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Innovative Micro Technology
Innovative Micro Technology_20100107
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Innovative Micro Technology patents


Recent patent applications related to Innovative Micro Technology. Innovative Micro Technology is listed as an Agent/Assignee. Note: Innovative Micro Technology may have other listings under different names/spellings. We're not affiliated with Innovative Micro Technology, we're just tracking patents.

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 new patent  Microfabricated fluid pump

A microfabricated fluid pump is formed in a multilayer substrate by etching a plurality of shallow and deep wells into the layers, and then joining these wells with voids formed by anisotropic etching. The voids define a flexible membrane over the substrate which deforms when a force is applied. The... Innovative Micro Technology

Thermocompression bonding with raised feature

A method for bonding two substrates is described, comprising providing a first and a second silicon substrate, providing a raised feature on at least one of the first and the second silicon substrate, forming a layer of gold on the first and the second silicon substrates, and pressing the first... Innovative Micro Technology

Microfabricated pressure transducer

A microfabricated pressure transducer is formed in a multilayer substrate by etching a plurality of shallow and deep wells into the layers, and then joining these wells with voids formed by anisotropic etching. The voids define a flexible membrane over the substrate which deforms when a force is applied.... Innovative Micro Technology

Microfabricated optical apparatus

A microfabricated optical apparatus that includes a light source driven by a waveform, a turning mirror, and a beam shaping element, wherein the waveform is delivered to the light source by at least one through silicon via. The microfabricated optical apparatus may also include a light-sensitive receiver which generates an... Innovative Micro Technology

Through substrate vias using solder bumps

A through substrate via is formed by disposing a quantity of solder material at the top of a through hole formed in a substrate, coating the hole with a wetting layer, and melting the solder material such that it flows into the hole. The solder material may alloy with the... Innovative Micro Technology

Microfabricated optical apparatus with integrated turning surface

A microfabricated optical apparatus that includes a light source or light detector in combination with an integrated turning surface to form a microfabricated optical subassembly. The integrated turning surface may be formed directly in the substrate material using gray scale lithography.... Innovative Micro Technology

Microfabricated optical apparatus

A microfabricated optical apparatus that includes a light source driven by a waveform, a turning mirror, and a beam shaping element, wherein the waveform is delivered to the light source by at least one through silicon via.... Innovative Micro Technology

Mems reed switch device

A MEMS device, having two flexible, permeable members which are manufactured to have sub-millimeter dimensions using MEMS fabrication procedures. The flexible, permeable members may form a reed switch, which closes an electrical connection in the presence of a magnetic field, and opens the connection otherwise. The MEMS reed switch device... Innovative Micro Technology

Device with separation limiting standoff

An MEMS device, having two substantially parallel surfaces are separated by an initial distance. At least one of the surfaces includes a raised feature that limits the gap between the surfaces to less than the initial distance when an actuating voltage is applied. In some embodiments, the raised feature limits... Innovative Micro Technology








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