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Mems Drive Inc patents


Recent patent applications related to Mems Drive Inc. Mems Drive Inc is listed as an Agent/Assignee. Note: Mems Drive Inc may have other listings under different names/spellings. We're not affiliated with Mems Drive Inc, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "M" | Mems Drive Inc-related inventors


Mems Drive, Inc.

. . ... Mems Drive Inc

Mems actuation systems and methods

A micro-electrical-mechanical system (mems) actuator includes: a mems actuation core, and a multi-piece mems electrical connector assembly electrically coupled to the mems actuation core and configured to be electrically coupled to a printed circuit board, wherein the multi-piece mems electrical connector includes: a plurality of subcomponents, and a plurality of coupling assemblies configured to couple the plurality of subcomponents together.. . ... Mems Drive Inc

Mems actuation systems and methods

A micro-electrical-mechanical system (mems) assembly includes a stationary stage, a rigid stage, at least one flexure configured to slidably couple the stationary stage and the rigid stage, at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, and at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage.. . ... Mems Drive Inc

Mems actuation systems and methods

A micro-electrical-mechanical system (mems) actuator includes a first set of actuation fingers, a second set of actuation fingers, and a first spanning structure configured to couple at least two fingers of the first set of actuation fingers while spanning at least one finger of the second set of actuation fingers.. . ... Mems Drive Inc

Mems actuation systems and methods

A method of manufacturing a micro-electrical-mechanical system (mems) assembly includes mounting a micro-electrical-mechanical system (mems) actuator to a metal plate. An image sensor assembly is mounted to the micro-electrical-mechanical system (mems) actuator. ... Mems Drive Inc

Mems actuation systems and methods

A micro-electrical-mechanical system (mems) assembly includes a micro-electrical-mechanical system (mems) actuator configured to be coupled, on a lower surface, to a printed circuit board, an image sensor assembly coupled to an upper surface of the micro-electrical-mechanical system (mems) actuator, and a holder assembly coupled to and positioned with respect to the micro-electrical-mechanical system (mems) actuator.. . ... Mems Drive Inc

Mems actuation systems and methods

A micro-electrical-mechanical system (mems) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (mems) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (mems).. . ... Mems Drive Inc

Electrical bar latching for low stiffness flexure mems actuator

A mems actuator including buckled flexures and a method of assembling the actuator are described. The assembled mems actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. ... Mems Drive Inc

Electric connection flexures

Electric connection flexures for moving stages of microelectromechanical systems (mems) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. ... Mems Drive Inc

Shock caging features for mems actuator structures

Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by mems device beam structures during events that may cause mechanical shock to the mems device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. ... Mems Drive Inc

Mems grid for manipulating structural parameters of mems devices

A system and method for manipulating the structural characteristics of a mems device include etching a plurality of holes into the surface of a mems device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the mems device.. . ... Mems Drive Inc

Simplified mems device fabrication process

A simplified mems fabrication process and mems device is provided that allows for cheaper and lighter-weight mems devices to be fabricated. The process comprises etching a plurality of holes or other feature patterns into a mems device, and then etching away the underlying wafer such that, after the etching process, the mems device is the required thickness and the individual die are separated, avoiding the extra steps of wafer thinning and die dicing. ... Mems Drive Inc

Shock caging features for mems actuator structures

Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by mems device beam structures during events that may cause mechanical shock to the mems device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. ... Mems Drive Inc

Mems actuator structures resistant to shock

Shock-resistant mems structures are disclosed. In one implementation, a motion control flexure for a mems device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. ... Mems Drive Inc

06/29/17 / #20170187937

Electrical bar latching for low stiffness flexure mems actuator

A mems actuator including buckled flexures and a method of assembling the actuator are described. The assembled mems actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. ... Mems Drive Inc

06/15/17 / #20170170059

Mems grid for manipulating structural parameters of mems devices

A system and method for manipulating the structural characteristics of a mems device include etching a plurality of holes into the surface of a mems device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the mems device.. . ... Mems Drive Inc

05/11/17 / #20170133951

Mems actuator package architecture

A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. ... Mems Drive Inc

05/11/17 / #20170133950

Mems actuator package architecture

A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. ... Mems Drive Inc

03/30/17 / #20170088418

Simplified mems device fabrication process

A simplified mems fabrication process and mems device is provided that allows for cheaper and lighter-weight mems devices to be fabricated. The process comprises etching a plurality of holes or other feature patterns into a mems device, and then etching away the underlying wafer such that, after the etching process, the mems device is the required thickness and the individual die are separated, avoiding the extra steps of wafer thinning and die dicing. ... Mems Drive Inc

03/30/17 / #20170088415

Mems grid for manipulating structural parameters of mems devices

A system and method for manipulating the structural characteristics of a mems device include etching a plurality of holes into the surface of a mems device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the mems device.. . ... Mems Drive Inc

02/09/17 / #20170040909

Multi-directional actuator

An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. ... Mems Drive Inc








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