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Lasertec Corporation patents

Recent patent applications related to Lasertec Corporation. Lasertec Corporation is listed as an Agent/Assignee. Note: Lasertec Corporation may have other listings under different names/spellings. We're not affiliated with Lasertec Corporation, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "L" | Lasertec Corporation-related inventors




Date Lasertec Corporation patents (updated weekly) - BOOKMARK this page
11/17/16Light source apparatus and inspection apparatus
03/24/16Inspection apparatus, coordinate detection apparatus, coordinate detection method, and wavefront aberration correction method
10/22/15Measuring apparatus and measuring method
10/15/15Pellicle inspection apparatus
08/27/15Laser light source device and inspection device
07/23/15Interferometer and phase shift amount measuring apparatus
06/18/15Defect classifying method and inspection apparatus
05/28/15Inspection apparatus and inspection method
11/13/14Inspection method and inspection apparatus
07/10/14Chucking device and chucking method
05/15/14Analysis apparatus and analysis method
12/05/13Defect inspection device, defect inspection method, and defect inspection program
09/19/13Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference mask
09/12/13Plasma shield device and plasma source apparatus
07/25/13Microscope and inspection apparatus
11/15/12Substrate inspection apparatus and mask inspection apparatus
02/02/12Radiation source apparatus and duv beam generation method
10/06/11Inspection system and inspection method
09/15/11Light source apparatus
06/09/11Efficient pulse laser light generation and devices using the same
07/23/09Depth measurement apparatus and depth measurement method
07/02/09Photomask inspection apparatus







ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009



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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Lasertec Corporation in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Lasertec Corporation with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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