09/22/16Bi-directional double-pass multi-beam writing
09/22/16Multi-beam writing of pattern areas of relaxed critical dimension
03/10/16Correction of short-range dislocations in a multi-beam writer
01/14/16Customizing a particle-beam writer using a convolution kernel
01/14/16Compensation of imaging deviations in a particle-beam writer using a convolution kernel
12/03/15Compensation of dose inhomogeneity using overlapping exposure spots
10/29/15Multi-beam tool for cutting patterns
10/29/15Multi-beam tool for cutting patterns
09/03/15Compensation of defective beamlets in a charged-particle multi-beam exposure tool
03/12/15Charged-particle multi-beam apparatus having correction plate
01/29/15Method for charged-particle multi-beam exposure
01/22/15Pattern definition device having multiple blanking arrays
07/17/14High-voltage insulation device for charged-particle optical apparatus
09/22/11Method for multi-beam exposure on a target
11/18/10Multi-beam deflector array means with bonded electrodes
10/07/10Method for maskless particle-beam exposure
09/09/10Global point spreading function in multi-beam patterning
07/29/10Method for producing a multi-beam deflector array device having electrodes
05/27/10Method for maskless particle-beam exposure
05/20/10Constant current multi-beam patterning
02/18/10Compensation of dose inhomogeneity and image distortion
08/13/09Particle-beam exposure apparatus with overall-modulation of a patterned beam
06/11/09Pattern lock system for particle-beam exposure apparatus

ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009


This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. is not affiliated or associated with Ims Nanofabrication Ag in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Ims Nanofabrication Ag with additional patents listed. Browse our Agent directory for other possible listings. Page by