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Nikon Corporation patents


      
Recent patent applications related to Nikon Corporation. Nikon Corporation is listed as an Agent/Assignee. Note: Nikon Corporation may have other listings under different names/spellings. We're not affiliated with Nikon Corporation, we're just tracking patents.

ARCHIVE: New 2015 2014 2013 2012 2011 2010 2009 | Company Directory "N" | Nikon Corporation-related inventors


Reflective image-forming optical system, exposure apparatus, and device manufacturing method

Nikon

Reflective image-forming optical system, exposure apparatus, and device manufacturing method

Search recent Press Releases: Nikon Corporation-related press releases
Count Application # Date Nikon Corporation patents (updated weekly) - BOOKMARK this page
12015008378603/26/15 new patent  Substrate bonding apparatus and substrate bonding method
22015008414603/26/15 new patent  Backside illumination image sensor and image-capturing device
32015008498403/26/15 new patent  Electronic device
42015008527003/26/15 new patent  Reflective image-forming optical system, exposure apparatus, and device manufacturing method
52015008537703/26/15 new patent  Optical system, optical manufacturing the optical system
62015008538703/26/15 new patent  Photographing lens, optical manufacturing the photographing lens
72015007575103/19/15Fluid distribution network for large stator motor
82015007693103/19/15Electronic apparatus
92015007752403/19/15Image sensor and imaging device
102015007758803/19/15Image file generation device, camera and image file generation method
112015007759003/19/15Imaging device
122015007773003/19/15Exposure apparatus and device fabrication method
132015007773203/19/15Drive spatial light modulator, generating pattern for exposure, and exposure method and apparatus
142015007785803/19/15Eyepiece optical system and optical apparatus
152015007034903/12/15Information provision device, information provision system, server, information provision method and program
162015007067003/12/15Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror
172015006230703/05/15Image processing apparatus, image-capturing apparatus, and storage medium having image processing program stored thereon
182015006230803/05/15Image processing apparatus, image-capturing apparatus and image processing method
192015006239103/05/15Image sensor, photographing method, and image-capturing device
202015006239303/05/15Imaging device
212015006533003/05/15Optical glass, optical element, optical system, and optical device
222015005304002/26/15Encoder, encoder installation method, torque-limiting mechanism, driving apparatus, and robot apparatus
232015005510702/26/15Microelectromechanical mirror assembly
242015005522102/26/15Zooming optical system, optical manufacturing zooming optical system
252015005582402/26/15Method of detecting a main subject in an image
262015005808202/26/15Server apparatus, specification determination method, and specification determination program
272015004780602/19/15Chamber system and heat-insulating panel
282015004872402/19/15Control controlling rotation of joints of robot
292015004922802/19/15Imaging unit, imaging apparatus and computer-readable medium having stored thereon a control program
302015004931402/19/15Inspection method, inspection apparatus, exposure control method, exposure system, and semiconductor device
312015005110502/19/15Nucleic acid detection method, detection probe, detection probe set, and nucleic acid quantification method
322015004283802/12/15Image processing apparatus
332015004297002/12/15Mirror assembly with heat transfer mechanism
342015004307802/12/15Zoom lens and optical apparatus having the same
352015004308602/12/15Zooming optical system, optical manufacturing zooming optical system
362015003611102/05/15Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
372015003611202/05/15Exposure apparatus, exposure method, and device manufacturing method
382015003611302/05/15Apparatus and providing fluid for immersion lithography
392015003611802/05/15Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method
402015003622502/05/15Zoom lens, optical apparatus, and manufacturing the zoom lens
412015002823501/29/15Valve, microfluidic device, microstructure, valve sheet, manufacturing valve sheet, and manufacturing microfluidic device
422015002947601/29/15Projection optical system, exposure apparatus, and exposure method
432015002948201/29/15Projection optical system, exposure apparatus, and exposure method
442015003156401/29/15Ligand having three finger structure and a detecting a molecule by using thereof
452015002146001/22/15Solid state imaging device and imaging apparatus
462015002269001/22/15Information displaying apparatus
472015002290001/22/15Lens barrel and imaging device
482015001576001/15/15Imaging unit, imaging apparatus, and computer readable medium storing thereon an imaging control program
492015001589601/15/15Methods and devices for reducing errors in goos-hÄnchen corrections of displacement data
502015001802301/15/15Electronic device
512015001897901/15/15Electronic apparatus
522015000931501/08/15Microscope apparatus
532015000937601/08/15Image pickup element and image pickup device
542015000938601/08/15A/d conversion circuit, and solid-state image pickup apparatus
552015001012701/08/15X-ray device, method, manufacturing structure, program, and recording medium on which program is recorded
562015001028501/08/15Imaging device
572015000263401/01/15Image sensor, image-capturing apparatus and image-capturing system
582015000283101/01/15Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
592015000283301/01/15Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
602014037457912/25/14Two-dimensional encoder system and method
612014037567312/25/14Image processing apparatus, image-capturing apparatus, and storage medium having image processing program stored thereon
622014037597612/25/14Movable body drive method and system, pattern formation method and apparatus, exposure driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method
632014037693312/25/14Movable body drive method and system, pattern formation method and apparatus, exposure driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method
642014038025212/25/14Display device and projection device
652014036867312/18/14Digital camera
662014036867912/18/14Electronic device, imaging device, image reproduction method, image reproduction program, recording medium with image reproduction program recorded thereupon, and image reproduction device
672014036871312/18/14Solid state imaging device and imaging apparatus
682014036890512/18/14Telescopic optical system and optical apparatus
692014036235612/11/14Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method
702014036245212/11/14Zooming optical system, optical manufacturing zooming optical system
712014035496712/04/14Environmental system including a transport region for an immersion lithography apparatus
722014035497112/04/14Exposure method, exposure apparatus, and device manufacturing method
732014035512912/04/14Zoom lens, imaging apparatus, and manufacturing zoom lens
742014035590112/04/14Algorithm for minimizing latent sharp image cost function and point spread function cost function with a spatial mask in a regularization term
752014034842311/27/14Image sorting method
762014034053411/20/14Image display apparatus having image-related information displaying function
772014034066711/20/14Exposure apparatus, exposure method, and device manufacturing method
782014033390911/13/14Exposure apparatus, exposure method, manufacturing device
792014033391011/13/14Immersion photolithography system and method using microchannel nozzles
802014033401211/13/14Zoom lens, optical apparatus, and manufacturing the zoom lens
812014033401311/13/14Zoom lens system, optical manufacturing zoom lens system
822014033402211/13/14Interchangeable lens, camera body and electronic device
832014032789911/06/14Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method
842014033068411/06/14Electronic device, information processing method and program
852014032083110/30/14Environmental system including vacuum scavenge for an immersion lithography apparatus
862014032083210/30/14Position-measurement systems
872014032083310/30/14Optical arrangement of autofocus elements for use with immersion lithography
882014032083510/30/14Method and device for inspecting spatial light modulator, and exposure
892014031349510/23/14Optical element and projection exposure apparatus based on use of the optical element
902014031350110/23/14Controller for optical device, exposure method and apparatus, and manufacturing device
912014030724510/16/14Illumination optical assembly, exposure apparatus, and device manufacturing method
922014030732610/16/14Eyepiece lens, viewfinder optical system and optical apparatus equipped with the same, and manufacturing eyepiece lens
932014030056210/09/14Electronic device
942014029004110/02/14Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and manufacturing display element
952014029324910/02/14Exposure producing device
962014029325210/02/14Exposure apparatus, and device manufacturing method
972014028338509/25/14X-ray device, x-ray irradiation method, and manufacturing structure
982014026204509/18/14Pressuring module, pressuring apparatus, substrate bonding apparatus, substrate bonding method, and bonded substrate
992014026808909/18/14Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method
1002014026836309/18/14Zoom optical system
1012014025388809/11/14Liquid jet and recovery system for immersion lithography
1022014025388909/11/14Exposure apparatus, exposure method, and producing device
1032014024743609/04/14Exposure apparatus, exposure method, and device manufacturing method
1042014023922808/28/14Caf2 translucent ceramics and manufacturing caf2 translucent ceramics
1052014024053708/28/14Electronic camera, image-processing apparatus, and image-processing program
1062014024068408/28/14Exposure apparatus, exposure method, and producing device
1072014024068508/28/14Exposure apparatus, exposure method, and producing device
1082014023289708/21/14Image-capturing device and image processing method
1092014023289808/21/14Digital camera
1102014023292708/21/14Focus estimating device, imaging device, and storage medium storing image processing program
1112014023299908/21/14Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
1122014023300208/21/14Exposure apparatus, producing device, and controlling exposure apparatus
1132014023300808/21/14Illumination optical system, exposure apparatus, device production method, and light polarization unit
1142014023311708/21/14Lens assembly, lens barrel and image capturing apparatus
1152014023393608/21/14Camera accessory, camera body and camera system
1162014023550808/21/14Nucleic acid linker
1172014022614408/14/14Substrate holding unit, exposure apparatus having same, exposure method, producing device, and liquid repellant plate
1182014022621108/14/14Optical integrator, illumination optical device, aligner, and fabricating device
1192014022716908/14/14Method for manufacturing zinc oxide thin film, and device
1202014022764408/14/14Functional film, liquid immersion member, manufacturing liquid immersion member, exposure apparatus, and device manufacturing method
1212014021830008/07/14Projection device
1222014021854808/07/14Electronic camera comprising means for navigating and printing image data
1232014021856108/07/14Recording medium for data file management, data file management, handling image data, and image capturing system
1242014021858108/07/14Portable information device, imaging apparatus and information acquisition system
1252014021870308/07/14Illumination method, illumination optical device, and exposure device
1262014021870408/07/14High na (numerical aperture) rectangular field euv catoptric projection optics using tilted and decentered zernike polynomial mirror surfaces
1272014021870508/07/14Illumination device
1282014021870708/07/14Exposure method and exposure apparatus, and device manufacturing method
1292014021881408/07/14Driving apparatus, optical apparatus and imaging apparatus
1302014021881508/07/14Vibration actuator and optical apparatus
1312014021962708/07/14Image recording apparatus, dynamic image processing apparatus, dynamic image reproduction apparatus, dynamic image recording apparatus, information recording/reproduction apparatus and methods employed therein, recording medium with computer program stored therein
1322014021117407/31/14Illumination optical assembly, exposure device, and device manufacturing method
1332014021117607/31/14Exposure apparatus and device manufacturing method
1342014021117707/31/14Exposure apparatus and device manufacturing method
1352014021118007/31/14Projection optical system, exposure apparatus, and exposure method
1362014021118207/31/14Projection optical system, exposure apparatus, and exposure method
1372014021118307/31/14Projection optical system, exposure apparatus, and exposure method
1382014021130707/31/14Laser scan confocal microscope
1392014021211407/31/14Image playback device and method and electronic camera with image playback function
1402014021523407/31/14Electronic device and computer readable medium
1412014020237707/24/14Crucible for producing compound crystal, producing compound crystal, and producing compound crystal using crucible
1422014020423107/24/14Focus adjustment device and imaging apparatus
1432014020424607/24/14Image processing device and program
1442014020435907/24/14Exposure method, exposure apparatus, exposure system and device manufacturing method
1452014020813107/24/14Electronic apparatus, power supply device, system and apparatus
1462014019823407/17/14Image processing apparatus, program, image processing method, and imaging apparatus
1472014019242107/10/14Wide-angle lens, imaging apparatus, and manufacturing wide-angle lens
1482014019314507/10/14Camera accessory
1492014018334507/03/14High resolution encoder head
1502014018350607/03/14Method for manufacturing transistor and transistor
1512014018489307/03/14Interchangeable lens
1522014018489607/03/14Accessory, camera, accessory control program, and camera control program
1532014017693106/26/14Intermittent temperature control of movable optical elements
1542014017857006/26/14Powder feeding device, blasting system, and manufacturing electrode material
1552014016839506/19/14Three-dimensional image display device
1562014016874306/19/14Spatial light modulation element and exposure apparatus
1572014016875106/19/14Spatial light modulation elements, manufacturing same, and spatial light modulators and exposure apparatus comprising same
1582014016879306/19/14Lens barrel, image-capturing device, and controlling lens barrel
1592014016058306/12/14Driving mechanism, lens barrel, and camera
1602014015285806/05/14Electronic device
1612014015297206/05/14Orientation independent focus mechanisms for laser radar
1622014015712206/05/14Electronic device
1632014015712306/05/14Method and system for a personal channel on a multimedia device
1642014014630005/29/14Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method
1652014013763005/22/14Electronic device and input method
1662014013208705/15/14Three axis linear actuator
1672014013293905/15/14Cleanup optics in immersion lithography
1682014013294005/15/14Exposure apparatus and exposure method, and device manufacturing method
1692014013384205/15/14Interchangeable lens, camera body, and electronic device
1702014012596105/08/14Movable body apparatus, exposure apparatus and device manufacturing method
1712014011081204/24/14Backside illumination image sensor, manufacturing method thereof and image-capturing device
1722014011178304/24/14Exposure apparatus, exposure method, and producing device
1732014011553604/24/14Display program and display device
1742014010440704/17/14Structured illumination optical system and structured illumination microscope device
1752014010445304/17/14Image capturing apparatus
1762014010471104/17/14Piezoelectric actuator and lens barrel
1772014009826204/10/14Image evaluation apparatus and camera
1782014009899204/10/14Electronic divice, selection method, acquisition method, electronic appratus, synthesis method and synthesis program
1792014009901404/10/14Image processing apparatus, method, and program
1802014009901504/10/14Automated vision inspection of a side curtain airbag assembly
1812014009245904/03/14Scanning microscope
1822014009246304/03/14Structured illumination apparatus, structured illumination microscopy, and structured illumination method
1832014009248604/03/14Lens barrel and optical apparatus
1842014009249004/03/14Lens system, optical device with lens system, and manufacturing lens
1852014009623804/03/14Electronic device, operator estimation method and program
1862014008573203/27/14Zoom lens system, imaging apparatus, and zooming the zoom lens system
1872014007832103/20/14Motion blur estimation and restoration using light trails
1882014007990203/20/14Caf2 polycrystalline body, focus ring, plasma processing apparatus, and producing caf2 polycrystalline body
1892014007141203/13/14Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
1902014007141903/13/14Fly's eye optical mirror with a plurality of optical elements rotationally aligned along two axes
1912014006348103/06/14Compact laser radar corner cube
1922014006349103/06/14Boresight error monitor for laser radar integrated optical assembly
1932014006430703/06/14Laser device
1942014006471803/06/14Accessory, camera, accessory control program, and camera control program
1952014006720403/06/14Electronic apparatus, processing system, and computer readable storage medium
1962014005506002/27/14Linearized control of piezoelectric actuator to reduce hysteresis
1972014005557102/27/14Image processing apparatus, image capturing apparatus, and image processing program
1982014005559402/27/14Structured illuminating microscopy and structured illuminating observation method
1992014005576202/27/14Optical arrangement of autofocus elements for use with immersion lithography
2002014005576302/27/14Exposure apparatus, exposure method, and producing device
2012014005586902/27/14Zoom lens, optical apparatus, and manufacturing zoom lens
2022014004975802/20/14Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
2032014004975902/20/14Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
2042014004976102/20/14Design rules for reducing the sensitivity of fringe projection autofocus to air temperature changes
2052014004976302/20/14Holding apparatus, exposure apparatus and manufacturing device
2062014004976402/20/14Exposure apparatus, exposure method, device manufacturing method, and carrier method
2072014004984902/20/14Lens unit and image capturing apparatus
2082014004359202/13/14Optical element and exposure apparatus
2092014004359302/13/14Exposure apparatus, exposure method, and producing device
2102014004359402/13/14Method of adjusting lighting optical device, lighting optical device, exposure system, and exposure method
2112014003604302/06/14Image processing apparatus and image processing program
2122014003634902/06/14Laser device
2132014003640302/06/14Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus
2142014003694402/06/14Method for adjusting electro-optic modulator in laser device, and laser device
2152014004042802/06/14Method of brokering digital data
2162014002765301/30/14Optical element, optical device, measurement device, and screening apparatus
2172014002898701/30/14Exposure apparatus and device fabrication method
2182014002899001/30/14Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
2192014002237701/23/14Mark detection method, exposure method and exposure apparatus, and device manufacturing method
2202014002241301/23/14Data recording apparatus and camera configured to selectively process data stored in a recording medium
2212014002252301/23/14Exposure apparatus, exposure method, producing device, and optical part
2222014002256001/23/14Detection method and detection apparatus
2232014001613601/16/14Optical coherence tomography observation apparatus, determining relative position of images, and program for determining relative position of images
2242014000966701/09/14Vibration actuator
2252014000967101/09/14Accessory, camera, accessory control method, accessory control program, and camera control program
2262014000975301/09/14Wavefront aberration measuring apparatus
2272014000982601/09/14Non-linear microscopy and non-linear observation method
2282014000235401/02/14Electronic device, image display system, and image selection method
2292014000267801/02/14Image saving apparatus, image transfer apparatus and image transmission apparatus
2302014000281401/02/14Observation device and observation method
2312014000373001/02/14Electronic device and grouping method
2322013034148812/26/13Imaging element and imaging apparatus
2332013034265712/26/13Stereo vision camera for laser radar
2342013034274512/26/13Imaging apparatus
2352013034290712/26/13Lens system, optical apparatus and manufacturing method
2362013034341012/26/13Ultraviolet laser device
2372013034365912/26/13Electronic device, electronic device control method, and computer-readable recording medium having stored thereon electronic device control program
2382013034601612/26/13Information terminal, information providing server, and control program
2392013033571712/19/13Immersion exposure apparatus and device manufacturing method with measuring device
2402013033572312/19/13Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
2412013032902912/12/13Digital camera system
2422013032920012/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
2432013032920112/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
2442013032920812/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
2452013032920912/12/13Mask, exposure apparatus and device manufacturing method
2462013032996412/12/13Image-processing device and image-processing program
2472013033066212/12/13Color time domain integration camera having a single charge coupled device and fringe projection auto-focus system
2482013033270612/12/13Electronic device, electronic device cooperating system, and electronic device controlling method
2492013032021912/05/13Method of inspecting synthetic silicia glass molded body



ARCHIVE: New 2015 2014 2013 2012 2011 2010 2009



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