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Nova Measuring Instruments Ltd
Nova Measuring Instruments Ltd Of Weizmann Scientific Park
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Nova Measuring Instruments Ltd patents

Recent patent applications related to Nova Measuring Instruments Ltd. Nova Measuring Instruments Ltd is listed as an Agent/Assignee. Note: Nova Measuring Instruments Ltd may have other listings under different names/spellings. We're not affiliated with Nova Measuring Instruments Ltd, we're just tracking patents.

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Date Nova Measuring Instruments Ltd patents (updated weekly) - BOOKMARK this page
03/02/17Overlay design optimization
01/26/17Test structures and metrology technique utilizing the test structures for measuring in patterned structures
01/19/17Optical phase measurement method and system
01/19/17Hybrid metrology technique
12/15/16Optical critical dimension metrology
12/15/16Method and system for planning metrology measurements
11/10/16Lateral shift measurement using an optical technique
11/03/16Surface planarization system and method
09/29/16Method and system for optimizing optical inspection of patterned structures
05/19/16Method and system for determining strain distribution in a sample
04/21/16Method and system for measuring patterned structures
03/24/16Method and system for improving optical measurements on small targets
03/17/16Scatterometry method and system
12/31/15Optical phase measurement method and system
12/03/15Optical critical dimensions and thickness characterization
11/05/15Method and system for optical characterization of patterned samples
08/13/15Optical metrology for in-situ measurements
07/30/15Optical measuring isolated features of a structure
07/09/15Optical detecting defects in three-dimensional structures
06/18/15Method and system for use in optical measurements in deep three-dimensional structures
05/07/15Lateral shift measurement using an optical technique
01/08/15Method and system for measuring patterned structures
12/25/14Optical measurement of one or more parameters of via-holes
07/10/14Monitoring verifying measurements in patterned structures
06/19/14Optical measuring in patterned structures
05/22/14Method and system for use in monitoring properties of patterned structures
03/20/14Method and system for optimizing optical inspection of patterned structures
01/09/14Method and system for measuring patterned structures
11/21/13Optical measuring in three-dimensional structures
10/24/13Method and system for use in measuring in complex patterned structures
08/15/13Method and system for optimizing optical inspection of patterned structures
05/23/13Lateral shift measurement using an optical technique
05/16/13Method and system for measuring in patterned structures
04/18/13Method and system for use in monitoring properties of patterned structures
04/11/13Method and system for endpoint detection
02/23/12Thin films measurement method and system
08/04/11Method and system for endpoint detection
02/17/11Monitoring apparatus and method particularly useful in photolithographically processing substrates
11/04/10Method and system for measuring patterned structures
08/26/10Lateral shift measurement using an optical technique
02/25/10Method and system for endpoint detection
01/14/10Thin films measurment method and system
09/17/09Monitoring apparatus and method particularly useful in photolithographically processing substrates
08/27/09Reflective optical system
05/21/09Vacuum uv based optical measuring method and system
01/14/10Thin films measurment method and system
01/12/12Method and system for measuring patterned structures
12/23/10Method and system for measuring patterned structures
11/04/10Method and system for measuring patterned structures
05/13/10Method and system for measuring patterned structures
06/25/09Method and system for measuring patterned structures







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