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Lam Research Ag patents


Recent patent applications related to Lam Research Ag. Lam Research Ag is listed as an Agent/Assignee. Note: Lam Research Ag may have other listings under different names/spellings. We're not affiliated with Lam Research Ag, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "L" | Lam Research Ag-related inventors


Method and processing wafer-shaped articles

A method for drying wafer-shaped articles comprises rotating a wafer-shaped article of a predetermined diameter on a rotary chuck, and dispensing a drying liquid onto one side of the wafer-shaped article. The drying liquid comprises greater than 50 mass % of an organic solvent. During at least part of the... Lam Research Ag

Apparatus and radiant heating plate for processing wafer-shaped articles

An apparatus for processing wafer-shaped articles includes a rotary chuck adapted to hold a wafer-shaped article of a predetermined diameter thereon. A radiant heating plate faces a wafer-shaped article when positioned on the rotary chuck. The radiant heating plate includes radiant heating elements, but a central region of the radiant... Lam Research Ag

Apparatus for processing wafer-shaped articles

An apparatus for processing wafer-shaped articles comprises a rotary chuck having a series of contact elements surrounding a wafer-shaped article when mounted on the rotary chuck. A non-rotating plate is positioned interiorly of the series of contact elements. The plate includes a gas supply that is configured to supply gas... Lam Research Ag

Method and processing wafer-shaped articles

An apparatus for processing wafer-shaped articles comprises a rotary chuck and a heating assembly that faces a wafer-shaped article when positioned on the rotary chuck. A liquid dispenser positioned so as to dispense liquid onto a surface of a wafer-shaped article that faces away from the rotary chuck when positioned... Lam Research Ag

Method and liquid treatment of wafer shaped articles

An apparatus for processing wafer-shaped articles comprises a rotary chuck adapted to hold a wafer shaped article thereon. The rotary chuck comprises a peripheral series of pins configured to contact an edge region of a wafer-shaped article. Each of the pins projects from the rotary chuck, and each of the... Lam Research Ag

Method and processing wafer-shaped articles

In an apparatus for treating a wafer-shaped article, a spin chuck is configured to hold a wafer-shaped article of a predetermined diameter. A non-rotating plate is positioned relative to the spin chuck such that the non-rotating plate is beneath and parallel to a wafer-shaped article when positioned on the spin... Lam Research Ag

Wet-dry integrated wafer processing system

An apparatus for processing wafer-shaped articles comprises a vacuum transfer module and an atmospheric transfer module. A first airlock interconnects the vacuum transfer module and the atmospheric transfer module. An atmospheric process module is connected to the atmospheric transfer module. A gas supply system is configured to supply gas separately... Lam Research Ag

Apparatus for liquid treatment of wafer shaped articles

An apparatus for treating a wafer-shaped article comprises a spin chuck configured to hold a wafer-shaped article of a predetermined diameter in a position wherein a lower surface of the wafer-shaped article is spaced a predetermined distance from an upper surface of the spin chuck. A treatment assembly is mounted... Lam Research Ag

Spin chuck with heated nozzle assembly

An apparatus for processing wafer-shaped articles comprises a process chamber and a spin chuck positioned inside the process chamber. The spin chuck is configured to hold a wafer-shaped article at a predetermined process position. A nozzle assembly extends into the process chamber such that a discharge end of the nozzle... Lam Research Ag

Spin chuck with gas leakage prevention

An apparatus for processing wafer-shaped articles, comprises a process chamber, and a spin chuck positioned inside the process chamber. The spin chuck is configured to hold a wafer-shaped article at a predetermined process position. A plate covers the spin chuck and is affixed to or formed integrally with the spin... Lam Research Ag

Spin chuck with in situ cleaning capability

In a method and apparatus for processing wafer-shaped articles, a spin chuck is positioned inside a process chamber. The spin chuck is configured to hold a wafer-shaped article at a predetermined process position. A cover covers the spin chuck and is affixed to or integral with the spin chuck for... Lam Research Ag

Spin chuck with in situ temperature monitoring

A device for processing wafer-shaped articles comprises a rotary chuck mounted for rotation within a surrounding enclosure. The rotary chuck has mounted therein at least one sensor, a microprocessor connected to the at least one sensor so as to receive output signals therefrom, and a wireless transmitter connected to the... Lam Research Ag

Apparatus for treating surfaces of wafer-shaped articles

A device for processing wafer-shaped articles comprises a closed process chamber providing a gas-tight enclosure, and a rotary chuck located within the closed process chamber. The closed process chamber comprises an annular duct surrounding the rotary chuck and extending along a first direction radially outwardly of the rotary chuck and... Lam Research Ag

Apparatus for treating surfaces of wafer-shaped articles

A rotary chuck for processing wafer-shaped articles comprises a chuck body having a series of gripping pins that are movable by sliding horizontally and in unison relative to the chuck body from a first position in which the gripping pins are relatively more retracted into the chuck body to a... Lam Research Ag








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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Lam Research Ag in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Lam Research Ag with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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