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Nikon Corporation patents


      
Recent patent applications related to Nikon Corporation. Nikon Corporation is listed as an Agent/Assignee. Note: Nikon Corporation may have other listings under different names/spellings. We're not affiliated with Nikon Corporation, we're just tracking patents.

ARCHIVE: New 2014 2013 2012 2011 2010 2009 | Company Directory "N" | Nikon Corporation-related inventors



Controller for optical device, exposure method and apparatus, and method for manufacturing device

Nikon

Controller for optical device, exposure method and apparatus, and method for manufacturing device

Search recent Press Releases: Nikon Corporation-related press releases
Count Application # Date Nikon Corporation patents (updated weekly) - BOOKMARK this page
12014031349510/23/14 new patent  Optical element and projection exposure apparatus based on use of the optical element
22014031350110/23/14 new patent  Controller for optical device, exposure method and apparatus, and method for manufacturing device
32014030724510/16/14Illumination optical assembly, exposure apparatus, and device manufacturing method
42014030732610/16/14Eyepiece lens, viewfinder optical system and optical apparatus equipped with the same, and method for manufacturing eyepiece lens
52014030056210/09/14Electronic device
62014029004110/02/14Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element
72014029324910/02/14Exposure apparatus and method for producing device
82014029325210/02/14Exposure apparatus, and device manufacturing method
92014028338509/25/14X-ray device, x-ray irradiation method, and manufacturing method for structure
102014026204509/18/14Pressuring module, pressuring apparatus, substrate bonding apparatus, substrate bonding method, and bonded substrate
112014026808909/18/14Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method
122014026836309/18/14Zoom optical system
132014025388809/11/14Liquid jet and recovery system for immersion lithography
142014025388909/11/14Exposure apparatus, exposure method, and method for producing device
152014024743609/04/14Exposure apparatus, exposure method, and device manufacturing method
162014023922808/28/14Caf2 translucent ceramics and manufacturing method of caf2 translucent ceramics
172014024053708/28/14Electronic camera, image-processing apparatus, and image-processing program
182014024068408/28/14Exposure apparatus, exposure method, and method for producing device
192014024068508/28/14Exposure apparatus, exposure method, and method for producing device
202014023289708/21/14Image-capturing device and image processing method
212014023289808/21/14Digital camera
222014023292708/21/14Focus estimating device, imaging device, and storage medium storing image processing program
232014023299908/21/14Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
242014023300208/21/14Exposure apparatus, method for producing device, and method for controlling exposure apparatus
252014023300808/21/14Illumination optical system, exposure apparatus, device production method, and light polarization unit
262014023311708/21/14Lens assembly, lens barrel and image capturing apparatus
272014023393608/21/14Camera accessory, camera body and camera system
282014023550808/21/14Nucleic acid linker
292014022614408/14/14Substrate holding unit, exposure apparatus having same, exposure method, method for producing device, and liquid repellant plate
302014022621108/14/14Optical integrator, illumination optical device, aligner, and method for fabricating device
312014022716908/14/14Method for manufacturing zinc oxide thin film, and device
322014022764408/14/14Functional film, liquid immersion member, method of manufacturing liquid immersion member, exposure apparatus, and device manufacturing method
332014021830008/07/14Projection device
342014021854808/07/14Electronic camera comprising means for navigating and printing image data
352014021856108/07/14Recording medium for data file management, apparatus for data file management, handling apparatus for image data, and image capturing system
362014021858108/07/14Portable information device, imaging apparatus and information acquisition system
372014021870308/07/14Illumination method, illumination optical device, and exposure device
382014021870408/07/14High na (numerical aperture) rectangular field euv catoptric projection optics using tilted and decentered zernike polynomial mirror surfaces
392014021870508/07/14Illumination device
402014021870708/07/14Exposure method and exposure apparatus, and device manufacturing method
412014021881408/07/14Driving apparatus, optical apparatus and imaging apparatus
422014021881508/07/14Vibration actuator and optical apparatus
432014021962708/07/14Image recording apparatus, dynamic image processing apparatus, dynamic image reproduction apparatus, dynamic image recording apparatus, information recording/reproduction apparatus and methods employed therein, recording medium with computer program stored therein
442014021117407/31/14Illumination optical assembly, exposure device, and device manufacturing method
452014021117607/31/14Exposure apparatus and device manufacturing method
462014021117707/31/14Exposure apparatus and device manufacturing method
472014021118007/31/14Projection optical system, exposure apparatus, and exposure method
482014021118207/31/14Projection optical system, exposure apparatus, and exposure method
492014021118307/31/14Projection optical system, exposure apparatus, and exposure method
502014021130707/31/14Laser scan confocal microscope
512014021211407/31/14Image playback device and method and electronic camera with image playback function
522014021523407/31/14Electronic device and computer readable medium
532014020237707/24/14Crucible for producing compound crystal, apparatus for producing compound crystal, and method for producing compound crystal using crucible
542014020423107/24/14Focus adjustment device and imaging apparatus
552014020424607/24/14Image processing device and program
562014020435907/24/14Exposure method, exposure apparatus, exposure system and device manufacturing method
572014020813107/24/14Electronic apparatus, power supply device, system and apparatus
582014019823407/17/14Image processing apparatus, program, image processing method, and imaging apparatus
592014019242107/10/14Wide-angle lens, imaging apparatus, and method for manufacturing wide-angle lens
602014019314507/10/14Camera accessory
612014018334507/03/14High resolution encoder head
622014018350607/03/14Method for manufacturing transistor and transistor
632014018489307/03/14Interchangeable lens
642014018489607/03/14Accessory, camera, accessory control program, and camera control program
652014017693106/26/14Intermittent temperature control of movable optical elements
662014017857006/26/14Powder feeding device, blasting system, and method for manufacturing electrode material
672014016839506/19/14Three-dimensional image display device
682014016874306/19/14Spatial light modulation element and exposure apparatus
692014016875106/19/14Spatial light modulation elements, method for manufacturing same, and spatial light modulators and exposure apparatus comprising same
702014016879306/19/14Lens barrel, image-capturing device, and method for controlling lens barrel
712014016058306/12/14Driving mechanism, lens barrel, and camera
722014015285806/05/14Electronic device
732014015297206/05/14Orientation independent focus mechanisms for laser radar
742014015712206/05/14Electronic device
752014015712306/05/14Method and system for a personal channel on a multimedia device
762014014630005/29/14Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method
772014013763005/22/14Electronic device and input method
782014013763005/22/14Electronic device and input method
792014013208705/15/14Three axis linear actuator
802014013293905/15/14Cleanup method for optics in immersion lithography
812014013294005/15/14Exposure apparatus and exposure method, and device manufacturing method
822014013384205/15/14Interchangeable lens, camera body, and electronic device
832014013208705/15/14Three axis linear actuator
842014013293905/15/14Cleanup method for optics in immersion lithography
852014013294005/15/14Exposure apparatus and exposure method, and device manufacturing method
862014013384205/15/14Interchangeable lens, camera body, and electronic device
872014012596105/08/14Movable body apparatus, exposure apparatus and device manufacturing method
882014012596105/08/14Movable body apparatus, exposure apparatus and device manufacturing method
892014011081204/24/14Backside illumination image sensor, manufacturing method thereof and image-capturing device
902014011178304/24/14Exposure apparatus, exposure method, and method for producing device
912014011553604/24/14Display program and display device
922014011081204/24/14Backside illumination image sensor, manufacturing method thereof and image-capturing device
932014011178304/24/14Exposure apparatus, exposure method, and method for producing device
942014011553604/24/14Display program and display device
952014010440704/17/14Structured illumination optical system and structured illumination microscope device
962014010445304/17/14Image capturing apparatus
972014010471104/17/14Piezoelectric actuator and lens barrel
982014010440704/17/14Structured illumination optical system and structured illumination microscope device
992014010445304/17/14Image capturing apparatus
1002014010471104/17/14Piezoelectric actuator and lens barrel
1012014009826204/10/14Image evaluation apparatus and camera
1022014009899204/10/14Electronic divice, selection method, acquisition method, electronic appratus, synthesis method and synthesis program
1032014009901404/10/14Image processing apparatus, method, and program
1042014009901504/10/14Automated vision inspection of a side curtain airbag assembly
1052014009826204/10/14Image evaluation apparatus and camera
1062014009899204/10/14Electronic divice, selection method, acquisition method, electronic appratus, synthesis method and synthesis program
1072014009901404/10/14Image processing apparatus, method, and program
1082014009901504/10/14Automated vision inspection of a side curtain airbag assembly
1092014009826204/10/14Image evaluation apparatus and camera
1102014009899204/10/14Electronic divice, selection method, acquisition method, electronic appratus, synthesis method and synthesis program
1112014009901404/10/14Image processing apparatus, method, and program
1122014009901504/10/14Automated vision inspection of a side curtain airbag assembly
1132014009245904/03/14Scanning microscope
1142014009246304/03/14Structured illumination apparatus, structured illumination microscopy, and structured illumination method
1152014009248604/03/14Lens barrel and optical apparatus
1162014009249004/03/14Lens system, optical device with lens system, and method of manufacturing lens
1172014009623804/03/14Electronic device, operator estimation method and program
1182014009245904/03/14Scanning microscope
1192014009246304/03/14Structured illumination apparatus, structured illumination microscopy, and structured illumination method
1202014009248604/03/14Lens barrel and optical apparatus
1212014009249004/03/14Lens system, optical device with lens system, and method of manufacturing lens
1222014009623804/03/14Electronic device, operator estimation method and program
1232014008573203/27/14Zoom lens system, imaging apparatus, and method for zooming the zoom lens system
1242014008573203/27/14Zoom lens system, imaging apparatus, and method for zooming the zoom lens system
1252014007832103/20/14Motion blur estimation and restoration using light trails
1262014007990203/20/14Caf2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing caf2 polycrystalline body
1272014007832103/20/14Motion blur estimation and restoration using light trails
1282014007990203/20/14Caf2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing caf2 polycrystalline body
1292014007141203/13/14Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
1302014007141903/13/14Fly's eye optical mirror with a plurality of optical elements rotationally aligned along two axes
1312014007141203/13/14Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
1322014007141903/13/14Fly's eye optical mirror with a plurality of optical elements rotationally aligned along two axes
1332014006348103/06/14Compact laser radar corner cube
1342014006349103/06/14Boresight error monitor for laser radar integrated optical assembly
1352014006430703/06/14Laser device
1362014006471803/06/14Accessory, camera, accessory control program, and camera control program
1372014006720403/06/14Electronic apparatus, processing system, and computer readable storage medium
1382014006348103/06/14Compact laser radar corner cube
1392014006349103/06/14Boresight error monitor for laser radar integrated optical assembly
1402014006430703/06/14Laser device
1412014006471803/06/14Accessory, camera, accessory control program, and camera control program
1422014006720403/06/14Electronic apparatus, processing system, and computer readable storage medium
1432014005506002/27/14Linearized control of piezoelectric actuator to reduce hysteresis
1442014005557102/27/14Image processing apparatus, image capturing apparatus, and image processing program
1452014005559402/27/14Structured illuminating microscopy and structured illuminating observation method
1462014005576202/27/14Optical arrangement of autofocus elements for use with immersion lithography
1472014005576302/27/14Exposure apparatus, exposure method, and method for producing device
1482014005586902/27/14Zoom lens, optical apparatus, and method for manufacturing zoom lens
1492014004975802/20/14Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
1502014004975902/20/14Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
1512014004976102/20/14Design rules for reducing the sensitivity of fringe projection autofocus to air temperature changes
1522014004976302/20/14Holding apparatus, exposure apparatus and manufacturing method of device
1532014004976402/20/14Exposure apparatus, exposure method, device manufacturing method, and carrier method
1542014004984902/20/14Lens unit and image capturing apparatus
1552014004359202/13/14Optical element and exposure apparatus
1562014004359302/13/14Exposure apparatus, exposure method, and method for producing device
1572014004359402/13/14Method of adjusting lighting optical device, lighting optical device, exposure system, and exposure method
1582014003604302/06/14Image processing apparatus and image processing program
1592014003634902/06/14Laser device
1602014003640302/06/14Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus
1612014003694402/06/14Method for adjusting electro-optic modulator in laser device, and laser device
1622014004042802/06/14Method of brokering digital data
1632014002765301/30/14Optical element, optical device, measurement device, and screening apparatus
1642014002898701/30/14Exposure apparatus and device fabrication method
1652014002899001/30/14Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
1662014002237701/23/14Mark detection method, exposure method and exposure apparatus, and device manufacturing method
1672014002241301/23/14Data recording apparatus and camera configured to selectively process data stored in a recording medium
1682014002252301/23/14Exposure apparatus, exposure method, method for producing device, and optical part
1692014002256001/23/14Detection method and detection apparatus
1702014001613601/16/14Optical coherence tomography observation apparatus, method for determining relative position of images, and program for determining relative position of images
1712014000966701/09/14Vibration actuator
1722014000967101/09/14Accessory, camera, accessory control method, accessory control program, and camera control program
1732014000975301/09/14Wavefront aberration measuring apparatus
1742014000982601/09/14Non-linear microscopy and non-linear observation method
1752014000235401/02/14Electronic device, image display system, and image selection method
1762014000267801/02/14Image saving apparatus, image transfer apparatus and image transmission apparatus
1772014000281401/02/14Observation device and observation method
1782014000373001/02/14Electronic device and grouping method
1792013034148812/26/13Imaging element and imaging apparatus
1802013034265712/26/13Stereo vision camera for laser radar
1812013034274512/26/13Imaging apparatus
1822013034290712/26/13Lens system, optical apparatus and manufacturing method
1832013034341012/26/13Ultraviolet laser device
1842013034365912/26/13Electronic device, electronic device control method, and computer-readable recording medium having stored thereon electronic device control program
1852013034601612/26/13Information terminal, information providing server, and control program
1862013033571712/19/13Immersion exposure apparatus and device manufacturing method with measuring device
1872013033572312/19/13Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
1882013032902912/12/13Digital camera system
1892013032920012/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
1902013032920112/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
1912013032920812/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
1922013032920912/12/13Mask, exposure apparatus and device manufacturing method
1932013032996412/12/13Image-processing device and image-processing program
1942013033066212/12/13Color time domain integration camera having a single charge coupled device and fringe projection auto-focus system
1952013033270612/12/13Electronic device, electronic device cooperating system, and electronic device controlling method
1962013032902912/12/13Digital camera system
1972013032920012/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
1982013032920112/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
1992013032920812/12/13Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
2002013032920912/12/13Mask, exposure apparatus and device manufacturing method
2012013032996412/12/13Image-processing device and image-processing program
2022013033066212/12/13Color time domain integration camera having a single charge coupled device and fringe projection auto-focus system
2032013033270612/12/13Electronic device, electronic device cooperating system, and electronic device controlling method
2042013032021912/05/13Method of inspecting synthetic silicia glass molded body
2052013032162512/05/13Electronic device and information transmission system
2062013032164312/05/13Image display device and object detection device
2072013032165212/05/13Electronic camera that wirelessly transfers data, which includes a power save mode
2082013032178512/05/13Exposure apparatus and device fabricating method
2092013032182312/05/13Form measuring apparatus, structure manufacturing system, scanning apparatus, method for measuring form, method for manufacturing structure, and non-transitory computer readable medium storing program for measuring form
2102013031459011/28/13Camera system, interchangeable lens and method of manufacturing interchangeable lens
2112013031467911/28/13Projection optical system, exposure apparatus, and exposure method
2122013031477611/28/13Imaging optical system, microscope apparatus including the imaging optical system, and stereoscopic microscope apparatus
2132013030799411/21/13Photometric device, imaging device, and camera
2142013030810811/21/13Measuring method, stage apparatus, and exposure apparatus
2152013030810911/21/13Measuring method, stage apparatus, and exposure apparatus
2162013030811311/21/13Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areas
2172013030811411/21/13Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areas
2182013030814011/21/13Method for spatially multiplexing two or more fringe projection signals on a single detector
2192013031117411/21/13Audio control device and imaging device
2202013029841511/14/13Form measuring apparatus, method for measuring form, method for manufacturing structure and non-transitory computer readable medium storing a program for setting measurement area
2212013030101511/14/13Apparatus and method for providing fluid for immersion lithography
2222013030101611/14/13Wafer table having sensor for immersion lithography
2232013030101911/14/13Exposure method and apparatus, maintenance method and device manufacturing method
2242013030102111/14/13Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
2252013030102211/14/13Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
2262013030102711/14/13Exposure method, exposure apparatus, and device manufacturing method
2272013030114311/14/13Lens system and optical apparatus
2282013030202511/14/13Camera accessory, camera body and camera system
2292013029356811/07/13Image processing apparatus and image processing program product
2302013029369811/07/13Microscope system
2312013029374111/07/13Image processing apparatus, image capturing apparatus, and storage medium storing image processing program
2322013029374711/07/13Imaging device, program, memory medium, and noise reduction method
2332013029385511/07/13Exposure apparatus and device manufacturing method
2342013029386011/07/13Exposure apparatus, exposure method, and method for producing device
2352013029390011/07/13Methods and devices for reducing errors in goos-hÄnchen corrections of displacement data
2362013028618210/31/13Focus position maintaining apparatus, and microscope
2372013028636910/31/13Using customized lens pupil optimization to enhance lithographic imaging in a source-mask optimization scheme
2382013029065210/31/13Storage control device
2392013027891210/24/13Spatial light modulator, exposure apparatus, and method for manufacturing device
2402013027121110/17/13Multi-layered semiconductor apparatus
2412013027161410/17/13Image display apparatus having image-related information displaying function
2422013027162710/17/13Camera with red-eye correction function
2432013027173910/17/13Exposure apparatus and device manufacturing method
2442013027180510/17/13Electronic element, variable capacitor, micro switch, method for driving micro switch, and mems type electronic element
2452013026521210/10/13Information display device and wireless remote controller
2462013026555510/10/13Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium
2472013026555610/10/13Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
2482013025541410/03/13Parallel linkage and actuator motor coil designs for tube carrier
2492013025830710/03/13Magnet array configuration for higher efficiency planar motor


ARCHIVE: New 2014 2013 2012 2011 2010 2009



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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Nikon Corporation in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Nikon Corporation with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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