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Lam Research Ag patents

Recent patent applications related to Lam Research Ag. Lam Research Ag is listed as an Agent/Assignee. Note: Lam Research Ag may have other listings under different names/spellings. We're not affiliated with Lam Research Ag, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "L" | Lam Research Ag-related inventors




Date Lam Research Ag patents (updated weekly) - BOOKMARK this page
06/08/17Spin chuck with heated nozzle assembly
06/08/17Spin chuck with gas leakage prevention
06/08/17Spin chuck with in situ cleaning capability
05/25/17Spin chuck with in situ temperature monitoring
05/04/17Apparatus for treating surfaces of wafer-shaped articles
05/04/17Apparatus for treating surfaces of wafer-shaped articles
12/29/16Dual mode chamber for processing wafer-shaped articles
08/18/16Slit nozzle
08/11/16Spin chuck with rotating gas showerhead
06/23/16Device for measuring the distribution or impulse of a series of droplets
04/28/16Liquid dispenser with improved drip prevention
04/28/16Convective wafer heating by impingement with hot gas
04/28/16Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
03/03/16Method and processing wafer-shaped articles
01/28/16Apparatus for treating surfaces of wafer-shaped articles
12/31/15Method for etching semiconductor structures and etching composition for use in such a method
12/17/15Method and liquid treatment of wafer shaped articles
08/27/15Device and removing liquid from a surface of a disc-like article
08/27/15Apparatus for liquid treatment of wafer shaped articles
08/20/15Method and processing wafer-shaped articles
07/23/15Method and conditioning process liquids
07/16/15Method and liquid treatment of wafer shaped articles
07/02/15Method and liquid treatment of wafer shaped articles
07/02/15Apparatus for treating surfaces of wafer-shaped articles
07/02/15Apparatus for treating surfaces of wafer-shaped articles
07/02/15Apparatus for treating surfaces of wafer-shaped articles
01/08/15Device for holding wafer shaped articles
01/01/15Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus
11/27/14Method and liquid treatment of wafer-shaped articles
11/20/14Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
09/25/14Collector for use with an treating wafer-shaped articles
09/25/14Apparatus for treating surfaces of wafer-shaped articles
08/14/14Process and treating surfaces of wafer-shaped articles
07/03/14Method and processing wafer-shaped articles
06/26/14Apparatus for liquid treatment of wafer shaped articles and liquid control ring for use in same
05/29/14Apparatus for liquid treatment of work pieces and flow control system for use in same
05/22/14Apparatus for processing wafer-shaped articles
04/17/14Method and liquid treatment of wafer shaped articles
04/10/14Apparatus for liquid treatment of wafer shaped articles
02/27/14Method and processing wafer-shaped articles
02/27/14Method and liquid treatment of wafer shaped articles
02/13/14Method and liquid treatment of wafer shaped articles
01/30/14Method and liquid treatment of wafer-shaped articles
12/05/13Method and processing wafer-shaped articles
11/21/13Apparatus and transporting wafer-shaped articles
11/21/13Method and liquid treatment of wafer-shaped articles
10/31/13Method and liquid treatment of wafer-shaped articles
10/03/13Apparatus and liquid treatment of wafer-shaped articles
09/12/13Process and treating surfaces of wafer-shaped articles
06/27/13Apparatus for treating surfaces of wafer-shaped articles
06/20/13Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device
05/30/13Device and treating wafer-shaped articles
05/23/13Device and processing wafer shaped articles
05/23/13Method and device for processing wafer shaped articles
04/25/13Method and processing wafer-shaped articles
04/25/13Method and processing wafer-shaped articles
04/25/13Method and processing wafer-shaped articles
04/25/13Method, apparatus and composition for wet etching
03/14/13Method and liquid treatment of wafer shaped articles
03/14/13Apparatus for treating surfaces of wafer-shaped articles
02/28/13Method and device for wet treatment of plate-like articles
01/24/13Ultrasonic cleaning method and apparatus
01/10/13Apparatus for treating a wafer-shaped article
12/06/12Device for treating surfaces of wafer-shaped articles
11/29/12Method and liquid treatment of wafer shaped articles
Patent Packs
11/15/12Device and process for liquid treatment of wafer shaped articles
11/01/12Ultrasonic treatment method and apparatus
07/05/12Device and wet treating disc-like substrates
06/28/12Process for treating a semiconductor wafer
06/07/12Method and surface treatment using inorganic acid and ozone
05/31/12Method and wafer wet processing
05/03/12Method and drying a semiconductor wafer
05/03/12Closed chamber for wafer wet processing
05/03/12Method for treating a semiconductor wafer
04/26/12Method for treating a semiconductor wafer
04/12/12Method for drying a semiconductor wafer
04/12/12Device and wet treating plate-like-articles
03/29/12Ultrasonic cleaning method and apparatus
01/26/12Device for holding wafer shaped articles
12/15/11Device for treating disc-like articles
Patent Packs
12/01/11Closed chamber with fluid separation feature
11/10/11Device for holding wafer shaped articles
11/10/11Method for treatment substrates and treatment composition for said method
10/20/11Device for treating disc-like articles
10/20/11Grounded chuck
10/20/11Wheelchair stair assist apparatus
10/13/11Device for treating disc-like article and operating same
06/30/11Ultrasonic cleaning fluid, method and apparatus
06/23/11High temperature chuck and using same
06/23/11Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin
06/23/11Device and process for liquid treatment of a wafer shaped article
06/02/11Method and surface treatment using a mixture of acid and oxidizing gas
01/06/11Method for deposition a film onto a substrate
11/18/10Device and process for wet treating a peripheral area of a wafer-shaped article
08/12/10Apparatus and wet treatment of disc-like articles
04/29/10Device and wet treating disc-shaped articles







ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009



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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Lam Research Ag in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Lam Research Ag with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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