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Shanghai Micro Electronics Equipment Co Ltd patents

Recent patent applications related to Shanghai Micro Electronics Equipment Co Ltd. Shanghai Micro Electronics Equipment Co Ltd is listed as an Agent/Assignee. Note: Shanghai Micro Electronics Equipment Co Ltd may have other listings under different names/spellings. We're not affiliated with Shanghai Micro Electronics Equipment Co Ltd, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "S" | Shanghai Micro Electronics Equipment Co Ltd-related inventors




Date Shanghai Micro Electronics Equipment Co Ltd patents (updated weekly) - BOOKMARK this page
08/03/17Exposure device and out-of-focus and tilt error compensation method
05/25/17Laser annealing device
01/19/17Lithography machine workpiece table and vertical position initialization method thereof
12/29/16Flat voice coil motor
11/24/16Silicon wafer edge protection device with collision protection function
11/10/16Reticle shape correction apparatus and photolithography tool using same
11/10/16Focusing leveling device
11/10/16Silicon wafer pre-alignment device and method therefor
05/26/16Reticle shape regulation device and method, and exposure apparatus using same
12/24/15Negative stiffness system for gravity compensation of micropositioner
12/10/15Warped silicon-chip adsorption device and adsorption method thereof
11/26/15Magnetic alignment system and alignment method therefor
10/29/15Wafer stage having function of anti-collision
10/08/15Balance mass system shared by workpiece table and mask table, and lithography machine
09/17/15Off-axis alignment system and alignment method
09/03/15Photolithographic illuminator device enabling controlled diffraction
08/20/15Photolithographic illuminator that is telecentric in two directions
05/21/15Linear motor and stage apparatus
04/09/15Method for measuring displacement of planar motor rotor
02/05/15Laser annealing apparatus and laser annealing method
01/08/15Planar motor rotor displacement measuring device and its measuring method
06/26/14Interference exposure device and method
03/13/14Method for measuring and calibrating centroid of coarse stage of photolithography tool
01/16/14Split type aerostatic bearing
11/07/13Large field projection objective for lithography
09/26/13Projection objective lens system
07/15/10Method for in-situ aberration measurement of optical imaging system in lithographic tools
11/05/09Immersion flow field maintenance system for an immersion lithography machine
09/03/09Precise positioning system for dual stage switching exposure
07/23/09Large-field unit-magnification projection optical system







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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Shanghai Micro Electronics Equipment Co Ltd in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Shanghai Micro Electronics Equipment Co Ltd with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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