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Lasertec Corporation patents

Recent patent applications related to Lasertec Corporation. Lasertec Corporation is listed as an Agent/Assignee. Note: Lasertec Corporation may have other listings under different names/spellings. We're not affiliated with Lasertec Corporation, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "L" | Lasertec Corporation-related inventors

Measurement apparatus, measurement method, and correction method

A measurement apparatus 1 according to the present invention includes a table 10 that has an axis of rotation 14 and supports a disc-shaped object 40, a first driving unit that rotates the table 10 around the axis of rotation 14, a light source 50 that produces illumination light with... Lasertec Corporation

Inspection apparatus and its focus adjustment method

An inspection apparatus according to an aspect of the present invention includes an EUV light source 11, an illumination optical system 10 provided to apply the EUV light to an EUV mask 60, a concave mirror and a convex mirror 22 configured to reflect the EUV light reflected on the... Lasertec Corporation

Mask inspection apparatus and mask inspection method

Provided are a mask inspection apparatus and a mask inspection method that can prevent a reduction in a reflectance of a drop-in mirror, which is caused by carbon contaminants. A mask inspection apparatus according to the present invention includes a drop-in mirror including multi-layer film and a reflective surface. The... Lasertec Corporation

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009


This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. is not affiliated or associated with Lasertec Corporation in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Lasertec Corporation with additional patents listed. Browse our Agent directory for other possible listings. Page by