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Shanghai Micro Electronics Equipment Co Ltd patents


Recent patent applications related to Shanghai Micro Electronics Equipment Co Ltd. Shanghai Micro Electronics Equipment Co Ltd is listed as an Agent/Assignee. Note: Shanghai Micro Electronics Equipment Co Ltd may have other listings under different names/spellings. We're not affiliated with Shanghai Micro Electronics Equipment Co Ltd, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "S" | Shanghai Micro Electronics Equipment Co Ltd-related inventors


Wafer processing device and method therefor

Disclosed in this invention is a wafer processing apparatus and method for pre-alignment and edge exposure of a wafer. The wafer processing apparatus includes a pre-alignment module, an edge exposure module, a motion module, a control module and a rotary table. The motion module includes a rotation module, a lifting... Shanghai Micro Electronics Equipment Co Ltd

Adjusting device and adjusting exposure device

An adjustment apparatus which is an optical system having an incident face and a light exit face that is parallel to the incident face. The optical system is disposed in an exposure device. The adjustment apparatus includes at least one wedge lens and a plurality of optical lenses configured such... Shanghai Micro Electronics Equipment Co Ltd

Exposure device and out-of-focus and tilt error compensation method

In an exposure apparatus and a method for defocus and tilt error compensation, each of alignment sensors (500a, 500b, 500c, 500d, 500e, 500f) corresponds to and has the same coordinate in the first direction as a respective one of focusing sensors (600a, 600b, 600c, 600d, 600e, 600f), so that each... Shanghai Micro Electronics Equipment Co Ltd

Laser annealing device

A laser annealing apparatus for annealing a silicon wafer placed on a wafer stage is disclosed which includes: a laser light source for generating a light beam; a first optical unit, configured to convert the light beam generated by the laser light source into a polarized light beam of a... Shanghai Micro Electronics Equipment Co Ltd

Lithography machine workpiece table and vertical position initialization method thereof

A fine-motion module for use in a wafer stage of a photolithography tool includes: a base (201); a fine-motion plate (210); a plurality of vertical motors (203), fixed between the base and the fine-motion plate; a plurality of gravity compensators (202), each having one end fixed on the base and... Shanghai Micro Electronics Equipment Co Ltd








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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Shanghai Micro Electronics Equipment Co Ltd in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Shanghai Micro Electronics Equipment Co Ltd with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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