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Nanometrics Incorporated patents


Recent patent applications related to Nanometrics Incorporated. Nanometrics Incorporated is listed as an Agent/Assignee. Note: Nanometrics Incorporated may have other listings under different names/spellings. We're not affiliated with Nanometrics Incorporated, we're just tracking patents.

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3d target for monitoring multiple patterning process

A metrology target is designed for monitoring variations in a multiple patterning process, such as a self-aligned doubled patterning (SADP) or self-aligned quadruple patterning (SAQP) process. The metrology target may include a plurality of sub-patterns. For example, the metrology target may be a three-dimensional (3D) target rather than a conventional... Nanometrics Incorporated

Optical critical dimension target design

A measurement target for a semiconductor device is designed. The semiconductor device includes a structure to be measured that has a spectrum response that is comparable to or below system noise level for an optical critical dimension measurement device to be used to measure the structure. The measurement target is... Nanometrics Incorporated

Interferometric characterization of surface topography

An interferometric metrology device characterizes a surface topography of a sample at different length scales by combining the interferometric data into blocks of different length scales or by filtering the interferometric data at different length scales and then determining statistical moments or surface properties of the surface topography at the... Nanometrics Incorporated








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