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Ims Nanofabrication Ag patents

Recent patent applications related to Ims Nanofabrication Ag. Ims Nanofabrication Ag is listed as an Agent/Assignee. Note: Ims Nanofabrication Ag may have other listings under different names/spellings. We're not affiliated with Ims Nanofabrication Ag, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "I" | Ims Nanofabrication Ag-related inventors




Date Ims Nanofabrication Ag patents (updated weekly) - BOOKMARK this page
11/17/16Multi-beam writing using inclined exposure stripes
09/22/16Bi-directional double-pass multi-beam writing
09/22/16Multi-beam writing of pattern areas of relaxed critical dimension
03/10/16Correction of short-range dislocations in a multi-beam writer
01/14/16Customizing a particle-beam writer using a convolution kernel
01/14/16Compensation of imaging deviations in a particle-beam writer using a convolution kernel
12/03/15Compensation of dose inhomogeneity using overlapping exposure spots
10/29/15Multi-beam tool for cutting patterns
10/29/15Multi-beam tool for cutting patterns
09/03/15Compensation of defective beamlets in a charged-particle multi-beam exposure tool
03/12/15Charged-particle multi-beam apparatus having correction plate
01/29/15Method for charged-particle multi-beam exposure
01/22/15Pattern definition device having multiple blanking arrays
07/17/14High-voltage insulation device for charged-particle optical apparatus
09/22/11Method for multi-beam exposure on a target
11/18/10Multi-beam deflector array means with bonded electrodes
10/07/10Method for maskless particle-beam exposure
09/09/10Global point spreading function in multi-beam patterning
07/29/10Method for producing a multi-beam deflector array device having electrodes
05/27/10Method for maskless particle-beam exposure
05/20/10Constant current multi-beam patterning
02/18/10Compensation of dose inhomogeneity and image distortion
08/13/09Particle-beam exposure apparatus with overall-modulation of a patterned beam
06/11/09Pattern lock system for particle-beam exposure apparatus







ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009



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