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Rudolph Technologies Inc patents

Recent patent applications related to Rudolph Technologies Inc. Rudolph Technologies Inc is listed as an Agent/Assignee. Note: Rudolph Technologies Inc may have other listings under different names/spellings. We're not affiliated with Rudolph Technologies Inc, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "R" | Rudolph Technologies Inc-related inventors




Date Rudolph Technologies Inc patents (updated weekly) - BOOKMARK this page
05/18/17Opto-acoustic metrology of signal attenuating structures
02/16/17Volumetric substrate scanner
12/01/16High speed autofocus system
08/18/16System for directly measuring the depth of a high aspect ratio etched feature on a wafer
08/04/16Automated wafer defect inspection system and a process of performing such inspection
05/26/16Method and apparatus to assist the processing of deformed substrates
04/14/16Calibration of semiconductor metrology systems
02/11/16Flexible handling system for semiconductor substrates
12/24/15Edge grip substrate handler
12/17/15Method of characterizing microfabrication process and products thereof
11/12/15Flying sensor head
11/05/15System and characterizing micro-fabrication processes
10/29/15Planar motor system with increased efficiency
10/01/15Multiple-blade device for substrate edge protection during photolithography
09/10/15Inspection of substrates using calibration and imaging
08/20/15Blade for substrate edge protection during photolithography
02/26/15Method of measuring and assessing a probe card with an inspection device
12/25/14Multiple measurement techniques including focused beam scatterometry for characterization of samples
12/18/14On-axis focus sensor and method
10/30/14System and characterizing micro-fabrication processes
10/23/14Substrate handler
09/11/14Inspection device with vertically moveable assembly
04/24/14System for directly measuring the depth of a high aspect ratio etched feature on a wafer
03/06/14Wafer edge inspection
08/22/13Scratch detection method and apparatus
08/15/13Wafer inversion mechanism
01/24/13Wafer edge inspection and metrology
11/15/12Infrared inspection of bonded substrates
10/11/12Substrate handler
07/26/12Optical inspection optimization
06/14/12Apparatus for obtaining planarity measurements with respect to a probe card analysis system
04/26/12Inspection device with vertically moveable assembly
04/12/12Automated wafer defect inspection system and a process of performing such inspection
03/22/12Polarization imaging
11/03/11Focusing method and apparatus
10/27/11Wafer edge inspection
06/16/11Reflective objective
06/16/11High reflection ratio material
04/21/11Probe card analysis system and method
04/14/11Wafer edge inspection and metrology
03/03/11Wafer fabrication monitoring systems and methods, including edge bead removal processing
02/17/11Wafer probe test and inspection system
12/23/10System and measuring probe float
12/02/10Method of applying the analysis of scrub mark morphology and location to the evaluation and correction of semiconductor testing, analysis, and manufacture
11/04/10Method and system for providing a high definition triangulation system
09/23/10Automated wafer defect inspection system and a process of performing such inspection
08/05/10High-speed capacitor leakage measurement systems and methods
04/08/10Wafer edge inspection and metrology
03/25/10Apparatus for obtaining planarity measurements with respect to a probe card analysis system
03/18/10All surface data for use in substrate inspection
03/11/10Probe mark inspection
01/21/10Wafer scanning
12/31/09Polarization imaging
03/19/09Illuminator for darkfield inspection







ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009



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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Rudolph Technologies Inc in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Rudolph Technologies Inc with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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