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Mattson Technology Inc patents

Recent patent applications related to Mattson Technology Inc. Mattson Technology Inc is listed as an Agent/Assignee. Note: Mattson Technology Inc may have other listings under different names/spellings. We're not affiliated with Mattson Technology Inc, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "M" | Mattson Technology Inc-related inventors




Date Mattson Technology Inc patents (updated weekly) - BOOKMARK this page
07/20/17Variable pattern separation grid for plasma chamber
07/06/17Gas flow control for millisecond anneal system
07/06/17Fluid leakage detection for a millisecond anneal system
07/06/17Electrode tip for arc lamp
07/06/17Features for improving process uniformity in a millisecond anneal system
07/06/17Chamber wall heating for a millisecond anneal system
07/06/17Substrate breakage detection in a thermal processing system
07/06/17Substrate support in a millisecond anneal system
07/06/17Preheat processes for millisecond anneal system
07/06/17Nitrogen injection for arc lamps
09/22/16Controlling azimuthal uniformity of etch process in plasma processing chamber
01/14/16System and protection of vacuum seals in plasma processing systems
10/22/15Inductive plasma source with high coupling efficiency
07/16/15Plasma reactor with inductive excitation of plasma and efficient removal of heat from the excitation coil
05/28/15Method for high aspect ratio photoresist removal in pure reducing plasma
05/07/15Novel mask removal process strategy for vertical nand device
04/02/15System and process for calibrating pyrometers in thermal processing chambers
02/05/15Apparatus and methods for generating electromagnetic radiation
09/04/14Heating configuration for use in thermal processing chambers
06/05/14Low cost high throughput processing platform
11/21/13Methods, apparatus and media for determining a shape of an irradiance pulse to which a workpiece is to be exposed
08/01/13Slotted electrostatic shield modification for improved etch and cvd process uniformity
01/31/13System and process for calibrating pyrometers in thermal processing chambers
11/29/12Method and growing thin oxide films on silicon while minimizing impact on existing structures
10/04/12System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
09/13/12Method and system for determining optical properties of semiconductor wafers
08/09/12Methods for determining wafer temperature
06/21/12Inductively coupled plasma source for plasma processing
05/24/12Endeffectors for handling semiconductor wafers
09/08/11System and process for calibrating pyrometers in thermal processing chambers
10/07/10System and reducing object deformation during a pulsed heating process
09/16/10System and process for calibrating pyrometers in thermal processing chambers
08/05/10Electrostatic chuck system and process for radially tuning the temperature profile across the surface of a substrate
06/17/10Method and growing thin oxide films on silicon while minimizing impact on existing structures
12/31/09Process and system for varying the exposure to a chemical ambient in a process chamber
10/01/09Methods for determining wafer temperature
06/25/09Determining the temperature of silicon at high temperatures
05/07/09Workpiece support with fluid zones for temperature control
04/16/09System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy







ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009



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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Mattson Technology Inc in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Mattson Technology Inc with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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