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Lg Siltron Incorporated patents

Recent patent applications related to Lg Siltron Incorporated. Lg Siltron Incorporated is listed as an Agent/Assignee. Note: Lg Siltron Incorporated may have other listings under different names/spellings. We're not affiliated with Lg Siltron Incorporated, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "L" | Lg Siltron Incorporated-related inventors

Method for manufacturing silicon single crystal ingot, and silicon single crystal ingot manufactured by the method

An embodiment provides a method for manufacturing a silicon single crystal ingot by using a silicon single crystal growing apparatus comprising: a chamber; a crucible arranged inside the chamber and accommodating a molten silicon solution; a heater arranged outside the crucible so as to heat the crucible; a heat shielding... Lg Siltron Incorporated

Wafer transfer device

An embodiment comprises: a guide moving in the vertical direction or the horizontal direction; a transfer arm provided on the guide and loading spaced apart wafers; a laser emission unit disposed on the guide and emitting first laser beams at the spaced apart wafers loaded on the transfer arm; and... Lg Siltron Incorporated

Wire sawing apparatus

A wire sawing apparatus of one embodiment comprises: a wire for cutting an ingot; an ingot conveyor unit for conveying the ingot to the wire; a nozzle for supplying slurry to the wire; and a dispersed slurry blocking unit disposed above the ingot sawed by the wire, so as to... Lg Siltron Incorporated

Apparatus and growing silicon single crystal ingot

An embodiment provides a method for growing a silicon single crystalline ingot that may include: preparing a silicon melt solution in a crucible; probing a seed in the silicon melt solution; rotating the seed and the crucible while applying a horizontal magnetic field to the crucible; and pulling up an... Lg Siltron Incorporated

Wafer polishing apparatus and wafer polishing method using same

An embodiment comprises: a lower plate; an upper plate which is disposed on the lower plate and rotates; a carrier which receives a wafer and is disposed on the lower plate; and a sensor unit for irradiating light to the wafer received in the carrier, detecting light reflected by the... Lg Siltron Incorporated

Monocrystal growth system and method capable of controlling shape of ingot interface

The present invention relates a method for controlling a growth interface shape while growing a monocrystal ingot by a Czochralski method, the method including a step of starting a growth of the monocrystal ingot after setting a control condition of a monocrystal growing process so that an interface of the... Lg Siltron Incorporated

Wafer loading apparatus of wafer polishing equipment and adjusting wafer loading position

An embodiment relates to a wafer loading apparatus of wafer polishing equipment. Provided is the wafer loading apparatus of wafer polishing equipment, comprising: a wafer polisher that includes a polishing carrier having a wafer hole formed therein in which a wafer is loaded, wherein both sides of the wafer are... Lg Siltron Incorporated

Silicon single crystal growing apparatus and silocon single crystal growing method using same

An exemplary embodiment of the present invention provides a silicon single crystal growing apparatus and method. The apparatus comprises: a chamber; a crucible that is disposed in the chamber and receives melted silicon; a heater disposed outside the crucible to heat the crucible; a heat shield part disposed in the... Lg Siltron Incorporated

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