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Nikon Corporation patents


      
Recent patent applications related to Nikon Corporation. Nikon Corporation is listed as an Agent/Assignee. Note: Nikon Corporation may have other listings under different names/spellings. We're not affiliated with Nikon Corporation, we're just tracking patents.

ARCHIVE: New 2014 2013 2012 2011 2010 2009 | Company Directory "N" | Nikon Corporation-related inventors



Nikon

Liquid jet and recovery system for immersion lithography

Search recent Press Releases: Nikon Corporation-related press releases
Count Application # Date Nikon Corporation patents (updated weekly) - BOOKMARK this page
12014026204509/18/14 new patent  Pressuring module, pressuring apparatus, substrate bonding apparatus, substrate bonding method, and bonded substrate
22014026808909/18/14 new patent  Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method
32014026836309/18/14 new patent  Zoom optical system
42014025388809/11/14Liquid jet and recovery system for immersion lithography
52014025388909/11/14Exposure apparatus, exposure method, and method for producing device
62014024743609/04/14Exposure apparatus, exposure method, and device manufacturing method
72014023922808/28/14Caf2 translucent ceramics and manufacturing method of caf2 translucent ceramics
82014024053708/28/14Electronic camera, image-processing apparatus, and image-processing program
92014024068408/28/14Exposure apparatus, exposure method, and method for producing device
102014024068508/28/14Exposure apparatus, exposure method, and method for producing device
112014023289708/21/14Image-capturing device and image processing method
122014023289808/21/14Digital camera
132014023292708/21/14Focus estimating device, imaging device, and storage medium storing image processing program
142014023299908/21/14Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
152014023300208/21/14Exposure apparatus, method for producing device, and method for controlling exposure apparatus
162014023300808/21/14Illumination optical system, exposure apparatus, device production method, and light polarization unit
172014023311708/21/14Lens assembly, lens barrel and image capturing apparatus
182014023393608/21/14Camera accessory, camera body and camera system
192014023550808/21/14Nucleic acid linker
202014022614408/14/14Substrate holding unit, exposure apparatus having same, exposure method, method for producing device, and liquid repellant plate
212014022621108/14/14Optical integrator, illumination optical device, aligner, and method for fabricating device
222014022716908/14/14Method for manufacturing zinc oxide thin film, and device
232014022764408/14/14Functional film, liquid immersion member, method of manufacturing liquid immersion member, exposure apparatus, and device manufacturing method
242014021830008/07/14Projection device
252014021854808/07/14Electronic camera comprising means for navigating and printing image data
262014021856108/07/14Recording medium for data file management, apparatus for data file management, handling apparatus for image data, and image capturing system
272014021858108/07/14Portable information device, imaging apparatus and information acquisition system
282014021870308/07/14Illumination method, illumination optical device, and exposure device
292014021870408/07/14High na (numerical aperture) rectangular field euv catoptric projection optics using tilted and decentered zernike polynomial mirror surfaces
302014021870508/07/14Illumination device
312014021870708/07/14Exposure method and exposure apparatus, and device manufacturing method
322014021881408/07/14Driving apparatus, optical apparatus and imaging apparatus
332014021881508/07/14Vibration actuator and optical apparatus
342014021962708/07/14Image recording apparatus, dynamic image processing apparatus, dynamic image reproduction apparatus, dynamic image recording apparatus, information recording/reproduction apparatus and methods employed therein, recording medium with computer program stored therein
352014021117407/31/14Illumination optical assembly, exposure device, and device manufacturing method
362014021117607/31/14Exposure apparatus and device manufacturing method
372014021117707/31/14Exposure apparatus and device manufacturing method
382014021118007/31/14Projection optical system, exposure apparatus, and exposure method
392014021118207/31/14Projection optical system, exposure apparatus, and exposure method
402014021118307/31/14Projection optical system, exposure apparatus, and exposure method
412014021130707/31/14Laser scan confocal microscope
422014021211407/31/14Image playback device and method and electronic camera with image playback function
432014021523407/31/14Electronic device and computer readable medium
442014020237707/24/14Crucible for producing compound crystal, apparatus for producing compound crystal, and method for producing compound crystal using crucible
452014020423107/24/14Focus adjustment device and imaging apparatus
462014020424607/24/14Image processing device and program
472014020435907/24/14Exposure method, exposure apparatus, exposure system and device manufacturing method
482014020813107/24/14Electronic apparatus, power supply device, system and apparatus
492014019823407/17/14Image processing apparatus, program, image processing method, and imaging apparatus
502014019242107/10/14Wide-angle lens, imaging apparatus, and method for manufacturing wide-angle lens
512014019314507/10/14Camera accessory
522014018334507/03/14High resolution encoder head
532014018350607/03/14Method for manufacturing transistor and transistor
542014018489307/03/14Interchangeable lens
552014018489607/03/14Accessory, camera, accessory control program, and camera control program
562014017693106/26/14Intermittent temperature control of movable optical elements
572014017857006/26/14Powder feeding device, blasting system, and method for manufacturing electrode material
582014016839506/19/14Three-dimensional image display device
592014016874306/19/14Spatial light modulation element and exposure apparatus
602014016875106/19/14Spatial light modulation elements, method for manufacturing same, and spatial light modulators and exposure apparatus comprising same
612014016879306/19/14Lens barrel, image-capturing device, and method for controlling lens barrel
622014016058306/12/14Driving mechanism, lens barrel, and camera
632014015285806/05/14Electronic device
642014015297206/05/14Orientation independent focus mechanisms for laser radar
652014015712206/05/14Electronic device
662014015712306/05/14Method and system for a personal channel on a multimedia device
672014014630005/29/14Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method
682014013763005/22/14Electronic device and input method
692014013763005/22/14Electronic device and input method
702014013208705/15/14Three axis linear actuator
712014013293905/15/14Cleanup method for optics in immersion lithography
722014013294005/15/14Exposure apparatus and exposure method, and device manufacturing method
732014013384205/15/14Interchangeable lens, camera body, and electronic device
742014013208705/15/14Three axis linear actuator
752014013293905/15/14Cleanup method for optics in immersion lithography
762014013294005/15/14Exposure apparatus and exposure method, and device manufacturing method
772014013384205/15/14Interchangeable lens, camera body, and electronic device
782014012596105/08/14Movable body apparatus, exposure apparatus and device manufacturing method
792014012596105/08/14Movable body apparatus, exposure apparatus and device manufacturing method
802014011081204/24/14Backside illumination image sensor, manufacturing method thereof and image-capturing device
812014011178304/24/14Exposure apparatus, exposure method, and method for producing device
822014011553604/24/14Display program and display device
832014011081204/24/14Backside illumination image sensor, manufacturing method thereof and image-capturing device
842014011178304/24/14Exposure apparatus, exposure method, and method for producing device
852014011553604/24/14Display program and display device
862014010440704/17/14Structured illumination optical system and structured illumination microscope device
872014010445304/17/14Image capturing apparatus
882014010471104/17/14Piezoelectric actuator and lens barrel
892014010440704/17/14Structured illumination optical system and structured illumination microscope device
902014010445304/17/14Image capturing apparatus
912014010471104/17/14Piezoelectric actuator and lens barrel
922014009826204/10/14Image evaluation apparatus and camera
932014009899204/10/14Electronic divice, selection method, acquisition method, electronic appratus, synthesis method and synthesis program
942014009901404/10/14Image processing apparatus, method, and program
952014009901504/10/14Automated vision inspection of a side curtain airbag assembly
962014009826204/10/14Image evaluation apparatus and camera
972014009899204/10/14Electronic divice, selection method, acquisition method, electronic appratus, synthesis method and synthesis program
982014009901404/10/14Image processing apparatus, method, and program
992014009901504/10/14Automated vision inspection of a side curtain airbag assembly
1002014009826204/10/14Image evaluation apparatus and camera
1012014009899204/10/14Electronic divice, selection method, acquisition method, electronic appratus, synthesis method and synthesis program
1022014009901404/10/14Image processing apparatus, method, and program
1032014009901504/10/14Automated vision inspection of a side curtain airbag assembly
1042014009245904/03/14Scanning microscope
1052014009246304/03/14Structured illumination apparatus, structured illumination microscopy, and structured illumination method
1062014009248604/03/14Lens barrel and optical apparatus
1072014009249004/03/14Lens system, optical device with lens system, and method of manufacturing lens
1082014009623804/03/14Electronic device, operator estimation method and program
1092014009245904/03/14Scanning microscope
1102014009246304/03/14Structured illumination apparatus, structured illumination microscopy, and structured illumination method
1112014009248604/03/14Lens barrel and optical apparatus
1122014009249004/03/14Lens system, optical device with lens system, and method of manufacturing lens
1132014009623804/03/14Electronic device, operator estimation method and program
1142014008573203/27/14Zoom lens system, imaging apparatus, and method for zooming the zoom lens system
1152014008573203/27/14Zoom lens system, imaging apparatus, and method for zooming the zoom lens system
1162014007832103/20/14Motion blur estimation and restoration using light trails
1172014007990203/20/14Caf2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing caf2 polycrystalline body
1182014007832103/20/14Motion blur estimation and restoration using light trails
1192014007990203/20/14Caf2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing caf2 polycrystalline body
1202014007141203/13/14Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
1212014007141903/13/14Fly's eye optical mirror with a plurality of optical elements rotationally aligned along two axes
1222014007141203/13/14Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
1232014007141903/13/14Fly's eye optical mirror with a plurality of optical elements rotationally aligned along two axes
1242014006348103/06/14Compact laser radar corner cube
1252014006349103/06/14Boresight error monitor for laser radar integrated optical assembly
1262014006430703/06/14Laser device
1272014006471803/06/14Accessory, camera, accessory control program, and camera control program
1282014006720403/06/14Electronic apparatus, processing system, and computer readable storage medium
1292014006348103/06/14Compact laser radar corner cube
1302014006349103/06/14Boresight error monitor for laser radar integrated optical assembly
1312014006430703/06/14Laser device
1322014006471803/06/14Accessory, camera, accessory control program, and camera control program
1332014006720403/06/14Electronic apparatus, processing system, and computer readable storage medium
1342014005506002/27/14Linearized control of piezoelectric actuator to reduce hysteresis
1352014005557102/27/14Image processing apparatus, image capturing apparatus, and image processing program
1362014005559402/27/14Structured illuminating microscopy and structured illuminating observation method
1372014005576202/27/14Optical arrangement of autofocus elements for use with immersion lithography
1382014005576302/27/14Exposure apparatus, exposure method, and method for producing device
1392014005586902/27/14Zoom lens, optical apparatus, and method for manufacturing zoom lens
1402014004975802/20/14Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
1412014004975902/20/14Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
1422014004976102/20/14Design rules for reducing the sensitivity of fringe projection autofocus to air temperature changes
1432014004976302/20/14Holding apparatus, exposure apparatus and manufacturing method of device
1442014004976402/20/14Exposure apparatus, exposure method, device manufacturing method, and carrier method
1452014004984902/20/14Lens unit and image capturing apparatus
1462014004359202/13/14Optical element and exposure apparatus
1472014004359302/13/14Exposure apparatus, exposure method, and method for producing device
1482014004359402/13/14Method of adjusting lighting optical device, lighting optical device, exposure system, and exposure method
1492014003604302/06/14Image processing apparatus and image processing program
1502014003634902/06/14Laser device
1512014003640302/06/14Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus
1522014003694402/06/14Method for adjusting electro-optic modulator in laser device, and laser device
1532014004042802/06/14Method of brokering digital data
1542014002765301/30/14Optical element, optical device, measurement device, and screening apparatus
1552014002898701/30/14Exposure apparatus and device fabrication method
1562014002899001/30/14Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
1572014002237701/23/14Mark detection method, exposure method and exposure apparatus, and device manufacturing method
1582014002241301/23/14Data recording apparatus and camera configured to selectively process data stored in a recording medium
1592014002252301/23/14Exposure apparatus, exposure method, method for producing device, and optical part
1602014002256001/23/14Detection method and detection apparatus
1612014001613601/16/14Optical coherence tomography observation apparatus, method for determining relative position of images, and program for determining relative position of images
1622014000966701/09/14Vibration actuator
1632014000967101/09/14Accessory, camera, accessory control method, accessory control program, and camera control program
1642014000975301/09/14Wavefront aberration measuring apparatus
1652014000982601/09/14Non-linear microscopy and non-linear observation method
1662014000235401/02/14Electronic device, image display system, and image selection method
1672014000267801/02/14Image saving apparatus, image transfer apparatus and image transmission apparatus
1682014000281401/02/14Observation device and observation method
1692014000373001/02/14Electronic device and grouping method
1702013034148812/26/13Imaging element and imaging apparatus
1712013034265712/26/13Stereo vision camera for laser radar
1722013034274512/26/13Imaging apparatus
1732013034290712/26/13Lens system, optical apparatus and manufacturing method
1742013034341012/26/13Ultraviolet laser device
1752013034365912/26/13Electronic device, electronic device control method, and computer-readable recording medium having stored thereon electronic device control program
1762013034601612/26/13Information terminal, information providing server, and control program
1772013033571712/19/13Immersion exposure apparatus and device manufacturing method with measuring device
1782013033572312/19/13Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
1792013032902912/12/13Digital camera system
1802013032920012/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
1812013032920112/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
1822013032920812/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
1832013032920912/12/13Mask, exposure apparatus and device manufacturing method
1842013032996412/12/13Image-processing device and image-processing program
1852013033066212/12/13Color time domain integration camera having a single charge coupled device and fringe projection auto-focus system
1862013033270612/12/13Electronic device, electronic device cooperating system, and electronic device controlling method
1872013032902912/12/13Digital camera system
1882013032920012/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
1892013032920112/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
1902013032920812/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
1912013032920912/12/13Mask, exposure apparatus and device manufacturing method
1922013032996412/12/13Image-processing device and image-processing program
1932013033066212/12/13Color time domain integration camera having a single charge coupled device and fringe projection auto-focus system
1942013033270612/12/13Electronic device, electronic device cooperating system, and electronic device controlling method
1952013032021912/05/13Method of inspecting synthetic silicia glass molded body
1962013032162512/05/13Electronic device and information transmission system
1972013032164312/05/13Image display device and object detection device
1982013032165212/05/13Electronic camera that wirelessly transfers data, which includes a power save mode
1992013032178512/05/13Exposure apparatus and device fabricating method
2002013032182312/05/13Form measuring apparatus, structure manufacturing system, scanning apparatus, method for measuring form, method for manufacturing structure, and non-transitory computer readable medium storing program for measuring form
2012013031459011/28/13Camera system, interchangeable lens and method of manufacturing interchangeable lens
2022013031467911/28/13Projection optical system, exposure apparatus, and exposure method
2032013031477611/28/13Imaging optical system, microscope apparatus including the imaging optical system, and stereoscopic microscope apparatus
2042013030799411/21/13Photometric device, imaging device, and camera
2052013030810811/21/13Measuring method, stage apparatus, and exposure apparatus
2062013030810911/21/13Measuring method, stage apparatus, and exposure apparatus
2072013030811311/21/13Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areas
2082013030811411/21/13Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areas
2092013030814011/21/13Method for spatially multiplexing two or more fringe projection signals on a single detector
2102013031117411/21/13Audio control device and imaging device
2112013029841511/14/13Form measuring apparatus, method for measuring form, method for manufacturing structure and non-transitory computer readable medium storing a program for setting measurement area
2122013030101511/14/13Apparatus and method for providing fluid for immersion lithography
2132013030101611/14/13Wafer table having sensor for immersion lithography
2142013030101911/14/13Exposure method and apparatus, maintenance method and device manufacturing method
2152013030102111/14/13Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
2162013030102211/14/13Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
2172013030102711/14/13Exposure method, exposure apparatus, and device manufacturing method
2182013030114311/14/13Lens system and optical apparatus
2192013030202511/14/13Camera accessory, camera body and camera system
2202013029356811/07/13Image processing apparatus and image processing program product
2212013029369811/07/13Microscope system
2222013029374111/07/13Image processing apparatus, image capturing apparatus, and storage medium storing image processing program
2232013029374711/07/13Imaging device, program, memory medium, and noise reduction method
2242013029385511/07/13Exposure apparatus and device manufacturing method
2252013029386011/07/13Exposure apparatus, exposure method, and method for producing device
2262013029390011/07/13Methods and devices for reducing errors in goos-hÄnchen corrections of displacement data
2272013028618210/31/13Focus position maintaining apparatus, and microscope
2282013028636910/31/13Using customized lens pupil optimization to enhance lithographic imaging in a source-mask optimization scheme
2292013029065210/31/13Storage control device
2302013027891210/24/13Spatial light modulator, exposure apparatus, and method for manufacturing device
2312013027121110/17/13Multi-layered semiconductor apparatus
2322013027161410/17/13Image display apparatus having image-related information displaying function
2332013027162710/17/13Camera with red-eye correction function
2342013027173910/17/13Exposure apparatus and device manufacturing method
2352013027180510/17/13Electronic element, variable capacitor, micro switch, method for driving micro switch, and mems type electronic element
2362013026521210/10/13Information display device and wireless remote controller
2372013026555510/10/13Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium
2382013026555610/10/13Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
2392013025541410/03/13Parallel linkage and actuator motor coil designs for tube carrier
2402013025830710/03/13Magnet array configuration for higher efficiency planar motor
2412013025025709/26/13Exposure apparatus, and device manufacturing method
2422013025025809/26/13Exposure method, exposure apparatus, and method for producing device
2432013025025909/26/13Exposure method, exposure apparatus, and method for producing device
2442013025026809/26/13Illumination optical apparatus and projection exposure apparatus
2452013025027109/26/13Stage assembly with secure device holder
2462013025042409/26/13Zoom lens, imaging device and method for manufacturing the zoom lens
2472013025149409/26/13Wh (wafer-holder) process
2482013024121109/19/13Power generator, electronic device, and power generating device
2492013024176109/19/13Beam steering for laser radar and other uses


ARCHIVE: New 2014 2013 2012 2011 2010 2009



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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Nikon Corporation in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Nikon Corporation with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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