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Invensense Inc
Invensense Incorporated

Invensense Inc patents


Recent patent applications related to Invensense Inc. Invensense Inc is listed as an Agent/Assignee. Note: Invensense Inc may have other listings under different names/spellings. We're not affiliated with Invensense Inc, we're just tracking patents.

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Microelectromechanical systems (mems) microphone feedback filtering

Feedback filtering for microelectromechanical systems (mems) sensors is described. An exemplary mems sensor system or apparatus can comprise a mems sensor and an associated integrated circuit (ic) or portions there of that facilitate shaping mems sensor frequency response by controlling or filtering a feedback signal. ... Invensense Inc

Data correction for a sensor

A device may include a sensor, a sampling unit, and an interpolator. The sensor may be configured to sense motion and output a sensed signal. ... Invensense Inc

Phase and amplitude adjustment for sensors

A device includes a micro-electro-mechanical system (mems) sensor and a pwm modifier circuitry. The mems sensor may include a drive circuitry and a sense circuitry. ... Invensense Inc

Substance sensing with tracers

Emission of a scented substance, which is mixed with a tracer substance, is controlled based on an amount of the tracer substance sensed during the emission of the scented substance. The scented substance can be mixed with the tracer substance in a known defined ratio. ... Invensense Inc

Systems and methods for coordinating applications with a user interface

Systems and methods are disclosed for coordinating applications by detecting a touch input and a related touch input a device locations associated with the applications, one of which is a user authentication application. A parameter may be established with the user authentication application so that the other application runs with the at least one parameter.. ... Invensense Inc

Systems and methods for motion assisted communication

Systems and devices are disclosed for communicating between a portable device and a first base station. A wireless communications link may be established between the portable device and the first base station. ... Invensense Inc

Data communication based on frequency

Systems and techniques for communicating data as a function of frequency are presented. In an implementation, a system includes a microelectromechanical systems (mems) sensor, a digital signal processor and a frequency detection circuit. ... Invensense Inc

Mems device with improved spring system

A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. ... Invensense Inc

Integrated piezoelectric microelectromechanical ultrasound transducer (pmut) on integrated circuit (ic) for fingerprint sensing

Microelectromechanical (mems) devices and associated methods are disclosed. Piezoelectric mems transducers (pmuts) suitable for integration with complementary metal oxide semiconductor (cmos) integrated circuit (ic), as well as pmut arrays having high fill factor for fingerprint sensing, are described.. ... Invensense Inc

Systems and methods differential pressure sensing

A pressure sensor of a mobile device may be corrected by receiving reference pressure information from an associated device. The correction using differential pressure measurements may be influenced by one or more determined condition characteristics.. ... Invensense Inc

Microphone distortion reduction

Microphone distortion reduction is presented herein. A system can comprise: a processor; and a memory that stores executable instructions that, when executed by the processor, facilitate performance of operations, comprising: obtaining a pressure-in to voltage-out transfer function representing a distortion of an output of a microphone corresponding to a stimulus of a defined sound pressure level that has been applied to the microphone; inverting an equation representing the pressure-in to voltage-out transfer function to obtain an inverse transfer function; and applying the inverse transfer function to the output to obtain a linearized output representing the stimulus. ... Invensense Inc

Configuration to reduce non-linear motion

Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a mems sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. ... Invensense Inc

Method and system for assigning point of sale information

One or more sets of anchor points may be assigned to one or more trajectories of a portable device by scoring each anchor point set with respect to each trajectory. The score for an anchor point set may be determined by cumulating the differences between each anchor point in the set with its closest trajectory segment.. ... Invensense Inc

Acoustically configurable microphone

Various embodiments provide for an acoustically configurable microphone device that can adjust various parameters affecting sensitivity, acoustic overload point, signal to noise ratio, sample rate, and other parametric choices that affect the performance and function of the acoustic sensor based on commands received via acoustic communications. An acoustic analysis engine can analyze acoustic communications received to determine whether or not the acoustic communication contains a command associated with configuring the microphone. ... Invensense Inc

02/22/18 / #20180052007

Device and method for sensor calibration

A device and method for a mems device with at least one sensor is disclosed. A thermal element is disposed in the mems device to selectively adjust a temperature of the mems device. ... Invensense Inc

02/01/18 / #20180031597

Multi-path signal processing for microelectromechanical systems (mems) sensors

Multi-path signal processing for microelectromechanical systems (mems) sensors is described. An exemplary mems sensor apparatus can comprise a single mems sensor element and an associated integrated circuit (ic) that facilitates generating multiple output signals having different output signal electrical characteristics required by a host system. ... Invensense Inc

02/01/18 / #20180028123

Systems and methods for determining engagement of a portable device

A portable device is provided having a motion sensor and an engagement sensor. A determination may be made whether the portable device is engaged with the platform. ... Invensense Inc

01/18/18 / #20180017385

Sensor with low power with closed-loop-force-feedback loop

A device includes a proof mass of a sensor, capacitive elements, an electrode circuitry, a time multiplexing circuitry, a sense circuitry, and a force feedback circuitry. The proof mass moves from a first position to a second position responsive to an external actuation. ... Invensense Inc

01/18/18 / #20180016135

Two different conductive bump stops on cmos-mems bonded structure

Provided herein is a method including forming a micro-electro-mechanical system (“mems”) wafer including a first mems device and a second mems device. A complementary metal-oxide semiconductor (“cmos”) wafer is formed including a first electrically conductive via and a second electrically conductive via. ... Invensense Inc

01/11/18 / #20180009654

Cmos-mems-cmos platform

A sensor chip includes a first substrate with a first surface and a second surface including at least one cmos circuit, a first mems substrate with a first surface and a second surface on opposing sides of the first mems substrate, a second substrate, a second mems substrate, and a third substrate including at least one cmos circuit. The first surface of the first substrate is attached to a packaging substrate and the second surface of the first substrate is attached to the first surface of the first mems substrate. ... Invensense Inc

01/04/18 / #20180002162

Mems sensor with high voltage switch

A system and/or method for utilizing mems switching technology to operate mems sensors. As a non-limiting example, a mems switch may be utilized to control dc and/or ac bias applied to mems sensor structures. ... Invensense Inc

12/14/17 / #20170355597

Method of fabrication of al/ge bonding in a wafer packaging environment and a product produced therefrom

A method of bonding of germanium to aluminum between two substrates to create a robust electrical and mechanical contact is disclosed. An aluminum-germanium bond has the following unique combination of attributes: (1) it can form a hermetic seal; (2) it can be used to create an electrically conductive path between two substrates; (3) it can be patterned so that this conduction path is localized; (4) the bond can be made with the aluminum that is available as standard foundry cmos process. ... Invensense Inc

12/14/17 / #20170355593

Method and system for mems devices with dual damascene formed electrodes

Methods and systems for mems devices with dual damascene formed electrodes is disclosed and may include forming first and second dielectric layers on a semiconductor substrate that includes a conductive layer at least partially covered by the first dielectric layer; removing a portion of the second dielectric layer; forming vias through the second dielectric layer and at least a portion of the second dielectric layer, where the via extends to the conductive layer; forming electrodes by filling the vias and a volume that is the removed portion of the second dielectric layer with a first metal; and coupling a micro-electro-mechanical systems (mems) substrate to the semiconductor substrate. A third dielectric layer may be formed between the first and second dielectric layers. ... Invensense Inc

12/07/17 / #20170350722

Demodulation phase calibration

A method includes receiving a signal from a sensor. The signal includes a first in-phase component and a first quadrature component. ... Invensense Inc

11/30/17 / #20170343353

Method and system for path-based point of sale ordering

Anchor points associated with point of sale information may be ordered by segmenting a trajectory derived from sensor data defined by adjacent turns to generate candidate links for each segment from which possible paths for the trajectory are derived. Each derived possible path may be scored with a multi-objective function using a global optimization algorithm to select a solution path from the derived possible paths that may be used to order a plurality of anchor points.. ... Invensense Inc

11/23/17 / #20170336516

Method for positioning a mobile terminal at the moment when a trigger event occurs

The invention relates to navigation, particularly, to detection of indoor and outdoor positions of mobile devices. Technical result of the invention is to improve the accuracy of mobile terminal position detection at time of occurrence of a specific trigger event and decrease of load on sensor, computing, communication and other resources of the mobile terminal at times when a trigger event occurs. ... Invensense Inc

11/23/17 / #20170336205

Mems circuit for capacitive non-linear correction

A micro-electro-mechanical system includes a proof mass, an anchor, an amplifier, a sense element, a reference element, and a feedback element. The proof mass is configured to move in response to a stimulus. ... Invensense Inc

11/23/17 / #20170334715

Transducer with enlarged back volume

A packaged integrated device includes a package substrate having a first surface and a second surface opposite the first surface, and the package substrate has a hole therethrough. The integrated device package also includes a first lid mounted on the first surface of the package substrate to define a first cavity, and a second lid mounted on the second surface of the package substrate to define a second cavity. ... Invensense Inc

11/23/17 / #20170334714

Integrated package containing mems acoustic sensor and pressure sensor

Integrated microelectromechanical systems (mems) acoustic sensor devices are disclosed. Integrated mems acoustic sensor devices can comprise a mems acoustic sensor element and a pressure sensor within the back cavity associated with the mems acoustic sensor element. ... Invensense Inc

11/23/17 / #20170334709

Cmos-mems structures with out-of-plane mems sensing gap

A micro-electro-mechanical system sensor device is disclosed. The sensor device comprises a micro-electro-mechanical system (mems) layer, comprising: an actuator layer and a cover layer, wherein a portion of the actuator layer is coupled to the cover layer via a dielectric; and an out-of-plane sense element interposed between the actuator layer and the cover layer, wherein the mems device layer is connected to a complementary metal-oxide-semiconductor (cmos) substrate layer via a spring and an anchor.. ... Invensense Inc

11/16/17 / #20170330863

3d integration using al-ge eutectic bond interconnect

A method includes aligning a germanium feature on a first cmos wafer with an aluminum feature on a second cmos wafer. The aluminum feature and the germanium feature are pressed together. ... Invensense Inc

11/16/17 / #20170330553

Transmit beamforming of a two-dimensional array of ultrasonic transducers

In a method for transmit beamforming of a two-dimensional array of ultrasonic transducers, a beamforming pattern to apply to a beamforming space of the two-dimensional array of ultrasonic transducers is defined. The beamforming space includes a plurality of elements, where each element of the beamforming space corresponds to an ultrasonic transducer of the two-dimensional array of ultrasonic transducers, where the beamforming pattern identifies which ultrasonic transducers within the beamforming space are activated during a transmit operation of the two-dimensional array of ultrasonic transducers, and wherein at least some of the ultrasonic transducers that are activated are phase delayed with respect to other ultrasonic transducers that are activated. ... Invensense Inc

11/16/17 / #20170330552

Transmit operation of an ultrasonic sensor

An ultrasonic sensor includes a two-dimensional array of ultrasonic transducers. A signal generator is configured to generate a plurality of transmit signals, wherein each transmit signal of the plurality of transmit signals has a different phase delay relative to other transmit signals of the plurality of transmit signals. ... Invensense Inc

11/16/17 / #20170330012

Operating a fingerprint sensor comprised of ultrasonic transducers

In a method for operating a fingerprint sensor comprising a plurality of ultrasonic transducers, a first subset of ultrasonic transducers of the fingerprint sensor are activated, the first subset of ultrasonic transducers for detecting interaction between an object and the fingerprint sensor. Subsequent to detecting interaction between an object and the fingerprint sensor, a second subset of ultrasonic transducers of the fingerprint sensor are activated, the second subset of ultrasonic transducers for determining whether the object is a human finger, wherein the second subset of ultrasonic transducers comprises a greater number of ultrasonic transducers than the first subset of ultrasonic transducers.. ... Invensense Inc

11/16/17 / #20170328870

Operation of an ultrasonic sensor

In a method of using an ultrasonic sensor comprising a two-dimensional array of ultrasonic transducers, a plurality of ultrasonic signals are transmitted according to a beamforming pattern at a position of the two-dimensional array. The beamforming pattern focuses the plurality of ultrasonic signals to location above the two-dimensional array, wherein the beamforming pattern identifies ultrasonic transducers of the two-dimensional array that are activated during transmission of the ultrasonic signals, and wherein at least some ultrasonic transducers of the beamforming pattern are phase delayed with respect to other ultrasonic transducers of the beamforming pattern. ... Invensense Inc

11/16/17 / #20170328866

Sensing device with a temperature sensor

An electronic device including an array of ultrasonic transducers, a temperature sensor for determining a temperature of the array of ultrasonic transducers, and a control module communicatively coupled to the array of ultrasonic devices and the temperature sensor. The control module is for receiving the temperature and for controlling operation of the array of ultrasonic transducers based at least in part on the temperature.. ... Invensense Inc

11/16/17 / #20170327370

Aluminum nitride (aln) devices with infrared absorption structural layer

A micro-electro-mechanical system device is disclosed. The micro-mechanical system device comprises a first silicon substrate comprising: a handle layer comprising a first surface and a second surface, the second surface comprises a cavity; an insulating layer deposited over the second surface of the handle layer; a device layer having a third surface bonded to the insulating layer and a fourth surface; a piezoelectric layer deposited over the fourth surface of the device layer; a metal conductivity layer disposed over the piezoelectric layer; a bond layer disposed over a portion of the metal conductivity layer; and a stand-off formed on the first silicon substrate; wherein the first silicon substrate is bonded to a second silicon substrate, comprising: a metal electrode configured to form an electrical connection between the metal conductivity layer formed on the first silicon substrate and the second silicon substrate.. ... Invensense Inc

11/16/17 / #20170326594

Ultrasonic transducer with a non-uniform membrane

A piezoelectric micromachined ultrasonic transducer (pmut) device includes a substrate, an edge support structure connected to the substrate, and a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane having non-uniform stiffness. The membrane includes a piezoelectric layer, a first electrode and a second electrode coupled to opposing sides of the piezoelectric layer, and a mechanical support layer coupled to one of the first electrode and the second electrode.. ... Invensense Inc

11/16/17 / #20170326593

Receive operation of an ultrasonic sensor

An ultrasonic sensor includes a two-dimensional array of ultrasonic transducers including a plurality of sub-arrays of ultrasonic transducers, wherein a sub-array of ultrasonic transducers of the plurality of sub-arrays of ultrasonic transducers is independently controllable, and wherein a sub-array of ultrasonic transducers has an associated receive channel. A plurality of shift registers is configured to select a receive pattern of ultrasonic transducers of the two-dimensional array of ultrasonic transducers to activate during a receive operation. ... Invensense Inc

11/16/17 / #20170326591

Supplemental sensor modes and systems for ultrasonic transducers

A piezoelectric micromachined ultrasonic transducer (pmut) device is provided. The pmut includes a substrate and an edge support structure connected to the substrate. ... Invensense Inc

11/16/17 / #20170326590

Ultrasonic transducer operable in a surface acoustic wave (saw) mode

A piezoelectric micromachined ultrasonic transducer (pmut) device is provided. The pmut includes a substrate and an edge support structure connected to the substrate. ... Invensense Inc

11/09/17 / #20170323133

Device mountable packaging of ultrasonic transducers

An electronic device including an array of ultrasonic transducers for generating and receiving ultrasonic signals, and an acoustic coupling layer overlying the array of ultrasonic transducers, where the ultrasonic signals are propagated through the acoustic coupling layer.. . ... Invensense Inc

11/09/17 / #20170322305

Operating a two-dimensional array of ultrasonic transducers

In a method of operating a two-dimensional array of ultrasonic transducers, a plurality of array positions comprising pluralities of ultrasonic transducers of the two-dimensional array of ultrasonic transducers is defined, the plurality of array positions each comprising a portion of ultrasonic transducers of the two dimensional array of ultrasonic transducers. For each array position of the plurality of array positions, a plurality of ultrasonic transducers associated with the respective array position are activated. ... Invensense Inc

11/09/17 / #20170322292

Two-dimensional array of cmos control elements

An electronic device includes a plurality of cmos control elements arranged in a two-dimensional array, where each cmos control element of the plurality of cmos control elements includes semiconductor devices. The plurality of cmos control elements each including a pmos semiconductor device portion comprising a high voltage pmos device and a low voltage pmos device and an nmos semiconductor device portion comprising a high voltage nmos device and a low voltage nmos device. ... Invensense Inc

11/09/17 / #20170322291

Two-dimensional array of cmos control elements

An electronic device includes a plurality of cmos control elements arranged in a two-dimensional array, where each cmos control element of the plurality of cmos control elements includes two semiconductor devices. The plurality of cmos control elements include a first subset of cmos control elements, each cmos control element of the first subset of cmos control elements including a semiconductor device of a first class and a semiconductor device of a second class, and a second subset of cmos control elements, each cmos control element of the second subset of cmos control elements including a semiconductor device of the first class and a semiconductor device of a third class. ... Invensense Inc

11/09/17 / #20170322290

Piezoelectric micromachined ultrasonic transducer (pmut)

A piezoelectric micromachined ultrasonic transducer (pmut) device is provided. The pmut includes a substrate and an edge support structure connected to the substrate. ... Invensense Inc

10/26/17 / #20170307374

Compensating circuit for a microelectromechanical (mems) resonator

A circuit comprising a microelectromechanical (mems) gyroscope and a gain circuit coupled with the mems gyroscope. The gain circuit is configured to receive a digitized drive signal based at least in part on a digitized drive voltage amplitude of the mems gyroscope. ... Invensense Inc

09/28/17 / #20170275158

Integration of ain ultrasonic transducer on a cmos substrate using fusion bonding process

Provided herein is a method including bonding a first oxide layer on a handle substrate to a second oxide layer on a complementary metal oxide semiconductor (“cmos”), wherein the fusion bonding forms a unified oxide layer including a diaphragm overlying a cavity on the cmos. The handle substrate is removed leaving the unified oxide layer. ... Invensense Inc

09/14/17 / #20170260039

Offset rejection electrodes

A mems sensor includes a sensing reference plane, an anchor, a proof mass, and sensing elements. The anchor is coupled to the sensing reference plane and to the proof mass that moves under an external excitation. ... Invensense Inc

09/07/17 / #20170255338

Determining force applied to an ultrasonic sensor

In a method for determining force applied to an ultrasonic sensor, ultrasonic signals are emitted from an ultrasonic sensor. A plurality of reflected ultrasonic signals from a finger interacting with the ultrasonic sensor is captured. ... Invensense Inc

08/31/17 / #20170251316

Electrical testing and feedthrough cancellation for an acoustic sensor

A method and circuit for testing an acoustic sensor are disclosed. In a first aspect, the method comprises using electro-mechanical features of the acoustic sensor to measure characteristic of the acoustic sensor. ... Invensense Inc

08/24/17 / #20170242806

Adaptive buffering

In a method of adaptive buffering in a mobile device having a host processor and a sensor processor coupled with the host processor, the sensor processor is used to buffer data received from a sensor that is operated by the sensor processor. The data is buffered by the sensor processor into a circular data buffer. ... Invensense Inc

08/24/17 / #20170242622

Adaptive buffering

In a method of adaptive buffering in a mobile device having a host processor and a sensor processor coupled with the host processor, the sensor processor is used to buffer data received from a sensor that is operated by the sensor processor, wherein the data is buffered by the sensor processor into a circular data buffer. In response to the sensor processor detecting triggering data within the received data: the sensor processor sets a start-end marker in the circular data buffer; and a command is sent from the sensor processor to a second processor.. ... Invensense Inc

08/24/17 / #20170241799

Systems and methods to compensate for gyroscope offset

A gyroscope signal may be compensated for offset by performing a low frequency adaptive noise cancellation process. Noise corresponding to user dynamics may be reduced by performing a motion sensor based adaptive noise cancellation process. ... Invensense Inc

08/17/17 / #20170234756

Systems and methods for differential pressure sensor calibration

Systems and methods are disclosed for calibrating a pressure sensor associated with a mobile device. The reference pressure information may be obtained from an associated device and then be used to calibrate the pressure sensor.. ... Invensense Inc

08/17/17 / #20170234684

Yaw rate gyroscope robust to linear and angular acceleration

A gyroscope includes four drive masses and four sense masses. Each drive mass is adjacent to two other drive masses and opposite the fourth drive mass, and each sense mass is adjacent to two other sense masses and opposite the fourth sense mass. ... Invensense Inc

08/03/17 / #20170219359

Method and system for estimating uncertainty for offline map information aided enhanced portable navigation

The navigation solution of a portable device may be enhanced using map information. Sensor data for the portable device may be used to derive navigation solutions at a plurality of epochs over a first period of time. ... Invensense Inc

07/27/17 / #20170215001

Microphone module with sound pipe

A microphone module has a substrate with an aperture to allow sound waves to pass through the substrate, a lid mounted to the substrate to define a first interior volume, a microphone mounted to the substrate within the first interior volume, and a housing coupled to the substrate and covering the aperture. The housing forms a second interior volume and includes an acoustic port configured to allow sound to enter the second interior volume. ... Invensense Inc

07/20/17 / #20170206559

Associating a single entity with multiple electronic devices

In a method of associating a single entity with multiple electronic devices, a server accesses user data collected via internet communications with a plurality of electronic devices. Each item of user data includes a location signature and a unique identifier. ... Invensense Inc

07/20/17 / #20170205368

Cmos integrated microheater for a gas sensor device

A gas sensor device with temperature uniformity is presented herein. In an implementation, a device includes a complementary metal-oxide semiconductor (cmos) substrate layer, a dielectric layer and a gas sensing layer. ... Invensense Inc

07/13/17 / #20170199035

Mems gyroscope amplitude control via quadrature

A system and/or method for utilizing quadrature signals, for example in a mems gyroscope, to control drive signal characteristics (e.g., amplitude, etc.). As a non-limiting example, a quadrature signal in a mems gyroscope may be isolated and/or processed to generate a drive signal that is used to drive a proof mass. ... Invensense Inc

07/06/17 / #20170191831

Systems and methods for synthetic sensor signal generation

Systems and devices are disclosed for providing sensor data first and second sensors integrated with a portable device may have multiple axes of measurement by combining data from the first sensor and the second sensor, a synthetic signal may be generated for a first axis of the first sensor.. . ... Invensense Inc

07/06/17 / #20170190571

Integrated package containing mems acoustic sensor and environmental sensor and methodology for fabricating same

An integrated package of at least one environmental sensor and at least one mems acoustic sensor is disclosed. The package contains a shared port that exposes both sensors to the environment, wherein the environmental sensor measures characteristics of the environment and the acoustic sensor measures sound waves. ... Invensense Inc

06/29/17 / #20170184627

Mems device to selectively measure excitation in different directions

A method and system for a sensor system of a device is disclosed. The sensor system includes a first mems sensor (fmems), a second mems sensor (smems) and a signal processor (sp). ... Invensense Inc

06/29/17 / #20170183225

Cmos-mems integrated device including multiple cavities at different controlled pressures and methods of manufacture

An integrated mems device comprises two substrates where the first and second substrates are coupled together and have two enclosures there between. One of the first and second substrates includes an outgassing source layer and an outgassing barrier layer to adjust pressure within the two enclosures. ... Invensense Inc

06/22/17 / #20170178681

Music detection and identification

A sensor processing unit comprises a microphone and a sensor processor. The sensor processor is coupled with the microphone. ... Invensense Inc

06/22/17 / #20170178102

Method and system for point of sale ordering

Anchor points associated with point of sale information may be ordered by deriving a trajectory for the portable device, associating known positions of the anchor points with a map encompassing the trajectory, characterizing turns of the trajectory, generating candidate paths by comparing the characterized turns to the map, selecting a solution path that corresponds to the anchor points and ordering the anchor points based at least in part on the solution path.. . ... Invensense Inc

06/22/17 / #20170176191

Method and system for using offline map information aided enhanced portable navigation

The navigation solution of a portable device may be enhanced using map information. Sensor data for the portable device may be used to derive navigation solutions at a plurality of epochs over a first period of time. ... Invensense Inc

06/22/17 / #20170176188

Apparatus and methods for ultrasonic sensor navigation

An apparatus and methods are disclosed for determining a navigational constraint for a portable device using an ultrasonic sensor. The navigational constraint may be used to supplement other navigational solutions or may be used independently. ... Invensense Inc

06/22/17 / #20170176062

Temperature stabilizing enclosure

A device includes a substrate, a micro-electro-mechanical system (mems) device disposed on the substrate, a controller disposed on the substrate, a heating element, and an enclosure. The heating element is configured to generate heat in response to a signal generated by the controller. ... Invensense Inc

06/15/17 / #20170169444

Systems and methods for determining consumer analytics

Systems and methods are disclosed for deriving consumer analytics. A portable device associated with a user that output sensor data representing motion of the portable device, and by extension, the user. ... Invensense Inc

06/15/17 / #20170168088

Accelerometer common mode self-test

An accelerometer has a plurality of proof masses and a plurality of sense electrodes, which collectively form at least two capacitors. A first sense drive signal is applied to a first capacitor and a second sense drive signal is applied to a second capacitor. ... Invensense Inc

06/15/17 / #20170168087

Identification and compensation of mems accelerometer errors

A microelectromechanical (mems) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. ... Invensense Inc

06/15/17 / #20170168086

Accelerometer sense path self-test

A microelectromechanical (mems) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. ... Invensense Inc

06/15/17 / #20170168085

Mems sensor with compensation of residual voltage

A microelectromechanical (mems) sensor, such as an accelerometer, has one more proof masses that respond to movement of the sensor, the movement of which is measured based on a distance between the one or more proof masses and on one or more sense electrodes. The accelerometer also has a plurality of auxiliary electrodes and a signal generator configured to apply an auxiliary signal having a first harmonic frequency to the plurality of auxiliary electrodes. ... Invensense Inc

06/15/17 / #20170168084

Residual voltage self test

A sensor such as an accelerometer includes a proof mass located opposite a plurality of electrodes located on a substrate. Some of the electrodes are auxiliary electrodes that apply an alternating current auxiliary signal to the proof mass while other electrodes are sense electrodes that sense movement of the proof mass. ... Invensense Inc

06/15/17 / #20170167946

Dual-sealed mems package with cavity pressure monitoring

A microelectromechanical sensor (mems) package includes a gyroscope and an accelerometer. The gyroscope is located within a low-pressure cavity that is sealed from an external pressure. ... Invensense Inc

06/15/17 / #20170167945

Identification of a seal failure in mems devices

A microelectromechanical sensor (mems) package includes a gyroscope and an accelerometer. The gyroscope is located within a low-pressure cavity that is sealed from an external pressure. ... Invensense Inc

06/15/17 / #20170167933

Pressure sensor

A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. ... Invensense Inc

06/15/17 / #20170167876

Gyroscope with auxiliary self-test

A gyroscope includes drive electrodes that drive a drive mass at a drive frequency. A sense mass is responsive to a coriolis force caused by rotation of the gyroscope and oscillates based on the drive frequency. ... Invensense Inc

06/15/17 / #20170167874

Mems sensor with voltage sensing of movable mass

A suspended spring-mass system is suspended from a plurality of the anchoring points. A source voltage is provided from one of anchoring points to the suspended spring-mass system. ... Invensense Inc

06/15/17 / #20170167873

Two frequency gyroscope compensation system and method

A gyroscope is driven at a drive frequency and senses a coriolis force caused by rotation of the gyroscope. The response of the gyroscope to a given coriolis force may change due to changes in the gyroscope over time. ... Invensense Inc

06/08/17 / #20170164107

Microphone package with an integrated digital signal processor

Systems and techniques for providing improved beam forming functionality and/or improve noise cancellation functionality in a microphone package are presented. In an implementation, a device includes a first microelectromechanical systems (mems) sensor, a second mems sensor, and a digital signal processor. ... Invensense Inc

05/04/17 / #20170127178

Distributed automatic level control for a microphone array

A distributed automatic level control function is provided, in which information relating to a common automatic level control parameter is transmitted to each of a plurality of microphone devices, wherein the information transmitted to at least one microphone device is derived from an audio sample of at least one different microphone device. Each microphone device produces the common automatic level control parameter based on the information received by the microphone device and applies the common automatic level control parameter produced by the microphone device to a distributed automatic level controller of the microphone device.. ... Invensense Inc

05/04/17 / #20170122771

Sensor output configuration

In a method of sensor output configuration, sensor output specifications for a plurality of sensor clients of a sensor are acquired. A first sensor output specification for a first of the sensor clients defines a first value for a sensor parameter. ... Invensense Inc

04/06/17 / #20170096330

Cavity pressure modification using local heating with a laser

A method and system for changing a pressure within at least one enclosure in a mems device are disclosed. In a first aspect, the method comprises applying a laser through one of the at least two substrates onto a material which changes the pressure within at least one enclosure when exposed to the laser, wherein the at least one enclosure is formed by the at least two substrates. ... Invensense Inc

03/23/17 / #20170085740

Systems and methods for storing images and sensor data

Systems and methods are disclosed for storing a plurality of images with a portable device. Inertial sensor data from a sensor assembly associated with the portable device may be obtained as each image is captured, allowing determination of a motion of the portable device for each image. ... Invensense Inc

03/23/17 / #20170082648

Systems and methods for thermally controlling sensors

A sensor may be compensated by selectively activating a temperature element to drive temperature within the thermal envelope encompassing the sensor towards an operating temperature and applying a compensation to output of the sensor based at least in part on the operating temperature. The initial ambient temperature may be estimated and the operating temperature may be selected from a set of predetermined temperatures based on the estimate. ... Invensense Inc

03/23/17 / #20170081181

A method for forming a mems device includes coupling a mems substrate and a base substrate. The mems substrate and the base substrate contain at least two enclosures. ... Invensense Inc

03/16/17 / #20170073223

Method of fabrication of al/ge bonding in a wafer packaging environment and a product produced therefrom

A method of bonding of germanium to aluminum between two substrates to create a robust electrical and mechanical contact is disclosed. An aluminum-germanium bond has the following unique combination of attributes: (1) it can form a hermetic seal; (2) it can be used to create an electrically conductive path between two substrates; (3) it can be patterned so that this conduction path is localized; (4) the bond can be made with the aluminum that is available as standard foundry cmos process. ... Invensense Inc

03/16/17 / #20170073217

Mems-cmos device that minimizes outgassing and methods of manufacture

A mems device is disclosed. The mems device includes a first substrate. ... Invensense Inc

03/09/17 / #20170067841

Gas sensor platform and the method of making the same

The present invention relates to low power, low cost, and compact gas sensors and methods for making the same. In one embodiment, the gas sensor includes a heating element embedded in a suspended structure overlying a substrate. ... Invensense Inc

03/09/17 / #20170066648

Cmos-mems integrated device with selective bond pad protection

A method and system for preparing a semiconductor wafer are disclosed. In a first aspect, the method comprises providing a passivation layer over a patterned top metal on the semiconductor wafer, etching the passivation layer to open a bond pad in the semiconductor wafer using a first mask, depositing a protection layer on the semiconductor wafer, patterning the protective layer using a second mask, and etching the passivation layer to open other electrodes in the semiconductor wafer using a third mask. ... Invensense Inc

03/02/17 / #20170057813

Cmos-mems integration using metal silicide formation

A method and system for forming a mems device are disclosed. In a first aspect, the method comprises providing a conductive material over at least a portion of a top metal layer of a base substrate, patterning the conductive material and the at least a portion of the top metal layer, and bonding the conductive material with a device layer of a mems substrate via metal silicide formation. ... Invensense Inc

02/23/17 / #20170055093

Dynamically programmable microphone

Various embodiments provide for a dynamically programmable acoustic sensor that can adjust various parameters affecting sensitivity, acoustic overload point, signal to noise ratio and other parametric choices that affect the performance and function of the acoustic sensor. A sound analysis engine can monitor the ambient noise in real time and adjust the parameters in response to changes in the ambient noise. ... Invensense Inc

02/23/17 / #20170053152

Always-on sensor device for human touch

Always-on or nearly always-on sensing of human touch at a device is provided. The sensing is split into a low-power detection stage and a full-power analysis stage, where the detection stage is implemented continually or nearly continually and causes system circuitry to perform analysis of the human touch after the low-power detection stage has confirmed the human touch. ... Invensense Inc

02/23/17 / #20170052161

Gas sensing material for a gas sensor device

Gas sensing material for a gas sensor device is presented herein. In an implementation, a method includes generating a tin dioxide material by adding metal chloride and metal acetate to a mixture comprising tin dioxide and ammonium hydroxide, generating a precipitate substance by adding an organic solvent to the tin dioxide material, generating a slurry mixture from the precipitate substance by performing a centrifugation process and by adding water to the precipitate substance, generating a dry powder material by heating the slurry mixture via a heat treating process, generating an ink material by suspending the dry powder material in a surfactant substance, and printing the ink material onto a gas sensor.. ... Invensense Inc

02/16/17 / #20170044007

Assembly and packaging of mems device

A micro electro mechanical systems (mems) device includes a solder bump on a substrate, a cmos-mems die comprising a cmos die and a mems die, and stud bumps on the cmos die. The mems die is disposed between the cmos die and the substrate. ... Invensense Inc

02/09/17 / #20170041545

Systems and methods for stabilizing images

Systems and methods are disclosed for stabilizing digital images. Sensor representing a condition of the portable device may be obtained and used to classify a context of the portable device based at least in part on the sensor data. ... Invensense Inc

02/02/17 / #20170033754

Multipath digital microphones

Multipath digital microphone systems comprising a multipath digital audio combiner component are described. Exemplary multipath digital microphone systems can switch from conveying one digital audio signal to conveying another digital audio signal based on one or more switching criteria determined by an exemplary multipath digital audio combiner component. ... Invensense Inc

02/02/17 / #20170030716

Method and apparatus for user and moving vehicle detection

An apparatus and method are disclosed for user and moving vehicle detection in which sensor data for a portable device is processed to determine whether the portable device is in a moving vehicle. Following a determination the portable device is in a moving vehicle, the sensor data is to characterize an association between the user and the portable device to determine whether the portable device is connected to the user. ... Invensense Inc

02/02/17 / #20170030714

Reducing resonance peaks and drive tones from a micro-electro-mechanical system gyroscope response

Reducing noise from drive tone and sense resonance peaks of a micro-electro-mechanical system (mems) gyroscope output using a notch filter is presented herein. The mems gyroscope can include a drive oscillation component configured to vibrate a sensor mass at a drive resonance frequency; a sense circuit configured to detect a deflection of the sensor mass, and generate, based on the deflection and the drive resonance frequency, a demodulated output; and a signal processing component configured to receive a set of frequencies comprising a first value representing the drive resonance frequency and a second value corresponding to a sense resonance frequency associated with the sense circuit, and apply, based on the first value and the second value, a notch filter to the demodulated output to obtain a filtered output.. ... Invensense Inc

01/26/17 / #20170022054

Aluminum nitride (aln) devices with infrared absorption structural layer

A micro-electro-mechanical system device is disclosed. The micro-mechanical system device comprises a first silicon substrate comprising: a handle layer comprising a first surface and a second surface, the second surface comprises a cavity; an insulating layer deposited over the second surface of the handle layer; a device layer having a third surface bonded to the insulating layer and a fourth surface; a piezoelectric layer deposited over the fourth surface of the device layer; a metal conductivity layer disposed over the piezoelectric layer; a bond layer disposed over a portion of the metal conductivity layer; and a stand-off formed on the first silicon substrate; wherein the first silicon substrate is bonded to a second silicon substrate, comprising: a metal electrode configured to form an electrical connection between the metal conductivity layer formed on the first silicon substrate and the second silicon substrate.. ... Invensense Inc

01/19/17 / #20170016723

Duty-cycled gyroscope

A gyroscope system comprises a mems gyroscope coupled to a drive system and a sense system. The drive system maintains the mems gyroscope in a state of oscillation and the sense system for receiving, amplifying, and demodulating an output signal of the mems gyroscope that is indicative of the rate of rotation. ... Invensense Inc

01/19/17 / #20170015547

Release chemical protection for integrated complementary metal-oxide-semiconductor (cmos) and micro-electro-mechanical (mems) devices

Systems and methods that protect cmos layers from exposure to a release chemical are provided. The release chemical is utilized to release a micro-electro-mechanical (mems) device integrated with the cmos wafer. ... Invensense Inc

01/12/17 / #20170013363

Microelectromechanical microphone having a stationary inner region

A microelectromechanical microphone has a stationary region or another type of mechanically supported region that can mitigate or avoid mechanical instabilities in the microelectromechanical microphone. The stationary region can be formed in a diaphragm of the microelectromechanical microphone by rigidly attaching, via a rigid dielectric member, an inner portion of the diaphragm to a backplate of the microelectromechanical microphone. ... Invensense Inc

01/12/17 / #20170008760

Mems-cmos-mems platform

A package combining a mems substrate, a cmos substrate and another mems substrate in one package that is vertically stacked is disclosed. The package comprises a sensor chip further comprising a first mems substrate and a cmos substrate with a first surface and a second surface and where the first mems substrate is attached to the first surface of the cmos substrate. ... Invensense Inc

01/05/17 / #20170004630

Method and apparatus for speed or velocity estimation using optical sensor

Systems and methods are disclosed for estimating speed and/or velocity for a portable device using an optical sensor. The optical sensor may capture a plurality of samples to be processed to estimate speed. ... Invensense Inc

01/05/17 / #20170001861

Method of increasing mems enclosure pressure using outgassing material

Semiconductor manufacturing processes include providing a first substrate having a first passivation layer disposed above a patterned top-level metal layer, and further having a second passivation layer disposed over the first passivation layer; the second passivation layer has a top surface. The processes further include forming an opening in a first portion of the second passivation layer, and the opening exposes a portion of a surface of the first passivation layer. ... Invensense Inc








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