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Nikon Corporation patents


Recent patent applications related to Nikon Corporation. Nikon Corporation is listed as an Agent/Assignee. Note: Nikon Corporation may have other listings under different names/spellings. We're not affiliated with Nikon Corporation, we're just tracking patents.

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 new patent  Exposure apparatus, exposure method, and device manufacturing method

An exposure apparatus transfers a pattern on a wafer by irradiating a reticle with an illumination light, and the pattern is formed on a pattern surface of the reticle. The exposure apparatus is provided with a reticle stage that moves holding the reticle, and a sensor that irradiates a measurement light on the pattern surface of the reticle held by the reticle stage and detects speckles from the pattern.. ... Nikon Corporation

 new patent  Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method

An illumination optical apparatus has an optical unit. The optical unit has a light splitter to split an incident beam into two beams; a first spatial light modulator which can be arranged in an optical path of a first beam; a second spatial light modulator which can be arranged in an optical path of a second beam; and a light combiner which combines a beam having passed via the first spatial light modulator, with a beam having passed via the second spatial light modulator; each of the first spatial light modulator and the second spatial light modulator has a plurality of optical elements arranged two-dimensionally and controlled individually.. ... Nikon Corporation

 new patent  Variable power optical system, optical apparatus, and variable power optical system manufacturing method

A variable magnification optical system includes: a first lens group (g1) having a positive refractive power and arranged closest to an object; a negative lens group (g2) having a negative refractive power and arranged closer to an image than the first lens group; a positive lens group (g4) which has a positive refractive power, which includes at least one lens that is arranged closer to the image than an aperture stop (s), and which is arranged closer to the image than the negative lens group; and a focusing group (g3) arranged between the negative lens group and the positive lens group, wherein when varying magnification, the first lens group moves with respect to an image plane, a distance between the first lens group and the negative lens group is changed, and a distance between the negative lens group and the positive lens group is changed, wherein when focusing, a distance between the focusing group and a lens arranged at a position to face an object-side of the focusing group is changed, and a distance between the focusing group and a lens arranged at a position to face an image-side of the focusing group is changed, and wherein a predetermined conditional expression is satisfied.. . ... Nikon Corporation

Nikon Corporation

. . ... Nikon Corporation

Image sensor, image-capturing apparatus and image-capturing system

To produce both 2d image data and color parallax image data from image data output from a single-plate image sensor, the resolutions of the 2d image data and parallax image data may be both degraded. The image sensor has a primitive lattice that is a group of pixels including (i) at least four types of parallax pixels formed by photoelectric converter elements each of which is associated with one of combinations of two different types of aperture masks and two different types of color filters and (ii) no-parallax pixels configured to guide an incident luminous flux to photoelectric converter elements without limitation. ... Nikon Corporation

Charged particle beam exposure apparatus and device manufacturing method

An electron beam exposure apparatus which exposes a wafer coated with an electron beam resist with an electron beam is equipped with: a stage that can be moved holding the wafer; an electron beam optical system that irradiates the wafer with an electron beam; and, an opening member, placed facing the wafer via a predetermined gap on the wafer side in the optical arrangement direction of the electron beam optical system, and having an opening through which the electron beam from the electron beam optical system passes.. . ... Nikon Corporation

Exposure apparatus

An exposure apparatus that can prevent disadvantages due to a leaked liquid is provided. The exposure apparatus includes a substrate holder that includes a peripheral wall portion and supporting portions located on an inside of the peripheral wall portion and that supports a substrate with the supporting portions by negatively pressurizing a space surrounded by the peripheral wall portion, and a recovery mechanism that includes a collection inlets provided on the inside of the peripheral wall portion and a vacuum system connected to the collection inlets, in which a liquid penetrated from an outer periphery of the substrate is sucked and recovered, in the state with an upper surface of the peripheral wall portion and a back surface of the substrate being spaced at a first distance.. ... Nikon Corporation

Exposure apparatus and exposure method, and device manufacturing method

In corner sections of first to fourth quadrants whose origin point is a center of an upper surface of a stage, three each of two-dimensional heads are provided. The three each of two-dimensional heads include one first head and two second heads. ... Nikon Corporation

System for measuring the position and movement of an object

The disclosure relates to a system for measuring the position of an object in a measurement volume, including: an optical angular measurement device, disposed with static optics, configured for measurement of the an azimuth and elevation angle of the object in the measurement volume with respect to the optical angular measurement device, a range measurement device, disposed with static component, configured for measurement of the range of the object in the measurement volume. It further relates to a use of the system and a measurement method.. ... Nikon Corporation

Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method

An alignment system is equipped with: an alignment system having an objective optical system, an irradiation system and a beam receiving system; and a calculation system, the objective optical system including an objective transparent plate that faces a wafer movable in a y-axis direction, the irradiation system irradiating a grating mark provided at the wafer with measurement beams via the objective transparent plate while scanning the measurement beams in the y-axis direction, the beam receiving system receiving diffraction beams from the grating mark of the measurement beams via the objective optical system, and the calculation system obtaining positional information of the grating mark on the basis of the output of the beam receiving system, wherein the objective transparent plate deflects or diffracts the diffraction beams diffracted at the grating mark toward the beam receiving system.. . ... Nikon Corporation

Variable power optical system, optical apparatus, and variable power optical system manufacturing method

A variable magnification optical system includes: a first lens group having a positive refractive power and arranged closest to an object; a negative lens group having a negative refractive power and arranged closer to an image than the first lens group; and a focusing group arranged between the negative lens group and an aperture stop, wherein when varying magnification, the distance between the first lens group and the negative lens group is changed, and the distance between the negative lens group and the aperture stop is changed, wherein when focusing, the distance between the focusing group and a lens arranged at a position to face an object-side of the focusing group is changed, and the distance between the focusing group and a lens arranged at a position to face an image-side of the focusing group is changed, wherein the focusing group is constituted by one single lens having a positive refractive power, and a predetermined conditional expression is satisfied.. . ... Nikon Corporation

Transparent-block encoder head with isotropic wedged elements

An encoder head configured for use with a lithographic exposure tool. The head is devoid of a multiplicity of stand-alone optical retroreflectors. ... Nikon Corporation

Profile measuring apparatus, structure manufacturing system, method for measuring profile, method for manufacturing structure, and non-transitory computer readable medium

There is provided a profile measuring apparatus, including: an irradiation section configured to irradiate a measurement light to a measurement area of the object; an imaging section configured to obtain an image of the measurement area; a table configured to place the object thereon; a coordinate calculation section configured to calculate a position of the measurement area based on an image detected by a detection section; and a positioning mechanism configured to drive and control a relative position of the imaging section and the table. The positioning mechanism calculates a relative position of the imaging section to the table, based on an information with respect to an edge line direction of a convex portion or an extending direction of a concave portion in the measurement area of the object having a repetitive concave-convex shape, to move at least one of the table and the imaging section.. ... Nikon Corporation

Electronic device, imaging device, image reproduction method, image reproduction program, recording medium with image reproduction program recorded thereupon, and image reproduction device

An electronic device includes: a communication unit that performs communication with an external device; and a control unit that issues a command to the external device via the communication unit, on the basis of at least one of capacity of the external device, and capacity of the electronic device.. . ... Nikon Corporation

05/03/18 / #20180124259

Image display apparatus having image-related information displaying function

A display system has a (1) camera that includes a lens and outputs an image data; (2) a first display that includes a first display screen on which (i) a first image, based on the image data output by the camera, containing a part of a person is displayed and (ii) information indicating a position where the camera has output the image data is displayed; and (3) a second display that includes (i) a receiver which receives the image data transmitted from the camera and (ii) a second display screen that displays a second image based on the image data. The second display can be carried by the person while receiving the image data.. ... Nikon Corporation

05/03/18 / #20180120713

Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method

A reflective mirror is provided with a base and a multilayer film including a first layer and a second layer laminated alternately on the base and capable of reflecting at least a portion of incident light. The multilayer film is provided with a first portion having a first thickness, and with a second portion having a second thickness that is different from the first thickness, and which is provided at a position rotationally symmetric to that of the first portion about an optical axis of the reflective mirror.. ... Nikon Corporation

05/03/18 / #20180120243

Measurement processing device, x-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method

A measurement processing device used for an x-ray inspection device includes: a region information acquisition unit that acquires first region information based on x-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.. . ... Nikon Corporation

04/19/18 / #20180109797

Moving image compression device, moving image decoding device, image compression device, image decoding device, imaging device, and non-transitory medium storage program

A moving image compression device has an obtaining unit, an image conversion unit, and a compression processing unit. The obtaining unit obtains a raw moving image having plural frames associated in an order of imaging, the frames having pixels of three different color components which are disposed periodically according to a color array with two rows and two columns. ... Nikon Corporation

04/19/18 / #20180109768

Image sensor, photographing method, and image-capturing device

An image sensor includes: a plurality of microlenses arranged in a two-dimensional pattern; and a plurality of pixels that are provided in correspondence to each of the microlenses and receive lights of different color components, respectively. Pixels that are provided at adjacent microlenses among the microlenses and that receive lights of same color components, are adjacently arranged.. ... Nikon Corporation

04/19/18 / #20180108539

Method for manufacturing wiring pattern, method for manufacturing transistor, and member for transfer

An object is to provide a novel method in place of the above-described conventional technology, as a technique for obtaining a thin film with a wiring pattern applied. A method for manufacturing a wiring pattern according to the present invention is characterized in that the method includes: a laminate forming step of forming a laminate by bringing a first member that has a resist layer and a metal layer formed on the resist layer into contact with a second member that includes a substrate; a resist layer patterning step of subjecting the resist layer to patterning; and an etching step of selectively removing the metal layer.. ... Nikon Corporation

04/19/18 / #20180107121

Microelectromechanical mirror assembly

An optical element assembly includes a base, and an element unit. The element unit includes (i) an optical element having an element central axis and an element perimeter; and (ii) an element connector assembly that couples the optical element to the base, the element connector assembly including a flexure assembly having an element flexure and a base flexure. ... Nikon Corporation

04/12/18 / #20180102324

Mark forming method and device manufacturing method

A mark forming method includes: a step of forming, on a device layer of a wafer, an intermediate layer to which a polymer layer containing a block copolymer is adherable, the device layer including a shot area and a scribe line area; a step of removing a portion, of the intermediate layer, formed in the scribe line area; a step of exposing an image of a mark on the scribe line area and forming, based on the image of the mark, a mark including recessed portion; and a step of applying the polymer layer containing the block copolymer on the device layer of the wafer. When a circuit pattern is formed by using the self-assembly of the block copolymer, it is possible to form the mark simultaneously with the formation of the circuit pattern.. ... Nikon Corporation

04/12/18 / #20180101104

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

In an exposure operation of a substrate, a controller controls first and second drive systems based on correction information for compensating for a measurement error of an encoder system and measurement information of first and second measurement devices, so that scanning exposure is performed and a measurement error is compensated for. In the scanning exposure, a mask and the substrate are each moved relative to illumination light with a first direction serving as a scanning direction, the measurement error occurring due to a difference between a position of a reference plane and a position of a grating surface of a grating section in a third direction orthogonal to a predetermined plane that includes the first direction, and the reference plane being a reference plane for position control or positioning of a second stage or a reference plane with which the substrate coincides in the exposure operation.. ... Nikon Corporation

04/12/18 / #20180101037

Thin-film alignment layer provided with integrally-formed spacing structures and forming an intermediate layer for an optical article comprising liquid crystals

A thin film forming an intermediate layer for an optical article including liquid crystals, the thin film including a main body limited by a first main surface and by a second main surface opposed to the first main surface, the first and second main surfaces both including a first zone exhibiting alignment properties for aligning liquid crystals along a predetermined alignment direction and a second zone forming spacing structures extending in projection from the first zone.. . ... Nikon Corporation

04/12/18 / #20180100793

Microparticle detection system and microparticle detection program

A microparticle detection system includes a stage unit including a mounting surface on which a fluid device having a flow path through which a sample containing microparticles is movable is capable of being mounted, an emission unit configured to emit illumination light to the flow path, an imaging unit configured to image scattered light generated from microparticles in the sample when illumination light is emitted, an identification unit configured to identify the microparticles included in the image for each of the microparticles on the basis of the image captured by the imaging unit, a particle size determination unit configured to determine a particle size of the microparticle for each of the microparticles identified by the identification unit, a zeta potential determination unit configured to determine a zeta potential of the microparticle for each of the microparticles identified by the identification unit, and a correlation unit configured to associate the particle size for each of the microparticles determined by the particle size determination unit with the zeta potential for each of the microparticles determined by the zeta potential determination unit for each of the microparticles.. . ... Nikon Corporation

04/05/18 / #20180098016

Imaging sensor and imaging device with column adc

An imaging sensor comprising: an imaging chip in which a plurality of pixel are arranged in a matrix; and a signal processing chip that is each provided for one or more pixel columns or one or more pixel rows, has a device that performs signal processing on a pixel signal output from a pixel, and is stacked with the imaging chip is provided. For example, the device that performs signal processing is an a/d converter that converts a pixel signal output from the pixel into a digital signal, and when a pixel signal output from the pixel is converted into a digital signal, at least two or more a/d converters among the a/d converters are controlled in parallel.. ... Nikon Corporation

04/05/18 / #20180097988

Electronic device and computer program product

An electronic device includes: an image-capturing unit that captures an image of a subject with an image sensor, the image sensor being configured to be able to set image-capturing conditions for a plurality of regions on an image-capturing surface; and a control unit that determines the image-capturing conditions varied for each of the regions, based on a subject element detected from the image captured by the image-capturing unit.. . ... Nikon Corporation

04/05/18 / #20180095275

Image-capturing device, multi-lens camera, and method for manufacturing image-capturing device

An image-capturing device includes: a micro-lens array in which a plurality of micro-lenses are arranged in a two dimensional configuration; an image sensor that comprises a plurality of pixel groups each comprising a plurality of pixels, and that receives light with each of the pixel groups that has passed through a respective micro-lens of the micro-lens array; and a drive unit that changes a positional relationship of the image sensor and the micro-lens array to prevent blurring of an image captured by the pixel groups.. . ... Nikon Corporation

03/29/18 / #20180091762

Electronic apparatus, reproduction device, reproduction method, recording medium, and recording method

An electronic apparatus includes: an input unit that inputs data for imaging conditions for each of a plurality of imaging regions included in an image capturing unit, different imaging conditions being set for each of the imaging regions; and a recording control unit that correlates the data for imaging conditions inputted from the input unit with the imaging regions and records correlated data in a recording unit.. . ... Nikon Corporation

03/29/18 / #20180089809

Image deblurring with a multiple section, regularization term

A method for estimating a latent sharp image (15) for a blurry image (14) includes estimating the latent sharp image (15) with a control system (20) that utilizes a latent sharp image estimation cost function having a regularization term (538) that has a linear first section (540) and a linear second section (542) to characterize the pixels (14a) and adjust the pixels (14a) to create the latent sharp image (15) with the adjusted pixels (15a). The first section (540) has a first slope and the second section (542) has a second slope that is different from the first slope. ... Nikon Corporation

03/29/18 / #20180088474

Layout method, mark detection method, exposure method, measurement device, exposure apparatus, and device manufacturing method

On a substrate conforming to a layout method for a plurality of marks for detection using a plurality of mark detection systems of which the detection centers are arranged at a predetermined spacing along an x-axis direction, a plurality of shot areas are formed in both an x-axis direction and a y-axis direction orthogonal thereto in an xy plane, and sets including at least two marks separated in the x-axis direction are repeatedly arranged along the x-axis direction at spacing of a length in the x-axis-direction of each shot area, and the marks belonging to each set are separated from each other in the x-axis direction by a spacing determined based arrangement in the x-axis direction of the plurality of mark detection systems and the length. It is thereby possible to reliably detect a plurality of marks on a substrate-using a plurality of mark detection systems.. ... Nikon Corporation

03/29/18 / #20180088473

Exposure apparatus, exposure method, and device manufacturing method

An exposure apparatus is equipped with a fine movement stage that can hold a liquid with a projection optical system when the stage is at a position facing an outgoing surface of the projection optical system, and a blade that comes into proximity within a predetermined distance of the fine movement stage when the fine movement stage is holding the liquid with the projection optical system, and moves along with the fine movement stage while maintaining the proximity state, and then holds the liquid with the projection optical system after the movement. Accordingly, a plurality of stages will not have to be placed right under the projection optical system interchangeably, which can suppress an increase in footprint of the exposure apparatus.. ... Nikon Corporation

03/29/18 / #20180088472

Exposure system

An exposure system is equipped with: a first row of chambers that are arranged to be adjacent to a c/d provided on a floor surface f on a +x side; a second row of chambers arranged on the −y side facing the first row of chambers; and a first control rack adjacent to the to the second row of chambers on a −x side and is arranged on the −y side facing the c/d. Inside at least a part of the plurality of chambers, exposure chambers where exposure is performed are formed and the first control rack distributes utilities supplied from the below the floor surface to the first and the second rows of chambers.. ... Nikon Corporation

03/29/18 / #20180088441

Lens barrel with shake detection function

A lens barrel with a shake detecting function includes: a lens tube that supports an imaging optical system; a first shake detection sensor that detects a shake along a first detection axis; a second shake detection sensor that detects a shake along a second detection axis; and a flexible printed circuit substrate via which the first shake detection sensor and the second shake detection sensor are attached to the lens tube such that each of the first detection axis and the second detection axis is substantially orthogonal to an optical axis of the imaging optical system and the first detection axis and the second detection axis are substantially orthogonal to each other.. . ... Nikon Corporation

03/29/18 / #20180088381

Liquid-chystal achromatic phase modulator

An achromatic phase modulator (100) adapted to modulate the phase of an incident beam of light (incident light) and to output the thus modulated light, the phase modulator (100) comprising a plurality of liquid crystal elements disposed in series on a light path of the incident light and a control unit (15) comprising a plurality of power sources (14) for applying drive electric signals to the liquid crystal elements, wherein the plurality of liquid crystal elements comprises at least a first and a second liquid crystal element groups (first liquid crystal element group; second liquid crystal element group), each group being composed of a pair of liquid crystal elements, the liquid crystal elements of the first and second group respectively being made of a first and a second liquid crystal material having a first and a second, different, refractive index wavelength dependence characteristic, the thicknesses (d1/2, d2/2) of the liquid crystal elements forming each group being equal.. . ... Nikon Corporation

03/22/18 / #20180081283

Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method

An exposure method and apparatus expose a substrate with illumination light via a projection optical system and a liquid of a liquid immersion area formed under the projection optical system. A second stage on which the substrate is held and a third stage are relatively moved, based on outer periphery positional information of the second stage, in order to cause the second stage to come close, from one side in a first direction, to the third stage that faces the projection optical system. ... Nikon Corporation

03/22/18 / #20180081158

Microscope objective lens

Provided is a microscope objective lens that sufficiently corrects on-axis and off-axis chromatic aberrations and that has a long working distance. A microscope objective lens ol includes, in order from an object side, a first lens group g1 with positive refractive power and a second lens group g2 with negative refractive power. ... Nikon Corporation

03/22/18 / #20180081148

Interchangeable lens, camera body, and camera

An interchangeable lens attachable to a camera body, the interchangeable lens including: a focusing optical system configured to vary a focal position of the interchangeable lens; and a transmitter configured to transmit a first value and a second value to the camera body, the first value indicating a relationship between an amount of movement of the focusing optical system and an amount of movement of an image plane at a position to which the focusing optical system has moved, the second value indicating a relationship between an amount of movement of the focusing optical system and an amount of movement of the image plane, the second value being equal to or smaller than the first value.. . ... Nikon Corporation

03/22/18 / #20180080076

Nucleic acid detection method, detection probe, detection probe set, and nucleic acid quantification method

A method for detecting a target nucleic acid, comprising: (a) contacting a nucleic acid sample comprising a target nucleic acid, comprising a first portion and a second portion, with: (i) a detection probe, wherein the detection probe is labeled with a labeling substance and comprises a nucleic acid sequence that forms a stem-loop structure and having a 5′ protruding end or a 3′ protruding end that is capable of hybridizing to the second portion, and (ii) a capture probe comprising a nucleic acid sequence capable of hybridizing to the first portion, wherein the capture probe is immobilized to a substrate, under conditions to form a target nucleic acid-detection probe-capture probe complex by hybridizing the second portion to the detection probe and hybridizing the first portion to the capture probe; (b) ligating a first end of the detection probe with an end of the target nucleic acid and ligating a second end of the detection probe with an end of the capture probe; and (c) detecting the labeling substance of the nucleic acid-detection probe-capture probe complex formed on the substrate.. . ... Nikon Corporation

03/15/18 / #20180074417

System and method for control of a workpiece and a chuck

An exposure apparatus (10) for transferring one or more features to a workpiece (22) includes an illumination source (44a); (ii) a chuck (40) that retains the workpiece (22); (iii) a chamber housing (28a) that encircles the chuck and the workpiece; and (iv) a temperature controller (32) (34) that adjusts the temperature of at least one of the chuck (40) and the workpiece (22) so that a predetermined temperature differential (309) exists between the chuck (40) and the workpiece (22) before transferring the features to the workpiece (22).. . ... Nikon Corporation

03/15/18 / #20180071987

Apparatus for manufacturing three dimensional shaped object, and method for manufacturing structure

An apparatus for manufacturing a three dimensional shaped object includes: a manufacturing unit that manufactures a three dimensional shaped object in which a plurality of solidified layers are built up together by repeating to manufacture a solidified layer, which is layered, by performing solidification processing upon a material that is positioned in a region set according to a shape of the three dimensional shaped object that is to be manufactured, to supply a new material upon an upper portion of the solidified layer that has been manufactured, to perform the solidification processing upon the new material and thus to manufacture a new solidified layer; and an inspecting unit that inspects the solidified layer that has already been built up, while the plurality of solidified layers are being built up together.. . ... Nikon Corporation

03/08/18 / #20180070027

Image processing device configured to correct an image so as to decrease output data

An image-capturing device includes: a plurality of microlenses arranged in a two-dimensional manner; a plurality of photodetectors arranged to correspond to the plurality of microlenses; an image synthesizing part that synthesizes an image at an optional image plane of a photographic optical system, based on signals from the plurality of photodetectors; and an image processing part that removes signals of other pixels from signals of pixels constituting the image synthesized in the image synthesizing part.. . ... Nikon Corporation

03/08/18 / #20180069991

Digital camera that sends electronic mail with event information

A portable telephone is equipped with a camera and includes an image sensor that is included in the camera and that outputs image data. The portable telephone also includes a processor configured to: (i) associate the image data with position information denoting a position at which the image data is output by the image sensor; (ii) control storage of the image data to a storage medium; (iii) select the image data related to the position information in the storage medium; (iv) acquire information indicating a map based on the position information related to the selected image data; and (v) create textual content to be sent to a destination based on the position information. ... Nikon Corporation

03/08/18 / #20180069968

Image display apparatus having image-related information displaying function

An electronic device includes an image sensor that outputs image data; a display that displays the image data output by the image sensor; an operating unit by which a user of the electronic device selects the image data displayed on the display; and a communication circuit that communicates with other electronic devices that are separate from the electronic device. When the image data is selected by the operating unit and the communication circuit receives an identification information of a first electronic device, which is one of the other electronic devices, the communication circuit transmits an identification information of the electronic device and an information about the image data to the first electronic device.. ... Nikon Corporation

03/08/18 / #20180067406

Exposure apparatus, exposure method, method for manufacturing device

A liquid immersion exposure apparatus in which a substrate is exposed via a projection optical system, includes: a liquid supply flow path; a first flow path which receives a first portion of immersion liquid from the liquid supply flow path; a second flow path which receive a second portion of the immersion liquid from the liquid supply flow path; a supply port via which the first portion of the immersion liquid is supplied; and an adjusting device provided downstream of the liquid supply flow path, which adjusts a quantity of the first portion of the immersion liquid. During the exposure of the substrate, the first portion of the immersion liquid is supplied to form a liquid immersion area covering a portion of an upper surface of the substrate, and the substrate is exposed with an exposure light through the liquid immersion area.. ... Nikon Corporation

03/08/18 / #20180067405

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

A first stage system having a first stage and a first drive system that moves the first stage is configured to hold a mask illuminated with illumination light. A second stage system having a second stage and a second drive system that moves the second stage is configured to hold a substrate. ... Nikon Corporation

03/08/18 / #20180067397

Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method

An exposure apparatus that scans and exposes each of a plurality of areas on a glass substrate, by irradiating the substrate with an illumination light via a projection optical system and relatively driving the substrate with respect to the illumination light, is equipped with: a substrate holder that levitates and supports a first area of the substrate; a substrate carrier that holds the glass substrate levitated and supported by the substrate holder; an x coarse movement stage that drives the substrate holder; an x voice coil motor that drives the substrate carrier; and a controller that controls the x coarse movement stage and the x voice coil motor so that the substrate holder and the substrate carrier are driven, respectively, in scanning exposure. Accordingly, an exposure apparatus with improved position controllability of an object can be provided.. ... Nikon Corporation

03/08/18 / #20180067339

Spectacle lens

Provided is a spectacle lens (1) comprising one multilayer film (3a, 3b) on each surface of a plastic lens base material (2), wherein by setting an average reflection rate in at least the 530-570 nm wavelength range to 2.5-5.5% in at least one of the multilayer films (3a, 3b) disposed on a surface of the plastic lens base material, it is possible to attain, in dim environments, an improvement in vividness and brightness in visibility of objects, particularly those that are red in color, as well as an improvement in visibility of the white in white computer screens and the like, and the lens is thereby suitable for the eyes of elderly people.. . ... Nikon Corporation

03/08/18 / #20180067302

Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method

One embodiment relates to a spatial light modulator unit comprising: a spatial light modulator with a plurality of optical elements; a spatial light modulation element applying spatial light modulation to the incident light and making rays of intensity levels according to positions of the respective optical elements; and a control unit.. . ... Nikon Corporation

03/08/18 / #20180065816

Object carrier device, exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, object carrying method, and exposure method

A carrying method of carrying a substrate with a substrate holder, including: holding a part of the substrate located above the substrate holder using holding pads; controlling and driving downward the holding pads holding the substrate so that the substrate is supported on the support surface of the substrate holder, when releasing the hold of an other part of the substrate by a substrate carry-in hand that holds the other part of the substrate located above the substrate holder. Accordingly, the substrate carriage to the substrate holder can be swiftly performed.. ... Nikon Corporation

03/01/18 / #20180063410

Imaging device

An imaging device includes: a first image sensor comprising first pixels that receive incident light, and that include a first and second photoelectric conversion units that are arranged in a first direction; and a second image sensor including second pixels that receive light that has passed through the first image sensor, and that include a third and fourth photoelectric conversion units that are arranged in a second direction that is different from the first direction.. . ... Nikon Corporation

03/01/18 / #20180063408

Exchangeable lens having a settable aperture and camera body that captures an image by an optical system which has a settable aperture

A lens barrel including: an optical system which includes a focus adjustment optical system; an aperture which limits the light beam which pass through the optical system to predetermined range at the time of detection of the focus state of the optical system; a drive which drives the focus adjustment optical system; a memory which stores a first predetermined value which is a aperture value within the predetermined range; and a transmitter which sends the first predetermined value to the camera body.. . ... Nikon Corporation

03/01/18 / #20180061627

Encoder head with birefringent elements for forming imperfect retroreflection and exposure system utilizing the same

An encoder head configured for use with a lithographic exposure tool. The head is devoid of the multiplicity of optical corner-cubes and includes, instead, a single, geometrically substantially perfect cuboid of optically-isotropic material complemented, in operation, with prismatic elements made of optically anisotropic material to form a contraption that, as a unit, splits a single beam of light delivered to the contraption into four measurement (sub-)beams of light (two in xz-plane, two in yz-plane) and causes each of these sub-beams to interact with the wafer-stage diffraction grating at the same location upon the second pass by the grating as upon the first pass by the grating, thereby solving problems of (i) structural complexity of a conventional encoder head for use in an exposure tool, (ii) burdensome alignment of the multitude of optical prisms in the process of forming such encoder head, and (iii) cyclic non-linear errors associated with measurements involving conventional corner-cubes-based encoder heads while, at the same time, reducing the geometrical footprint of the encoder head.. ... Nikon Corporation

03/01/18 / #20180061035

Electronic camera, image-processing device, and image-processing program

There are provided an imaging section imaging a subject and generating a plurality of images; an evaluating section performing evaluation on the plurality of images generated by the imaging section; a selecting section selecting, based on an evaluation result of the evaluating section, a part of images from among the plurality of images generated by the imaging section; a recognizing section performing scene recognition on a plurality of images selected by the selecting section; and a determining section determining, based on a recognition result of the recognizing section, reproduction order of the plurality of images subjected to the scene recognition.. . ... Nikon Corporation

03/01/18 / #20180059554

Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method

An exposure apparatus exposes a substrate with illumination light via an optical system. A detection system supported in a measurement station detects a mark of the substrate. ... Nikon Corporation

03/01/18 / #20180059549

Exposure apparatus and device fabrication method

An exposure apparatus includes a stage apparatus having an upper surface in which a recess that holds a substrate is formed. A liquid immersion system has a supply port via which a liquid is supplied and a collection port via which the liquid is collected forms a liquid immersion region. ... Nikon Corporation

02/22/18 / #20180054577

Imaging unit, imaging apparatus, and computer-readable medium having stored thereon a control program

Provided is an imaging unit including an imaging section that includes a pixel capable of performing charge accumulation a plurality of times in response to an imaging instruction for generating one frame of image data; a storage section that stores a pixel signal based on output from the pixel; an updating section that updates the pixel signal already stored in the storage section by performing an integration process to integrate the pixel signal output from the pixel as a result of a new charge accumulation and the pixel signal already stored in the storage section; and a control section that controls whether the updating section performs the update, for each of a plurality of pixel groups that each include one or more pixels.. . ... Nikon Corporation

02/22/18 / #20180052399

Exposure apparatus, exposing method, method for manufacturing device, program, and recording medium

An exposure apparatus includes a liquid immersion member including a first member and a second member and configured to form a liquid immersion space of the liquid, a driving apparatus configured to move the second member with respect to the first member; and a controller configured to control the driving apparatus. The controller controls the driving apparatus so that a first operation of the second member in a first movement period of the substrate between exposure termination of a first shot region and exposure start of a second shot region is different from a second operation of the second member in a second movement period of the substrate between exposure termination of a third shot region and exposure start of a fourth shot region, the first and second shot regions being included in the same row, the third and fourth shot regions being arranged in different rows.. ... Nikon Corporation

02/22/18 / #20180052398

Projection optical system, exposure apparatus, and exposure method

An immersion projection optical system having, for example, a catadioptric and off-axis structure, reduces the portion of an image space filled with liquid (immersion 5 liquid), the projection optical system, which projects a reduced image of a first plane onto a second plane through the liquid, includes a refractive optical element (lp) arranged nearest to the second plane. The refractive optical element includes a light emitting surface (lpb) shaped to be substantially symmetric with respect to two axial directions (xy axes) perpendicular to each other on the second plane. ... Nikon Corporation

02/22/18 / #20180052397

Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium

A liquid immersion member is used in a liquid immersion exposure apparatus which exposes a substrate by exposure light via a first liquid between an emitting surface of an optical member and the substrate, and is capable of forming a liquid immersion space on an object movable below the optical member. The liquid immersion member includes a first member that is disposed at at least a portion of surrounding of the optical member; a second member that is capable of being opposite to the object and is movable outside an optical path of the exposure light; and a protection part that protects the optical member. ... Nikon Corporation

02/22/18 / #20180052311

Variable power optical system, optical apparatus, and variable power optical system manufacturing method

A variable magnification optical system includes: a first lens group having a positive refractive power and arranged closest to an object; a negative lens group having a negative refractive power and arranged closer to an image than the first lens group; a positive lens group which has a positive refractive power, which includes at least one lens that moves integrally with an aperture stop, and which is arranged closer to the image than the negative lens group; and a focusing group arranged between the negative lens group and the positive lens group, wherein when varying magnification, the first lens group moves with respect to an image plane, the distance between the first lens group and the negative lens group is changed, and the distance between the negative lens group and the positive lens group is changed, wherein when focusing, the distance between the focusing group and a lens arranged at a position to face an object-side of the focusing group is changed, and the distance between the focusing group and a lens arranged at a position to face an image-side of the focusing group is changed, wherein the focusing group is constituted by a single lens component, wherein the positive lens group is constituted by a front group having a positive refractive power and a rear group having a negative refractive power, and the distance between the front group and the rear group is the largest air distance among air distances in the positive lens group, and wherein the rear group is constituted by two lens components.. . ... Nikon Corporation

02/15/18 / #an imaging lens (pl) has an image surface (i) curved to have a concave surface facing an object and consists of, in order from the object along an optical axis (ax): a front group (ga) including four lenses (l1 to l4); and a back group (gb) including a single lens (l5). the following conditional expression is satisfied.

Nikon Corporation

. . ... Nikon Corporation

02/15/18 / #20180048842

Image pickup element and image pickup device

An imaging element includes: an imaging unit in which a plurality of pixel groups including a plurality of pixels that output pixel signals according to incident light are formed, and on which incident light corresponding to mutually different pieces of image information is incident; a control unit that controls, for each of the pixel groups, a period of accumulating in the plurality of pixels included in the pixel group; and a readout unit that is provided to each of the pixel groups, and reads out the pixel signals from the plurality of pixels included in the pixel group.. . ... Nikon Corporation

02/15/18 / #20180048837

Image-capturing device and image sensor

An image-capturing device includes an image sensor. The image sensor includes an upper layer pixel group and a lower layer pixel group that receives the light fluxes from the subject that have passed through each pixel in the upper layer pixel group. ... Nikon Corporation

02/15/18 / #20180046096

Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method

A measurement device has: a slider which holds a substrate and is movable parallel to the xy plane; a drive system that drives the slider; a position measurement system which emits beams from a head section to a measurement surface in which grating section are provided on the slider, which receives respective return beams of the beams from the measurement surface, and which is capable of measuring position information in at least directions of three degrees of freedom including the absolute position coordinates of the slider; a mark detection system that detects a mark on the substrate; and a controller which detects the marks on the substrate using the mark detection system while controlling the drive of the slider, and which obtains the absolute position coordinates of each mark based on the detection result of each mark and measurement information by the position measurement system at the time of detection.. . ... Nikon Corporation

02/15/18 / #20180046093

Exposure apparatus, movable body apparatus, and device manufacturing method

A movable body apparatus includes a base member, a movable body that is movable at least two-dimensionally, parallel to a predetermined plane, on the base member, a planar motor of a magnetic levitation method having a stator provided at the base member and a mover provided at the movable body, a measurement system that measures a position of the movable body in a direction parallel to the predetermined plane, and a controller. The controller limits movement of the movable body in the direction parallel to the predetermined plane by applying, to the movable body, a driving force generated by the planar motor, directed from the movable body to the base member in a direction intersecting the predetermined plane.. ... Nikon Corporation

02/15/18 / #20180046092

Linear motor, stage apparatus, and exposure apparatus

A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage (142a) of a liquid for regulating temperature, and is provided with a coil unit (141) having at least a part thereof in contact with the liquid. ... Nikon Corporation

02/15/18 / #20180046066

Interchangeable lens, camera body, and electronic device

An interchangeable lens to be detachably attached to a camera body, that includes a holding unit at which a plurality of contacts is arranged, the interchangeable lens includes: a first communication contact system arranged at the holding unit; and a second communication contact system different from the first communication contact system, arranged at the holding unit at a position different from a position at which the first communication contact system is arranged. The fourth contact is arranged at a position closer to the second communication contact system than the first contact, the second contact, and the third contact are, and the seventh contact and the eighth contact are arranged at positions closer to the first communication contact system than the fifth contact and the sixth contact are.. ... Nikon Corporation

02/15/18 / #20180045660

X-ray inspection device, x-ray inspection method, and method of manufacturing structure

The x-ray inspection device includes a radiation source that irradiates x-rays toward a specimen that is rotated; a detector that detects transmitted x-rays irradiated by the radiation source, and passed through the specimen, and output a plurality of detection data for each angle of rotation; and a region extracting unit that extracts a region where the specimen is projected onto the detector, using the plurality of detection data.. . ... Nikon Corporation

02/15/18 / #20180044665

Method of manufacturing protein array or peptide array, method of identifying functional protein or functional peptide, protein array or peptide array, and functional protein or functional peptide identification kit

There is provided a method of manufacturing a protein array or peptide array suitable for an efficient screening of a functional protein or functional peptide. The method of manufacturing a protein array or peptide array includes the steps of: (a) preparing a nucleic acid immobilized on a solid support and a cell-free synthesis system in a reactor, in which a reactor array includes the reactor having a specific aperture shape and a protein capture molecule or a peptide capture molecule provided on at least a portion of wall surface and bottom surface in the reactor; and (c) synthesizing a protein or peptide from the nucleic acid using the cell-free synthesis system and immobilizing the protein or peptide in the reactor.. ... Nikon Corporation

02/08/18 / #20180039827

Image determining device to determine the state of a subject

To determine the state of a subject person with a simple structure, an image determining device includes: an imaging unit that captures an image from a first direction, the image including the subject person; a first detector that detects size information from the image, the size information being about the subject person in the first direction; a second detector that detects position-related information, the position-related information being different from the information detected by the first detector; and a determining unit that determines the state of the subject person, based on a result of the detection performed by the first detector and a result of the detection performed by the second detector.. . ... Nikon Corporation

02/08/18 / #20180039191

Measurement device, lithography system and exposure apparatus, and device manufacturing method

A measurement device is equipped with a surface plate, a slider which holds a substrate and which is movable relative to the surface plate, a drive system that moves the slider, a first position measurement system which measures the slider's first position information relative to the surface plate, a measurement unit having a mark detection system that detects a mark on a substrate, a second position measurement system which measures a relative second position information between the mark detection system and substrate, and a controller which obtains the first position information from the first position measurement system and second position information from the second position measurement system while controlling the slider's movement by the drive system, and obtains position information of a plurality of marks based on detection signals of the mark detection system having detected marks on the substrate, the first position information, and the second position information.. . ... Nikon Corporation

02/08/18 / #20180039190

Substrate processing system and substrate processing method, and device manufacturing method

A lithography system is provided with: a measurement device measuring position information of marks on a substrate held in a first stage; and an exposure apparatus on a second stage, the substrate for which the position information measurement for the marks has been completed, performs alignment measurement to measure position information for part of marks selected from among the marks on the substrate, and performs exposure. The measurement device measures position information of many marks on the substrate to obtain higher-degree components of correction amounts of an arrangement of divided areas, and the exposure apparatus measures position information of a small number of marks on the substrate to obtain lower-degree components of the correction amounts of the arrangement of the divided areas and exposes the plurality of divided areas while controlling the position of the substrate by using the obtained lower-degree components and the higher-degree components obtained by the measurement device.. ... Nikon Corporation

02/08/18 / #20180039189

Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium

A liquid immersion exposure apparatus includes a liquid immersion member which forms a liquid immersion space on an object disposed opposite to an emitting surface of an optical member. The liquid immersion member includes (i) a first member that has a first liquid supply port and a first opening through which the exposure light is projected, (ii) a second member that has a first liquid recovery port facing downwardly and that is movable with respect to the first member, and (iii) a gas supply port arranged radially outward of the first liquid recovery port with respect to a path of the exposure light. ... Nikon Corporation

02/08/18 / #20180039187

Apparatus and method for providing fluid for immersion lithography

A liquid immersion lithography apparatus includes a projection system having a final optical element and a nozzle member having a first opening disposed on a first side of the final optical element and from which an immersion liquid is supplied, a second opening disposed on a second side of the final optical element and from which the immersion liquid is recovered, and a liquid recovery portion disposed to surround a path of an exposure beam and from which the immersion liquid is recovered. A tank is fluidicly connected to the liquid recovery portion of the nozzle member. ... Nikon Corporation

02/08/18 / #20180039186

Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium

A liquid immersion exposure apparatus includes a liquid immersion member which forms a liquid immersion space under an emitting surface of a last optical member. The exposure light is projected to a substrate through liquid in the liquid immersion space to expose the substrate while the substrate is moved in a scanning direction. ... Nikon Corporation

02/08/18 / #20180039185

Exposure apparatus and device manufacturing method

An exposure apparatus exposes a substrate with illumination light via a liquid. A liquid immersion member of the exposure apparatus has a lower surface, a plurality of collection ports, and a plurality of supply ports. ... Nikon Corporation

02/08/18 / #20180038682

Compensation for goos-hanchen error in autofocus systems

Prediction of a distribution of light in an illumination pupil of an illumination system includes identifying component(s) of the illumination system the adjustment of which affects this distribution and simulating the distribution based on a point spread function defined in part by the identified components. The point spread function has functional relationship with configurable setting of the illumination settings.. ... Nikon Corporation

02/01/18 / #a zoom lens comprises a first lens group (g1), a second lens group (g2), a third lens group (g3), a fourth lens group (g4), and a fifth lens group (g5) having positive refractive power. upon zooming, the first lens group (g1), the second lens group (g2), the third lens group (g3), the fourth lens group (g4), and the fifth lens group (g5) are moved along an optical axis to change a distance between the first lens group (g1) and the second lens group (g2), a distance between the second lens group (g2) and the third lens group (g3), a distance between the third lens group (g3) and the fourth lens group (g4), and a distance between the fourth lens group (g4) and the fifth lens group (g5), in such a manner that the following conditional expression is satisfied.

Nikon Corporation

. . ... Nikon Corporation

02/01/18 / #a first lens group (g1) having a positive refractive power, a second lens group (g2) having a negative refractive power, a third lens group (g3) having a positive refractive power, a fourth lens group (g4) having a negative refractive power, and a fifth lens group (g5) having a positive refractive power are arranged in order along an optical axis from an object, and distances between each lens group change when zooming, and the first lens group (g1) is composed of two lenses, and the following expression (1) is satisfied:

Nikon Corporation

. . ... Nikon Corporation

02/01/18 / #20180033582

X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kv and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. ... Nikon Corporation

02/01/18 / #20180033581

X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kv and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. ... Nikon Corporation

02/01/18 / #20180033580

X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kv and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. ... Nikon Corporation

02/01/18 / #20180033579

X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kv and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. ... Nikon Corporation

02/01/18 / #20180031811

Optical system, optical device, and method for adjusting optical system

An optical system includes: a first lens group having a positive refractive power, a second lens group having a negative refractive power, and a third lens group, disposed in this order along an optical axis starting from an object side, wherein: the second lens group is movable along the optical axis to perform focusing from an infinity-distance object to a short-distance object; and the third lens group comprises: a vibration-proofing lens group configured to be movable in a direction having a component perpendicular to the optical axis to perform image surface correction on image blurring; and an adjustment lens group that is disposed closer to an image side than the vibration-proofing lens group is, the adjustment lens group including a negative lens ln and a lens group having a positive refractive power, disposed next to the negative lens ln, and the adjustment lens group being capable of adjusting an air gap between the negative lens ln and the lens group having a positive refractive power.. . ... Nikon Corporation

02/01/18 / #20180031368

Autofocus system and method

New and useful concepts for an autofocus system and method are provided. A basic concept uses fringe projection in an autofocus system and method. ... Nikon Corporation

02/01/18 / #20180031367

Optical assembly, method for producing data in the same, and method for manufacturing structure

An integrated optical assembly is provided, with enhancements that are particularly useful when the integrated optical assembly forms part of a laser radar system. The integrated optical assembly produces a reference beam that is related to the optical characteristics of a scanning reflector, or to changes in position or orientation of the scanning reflector relative to a source. ... Nikon Corporation

01/25/18 / #20180024442

Liquid jet and recovery system for immersion lithography

An immersion lithography apparatus includes a projection system having a last optical element, a plurality of liquid supply openings that surround a path of exposure light that exits an end surface of the last optical element and face downwardly, and a plurality of liquid recovery openings that surround the path of the exposure light, are arranged radially outward of the liquid supply openings, and face downwardly. An upper surface of a substrate is opposite to the liquid supply openings and the liquid recovery openings. ... Nikon Corporation

01/25/18 / #20180024315

Optical system, imaging device having same, and method for manufacturing optical system

An optical system includes, disposed in sequence along an optical axis starting on an object side: a first lens group having a positive refractive power, which remains fixed relative to an image surface upon focusing; and a second lens group having a positive refractive power, which moves along the optical axis upon focusing, wherein: the first lens group includes: a first partial lens group that comprises at least two positive lenses and has a positive refractive power; and a negative lens, the second lens group includes: at least one meniscus lens with a convex surface thereof facing the object side; a second partial lens group that includes at least one negative lens and at least one positive lens, and has a positive refractive power; and a cemented lens that is formed by bonding together a plurality of lenses and has a positive refractive power, wherein: a predetermined conditional expression is satisfied.. . ... Nikon Corporation

01/25/18 / #20180024079

Image reconstruction method for x-ray measuring device, structure manufacturing method, image reconstruction program for x-ray measuring device, and x-ray measuring device

An image reconstruction method, includes: generating differential data indicating a difference between detection data generated by detecting x-ray that passed through a measurement object by irradiating x-rays to the measurement object and estimate data generated by estimating x-rays that are assumed to have been passed through an estimated structure having been generated by estimating a shape of the measurement object; and generating an image using the differential data and the estimated structure.. . ... Nikon Corporation

01/18/18 / #20180020207

Imaging system, imaging device, method of imaging, and storage medium

An imaging system, including: a first body; a first imager that is provided in the first body and images an object; a first information calculator that is provided in the first body and calculates first model information including at least one of shape information and texture information of the object based on an imaging result of the first imager; a pattern setter that sets a reference pattern indicating at least a part of the first model information calculated by the first information calculator; a first projector that projects the reference pattern toward the object; a second body; a second imager that is provided in the second body and images the object onto which the reference pattern is projected; a second information calculator that is provided in the second body and calculates second model information including at least one of shape information and texture information of the object based on an imaging result of the second imager; and a pattern extractor that extracts the reference pattern projected by the first projector from the imaging result of the second imager.. . ... Nikon Corporation

01/18/18 / #20180020200

Image-capturing device

Because conversion from an invisible wavelength band to a visible wavelength band has been performed arbitrarily on a device-by-device basis, the color gamut in the visible color space could not be utilized sufficiently. A first aspect of the present invention provides an image-capturing device including: an image-capturing unit that is photosensitive to light in an invisible band; a generating unit that generates invisible wavelength information defined based on a sensitivity characteristic, which is an output characteristic of the image-capturing unit, to an object light flux wavelength for conversion of image-capturing data generated from an output signal of the image-capturing unit into visible color space image data; and a processing unit that relates the invisible wavelength information to the image-capturing data.. ... Nikon Corporation

01/18/18 / #20180020153

Image sensor and image-capturing apparatus

An image sensor includes: a first light-receiving unit that: receives a modulated optical signal having being reflected on an image-capturing target and including a modulated component with an intensity modulated at a predetermined modulation frequency; and outputs a first electrical signal; a second light-receiving unit that: receives a reference optical signal with an intensity modulated in synchronization with the modulated optical signal; and outputs a second electrical signal; and a detecting unit that: is provided to a substrate stacked on a substrate including the first light-receiving unit; refers to the second electrical signal; and detects, from the first electrical signal, a third electrical signal corresponding to the modulated component.. . ... Nikon Corporation

01/18/18 / #20180020143

Image processing apparatus, imaging apparatus, and machine-readable medium storing a program

Provided is an image processing apparatus including as image acquiring section that acquires a plurality of images obtained by imaging, at different times, a subject irradiated with lights intensity-modulated with a plurality of modulation frequencies or modulation frequency bands; and a demodulating section that demodulates pixel values of the plurality of images with a plurality of demodulation frequencies or demodulation frequency bands based on the plurality of modulation frequencies or modulation frequency bands, for each pixel, thereby generating a plurality of pieces of pixel information indicating subject light amounts from the subject caused by each of the lights intensity-modulated with the plurality of modulation frequencies or modulation frequency bands, for each pixel.. . ... Nikon Corporation

01/18/18 / #20180019640

Drive apparatus and robot device

A drive apparatus includes a motor having a drive part that rotates a first shaft member; a transmission part that transmits rotation of the first shaft member to a second shaft member which is different from the first shaft member; a first detection device provided at the first shaft member to detect information regarding rotation of the drive part; a second detection device provided at the second shaft member to detect information regarding rotation of the transmission part; and a prevention part that prevents movement of foreign substance toward a detection part which includes at least one of the first detection device and the second detection device.. . ... Nikon Corporation

01/18/18 / #20180019093

X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kv and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. ... Nikon Corporation

01/18/18 / #20180019092

X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kv and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. ... Nikon Corporation

01/18/18 / #20180017774

Microscope device, viewing method, and control program

A microscope apparatus includes an illumination optical system that emits activating light and exciting light, an image capturing unit that captures an image formed by an imaging optical system, an image processing unit that carries out image processing using an image capturing result from the image capturing unit, and a controller . The controller provides a plurality of image generation periods and interrupt periods; causes, in the image generation periods, the activated fluorescent material to be irradiated with the exciting light and causes the image capturing unit to capture an image of the fluorescent light from the activated fluorescent material in a plurality of frame periods; and sets an intensity of the exciting light in the interrupt periods to be lower than an intensity in the image generation periods or causes the emission of the exciting light to stop in the interrupt periods. ... Nikon Corporation

01/18/18 / #20180017773

Microscope device, observation method, and storage medium

The microscope device includes an imager, an image processor, and a controller. In a first period, the controller causes excitation light to be emitted and causes the imager to image a fluorescent image from an activated fluorescent substance in a plurality of frame periods. ... Nikon Corporation

01/18/18 / #20180017380

Imaging system, imaging device, method of imaging, and storage medium

An imaging system, including: a first body; a first imager that is provided in the first body and images an object; a first information calculator that is provided in the first body and calculates first model information including at least one of shape information and texture information of the object based on an imaging result of the first imager; a pattern setter that sets a reference pattern indicating at least a part of the first model information calculated by the first information calculator; a first projector that projects the reference pattern toward the object; a second body; a second imager that is provided in the second body and images the object onto which the reference pattern is projected; a second information calculator that is provided in the second body and calculates second model information including at least one of shape information and texture information of the object based on an imaging result of the second imager; and a pattern extractor that extracts the reference pattern projected by the first projector from the imaging result of the second imager.. . ... Nikon Corporation

01/18/18 / #20180017379

Imaging system, imaging device, method of imaging, and storage medium

An imaging system, including: a first body; a first detector that is provided in the first body and includes a first imager that images an object; a first information calculator that is provided in the first body and uses a detection result of the first detector to calculate at least one of shape information and texture information of the object; a second body that is arranged at a position separate from the first body and has identification information detected by the first imager; a second detector that is provided in the second body and includes a second imager that images the object; and a position acquirer that acquires position information including a positional relation between the first detector and the second detector based on the identification information detected by the first imager.. . ... Nikon Corporation

01/18/18 / #20180016176

Device for manufacturing sio2-tio2 based glass

A device for manufacturing sio2—tio2 based glass by growing a glass ingot upon a target by a direct method. The device includes the target, comprising a thermal storage portion that accumulates heat by being preheated, and a heat insulating portion that suppresses conduction of heat from the thermal storage portion in a direction opposite to the glass ingot.. ... Nikon Corporation

01/11/18 / #20180011411

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus exposes a substrate by irradiating the substrate with exposure light via a projection optical system and a liquid. The exposure apparatus is provided with a liquid immersion mechanism for supplying the liquid and recovering the liquid. ... Nikon Corporation

01/11/18 / #20180011410

Measuring method, stage apparatus, and exposure apparatus

An exposure apparatus exposes a substrate with an illumination light via a projection optical system. The apparatus has a base member supported via a first isolating member below the projection optical system; a stage arranged on the base member, and having a holder configured to support the substrate; a metrology frame supported via a second isolating member; a drive system to drive the stage on the base member; a plurality of grating portions on the metrology frame and arranged substantially parallel to a predetermined plane orthogonal to an optical axis of the projection optical system above the stage; an encoder system on the stage and configured to obtain position information of the stage; and a controller configured to control the drive system based on the position information obtained by the encoder system.. ... Nikon Corporation

01/04/18 / #a fluidic device includes:

Nikon Corporation

. . ... Nikon Corporation

01/04/18 / #20180007261

Image-capturing device and image processing method

An image-capturing device includes: a photographic optical system; a photoelectric conversion element array made up with a plurality of photoelectric conversion elements arrayed therein; a micro-lens array made up with a plurality of micro-lenses arrayed therein; a data creation unit that creates pixel data at a plurality of pixels on a specific image forming plane by applying filter matrix data to output signals provided from the plurality of photoelectric conversion elements; and an image synthesis unit that synthetically generates an image on the specific image forming plane at a given position assumed along an optical axis of the photographic optical system, based upon the pixel data. The filter matrix data assume a two-dimensional data array pattern conforming to a specific intensity distribution with a distribution center thereof set at an element corresponding to a central position of a projection image of each of the plurality of pixels.. ... Nikon Corporation

01/04/18 / #20180004098

Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method

While a wafer stage moves linearly in a y-axis direction, surface position information of a wafer surface at a plurality of detection points set at a predetermined interval in an x-axis direction is detected by a multipoint af system, and by a plurality of alignment systems arranged in a line along the x-axis direction, marks at different positions on the wafer are each detected, and a part of a chipped shot of the wafer is exposed by a periphery edge exposure system. This allows throughput to be improved when compared with the case when detection operation of the marks, detection operation of the surface position information (focus information), and periphery edge exposure operation are performed independently.. ... Nikon Corporation

01/04/18 / #20180004097

Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method

While a wafer stage moves linearly in a y-axis direction, surface position information of a wafer surface at a plurality of detection points set at a predetermined interval in an x-axis direction is detected by a multipoint af system, and by a plurality of alignment systems arranged in a line along the x-axis direction, marks at different positions on the wafer are each detected, and a part of a chipped shot of the wafer is exposed by a periphery edge exposure system. This allows throughput to be improved when compared with the case when detection operation of the marks, detection operation of the surface position information (focus information), and periphery edge exposure operation are performed independently.. ... Nikon Corporation

01/04/18 / #20180004096

Stage apparatus, exposure apparatus, and exposure method

An exposure apparatus has a stage having a substrate holder and a plate member around the substrate holder to surround a substrate on the substrate holder. A liquid supply mechanism includes a supply port above the stage at a more outward position than an optical path of light from a projection system and supplies liquid onto the stage from the supply port. ... Nikon Corporation

01/04/18 / #20180003484

System and method for a displacement measurement

System and method for profiling of a surface with lateral scanning interferometer the optical axis of which is perpendicular to the surface. In-plane scanning of the surface is carried out with increments that correspond to integer number of pixels of an employed optical detector. ... Nikon Corporation

12/28/17 / #20170374735

Substrate, imaging unit and imaging device

A substrate comprises: a first insulating layer; a second insulating layer having an elastic modulus that is different from an elastic modulus of the first insulating layer; and a core layer that is sandwiched by the first insulating layer and the second insulating layer, and is more rigid than the first insulating layer and the second insulating layer.. . ... Nikon Corporation

12/28/17 / #20170371253

Exposure apparatus, exposure method, and method for producing device

An exposure apparatus includes a projection optical system having a last optical element via which an exposure beam is projected to a projection area, and a liquid supply system having a first supply port and a second supply port via which an immersion liquid is supplied to form a liquid immersion area. The first supply port is arranged on one side of the projection area in a scanning direction, and the second supply port is arranged on the other side of the projection area in the scanning direction, the first and second supply ports facing downwardly. ... Nikon Corporation

12/28/17 / #20170371252

Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method

A controller of an exposure apparatus (1) controls a second drive system so that scanning exposure is performed via a projection optical system and liquid of a liquid immersion area, from an area located on one side in a first direction, of a plurality of areas of a substrate held by a second stage that is placed facing the projection optical system and (ii) controls the second drive system so that a third stage comes close to the second stage from the other side in the first direction, and the second and the third stages that have come close together move from the other side to the one side in the first direction in order to place the third stage to face the projection optical system instead of the second stage while substantially maintaining the liquid immersion area under the lens.. . ... Nikon Corporation

12/28/17 / #20170371249

Exposure apparatus and exposure method, and device manufacturing method

A movable body apparatus moves an object and includes a measurement member in a cantilevered supported state; a moving member having a holding section of the object and a space section into which the measurement member can be inserted; a measurement system that measures positional information of the moving member by irradiating a grating member with a measurement beam via a head and receiving light of the measurement beam from the grating member, the head being provided at one of the measurement member and the moving member, and the grating member being provided at the other of the measurement member and the moving member; and a drive system that moves the moving member based on the positional information. The measurement member has a cross-sectional shape in which its fixed end is thicker than its free end.. ... Nikon Corporation

12/28/17 / #20170370922

Fluidic device, system, and method

A fluidic device includes: a circulation flow path; and a capture part arranged on the circulation flow path and configured to capture a sample substance in a solution and/or a detection part arranged on the circulation flow path and configured to detect a sample substance in a solution. A method of capturing a sample substance that is bound to a carrier particle, using a fluidic device which includes a circulation flow path and a capture part arranged on the circulation flow path and configured to capture the carrier particle and in which the circulation flow path has two or more circulation flow path valves, includes: an introduction step of, in a state where the circulation flow path valve is closed, introducing a solution that includes a sample substance to at least one of partitions partitioned by the circulation flow path valve and introducing a solution that includes a carrier particle which is bound to the sample substance to at least another of the partitions; a mix step of opening all of the circulation flow path valves and circulating and mixing a solution in the circulation flow path; and a capture step of capturing the carrier particle by the capture part.. ... Nikon Corporation

12/21/17 / #20170366742

Electronic camera, image display device, and storage medium storing image display program

A display unit having an image display area for displaying an image, an operation unit by which a predetermined area in the image display area is designated in a movable manner, and a filter unit performing filter processing on the image corresponding to the predetermined area designated in the movable manner by the operation unit. Accordingly, it is possible to easily perform an operation of overlapping a plurality of filter effects, and a comparison of images based on the presence/absence of a filter effect, or different filter effects, without performing a complicated filter operation.. ... Nikon Corporation

12/21/17 / #20170366734

Exchangeable lens and camera body

An exchangeable lens includes: a mount unit at which a camera body is detachably engaged; a plurality of drive target members, conditions of which change as a drive force is applied thereto; an initialization unit that executes initialization processing for each of the plurality of drive target members; an initialization status transmission unit that transmits initialization statuses, each indicating a status of the initialization processing executed for one of the drive target members, to the camera body via a first transmission path over predetermined first cycles; and a drive condition transmission unit that transmits a drive condition of at least one drive target member among the plurality of drive target members to the camera body via a second transmission path different from the first transmission path over predetermined second cycles different from the predetermined first cycles.. . ... Nikon Corporation

12/21/17 / #20170365046

Algorithm and device for image processing

Deblurring a blurry image (14) includes the steps of (i) computing a spatial mask (256); (ii) computing a modified blurry image (264) using the blurry image (14) and the spatial mask (256); and (iii) computing a latent sharp image (16) using the modified blurry image (264) and a point spread function (260). Additionally, the image (714) to can be analyzed to identify areas of the image (714) that are suitable for point spread function estimation. ... Nikon Corporation

12/21/17 / #20170363972

Exposure apparatus, method for producing device, and method for controlling exposure apparatus

A liquid immersion exposure apparatus includes a projection system, a liquid supply inlet, a first liquid collection outlet, and a separator fluidically connected to the first liquid collection outlet, the separator separating one of liquid and gas, which have been collected via the first liquid collection outlet, from the other. A stage which holds a substrate has a second liquid collection outlet that collects a portion of the liquid supplied from the liquid supply inlet which comes from a gap between an upper surface of the substrate and an upper surface of the stage.. ... Nikon Corporation

12/21/17 / #20170363971

Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method

A controller of an exposure apparatus is coupled to an alignment system, an aerial image measurement device and an encoder system, to control a drive system based on correction information and measurement information of the encoder system, the correction information compensating a measurement error of the encoder system that occurs due to a plurality of scale members. In an exposure operation of a substrate, a detection operation of a mark of the substrate and a fiducial mark, and a detection operation of an aerial image, the positional information of the stage is measured with the encoder system. ... Nikon Corporation

12/21/17 / #20170363962

Lithography system, simulation apparatus, and pattern forming method

A simulation apparatus has: a first processing part configured to obtain a value of a parameter in a first set relating to the forming of the pattern; a second processing part configured to obtain a value of a parameter in a second set that is at least partially same as the parameter in the first set and relating to the forming of the pattern; and an integration processing part configured to evaluate, based on the value of the parameter in the first set and the value of the parameter in the second set, a state of the pattern formed on the substrate and a forming condition when the pattern is formed, and to determine based on the result of the evaluation whether or not to make at least one of the first processing part and the second processing part recalculate the value of the parameter in the corresponding set.. . ... Nikon Corporation

12/21/17 / #20170363951

Scanner based optical proximity correction system and method of use

A modeling technique is provided. The modeling technique includes inputting tool parameters into a model and inputting basic model parameters into the model. ... Nikon Corporation

12/14/17 / #20170357163

Holding apparatus, exposure apparatus and manufacturing method of device

A holding apparatus includes a holding portion that includes a first member which contacts a portion of an object, a second member which at least a portion thereof is fixed to a base, and a connection member which is configured to connect the first and second members, and a driving unit which drives the holding portion to change at least a posture of the first member, wherein a relative positional relationship between the first member and the second member is changed via the connection member.. . ... Nikon Corporation

12/14/17 / #20170357160

Exposure apparatus, exposure method, and device manufacturing method

An exposure apparatus exposes a substrate with exposure light via a liquid. The exposure apparatus includes an optical system including an emission surface from which the exposure light is emitted; a liquid supply port that supplies the liquid in order to fill an optical path of the exposure light emitted from the emission surface with the liquid; and a fluid supply port that supplies a fluid including a material capable of changing the specific resistance of the liquid to at least a part of a space around a liquid immersion space that is formed by the liquid.. ... Nikon Corporation

12/07/17 / #20170353700

Imaging device

An imaging device includes a plurality of first pixels that includes pixels of a plurality of color components and generates a first signal from incident light, a plurality of second pixels that generates a second signal from light that has transmitted at least a part of the first pixels, and a signal generation unit that generates a signal obtained by combining the first signal and the second signal.. . ... Nikon Corporation

12/07/17 / #20170351188

Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus

A control method of a movable body includes: a step of detecting a part of a plurality of grating marks provided at a wafer placed on a movable body that is movable within an xy plane, while scanning a measurement beam, that is irradiated from a mark detection system, in a y-axis direction with respect to the part of plurality of grating marks, as moving the movable body in the y-axis direction; a step of measuring an irradiation position of the measurement beam on the part of the plurality of grating marks; and a step of relatively moving the measurement beam and the movable body in an x-axis direction on the basis of the measurement result of the irradiation position and also detecting another grating mark while scanning the measurement beam in the y-axis direction.. . ... Nikon Corporation

12/07/17 / #20170351163

Shutter device and image-capturing apparatus

A shutter device includes: a substrate having an opening; a first light-shielding member having a light-shielding region having lengths in first and second directions respectively larger and smaller than those of the opening in the same directions, and partly shields the opening while moving from a first position outside the opening of the substrate to a second position outside the opening, the second position being different from the first position; and a second light-shielding member having a light-shielding region having a length in the first direction smaller than the length of the opening in the first direction and a length in the second direction smaller than the length of the opening in the second direction, and shields the opening between an end in the first direction of the first light-shielding member and the substrate while moving in the second direction.. . ... Nikon Corporation

12/07/17 / #20170351162

Shutter device and image-capturing apparatus

A shutter device includes: a substrate having an opening; a first light-shielding member that moves from a first position outside the opening of the substrate to a second position outside the opening to shield the opening, the second position being different from the first position; a second light-shielding member that partly shields the opening while moving from the first position to the second position; a first moving member that has a protrusion moving along a hole provided in the substrate to move the first light-shielding member; a second moving member that is coupled to the second light-shielding member and moves together with the second light-shielding member; and a third moving member, located outside a movement range of the protrusion during the second light-shielding member being located in the first position, that is coupled to the second light-shielding member and moves together with the second light-shielding member.. . ... Nikon Corporation

12/07/17 / #20170351100

Beam transforming optical system, illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power having different thickness to rotate linear polarization direction

An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, and a polarization member made of optical material with optical rotatory power, which is arranged in the optical path on an incidence side of the optical integrator, and which changes a polarization state of the illumination light. ... Nikon Corporation

12/07/17 / #20170351055

Lens barrel, image capturing device and method of manufacturing the same

A lens barrel includes: a first cylindrical member that extends in a prescribed axial direction; a second cylindrical member that slides in the prescribed axial direction along an inner circumferential surface of the first cylindrical member; an axis member that slides in the prescribed axial direction along an inner circumferential surface of the second cylindrical member; and a first holding member that is fixed to the axis member, is guided in the prescribed axial direction by the slide of the axis member against the second cylindrical member, and holds a first optical member.. . ... Nikon Corporation

12/07/17 / #20170350805

Analysis device, analysis method, analysis program, cell manufacturing method and cells

An analysis device includes an acquisition unit configured to acquire an image of a cell and an identification unit configured to identify elements that are identifiable on the basis of the image of cell acquired by the acquisition unit. Characteristic quantities of the elements identified by the identification unit are calculated, a correlation between the characteristic quantities is calculated on the basis of the calculated characteristic quantities of the elements, and a correlation between the elements is calculated on the basis of the calculated correlation between the characteristic quantities.. ... Nikon Corporation

12/07/17 / #20170350736

Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method

Position information of a movable body within an xy plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a z-axis direction orthogonal to the xy plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.. ... Nikon Corporation

12/07/17 / #20170347882

Fundus image forming device

A fundus imaging system comprises: a reflection mirror that reflects a light beam incident on the reflection mirror after passing through a first focus so as to cause the light beam to pass through a second focus; a two-dimensional scanning unit that is disposed at a position that coincides with a position of the first focus of the reflection mirror and that reflects a light beam incident on the two-dimensional scanning unit so as to perform scanning with the light beam in two-dimensional directions; and a compensating unit that compensates for illuminance ununiformity of a light beam illuminating the retina, the illuminance ununiformity resulting from unevenness of a ratio of an angular change of a light beam emitted from the first focus during scanning of the two-dimensional scanning unit to an angular change of a light beam incident on the second focus resulting from being reflected by the reflection mirror.. . ... Nikon Corporation

12/07/17 / #20170347881

Fundus image forming device

A fundus imaging system comprises: a first reflection mirror that reflects a light beam passing through a first focus of the first reflection mirror to pass through a second focus; a two-dimensional scanning unit that is disposed at a position of the first focus and reflects a light beam incident on the two-dimensional scanning unit so as to scan the retina with the light beam in two-dimensional directions; and a second reflection mirror that reflects a light beam passing through a third focus so as to cause the light beam to pass through a fourth focus, the second reflection mirror being disposed so that a position of the third focus coincides with a position of the second focus, wherein a position of the pupil of the subject is disposed so as to coincide with a position of the fourth focus.. . ... Nikon Corporation

11/30/17 / #20170344358

Electronic apparatus, power supply device, system and apparatus

A power supply device is caused to execute a new program. An electronic apparatus that receives power from a power supply device in a non-contact manner includes: an intra-apparatus circuit that operates with power received via a power transmission path from the power supply device to the electronic apparatus; a program acquiring unit that acquires a program to be executed by the power supply device from outside, and stores the program; and an apparatus-side communicating unit that transmits the program to the power supply device via the power transmission path.. ... Nikon Corporation

11/30/17 / #20170343905

Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method

While a wafer stage linearly moves in a y-axis direction, a multipoint af system detects surface position information of the wafer surface at a plurality of detection points that are set at a predetermined distance in an x-axis direction and also a plurality of alignment systems that are arrayed in a line along the x-axis direction detect each of marks at positions different from one another on the wafer. That is, detection of surface position information of the wafer surface at a plurality of detection points and detection of the marks at positions different from one another on the wafer are finished, only by the wafer stage (wafer) linearly passing through the array of the plurality of detection points of the multipoint af system and the plurality of alignment systems, and therefore, the throughput can be improved.. ... Nikon Corporation

11/30/17 / #20170343902

Illumination device

An object is to provide an illumination apparatus that achieves illumination with a uniform illuminance distribution, while reducing a light quantity loss. An illumination apparatus for illuminating an illumination target surface has: a deflection member configured to form an illuminance distribution with a periodic pattern along a predetermined direction on a predetermined face traversing an optical path; and an optical integrator system having a plurality of wavefront division facets arrayed on the predetermined face and configured to form secondary light sources with use of a beam from the deflection member; the deflection member forms the illuminance distribution with the periodic pattern of an integer times or a unit fraction times an array period of the plurality of wavefront division facets.. ... Nikon Corporation

11/30/17 / #20170343768

Exchangeable lens

An exchangeable lens mountable on a camera body includes: a selection unit configured to select a first state wherein a movement range of a focusing optical system changing the exchangeable lens' focal position is limited and a second state which is different from the first state, and a transmission unit configured to transmit a first and second value which is equal to or smaller than the first value to the camera body in the second state, the first value indicating a relationship between the focusing optical system's moving amount and an image plane's moving amount at a position wherein the focusing optical system has moved, the second value indicating a relationship between the moving amount of the focusing optical system and the moving amount of the image plane, and transmit a value which changes depending on the focusing optical system's position as the second value in the first state.. . ... Nikon Corporation

11/30/17 / #20170343391

Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method

Position information of a movable body within an xy plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a z-axis direction orthogonal to the xy plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.. ... Nikon Corporation

11/23/17 / #20170339333

Focus detection device and image-capturing apparatus

A focus detection device includes: an image sensor that includes a plurality of focus detection pixel rows, each having a plurality of focus detection pixels and each outputting a pair of focus detection signals; a spatial accumulation unit that calculates spatially accumulated values by adding together pairs of focus detection signals output from a first predetermined number of focus detection pixel rows among the plurality of focus detection pixel rows; and a focus detection unit that detects a focusing condition at an optical system based upon the spatially accumulated values.. . ... Nikon Corporation

11/23/17 / #20170336723

Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

Positional information of a movable body in a y-axis direction is measured using an interferometer and an encoder whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. ... Nikon Corporation

11/23/17 / #20170336720

Extreme ultraviolet lithography system that utilizes pattern stitching

An extreme ultraviolet lithography system (10) that creates a pattern (230) having a plurality of densely packed parallel lines (232) on a workpiece (22) includes a patterning element (16); an euv illumination system (12) that directs an extreme ultraviolet beam (13a) at the patterning element (16); a projection optical assembly (18) that directs the extreme ultraviolet beam diffracted off of the patterning element (16) at the workpiece (22); and a pattern blind assembly (26) positioned in a beam path (55) of the extreme ultraviolet beam (13a). The pattern blind assembly (26) shapes the extreme ultraviolet beam (13a) so that an exposure field (28) on the workpiece (22) has a polygonal shape.. ... Nikon Corporation

11/23/17 / #20170336716

Euv lithography system for dense line patterning

Extreme ultra-violet (euv) lithography ruling engine specifically configured to print one-dimensional lines on a target workpiece includes source of euv radiation; a pattern-source defining 1d pattern: an illumination unit (iu) configured to irradiate the pattern-source; and projection optics (po) configured to optically image, with a reduction factor n>1, the 1d pattern on image surface that is optically-conjugate to the 1d pattern. Irradiation of the pattern-source can be on-axis or off-axis. ... Nikon Corporation

11/23/17 / #20170336715

Euv lithography system for dense line patterning

Extreme ultra-violet (euv) lithography ruling engine specifically configured to print one-dimensional lines on a target workpiece includes source of euv radiation; a pattern-source defining 1d pattern; an illumination unit (iu) configured to irradiate the pattern-source; and projection optics (po) configured to optically image, with a reduction factor n>1, the 1d pattern on image surface that is optically-conjugate to the 1d pattern. Irradiation of the pattern-source can be on-axis or off-axis. ... Nikon Corporation

11/16/17 / #20170332016

Electronic apparatus

An electronic apparatus includes: an input unit that inputs image data generated by an image capturing unit that has a plurality of pixel groups, each pixel group including at least one pixel, and that is capable of performing image-capturing under different imaging conditions for each of the pixel groups and data for the imaging conditions for each of the pixel groups; and a recording control unit that generates image data for each of pixel groups having the same imaging conditions based on the image data inputted from the input unit and records the image data generated for each of the pixel groups having the same imaging conditions in a recording unit.. . ... Nikon Corporation

11/16/17 / #20170332008

Capturing apparatus, electronic device, and program

An image-capturing apparatus includes: an image sensor having a first image-capturing region and a second image-capturing region different from the first image-capturing region; and a control unit that displays an image generated by the first image-capturing region and an image generated by the second image-capturing region on a display unit, with a region targeted for setting image-capturing conditions of the image sensor being selectable.. . ... Nikon Corporation

11/16/17 / #20170332006

Focusing device and camera

A focusing device comprises: an image capturing unit that captures a subject image formed via an optical system including a lens for executing focus adjustment and outputs an output signal; an edge detection unit that detects an edge signal among the output signal in correspondence to each color component among a plurality of color components contained in an image based upon the output signal; a calculation unit that calculates edge differential values each of which is a differential value of the edge signal in correspondence to the each color component; and a control unit that controls a moving direction along which the lens is to move based upon a comparison of the edge differential values.. . ... Nikon Corporation

11/16/17 / #20170330037

Imaging device and information acquisition system in which an acquired image and associated information are held on a display

An imaging device includes an imaging portion that images a subject; a positional information acquisition portion that acquires positional information of an imaging position; a control portion which acquires information on the subject based on the positional information, and displays image data of the subject and the information on the subject on a display portion; and a hold control portion that outputs a hold control signal, which holds the image data of the subject and the information on the subject, to the control portion.. . ... Nikon Corporation

11/16/17 / #20170329239

Exposure apparatus and method for producing device

A liquid immersion exposure apparatus exposes a substrate with an exposure beam via a liquid immersion area formed on a portion of a surface of the substrate. The apparatus includes: a projection system; a first nozzle member having an aperture through which the exposure beam is projected, the first nozzle member having a liquid supply inlet and a liquid recovery outlet; a second nozzle member having a gas supply inlet via which a gas is supplied, the gas being supplied via the gas supply inlet to a space surrounding the liquid immersion area during the exposure; and a stage system having a holder by which the substrate is held. ... Nikon Corporation

11/16/17 / #20170329236

Positioning system using surface pattern recognition and interpolation

A stage assembly for positioning a device along a first axis, the stage assembly comprising: a base; a stage that retains the device and moves above the base; a mover assembly that moves the stage along the first axis relative to the base; a first sensor system that monitors the movement of the stage along the first axis, the first sensor system generating a first signal, the first sensor system having a first sensor accuracy; a second sensor system that monitors the movement of the stage along the first axis, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy of the first sensor system, the second sensor generating a second signal; and a control system that controls the mover assembly using at least one of the first sensor and the second signal.. . ... Nikon Corporation








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