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Nikon Corporation patents


Recent patent applications related to Nikon Corporation. Nikon Corporation is listed as an Agent/Assignee. Note: Nikon Corporation may have other listings under different names/spellings. We're not affiliated with Nikon Corporation, we're just tracking patents.

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Method of manufacturing protein array or peptide array, identifying functional protein or functional peptide, protein array or peptide array, and functional protein or functional peptide identification kit

There is provided a method of manufacturing a protein array or peptide array suitable for an efficient screening of a functional protein or functional peptide. The method of manufacturing a protein array or peptide array includes the steps of: (a) preparing a nucleic acid immobilized on a solid support and... Nikon Corporation

X-ray inspection device, x-ray inspection method, and manufacturing structure

The X-ray inspection device includes a radiation source that irradiates X-rays toward a specimen that is rotated; a detector that detects transmitted X-rays irradiated by the radiation source, and passed through the specimen, and output a plurality of detection data for each angle of rotation; and a region extracting unit... Nikon Corporation

Imaging lens and image capturing device

TL denotes a total length of the imaging lens (PL) (a distance between a vertex of a lens surface closest to the object and an axial image point corresponding to an infinite distant object).... Nikon Corporation

Interchangeable lens, camera body, and electronic device

An interchangeable lens to be detachably attached to a camera body, that includes a holding unit at which a plurality of contacts is arranged, the interchangeable lens includes: a first communication contact system arranged at the holding unit; and a second communication contact system different from the first communication contact... Nikon Corporation

Linear motor, stage apparatus, and exposure apparatus

A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage (142a) of a liquid for regulating temperature, and is provided with a coil unit (141) having at least... Nikon Corporation

Exposure apparatus, movable body apparatus, and device manufacturing method

A movable body apparatus includes a base member, a movable body that is movable at least two-dimensionally, parallel to a predetermined plane, on the base member, a planar motor of a magnetic levitation method having a stator provided at the base member and a mover provided at the movable body,... Nikon Corporation

Measurement device, lithography system and exposure apparatus, and control method, overlay measurement manufacturing method

A measurement device has: a slider which holds a substrate and is movable parallel to the XY plane; a drive system that drives the slider; a position measurement system which emits beams from a head section to a measurement surface in which grating section are provided on the slider, which... Nikon Corporation

Image-capturing device and image sensor

An image-capturing device includes an image sensor. The image sensor includes an upper layer pixel group and a lower layer pixel group that receives the light fluxes from the subject that have passed through each pixel in the upper layer pixel group. The lower layer pixel group includes fourth, fifth... Nikon Corporation

Image pickup element and image pickup device

An imaging element includes: an imaging unit in which a plurality of pixel groups including a plurality of pixels that output pixel signals according to incident light are formed, and on which incident light corresponding to mutually different pieces of image information is incident; a control unit that controls, for... Nikon Corporation

Compensation for goos-hanchen error in autofocus systems

Prediction of a distribution of light in an illumination pupil of an illumination system includes identifying component(s) of the illumination system the adjustment of which affects this distribution and simulating the distribution based on a point spread function defined in part by the identified components. The point spread function has... Nikon Corporation

Exposure apparatus and device manufacturing method

An exposure apparatus exposes a substrate with illumination light via a liquid. A liquid immersion member of the exposure apparatus has a lower surface, a plurality of collection ports, and a plurality of supply ports. The lower surface has an opening through which illumination light passes. The collection ports are... Nikon Corporation

Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium

A liquid immersion exposure apparatus includes a liquid immersion member which forms a liquid immersion space under an emitting surface of a last optical member. The exposure light is projected to a substrate through liquid in the liquid immersion space to expose the substrate while the substrate is moved in... Nikon Corporation

Apparatus and providing fluid for immersion lithography

A liquid immersion lithography apparatus includes a projection system having a final optical element and a nozzle member having a first opening disposed on a first side of the final optical element and from which an immersion liquid is supplied, a second opening disposed on a second side of the... Nikon Corporation

Liquid immersion member, exposure apparatus, exposing method, manufacturing device, program, and recording medium

A liquid immersion exposure apparatus includes a liquid immersion member which forms a liquid immersion space on an object disposed opposite to an emitting surface of an optical member. The liquid immersion member includes (i) a first member that has a first liquid supply port and a first opening through... Nikon Corporation

Substrate processing system and substrate processing method, and device manufacturing method

A lithography system is provided with: a measurement device measuring position information of marks on a substrate held in a first stage; and an exposure apparatus on a second stage, the substrate for which the position information measurement for the marks has been completed, performs alignment measurement to measure position... Nikon Corporation

Measurement device, lithography system and exposure apparatus, and device manufacturing method

A measurement device is equipped with a surface plate, a slider which holds a substrate and which is movable relative to the surface plate, a drive system that moves the slider, a first position measurement system which measures the slider's first position information relative to the surface plate, a measurement... Nikon Corporation

Image determining device to determine the state of a subject

To determine the state of a subject person with a simple structure, an image determining device includes: an imaging unit that captures an image from a first direction, the image including the subject person; a first detector that detects size information from the image, the size information being about the... Nikon Corporation

Optical assembly, producing data in the same, and manufacturing structure

An integrated optical assembly is provided, with enhancements that are particularly useful when the integrated optical assembly forms part of a laser radar system. The integrated optical assembly produces a reference beam that is related to the optical characteristics of a scanning reflector, or to changes in position or orientation... Nikon Corporation

Autofocus system and method

New and useful concepts for an autofocus system and method are provided. A basic concept uses fringe projection in an autofocus system and method. A further aspect provides spatial filtering concepts for the fringe projection concept. In yet another aspect, the fringe projection autofocus system and method is provided with... Nikon Corporation

Optical system, optical device, and adjusting optical system

An optical system includes: a first lens group having a positive refractive power, a second lens group having a negative refractive power, and a third lens group, disposed in this order along an optical axis starting from an object side, wherein: the second lens group is movable along the optical... Nikon Corporation

Zoom lens, an optical apparatus, and a manufacturing the zoom lens

where D1 denotes a thickness on the optical axis of the first lens group (G1), and fw denotes a focal length of the zoom lens (ZL) in a wide-angle end state.... Nikon Corporation

Zoom lens, optical manufacturing the zoom lens

2.30<f5/d4w<3.60... Nikon Corporation

Image reconstruction x-ray measuring device, structure manufacturing method, image reconstruction program for x-ray measuring device, and x-ray measuring device

An image reconstruction method, includes: generating differential data indicating a difference between detection data generated by detecting X-ray that passed through a measurement object by irradiating X-rays to the measurement object and estimate data generated by estimating X-rays that are assumed to have been passed through an estimated structure having... Nikon Corporation

Optical system, imaging device having same, and manufacturing optical system

An optical system includes, disposed in sequence along an optical axis starting on an object side: a first lens group having a positive refractive power, which remains fixed relative to an image surface upon focusing; and a second lens group having a positive refractive power, which moves along the optical... Nikon Corporation

Liquid jet and recovery system for immersion lithography

An immersion lithography apparatus includes a projection system having a last optical element, a plurality of liquid supply openings that surround a path of exposure light that exits an end surface of the last optical element and face downwardly, and a plurality of liquid recovery openings that surround the path... Nikon Corporation

Device for manufacturing sio2-tio2 based glass

A device for manufacturing SiO2—TiO2 based glass by growing a glass ingot upon a target by a direct method. The device includes the target, comprising a thermal storage portion that accumulates heat by being preheated, and a heat insulating portion that suppresses conduction of heat from the thermal storage portion... Nikon Corporation

Imaging system, imaging device, imaging, and storage medium

An imaging system, including: a first body; a first detector that is provided in the first body and includes a first imager that images an object; a first information calculator that is provided in the first body and uses a detection result of the first detector to calculate at least... Nikon Corporation

Imaging system, imaging device, imaging, and storage medium

An imaging system, including: a first body; a first imager that is provided in the first body and images an object; a first information calculator that is provided in the first body and calculates first model information including at least one of shape information and texture information of the object... Nikon Corporation

Microscope device, observation method, and storage medium

The microscope device includes an imager, an image processor, and a controller. In a first period, the controller causes excitation light to be emitted and causes the imager to image a fluorescent image from an activated fluorescent substance in a plurality of frame periods. In a second period, the controller... Nikon Corporation

Microscope device, viewing method, and control program

A microscope apparatus includes an illumination optical system that emits activating light and exciting light, an image capturing unit that captures an image formed by an imaging optical system, an image processing unit that carries out image processing using an image capturing result from the image capturing unit, and a... Nikon Corporation

Drive apparatus and robot device

A drive apparatus includes a motor having a drive part that rotates a first shaft member; a transmission part that transmits rotation of the first shaft member to a second shaft member which is different from the first shaft member; a first detection device provided at the first shaft member... Nikon Corporation

Image processing apparatus, imaging apparatus, and machine-readable medium storing a program

Provided is an image processing apparatus including as image acquiring section that acquires a plurality of images obtained by imaging, at different times, a subject irradiated with lights intensity-modulated with a plurality of modulation frequencies or modulation frequency bands; and a demodulating section that demodulates pixel values of the plurality... Nikon Corporation

Image sensor and image-capturing apparatus

An image sensor includes: a first light-receiving unit that: receives a modulated optical signal having being reflected on an image-capturing target and including a modulated component with an intensity modulated at a predetermined modulation frequency; and outputs a first electrical signal; a second light-receiving unit that: receives a reference optical... Nikon Corporation

Image-capturing device

Because conversion from an invisible wavelength band to a visible wavelength band has been performed arbitrarily on a device-by-device basis, the color gamut in the visible color space could not be utilized sufficiently. A first aspect of the present invention provides an image-capturing device including: an image-capturing unit that is... Nikon Corporation

Imaging system, imaging device, imaging, and storage medium

An imaging system, including: a first body; a first imager that is provided in the first body and images an object; a first information calculator that is provided in the first body and calculates first model information including at least one of shape information and texture information of the object... Nikon Corporation

01/11/18 / #20180011410

Measuring method, stage apparatus, and exposure apparatus

An exposure apparatus exposes a substrate with an illumination light via a projection optical system. The apparatus has a base member supported via a first isolating member below the projection optical system; a stage arranged on the base member, and having a holder configured to support the substrate; a metrology... Nikon Corporation

01/11/18 / #20180011411

Exposure apparatus, exposure method, and producing device

Exposure apparatus exposes a substrate by irradiating the substrate with exposure light via a projection optical system and a liquid. The exposure apparatus is provided with a liquid immersion mechanism for supplying the liquid and recovering the liquid. The liquid immersion mechanism has an inclined surface, which is opposite to... Nikon Corporation

01/04/18 / #20180001320

Fluidic device, system, and method

a second circulation flow path in which a solution mixed in the first flow path is circulated and which has a capture part configured to capture a sample substance included in the solution and/or a detection part configured to detect a sample substance included in the solution.... Nikon Corporation

01/04/18 / #20180003484

System and a displacement measurement

System and method for profiling of a surface with lateral scanning interferometer the optical axis of which is perpendicular to the surface. In-plane scanning of the surface is carried out with increments that correspond to integer number of pixels of an employed optical detector. Determination of height profile of a... Nikon Corporation

01/04/18 / #20180004096

Stage apparatus, exposure apparatus, and exposure method

An exposure apparatus has a stage having a substrate holder and a plate member around the substrate holder to surround a substrate on the substrate holder. A liquid supply mechanism includes a supply port above the stage at a more outward position than an optical path of light from a... Nikon Corporation

01/04/18 / #20180004097

Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method

While a wafer stage moves linearly in a Y-axis direction, surface position information of a wafer surface at a plurality of detection points set at a predetermined interval in an X-axis direction is detected by a multipoint AF system, and by a plurality of alignment systems arranged in a line... Nikon Corporation

01/04/18 / #20180004098

Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method

While a wafer stage moves linearly in a Y-axis direction, surface position information of a wafer surface at a plurality of detection points set at a predetermined interval in an X-axis direction is detected by a multipoint AF system, and by a plurality of alignment systems arranged in a line... Nikon Corporation

01/04/18 / #20180007261

Image-capturing device and image processing method

An image-capturing device includes: a photographic optical system; a photoelectric conversion element array made up with a plurality of photoelectric conversion elements arrayed therein; a micro-lens array made up with a plurality of micro-lenses arrayed therein; a data creation unit that creates pixel data at a plurality of pixels on... Nikon Corporation

12/28/17 / #20170370922

Fluidic device, system, and method

A fluidic device includes: a circulation flow path; and a capture part arranged on the circulation flow path and configured to capture a sample substance in a solution and/or a detection part arranged on the circulation flow path and configured to detect a sample substance in a solution. A method... Nikon Corporation

12/28/17 / #20170371249

Exposure apparatus and exposure method, and device manufacturing method

A movable body apparatus moves an object and includes a measurement member in a cantilevered supported state; a moving member having a holding section of the object and a space section into which the measurement member can be inserted; a measurement system that measures positional information of the moving member... Nikon Corporation

12/28/17 / #20170371252

Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method

A controller of an exposure apparatus (1) controls a second drive system so that scanning exposure is performed via a projection optical system and liquid of a liquid immersion area, from an area located on one side in a first direction, of a plurality of areas of a substrate held... Nikon Corporation

12/28/17 / #20170371253

Exposure apparatus, exposure method, and producing device

An exposure apparatus includes a projection optical system having a last optical element via which an exposure beam is projected to a projection area, and a liquid supply system having a first supply port and a second supply port via which an immersion liquid is supplied to form a liquid... Nikon Corporation

12/28/17 / #20170374735

Substrate, imaging unit and imaging device

A substrate comprises: a first insulating layer; a second insulating layer having an elastic modulus that is different from an elastic modulus of the first insulating layer; and a core layer that is sandwiched by the first insulating layer and the second insulating layer, and is more rigid than the... Nikon Corporation

12/21/17 / #20170363951

Scanner based optical proximity correction system and use

A modeling technique is provided. The modeling technique includes inputting tool parameters into a model and inputting basic model parameters into the model. The technique further includes generating a simulated, corrected reticle design using the tool parameters and the basic model parameters. An image of test patterns is compared against... Nikon Corporation

12/21/17 / #20170363962

Lithography system, simulation apparatus, and pattern forming method

A simulation apparatus has: a first processing part configured to obtain a value of a parameter in a first set relating to the forming of the pattern; a second processing part configured to obtain a value of a parameter in a second set that is at least partially same as... Nikon Corporation

12/21/17 / #20170363971

Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method

A controller of an exposure apparatus is coupled to an alignment system, an aerial image measurement device and an encoder system, to control a drive system based on correction information and measurement information of the encoder system, the correction information compensating a measurement error of the encoder system that occurs... Nikon Corporation

12/21/17 / #20170363972

Exposure apparatus, producing device, and controlling exposure apparatus

A liquid immersion exposure apparatus includes a projection system, a liquid supply inlet, a first liquid collection outlet, and a separator fluidically connected to the first liquid collection outlet, the separator separating one of liquid and gas, which have been collected via the first liquid collection outlet, from the other.... Nikon Corporation

12/21/17 / #20170365046

Algorithm and device for image processing

Deblurring a blurry image (14) includes the steps of (i) computing a spatial mask (256); (ii) computing a modified blurry image (264) using the blurry image (14) and the spatial mask (256); and (iii) computing a latent sharp image (16) using the modified blurry image (264) and a point spread... Nikon Corporation

12/21/17 / #20170366734

Exchangeable lens and camera body

An exchangeable lens includes: a mount unit at which a camera body is detachably engaged; a plurality of drive target members, conditions of which change as a drive force is applied thereto; an initialization unit that executes initialization processing for each of the plurality of drive target members; an initialization... Nikon Corporation

12/21/17 / #20170366742

Electronic camera, image display device, and storage medium storing image display program

A display unit having an image display area for displaying an image, an operation unit by which a predetermined area in the image display area is designated in a movable manner, and a filter unit performing filter processing on the image corresponding to the predetermined area designated in the movable... Nikon Corporation

12/14/17 / #20170357160

Exposure apparatus, exposure method, and device manufacturing method

An exposure apparatus exposes a substrate with exposure light via a liquid. The exposure apparatus includes an optical system including an emission surface from which the exposure light is emitted; a liquid supply port that supplies the liquid in order to fill an optical path of the exposure light emitted... Nikon Corporation

12/14/17 / #20170357163

Holding apparatus, exposure apparatus and manufacturing device

A holding apparatus includes a holding portion that includes a first member which contacts a portion of an object, a second member which at least a portion thereof is fixed to a base, and a connection member which is configured to connect the first and second members, and a driving... Nikon Corporation

12/07/17 / #20170347881

Fundus image forming device

A fundus imaging system comprises: a first reflection mirror that reflects a light beam passing through a first focus of the first reflection mirror to pass through a second focus; a two-dimensional scanning unit that is disposed at a position of the first focus and reflects a light beam incident... Nikon Corporation

12/07/17 / #20170347882

Fundus image forming device

A fundus imaging system comprises: a reflection mirror that reflects a light beam incident on the reflection mirror after passing through a first focus so as to cause the light beam to pass through a second focus; a two-dimensional scanning unit that is disposed at a position that coincides with... Nikon Corporation

12/07/17 / #20170349757

Continuous flow process for manufacturing surface modified metal oxide nanoparticles by supercritical solvothermal synthesis

The invention concerns a continuous flow process for manufacturing surface modified metal oxide nanoparticles by supercritical solvothermal synthesis in an reaction medium flowing within a continuous flow chamber, said continuous flow chamber containing a hydrolysis area and a supercritical area, said process comprising the introduction of a flow of metal... Nikon Corporation

12/07/17 / #20170350736

Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method

Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is... Nikon Corporation

12/07/17 / #20170350805

Analysis device, analysis method, analysis program, cell manufacturing method and cells

An analysis device includes an acquisition unit configured to acquire an image of a cell and an identification unit configured to identify elements that are identifiable on the basis of the image of cell acquired by the acquisition unit. Characteristic quantities of the elements identified by the identification unit are... Nikon Corporation

12/07/17 / #20170351055

Lens barrel, image capturing device and manufacturing the same

A lens barrel includes: a first cylindrical member that extends in a prescribed axial direction; a second cylindrical member that slides in the prescribed axial direction along an inner circumferential surface of the first cylindrical member; an axis member that slides in the prescribed axial direction along an inner circumferential... Nikon Corporation

12/07/17 / #20170351100

Beam transforming optical system, illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power having different thickness to rotate linear polarization direction

An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, and a polarization member made of optical material with optical rotatory power, which is arranged in the optical path on... Nikon Corporation

12/07/17 / #20170351162

Shutter device and image-capturing apparatus

A shutter device includes: a substrate having an opening; a first light-shielding member that moves from a first position outside the opening of the substrate to a second position outside the opening to shield the opening, the second position being different from the first position; a second light-shielding member that... Nikon Corporation

Patent Packs
12/07/17 / #20170351163

Shutter device and image-capturing apparatus

A shutter device includes: a substrate having an opening; a first light-shielding member having a light-shielding region having lengths in first and second directions respectively larger and smaller than those of the opening in the same directions, and partly shields the opening while moving from a first position outside the... Nikon Corporation

12/07/17 / #20170351188

Control movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus

A control method of a movable body includes: a step of detecting a part of a plurality of grating marks provided at a wafer placed on a movable body that is movable within an XY plane, while scanning a measurement beam, that is irradiated from a mark detection system, in... Nikon Corporation

12/07/17 / #20170353700

Imaging device

An imaging device includes a plurality of first pixels that includes pixels of a plurality of color components and generates a first signal from incident light, a plurality of second pixels that generates a second signal from light that has transmitted at least a part of the first pixels, and... Nikon Corporation

11/30/17 / #20170343391

Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method

Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is... Nikon Corporation

11/30/17 / #20170343768

Exchangeable lens

An exchangeable lens mountable on a camera body includes: a selection unit configured to select a first state wherein a movement range of a focusing optical system changing the exchangeable lens' focal position is limited and a second state which is different from the first state, and a transmission unit... Nikon Corporation

11/30/17 / #20170343902

Illumination device

An object is to provide an illumination apparatus that achieves illumination with a uniform illuminance distribution, while reducing a light quantity loss. An illumination apparatus for illuminating an illumination target surface has: a deflection member configured to form an illuminance distribution with a periodic pattern along a predetermined direction on... Nikon Corporation

11/30/17 / #20170343905

Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method

While a wafer stage linearly moves in a Y-axis direction, a multipoint AF system detects surface position information of the wafer surface at a plurality of detection points that are set at a predetermined distance in an X-axis direction and also a plurality of alignment systems that are arrayed in... Nikon Corporation

11/30/17 / #20170344358

Electronic apparatus, power supply device, system and apparatus

A power supply device is caused to execute a new program. An electronic apparatus that receives power from a power supply device in a non-contact manner includes: an intra-apparatus circuit that operates with power received via a power transmission path from the power supply device to the electronic apparatus; a... Nikon Corporation

11/23/17 / #20170336715

Euv lithography system for dense line patterning

Extreme ultra-violet (EUV) lithography ruling engine specifically configured to print one-dimensional lines on a target workpiece includes source of EUV radiation; a pattern-source defining 1D pattern; an illumination unit (IU) configured to irradiate the pattern-source; and projection optics (PO) configured to optically image, with a reduction factor N>1, the 1D... Nikon Corporation

11/23/17 / #20170336716

Euv lithography system for dense line patterning

Extreme ultra-violet (EUV) lithography ruling engine specifically configured to print one-dimensional lines on a target workpiece includes source of EUV radiation; a pattern-source defining 1D pattern: an illumination unit (IU) configured to irradiate the pattern-source; and projection optics (PO) configured to optically image, with a reduction factor N>1, the 1D... Nikon Corporation

11/23/17 / #20170336720

Extreme ultraviolet lithography system that utilizes pattern stitching

An extreme ultraviolet lithography system (10) that creates a pattern (230) having a plurality of densely packed parallel lines (232) on a workpiece (22) includes a patterning element (16); an EUV illumination system (12) that directs an extreme ultraviolet beam (13A) at the patterning element (16); a projection optical assembly... Nikon Corporation

11/23/17 / #20170336723

Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

Positional information of a movable body in a Y-axis direction is measured using an interferometer and an encoder whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the... Nikon Corporation

11/23/17 / #20170339333

Focus detection device and image-capturing apparatus

A focus detection device includes: an image sensor that includes a plurality of focus detection pixel rows, each having a plurality of focus detection pixels and each outputting a pair of focus detection signals; a spatial accumulation unit that calculates spatially accumulated values by adding together pairs of focus detection... Nikon Corporation

11/16/17 / #20170328538

Illumination device for optimizing polarization in an illumination pupil

A new and useful illumination device, e.g. for a lithographic optical imaging system, is provided, and comprises a mirror array located between a radiation source and an illumination pupil. Each mirror element of the mirror array is individually steerable (controllable), and the polarization state of light from each mirror element... Nikon Corporation

11/16/17 / #20170329122

Structured illumination microscope, observation method , and control program

A structured illumination microscope includes: a first illumination optical system configured to irradiate, from a first direction, a sample with activating light for activating a fluorescent substance included in the sample; a second illumination optical system configured to irradiate, from a second direction that is different from the first direction,... Nikon Corporation

Patent Packs
11/16/17 / #20170329234

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

An exposure apparatus exposes a substrate by projecting a pattern image onto the substrate through a liquid. The exposure apparatus includes a projection optical system by which the pattern image is projected onto the substrate, and a movable member which is movable relative to the projection optical system. A liquid-repellent... Nikon Corporation

11/16/17 / #20170329236

Positioning system using surface pattern recognition and interpolation

A stage assembly for positioning a device along a first axis, the stage assembly comprising: a base; a stage that retains the device and moves above the base; a mover assembly that moves the stage along the first axis relative to the base; a first sensor system that monitors the... Nikon Corporation

11/16/17 / #20170329239

Exposure producing device

A liquid immersion exposure apparatus exposes a substrate with an exposure beam via a liquid immersion area formed on a portion of a surface of the substrate. The apparatus includes: a projection system; a first nozzle member having an aperture through which the exposure beam is projected, the first nozzle... Nikon Corporation

11/16/17 / #20170330037

Imaging device and information acquisition system in which an acquired image and associated information are held on a display

An imaging device includes an imaging portion that images a subject; a positional information acquisition portion that acquires positional information of an imaging position; a control portion which acquires information on the subject based on the positional information, and displays image data of the subject and the information on the... Nikon Corporation

11/16/17 / #20170332006

Focusing device and camera

A focusing device comprises: an image capturing unit that captures a subject image formed via an optical system including a lens for executing focus adjustment and outputs an output signal; an edge detection unit that detects an edge signal among the output signal in correspondence to each color component among... Nikon Corporation

11/16/17 / #20170332008

Capturing apparatus, electronic device, and program

An image-capturing apparatus includes: an image sensor having a first image-capturing region and a second image-capturing region different from the first image-capturing region; and a control unit that displays an image generated by the first image-capturing region and an image generated by the second image-capturing region on a display unit,... Nikon Corporation

11/16/17 / #20170332016

Electronic apparatus

An electronic apparatus includes: an input unit that inputs image data generated by an image capturing unit that has a plurality of pixel groups, each pixel group including at least one pixel, and that is capable of performing image-capturing under different imaging conditions for each of the pixel groups and... Nikon Corporation

11/09/17 / #20170321079

Polymer compound, surface treatment agent, laminated body using surface treatment agent, transistor, manufacturing laminated body

Provided is a compound which is excellent terms of stability and tight adhesion to substrates and on which wiring can be formed by electroless plating. The compound is a high-molecular-weight compound having a constituent unit represented by the following formula (1). [In formula (1), R1 represents a hydrogen atom or... Nikon Corporation

11/09/17 / #20170322483

Electronic device

An electronic device includes: a communication unit that is engaged in communication with an external device; a control unit that adds image information into transmission data to be transmitted to the communication unit; and a decision-making unit that makes a decision in correspondence to information indicating a recipient of the... Nikon Corporation

11/09/17 / #20170322496

Exposure apparatus and device fabricating method

A liquid immersion exposure apparatus includes a projection optical system via which exposure light is projected, a first stage that is movable below the projection optical system and having a holding portion that holds a substrate, a second stage that is movable below the projection optical system, and a nozzle... Nikon Corporation

11/09/17 / #20170322498

Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

Positional information of a movable body in a Y-axis direction is measured using an interferometer and an encoder whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the... Nikon Corporation

11/09/17 / #20170324911

Electronic apparatus, reproduction device, reproduction method, recording medium, and recording method

An electronic apparatus includes: an input unit that inputs image data generated by an image capturing unit that has a plurality of imaging regions and that has different imaging conditions for each of the imaging regions and data for the imaging conditions for each of the imaging regions; and a... Nikon Corporation

11/02/17 / #20170315337

Variable magnification optical system, optical device, and production variable magnification optical system

Comprising, in order from an object side: a first lens group G1 having positive refractive power; a second lens group G2 having negative refractive power; a third lens group G3 having positive refractive power; and a fourth lens group G4 having positive refractive power; upon zooming from a wide-angle end... Nikon Corporation

11/02/17 / #20170315457

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

A substrate is exposed with an illumination light via a projection optical system. A stage that holds the substrate moves below the projection optical system. A measurement system measures positional information of the stage with a plurality of heads that face a grating section. Movement of the stage is controlled... Nikon Corporation

11/02/17 / #20170316682

Electronic device

An electronic device may include a position detecting unit that detects a position; a time detecting unit that detects a time; a communicating unit that communicates with a first device provided separately from the position detecting unit and the time detecting unit; and an instructing unit that instructs, via the... Nikon Corporation

11/02/17 / #20170317129

Image-capturing unit, image-capturing apparatus, and manufacturing image-capturing unit

Provided is an image-capturing unit including an image-capturing chip that includes a first surface having a pixel and a second surface that is on an opposite side of the first surface and has provided thereon an output section that outputs a pixel signal read from the pixel; a transparent substrate... Nikon Corporation

11/02/17 / #20170318209

Device and image processing method

An electronic device, includes an input unit that inputs image data generated by an imaging unit that has a plurality of imaging regions with imaging conditions being different for each of the imaging regions, and data of the imaging conditions for each of the imaging regions; and an image processing... Nikon Corporation

11/02/17 / #20170318251

Imaging device

An imaging device has a sensor chip and a signal processing chip. The sensor chip includes a pixel array in which a plurality of pixels are arranged in a 2-dimensional matrix and a data output terminal group made up of a plurality of data output terminals which output analog signals... Nikon Corporation

11/02/17 / #20170318256

Electronic apparatus, reproduction device, reproduction method, recording medium, and recording method

An electronic apparatus includes: an input unit that inputs data for imaging conditions for each of a plurality of imaging regions included in an image capturing unit, different imaging conditions being set for each of the imaging regions, and data for information relating to positions of the imaging regions; and... Nikon Corporation

10/26/17 / #20170304946

Shaping apparatus and shaping method

A shaping apparatus is equipped with: a beam shaping system having a beam irradiation section that includes a condensing optical system which emits a beam and a material processing section which supplies a shaping material irradiated by the beam from the beam irradiation section; and a controller which, on the... Nikon Corporation

10/26/17 / #20170304947

Shaping apparatus and shaping method

This shaping apparatus is equipped with: a movement system which moves a target surface; a measurement system for acquiring position information of the target surface in a state movable by the movement system, a beam shaping system that has a beam irradiation section and a material processing section which supplies... Nikon Corporation

10/26/17 / #20170307863

Catadioptric imaging systems for digital scanner

where βII is a magnification of the second portion. A digital scanner including such projection optical system and operating with UV light having a spectral bandwidth on the order of 1 picometer. Method for forming an image with such projection optical system.... Nikon Corporation

10/26/17 / #20170307884

Control device, head-mount display device, program, and control detecting head motion of a user

It is possible to provide a technique for accurately performing an operation desired by a user. A user's head operation is identified according to information detected by a head motion detection unit. A process desired by the user is executed according to an angular velocity of the head motion. Moreover,... Nikon Corporation

10/26/17 / #20170307984

Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium

An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.... Nikon Corporation

10/26/17 / #20170309000

Image restoration apparatus, camera and program

The present invention provides an image restoration apparatus, a camera and a program which are capable of performing image restoration with simple const ruction. A specific area within a captured image is specified, and a calculation of a point spread function and the image restoration calculation are carried out using... Nikon Corporation

10/26/17 / #20170309847

Transistor manufacturing method and transistor

A transistor manufacturing method includes: forming a first insulator layer of which formation material is a fluorine-containing resin, on a substrate having a source electrode, a drain electrode, and a semiconductor layer so as to cover the semiconductor layer; forming a second insulator layer to cover the first insulator layer;... Nikon Corporation

10/26/17 / #20170310887

Electronic device

An electronic device includes: an input unit that inputs imaging condition data for each imaging region of an imaging unit that has a plurality of imaging regions with the imaging conditions being different for each of the imaging regions, and position information data for the imaging regions; and a recording... Nikon Corporation

10/26/17 / #20170310900

Portable information device having real-time display with relevant information

A portable information device including a body, a position information portion that is provided in the body and that outputs position information, an image sensor that is provided in the body, a display system that is provided in the body and that displays, on a local field in a screen... Nikon Corporation

10/26/17 / #20170310919

Electronic apparatus

An electronic apparatus includes: a processing unit that processes an image capture signal captured by an image capturing unit; a communication unit that is capable of transmitting the image capture signal captured by the image capturing unit to an external apparatus; and a determination unit that determines whether or not... Nikon Corporation








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