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Mks Instruments Inc patents

Recent patent applications related to Mks Instruments Inc. Mks Instruments Inc is listed as an Agent/Assignee. Note: Mks Instruments Inc may have other listings under different names/spellings. We're not affiliated with Mks Instruments Inc, we're just tracking patents.

ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "M" | Mks Instruments Inc-related inventors




Date Mks Instruments Inc patents (updated weekly) - BOOKMARK this page
03/16/17Pressure sensor with real time health monitoring and compensation
03/02/17Method and pressure-based flow measurement in non-critical flow conditions
03/02/17Feedback control by rf waveform tailoring for ion energy distribution
03/02/17Plasma rf bias cancellation system
03/02/17Direct three phase parallel resonant inverter for reactive gas generator applications
02/23/17Supervisory control of radio frequency (rf) impedance tuning operation
02/09/17Stress relief mems structure and package
02/02/17Systems and methods for pressure differential molecular spectroscopy of compressible fluids
01/19/17Unified rf power delivery single input, multiple output control for continuous and pulse mode operation
01/12/17Devices and methods for feedthrough leakage current detection and decontamination in ionization gauges
01/12/17Ionization pressure gauge with bias voltage and emission current control and measurement
01/12/17Trimmable heater
12/08/16Solid state microwave generator and power amplifier
08/11/16Apparatus and metastable enhanced plasma ignition
08/11/16Apparatus and plasma ignition with a self-resonating device
08/11/16Stress relief mems structure and package
07/21/16Radial sealing butterfly valve
07/21/16Polymer composite vacuum components
07/14/16Digitalization of analog mfc control input
06/23/16Compact, configurable power supply for energizing ozone-producing cells
06/09/16Adaptive periodic waveform controller
05/12/16Long lifetime cold cathode ionization vacuum gauge design
04/28/16Method and a directly electrically heated flow-through chemical reactor
12/31/15Power supply circuits incorporating transformers for combining of power amplifier outputs and isolation of load voltage clamping circuits
12/10/15Method and siloxane measurements in a biogas
11/12/15Computer-implemented generating generalized fractional designs
11/05/15Pressure-less ozonated di-water (dio3) recirculation reclaim system
11/05/15Microwave plasma applicator with improved power uniformity
10/29/15Streamlined heater assembly with front and intermediate daisy chain power injection, shielding, and water resistant features
10/22/15Ionization gauge for high pressure operation
10/08/15Toroidal plasma channel with varying cross-section areas along the channel
10/01/15Micro-pirani vacuum gauges
10/01/15Microwave plasma applicator with improved power uniformity
09/03/15Pilot valve structures and mass flow controllers
08/20/15Method and a directly electrically heated flow-through chemical reactor
08/20/15Ozone generator
06/11/15Use of one or more retro-reflectors in a gas analyzer system
05/14/15Powder and deposition control in throttle valves
04/23/15Ionization gauge with emission current and bias potential control
04/02/15Cold cathode ionization vacuum gauge
04/02/15Cold cathode ionization vacuum gauge
03/05/15Upstream volume mass flow verification systems and methods
01/29/15Trace gas concentration in art ms traps
11/06/14Pressure-balanced control valves
10/30/14Mems pressure sensors with integrated baffles
10/30/14Multiple radio frequency power supply control of frequency and phase
10/16/14Method and system for controlling radio frequency power
10/09/14Self-calibrating pressure sensor system with pressure sensor and reference sensor that share common sealed chamber
09/18/14Toroidal plasma abatement apparatus and method
09/18/14Virtual rf sensor
08/28/14Pressure sensor with integrated health monitoring and compensation
08/28/14System for and multiple channel fast pulse gas delivery
08/07/14Synchronization of rf pulsing with rf metrology, processing, and control
08/07/14Distortion correction based feedforward control radio frequency power sources
07/10/14System for and fast pulse gas delivery
07/10/14System for and monitoring flow through mass flow controllers in real time
06/12/14System for and providing pressure insensitive self verifying mass flow controller
05/15/14Method of two-stage flow control
05/15/14Multivariate prediction of a batch manufacturing process
05/01/14Rf pulse edge shaping
04/24/14Corrosion and deposition protected valve apparatus and method
04/10/14System and methods of bimodal automatic power and frequency tuning of rf generators
03/27/14Method and self verification of pressured based mass flow controllers
03/06/14Method and a large area inductive plasma source
03/06/14Secondary plasma detection systems and methods
Patent Packs
02/27/14Phase and frequency control of a radio frequency generator from an external source
02/20/14On the enhancements of planar based rf sensor technology
01/30/14Power distortion-based servo control systems for frequency tuning rf power sources
01/30/14Wideband aft power amplifier systems with frequency-based output transformer impedance balancing
10/10/13Multivariate monitoring of a batch manufacturing process
10/03/13Compact, configurable power supply for energizing ozone-producing cells
10/03/13Versatile zero-voltage switch resonant inverter for industrial dielectric barrier discharge generator applications
08/29/13Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing
08/22/13Methods and automated predictive design space estimation
08/08/13Chemical ionization reaction or proton transfer reaction mass spectrometry
08/01/13Method and siloxane measurements in a biogas
07/25/13Pressure sensor
07/04/13Power distortion-based servo control systems for frequency tuning rf power sources
06/20/13Power supply including transformer-less high voltage power oscillators for ozone generation
06/13/13Gas injector plasma applicator
Patent Packs
05/16/13Toroidal plasma channel with varying cross-section areas along the channel
04/04/13Method of and multiple channel flow ratio controller system
03/21/13Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
02/21/13Adjustable resonant buck converter
12/13/12Mass spectrometry for gas analysis in which both a charged particle source and a charged particle analyzer are offset from an axis of a deflector lens, resulting in reduced baseline signal offsets
12/13/12Mass spectrometry for gas analysis with a one-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens
12/13/12Mass spectrometry for a gas analysis with a two-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens
12/06/12Ozone generator
11/29/12Automated model building and model updating
11/15/12Method and system for shoot-through protection
11/08/12System to remove dissolved gases selectively from liquids
10/18/12Radio frequency power delivery system
09/06/12Optimization of data processing parameters
08/30/12System for and fast pulse gas delivery
08/09/12Pressure regulation in remote zones
07/12/12Apparatus and pressure fluctuation insensitive mass flow control
07/05/12High-efficiency, hot trap apparatus and method
06/28/12Method and processing metal bearing gases
06/21/12Two-stage, slow-start valve apparatus and method
06/14/12Measuring and controlling parameters of a plasma generator
06/14/12Methods and automated predictive design space estimation
05/17/12Capacitive pressure sensor with improved electrode structure
05/17/12Controlling a discrete-type manufacturing process with a multivariate model
04/26/12Frequency interference detection and correction
04/12/12Wide-dynamic range electrometer with a fast response
04/05/12Measuring minority carrier lifetime
03/15/12Multiple heater control system with expandable modular functionality
03/15/12Power amplifier with transistor input mismatching
03/15/12Monitoring, detecting and quantifying chemical compounds in a sample
03/08/12Lcl high power combiner
Social Network Patent Pack
02/09/12Capacitive pressure sensor
02/09/12Process control using process data and yield data
01/19/12Phase and frequency control of a radio frequency generator from an external source
01/19/12Multipoint voltage and current probe system
01/05/12Chemical ionization reaction or proton transfer reaction mass spectrometry
12/08/11Reduction of copper or trace metal contaminants in plasma electrolytic oxidation coatings
10/06/11Multi-channel radio frequency generator
10/06/11Variable class characteristic amplifier
09/22/11Ozone concentration sensor
07/14/11Apparatus for measuring minority carrier lifetime and using the same
Patent Packs
06/09/11Devices, systems, and methods for carbonation of deionized water
01/20/11Wide-dynamic range electrometer with a fast response
01/13/11Methods and protecting plasma chamber surfaces
12/30/10Method and system for controlling radio frequency power
12/23/10Apparatus and pressure fluctuation insensitive mass flow control
11/18/10Methods and automated predictive design space estimation
09/16/10Radio frequency power delivery system
09/16/10Bitmap cluster analysis of defects in integrated circuits
09/02/10Method and siloxane measurements in a biogas
08/12/10Arc detection
08/12/10Harmonic derived arc detector
08/05/10Radio frequency power control system
07/29/10Controlling a manufacturing process with a multivariate model
07/15/10Signal oversampling for improved s:n in reflector movement system
07/01/10Reactive chemical containment system
06/17/10Methods and systems for stabilizing an amplifier
05/20/10Dual-mode mass flow verification and mass flow delivery system and method
04/22/10Process control using process data and yield data
04/01/10Multigas monitoring and detection system
03/25/10Tune range limiter
03/11/10Versatile semiconductor manufacturing controller with statistically repeatable response times
03/04/10Automated model building and batch model building for a manufacturing process, process monitoring, and fault detection
02/11/10Systems and methods for updating valve cracking current in mass flow controllers
02/04/10Ozone concentration sensor
01/21/10Sputtering system and method including an arc detection
01/07/10Radio frequency (rf) envelope pulsing using phase switching of switch-mode power amplifiers
12/31/09Particle trap for a plasma source
12/24/09Preventive maintenance diagnostics for valve systems
12/24/09Phase and frequency control of a radio frequency generator from an external source
11/26/09Method and processing metal bearing gases
Patent Packs
10/15/09Capacitance manometers and methods of making same
10/15/09Orthogonal radio frequency voltage/current sensor with high dynamic range
09/10/09Integrated absolute and differential pressure transducer
09/10/09Process control using process data and yield data
08/20/09Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
08/20/09Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
08/20/09Systems and methods for sorting irregular objects
06/25/09Hierarchically organizing data using a partial least squares analysis (pls-trees)
05/28/09Multi-zone pressure control system
04/30/09High accuracy mass flow verifier with multiple inlets
04/16/09Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer
04/16/09Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer
02/26/09Multivariate multiple matrix analysis of analytical and sensory data
02/05/09Automated model building and model updating







ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009



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