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Sematech Inc patents


Recent patent applications related to Sematech Inc. Sematech Inc is listed as an Agent/Assignee. Note: Sematech Inc may have other listings under different names/spellings. We're not affiliated with Sematech Inc, we're just tracking patents.

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Method for reducing charge in critical dimension-scanning electron microscope metrology

Methods and compositions are provided for reducing or eliminating charge buildup during scanning electron microscopy (sem) metrology of a critical dimension (cd) in a structure produced by lithography. An under layer is utilized that comprises silicon in the construction of the structure. ... Sematech Inc








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