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Nuflare Technology Inc patents

Recent patent applications related to Nuflare Technology Inc. Nuflare Technology Inc is listed as an Agent/Assignee. Note: Nuflare Technology Inc may have other listings under different names/spellings. We're not affiliated with Nuflare Technology Inc, we're just tracking patents.

ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "N" | Nuflare Technology Inc-related inventors




Date Nuflare Technology Inc patents (updated weekly) - BOOKMARK this page
04/27/17 new patent  Temperature measuring mask and temperature measuring method
04/20/17Supporting case and multi charged particle beam drawing apparatus
04/13/17Multi charged particle beam writing method, and multi charged particle beam writing apparatus
04/06/17Multi charged particle beam writing method and multi charged particle beam writing apparatus
03/16/17Multi charged particle beam writing method, and multi charged particle beam writing apparatus
03/09/17Method for fabricating semiconductor device, pattern writing apparatus, recording medium recording program, and pattern transfer apparatus
03/09/17Method for measuring pattern width deviation, and pattern inspection apparatus
03/09/17Charged particle beam lithography apparatus and charged particle beam lithography method
03/02/17Vapor phase growth apparatus and vapor phase growth method
02/16/17Multi charged particle beam writing apparatus and multi charged particle beam writing method
02/09/17Pattern inspection apparatus, pattern imaging apparatus, and pattern imaging method
02/02/17Pattern inspection apparatus and pattern inspection method
02/02/17Method of cleaning electron source and electron beam writing apparatus
01/19/17Drawing data creation method and charged particle beam drawing apparatus
01/12/17Vapor deposition method and vapor deposition apparatus
01/12/17Adjustment charged particle beam drawing apparatus and charged particle beam drawing method
12/22/16Inspection apparatus and inspection method
12/15/16Method for evaluating charged particle beam drawing apparatus
12/15/16Charged particle beam lithography method and charged particle beam lithography apparatus
12/01/16Multiple charged particle beam lithography apparatus and multiple charged particle beam lithography method
11/24/16Vapor phase growth apparatus and vapor phase growth method
11/24/16Charged particle beam drawing apparatus and charged particle beam drawing method
11/17/16Charged particle beam writing apparatus and charged particle beam writing method
11/03/16Multi-charged particle beam writing apparatus and multi-charged particle beam writing method
10/27/16Charged particle beam writing apparatus and charged particle beam writing method
10/20/16Inspection method and template
10/13/16Charged particle beam writing apparatus and charged particle beam writing method
10/06/16Inspection method, inspection apparatus, and inspection system
09/29/16Film forming apparatus and thermometry method
09/29/16Charged particle beam writing apparatus and charged particle beam writing method
09/29/16Charged particle beam drawing apparatus and drawing data generation method
09/29/16Multi charged particle beam writing apparatus, and multi charged particle beam writing method
09/15/16Method of cleaning mask cover and cleaning board
09/15/16Mask inspection apparatus and mask inspection method
09/15/16Heater and manufacturing semiconductor device using heater
08/25/16Line width error obtaining method, line width error obtaining apparatus, and inspection system
08/18/16Method for estimating lifetime of cathode in electron beam lithography apparatus
08/11/16Method for evaluating charged particle beam drawing apparatus
07/21/16Defect inspection device
07/21/16Rotation angle measuring multi-charged particle beam image, rotation angle adjustment multi-charged particle beam image, and multi-charged particle beam writing apparatus
07/21/16Multi-beam current quantity measuring method, multi-charged particle drawing control device, and multi-charged particle beam drawing device
07/21/16Method of generating write data for energy beam writing apparatus, writing with energy beam, and energy beam writing apparatus
07/14/16Inspection apparatus and inspection method
07/14/16Charged particle beam drawing apparatus
06/23/16Vapor phase growth apparatus and vapor phase growth method
06/23/16Multi charged particle beam writing apparatus, and multi charged particle beam writing method
06/23/16Charged particle beam drawing apparatus and charged particle beam drawing method
06/16/16Inspection method and inspection apparatus
06/09/16Multi charged particle beam writing apparatus and multi charged particle beam writing method
06/02/16Blanking aperture array device for multi-beams, and fabrication blanking aperture array device for multi-beams
06/02/16Multi charged particle beam writing method, and multi charged particle beam writing apparatus
06/02/16Multi charged particle beam writing apparatus, and multi charged particle beam writing method
06/02/16Method for generating writing data
06/02/16Multiple charged particle beam lithography apparatus and multiple charged particle beam pattern writing method
05/26/16Charged particle beam writing apparatus, and charged particle beam writing method
05/19/16Silicon carbide semiconductor film-forming apparatus and film-forming method using the same
05/19/16Blanking system for multi charged particle beams, and multi charged particle beam writing apparatus
05/19/16Electron beam writing apparatus and output control method
05/12/16Vapor phase growth apparatus, storage container, and vapor phase growth method
04/28/16Vapor phase growth apparatus and vapor phase growth method
04/21/16Radiation thermometer and thermometry method
04/21/16Writing data verification method and multi-charged particle beam writing apparatus
04/21/16Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus
04/21/16Charged particle beam writing apparatus, charged particle beam writing method, and shot correction charged particle beam writing method
04/21/16Method for forming resist film and charged particle beam writing method
Patent Packs
04/14/16Vapor phase growth apparatus and vapor phase growth method
04/14/16Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatus
04/14/16Substrate cover
04/07/16Blanking aperture array and charged particle beam writing apparatus
03/31/16Method for correcting drift of accelerating voltage, correcting drift of charged particle beam, and charged particle beam writing apparatus
03/24/16Substrate processing apparatus
03/24/16Method of measuring beam position of multi charged particle beam, and multi charged particle beam writing apparatus
03/24/16Ozone supplying apparatus, ozone supplying method, and charged particle beam drawing system
03/10/16Inspection method
03/10/16Charged particle beam writing apparatus, adjusting beam incident angle to target object surface, and charged particle beam writing method
03/10/16Data generating apparatus, energy beam writing apparatus, and energy beam writing method
03/03/16Inspection blanking device for blanking multi charged particle beams
03/03/16Electron gun supporting member and electron gun apparatus
03/03/16Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus
03/03/16Blanking device for multi charged particle beams, multi charged particle beam writing apparatus, and defective beam blocking multi charged particle beams
Patent Packs
02/25/16Charged-particle beam drawing apparatus and vibration damping mechanism
02/25/16Method of producing aperture member
02/11/16Mask inspection apparatus and mask inspection method
02/11/16Multi charged particle beam writing method and multi charged particle beam writing apparatus
02/04/16Vapor phase growth apparatus and vapor phase growth method
02/04/16Position measuring method, misplacement map generating method, and inspection system
01/28/16Film forming apparatus, susceptor, and film forming method
01/21/16Mask inspection apparatus and mask inspection method
01/21/16Charged particle beam writing apparatus and charged particle beam writing method
01/07/16Charged particle beam writing apparatus and charged particle beam writing method
12/31/15Pattern test apparatus
12/31/15Mask inspection apparatus, mask evaluation method and mask evaluation system
12/31/15Charged particle beam drawing apparatus and charged particle beam drawing method
12/10/15Cathode obtaining method and electron beam writing apparatus
12/03/15Multi charged particle beam writing method, and multi charged particle beam writing apparatus
11/26/15Multi charged particle beam writing method, and multi charged particle beam writing apparatus
11/19/15Film-forming manufacturing apparatus and method
11/19/15Inspection method, template substrate, and focus offset method
11/19/15Electron beam writing apparatus and electron beam writing method
11/19/15Semiconductor substrate, manufacturing semiconductor substrate, and semiconductor device
11/12/15Charged particle beam writing apparatus, and detecting irregularities in dose of charged particle beam
11/12/15Vapor phase growth method and vapor phase growth apparatus
10/29/15Method for fabricating semiconductor device, pattern writing apparatus, recording medium recording program, and pattern transfer apparatus
10/29/15Charged particle beam drawing apparatus
10/22/15Susceptor processing method and susceptor processing plate
10/22/15Electron beam writing apparatus, and adjusting convergence half angle of electron beam
10/22/15Multi charged particle beam writing apparatus, and multi charged particle beam writing method
10/15/15Shot data generation method and multi charged particle beam writing method
10/08/15Image capturing apparatus and inspection apparatus and inspection method
10/01/15Curvature measurement apparatus and method
Social Network Patent Pack
10/01/15Inspection method
10/01/15Charged particle beam writing apparatus and charged particle beam writing method
10/01/15Charged particle beam drawing apparatus, information processing apparatus and pattern inspection apparatus
10/01/15Vapor phase growth apparatus and vapor phase growth method
09/24/15Method for correcting drift of charged particle beam, and charged particle beam writing apparatus
09/10/15Multi charged particle beam writing apparatus
08/27/15Mask manufacturing method, mask substrate, and charged beam drawing method
08/20/15Vapor phase growth method
08/20/15Multi charged particle beam writing apparatus and multi charged particle beam writing method
08/13/15Method for acquiring settling time
Patent Packs
08/13/15Charged particle beam writing apparatus, and charged particle beam writing method
08/13/15Manufacturing semiconductor device
08/06/15Illumination apparatus and pattern inspection apparatus
08/06/15Mask inspection apparatus and mask inspection method
07/30/15Inspection apparatus and inspection method
07/23/15Focal position adjustment method and inspection method
07/23/15Multi charged particle beam writing apparatus, and multi charged particle beam writing method
07/16/15Exposure mask fabrication method, exposure mask fabrication system, and semiconductor device fabrication method
07/09/15Inspection inspecting line width and/or positional errors of a pattern
07/09/15Multi charged particle beam writing apparatus and multi charged particle beam writing method
06/04/15Multi charged particle beam writing apparatus, and multi charged particle beam writing method
05/21/15Objective lens switching mechanism and inspection apparatus
05/14/15Blanking device for multi charged particle beam, and multi charged particle beam writing method
05/14/15Defect estimation device and method and inspection system and method
05/07/15Measuring apparatus
05/07/15Measuring apparatus
04/16/15Blanking device for multiple charged particle beams
04/02/15Film formation apparatus and film formation method
04/02/15Manufacturing semiconductor device and manufacturing semiconductor device
03/05/15Charged particle beam writing apparatus, and charged particle beam writing method
03/05/15Multi charged particle beam writing apparatus and multi charged particle beam writing method
02/26/15Image capturing device and inspection apparatus and inspection method
02/26/15Method for producing a thermoelectron emission source and producing a cathode
02/12/15Method of analysing the changes in geometry of an irradiated fuel
02/12/15Multi charged particle beam writing method, and multi charged particle beam writing apparatus
02/12/15Charged particle beam writing apparatus and charged particle beam writing method
01/22/15Charged particle beam drawing apparatus and drawing chamber
01/22/15Inspection apparatus
01/15/15Vapor phase growth apparatus and vapor phase growth method
01/15/15Charged particle beam writing apparatus and charged particle beam writing method
Patent Packs
01/08/15Vapor phase growth apparatus and vapor phase growth method
01/08/15Vapor phase growth apparatus and vapor phase growth method
12/18/14Vapor phase growth apparatus
12/18/14Multi charged particle beam writing method, and multi charged particle beam writing apparatus
12/18/14Vapor phase growth apparatus and vapor phase growth method
12/11/14Multi charged particle beam writing method, and multi charged particle beam writing apparatus
12/11/14Temperature adjusting apparatus of mask substrate, mask drawing apparatus, and mask drawing method
11/27/14Multi charged particle beam writing apparatus, and multi charged particle beam writing method
11/27/14Inspection sensitivity evaluation method
10/30/14Charged particle beam drawing apparatus, format check apparatus and format check method
10/30/14Mask cover, charged particle beam drawing apparatus and charged particle beam drawing method
10/30/14Charged particle beam drawing apparatus and charged particle beam drawing method
10/30/14Inspection apparatus
10/23/14Pattern inspection apparatus and pattern inspection method
10/16/14Inspection apparatus and inspection method
10/16/14Inspection method and inspection apparatus
10/16/14Pattern inspection method
10/09/14Illumination apparatus and inspection apparatus
10/02/14Charged particle beam writing acquiring dose modulation coefficient of charged particle beam
10/02/14Inspection method and inspection apparatus
Social Network Patent Pack
09/18/14Current regulation multiple beams
09/18/14Charged particle beam writing apparatus, aperture unit, and charged particle beam writing method
08/28/14Replaceable light source and radiation generating device including the same
08/28/14Sample support apparatus
08/28/14Pattern inspection method and pattern inspection apparatus
08/21/14Inspection method and inspection apparatus
08/21/14Charged particle beam writing apparatus, and buffer memory data storage method
08/14/14Multi charged particle beam writing apparatus and multi charged particle beam writing method
07/31/14Vapor phase growth apparatus and vapor phase growth method
07/24/14Charged particle beam writing apparatus, adjusting beam incident angle to target object surface, and charged particle beam writing method
07/24/14Inspection apparatus
07/17/14Charged particle beam writing method
07/03/14Multi charged particle beam writing apparatus and multi charged particle beam writing method
06/26/14Multi charged particle beam writing apparatus
06/26/14Charged particle beam writing apparatus
06/19/14Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus
05/22/14Charged particle beam writing apparatus and charged particle beam dose check method
05/22/14Thermionic cathode and manufacturing thermionic cathode
05/08/14Multi charged particle beam writing method and multi charged particle beam writing apparatus
05/08/14Charged particle beam writing apparatus and charged particle beam writing method
Social Network Patent Pack
05/01/14Cathode selection method
04/24/14Inspection apparatus and inspection method
04/17/14Inspection apparatus and inspection apparatus system
04/10/14High-brightness, long life thermionic cathode and methods of its fabrication
03/20/14Charged particle beam writing apparatus and charged particle beam writing method
03/13/14Pattern evaluation method and apparatus
03/06/14Charged particle beam pattern writing method and charged particle beam writing apparatus
02/27/14Defect detection method
02/27/14Pattern test apparatus
01/02/14Mask drawing method, mask drawing apparatus
12/05/13Multi charged particle beam writing method and multi charged particle beam writing apparatus
11/28/13Charged particle beam lithography apparatus and charged particle beam pattern writing method
10/10/13Charged particle beam lithography apparatus, inspection apparatus and inspection pattern writing data
10/10/13Acquisition charged particle beam deflection shape error and charged particle beam writing method
10/03/13Film-forming apparatus and film-forming method
10/03/13Charged particle beam writing apparatus and charged particle beam writing method
10/03/13Shaping offset adjustment method and charged particle beam drawing apparatus
09/26/13Inspection system and method
09/26/13Film-forming the formation of silicon carbide and film-forming the formation of silicon carbide
09/26/13Charged particle beam writing apparatus and charged particle beam writing method
09/26/13Multi charged particle beam writing apparatus and multi charged particle beam writing method
09/26/13Multi charged particle beam writing apparatus and multi charged particle beam writing method
09/26/13Multi charged particle beam writing apparatus and multi charged particle beam writing method
09/19/13Multi charged particle beam writing apparatus and multi charged particle beam writing method
08/22/13Electron beam writing apparatus and electron beam writing method
08/22/13Inspection system and method
08/22/13Electron beam writing apparatus and electron beam writing method
07/11/13Luminous flux branching element and mask defect inspection apparatus
07/11/13Charged-particle beam drawing method, computer-readable recording media, and charged-particle beam drawing apparatus
06/20/13Film-forming apparatus and film-forming method
Social Network Patent Pack
06/20/13Film-forming apparatus and film-forming method
06/20/13Multi charged particle beam writing apparatus and multi charged particle beam writing method
06/13/13Charged particle beam writing apparatus and charged particle beam writing method
05/30/13Charged particle beam writing apparatus and charged particle beam writing method
05/02/13Film-forming method and film-forming apparatus
04/25/13Charged particle beam writing apparatus and charged particle beam writing method
04/18/13Defect estimation device and method and inspection system and method
04/18/13Defect estimation device and method and inspection system and method
04/04/13Charged particle beam writing apparatus and charged particle beam writing method
04/04/13Multi charged particle beam writing apparatus and multi charged particle beam writing method
04/04/13Pattern inspection apparatus and pattern inspection method
04/04/13Manufacturing semiconductor device
03/14/13Charged particle beam drawing method and charged particle beam drawing apparatus
03/07/13Multi charged particle beam writing apparatus and multi charged particle beam writing method
03/07/13Multi charged particle beam writing apparatus and multi charged particle beam writing method
02/21/13Pattern inspection apparatus and pattern inspection method
02/14/13Charged particle beam drawing apparatus and charged particle beam drawing method
01/10/13Apparatus and pattern inspection
12/06/12Inspection apparatus and method
11/22/12Charged particle beam writing apparatus and charged particle beam writing method
11/22/12Charged particle beam writing apparatus and same
11/15/12Charged particle beam writing apparatus and charged particle beam writing method
10/04/12Charged particle beam writing apparatus and charged particle beam writing method
10/04/12Method for fabricating semiconductor device, pattern writing apparatus, recording medium recording program, and pattern transfer apparatus
09/27/12Manufacturing semiconductor device
08/23/12Charged particle beam writing apparatus and charged particle beam writing method
08/23/12Charged particle beam writing apparatus and charged particle beam writing method
08/02/12Charged particle beam writing apparatus and method
07/26/12Charged particle beam writing apparatus and charged particle beam writing method







ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009



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