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Sumco Corporation patents

Recent patent applications related to Sumco Corporation. Sumco Corporation is listed as an Agent/Assignee. Note: Sumco Corporation may have other listings under different names/spellings. We're not affiliated with Sumco Corporation, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "S" | Sumco Corporation-related inventors




Date Sumco Corporation patents (updated weekly) - BOOKMARK this page
09/07/17Method for polishing silicon wafer
09/07/17Semiconductor epitaxial wafer and producing the same, and producing solid-state image sensing device
08/03/17Quality-evaluated vitreous silica crucible
06/08/17Grinding apparatus and grinding method
04/06/17Silicon single crystal manufacturing method
03/30/17Inspection vitreous silica crucible
03/30/17Method for manufacturing single crystal
03/16/17Method and manufacturing single crystal
03/16/17Epitaxial silicon wafer and producing the epitaxial silicon wafer
03/16/17Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and producing solid-state image sensing device
03/09/17Vitreous silica crucible and manufacturing the same
03/09/17Production epitaxial silicon wafer, vapor deposition equipment and valve
03/02/17Soi wafer manufacturing process and soi wafer
03/02/17Soi wafer manufacturing process and soi wafer
02/16/17Silicon wafer and manufacturing same
01/12/17Method for manufacturing semiconductor wafer
01/12/17Epitaxial-silicon-wafer manufacturing method and epitaxial silicon wafer
12/29/16Quality evaluation silicon wafer, and silicon wafer and producing silicon wafer using the method
12/01/16Epitaxial wafer manufacturing method and epitaxial wafer
11/03/16Silicon wafer and manufacturing the same
10/27/16Vitreous silica crucible and distortion-measuring the same
10/27/16Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and producing solid-state image sensor
10/20/16Method of evaluating epitaxial wafer
10/13/16Susceptor, vapor deposition apparatus, vapor deposition method and epitaxial silicon wafer
10/06/16Vitreous silica crucible and manufacturing the same
10/06/16Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and producing solid-state image sensing device
09/01/16Silicon single crystal producing method
08/25/16Quality evaluation silicon wafer, and silicon wafer and producing silicon wafer using the method
08/18/16Epitaxial wafer and manufacturing the same
07/21/16Method of polishing wafer and wafer polishing apparatus
07/14/16Evaluation suitable silica powder in manufacturing vitreous silica crucible for pulling of silicon single crystal
07/14/16Vitreous silica crucible
07/14/16Inspection vitreous silica crucible
06/30/16Method of manufacturing single crystal
06/30/16Manufacturing epitaxial silicon wafer
06/23/16Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and producing solid-state image sensing device
06/23/16Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and producing solid-state image sensing device
06/23/16Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and producing solid-state image sensing device
06/16/16Single side polishing wafer
06/02/16Method for pulling silicon single crystal
05/26/16Method of producing silicon single crystal
05/26/16Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and producing solid-state image sensing device
05/05/16Method of producing epitaxial wafer
04/28/16Method of manufacturing composite crucible
04/21/16Vitreous silica crucible for pulling of silicon single crystal and manufacturing the same
04/07/16Contamination control vapor deposition apparatus and producing epitaxial silicon wafer
04/07/16Wafer for solar cell, producing wafer for solar cell, producing solar cell, and producing solar cell module
03/24/16Production epitaxial silicon wafer and vapor deposition apparatus
03/24/16Epitaxial silicon wafer
03/17/16Method of evaluating metal contamination in boron-doped p-type silicon wafer, device of evaluating metal contamination in boron-doped p-type silicon wafer, and manufacturing boron-doped p-type silicon wafer
02/11/16Epitaxial silicon wafer and manufacturing same
02/04/16Manufacturing epitaxial silicon wafer
01/14/16Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and producing solid-state image sensing device
12/31/15Manufacturing epitaxial silicon wafer, and epitaxial silicon wafer
12/24/15Method of manufacturing vitreous silica crucible and manufacturing silicon ingot
11/26/15Method of manufacturing composite crucible and manufacturing silicon crystal
11/05/15Method of evaluating metal contamination in semiconductor wafer and manufacturing semiconductor wafer
10/22/15Method for processing semiconductor wafer
07/02/15Epitaxial growth apparatus
07/02/15Method of producing epitaxial silicon wafer and epitaxial silicon wafer
07/02/15Wafer defect inspection inspecting a wafer defect
06/18/15Method and polishing work
04/30/15Epitaxial growth method
04/23/15Epitaxial growth method
03/26/15Polycrystalline silicon and casting the same
Patent Packs
03/26/15Polishing composition and polishing method using the same
03/05/15Apparatus and double-side polishing of work
02/26/15Silicon wafer and manufacturing method thereof
01/29/15Silica glass crucible
01/08/15Method for measuring three-dimensional shape of silica glass crucible, and producing monocrystalline silicon
01/01/15Machining process for semiconductor wafer
11/06/14Method for evaluating silica glass crucible, producing silicon single crystals
09/18/14Semiconductor wafer and producing same
08/28/14Wafer for solar cell, producing wafer for solar cell, producing solar cell, and producing solar cell module
06/12/14Method of polishing one side of wafer and single side polishing wafer
05/15/14Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and producing solid-state image sensing device
05/15/14Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and producing solid-state image sensing device
04/10/14Method of evaluating metal contamination in semiconductor sample and manufacturing semiconductor substrate
03/20/14Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and producing solid-state image sensing device
02/27/14Method of producing wafer for solar cell, producing solar cell, and producing solar cell module
Patent Packs
01/02/14Method for determining cop generation factors for single-crystal silicon wafer
12/19/13Method and polishing workpiece
12/05/13Crystal holding mechanism of single crystal pulling device and producing single crystal ingot
11/21/13Apparatus for cleaning exhaust passage for semiconductor crystal manufacturing device and cleaning same
10/10/13Silicon single crystal manufacturing apparatus and silicon single crystal manufacturing method
10/10/13Method of producing epitaxial wafer and the epitaxial wafer
08/29/13Method for removing oxide film formed on surface of silicon wafer
05/30/13Silicon electromagnetic casting apparatus
05/02/13Method for polishing silicon wafer, and polishing solution for use in the method
04/18/13Method for polishing silicon wafer
02/07/13Method for polishing silicon wafer and polishing liquid therefor
12/27/12Wafer for backside illumination type solid imaging device, production method thereof and backside illumination solid imaging device
12/13/12Manufacturing semiconductor wafer
12/06/12Silicon wafer and manufacturing thereof, and manufacturing semiconductor device
11/22/12Method of evaluating silicon wafer and manufacturing silicon wafer
11/15/12Epitaxial growth apparatus and epitaxial growth method
09/27/12Tray for cvd and forming film using same
09/20/12Cleaning method
08/16/12Method for polishing semiconductor wafer
07/12/12Method of detecting specific defect, and system and program for detecting specific defect
06/21/12Method for producing epitaxial silicon wafer
06/14/12Apparatus of producing silicon single crystal and producing silicon single crystal
05/24/12Epitaxial wafer and production method thereof
05/10/12Epitaxial silicon wafer and manufacturing same
05/10/12Epitaxial silicon wafer and manufacturing same
05/03/12Epitaxial wafer and producing the same
04/19/12Method for producing silicon epitaxial wafer
03/29/12Method of etching surface layer portion of silicon wafer and analyzing metal contamination of silicon wafer
03/22/12Fixed abrasive-grain processing device, fixed abrasive-grain processing, and producing semiconductor wafer
03/08/12Epitaxial silicon wafer and production method thereof
Social Network Patent Pack
03/01/12Method of analyzing iron concentration of boron-doped p-type silicon wafer and manufacturing silicon wafer
03/01/12Silicon wafer and producing the same
02/23/12Silicon wafer and manufacturing method
02/09/12Semiconductor substrate, semiconductor device, and producing semiconductor substrate
02/09/12Method for cleaning silicon sludge
02/09/12Method for producing silicon epitaxial wafer
02/02/12Semiconductor wafer polishing method and polishing pad shaping jig
02/02/12Method for determining cop generation factors for single-crystal silicon wafer
01/26/12Semiconductor substrate for solid-state image sensing device as well as solid-state image sensing device and producing the same
01/19/12Silicon wafer and manufacturing same
Patent Packs
12/22/11Sapphire seed and manufacturing the same, and manufacturing sapphire single crystal
12/08/11Epitaxial wafer and producing the same
11/17/11Wafer defect inspection inspecting a wafer defect
10/27/11Method for manufacturing a silicon wafer
10/27/11Silicon single crystal pull-up apparatus and manufacturing silicon single crystal
10/27/11Method for manufacturing a silicon wafer
10/27/11Polishing solution distribution apparatus and polishing apparatus having the same
10/13/11Epitaxial substrate for solid-state imaging device with gettering sink, semiconductor device, back illuminated solid-state imaging device and manufacturing method thereof
10/06/11Epitaxial silicon wafer and fabrication method thereof
10/06/11Laser processing transparent material
08/11/11Image data processing method and image creating method
08/04/11Method of producing silicon wafer, epitaxial wafer and solid state image sensor, and device for producing silicon wafer
07/14/11Silicon epitaxial wafer and production same
07/14/11Method for shape modification of polishing pad
06/16/11Processes for production of silicon ingot, silicon wafer and epitaxial wafer , and silicon ingot
06/16/11Semiconductor manufacturing plant
06/09/11Method for producing epitaxial silicon wafer
06/09/11Method of controlling film thinning of semiconductor wafer for solid-state image sensing device
05/26/11Method for measuring semiconductor wafer profile and device for measuring the same used therefor
05/19/11Method of manufacturing silicon single crystal
05/19/11Method for manufacturing epitaxial wafer and wafer holder used in the method
05/19/11Epitaxial growth apparatus and epitaxial growth method
05/12/11Wafer bonding method
04/21/11Semiconductor device and manufacturing the same
04/14/11Epitaxial wafer and producing the same
04/14/11Method of removing heavy metal in semiconductor substrate
03/17/11Method of producing bonded substrate
03/10/11Method of producing single crystal silicon
03/03/11Wire saw device
03/03/11Epitaxial substrate for back-illuminated image sensor and manufacturing method thereof
Patent Packs
03/03/11Method of producing epitaxial wafer as well as epitaxial wafer
02/17/11Single-crystal growth apparatus and raw-material supply method
02/10/11Silicon epitaxial wafer and production thereof
02/03/11Method and inspecting defects in wafer
02/03/11Method for producing semiconductor substrate
01/27/11Method for producing laser-marked semiconductor wafer
12/30/10Method of manufacturing silicon single crystal, pulling silicon single crystal and vitreous silica crucible
12/30/10Method for manufacturing simox wafer and simox wafer
12/23/10Method and controlling the growth process of a monocrystalline silicon ingot
12/23/10Method of producing silicon single crystal
12/23/10Silicon monocrystal growth method
12/09/10Method for judging whether semiconductor wafer is non-defective wafer by using laser scattering method
12/09/10Method of producing epitaxial substrate for solid-state imaging device, and producing solid-state imaging device
12/02/10Method and manufacturing semiconductor substrate dedicated to semiconductor device, and manufacturing semiconductor device
11/18/10Method for manufacturing epitaxial silicon wafer
11/11/10Method of producing bonded wafer
10/14/10Method for manufacturing epitaxial wafer
10/07/10Method for cleaning silicon wafer and cleaning the silicon wafer
10/07/10Apparatus for removing reflected light
09/30/10Seed crystal for pulling silicon single crystal and manufacturing silicon single crystal by using the seed crystal
Social Network Patent Pack
09/30/10Method for producing a bonded wafer
09/23/10Epitaxial wafer
09/09/10High resistivity silicon wafer and manufacturing the same
09/09/10Epitaxial film growing method, wafer supporting structure and susceptor
09/02/10Method for manufacturing direct bonded soi wafer and direct bonded soi wafer manufactured by the methond
08/26/10Cylindrical grinder and cylindrical grinding ingot
08/12/10Wafer surface measuring apparatus
08/05/10Method for manufacturing simox wafer
08/05/10Polishing pad thickness measuring method and polishing pad thickness measuring device
07/22/10Method for producing bonded wafer
07/15/10Method for manufacturing silicon single crystal
07/15/10Method for producing bonded wafer
07/08/10Apparatus for pulling silicon single crystal
07/01/10Method of producing bonded silicon wafer
06/24/10Manufacturing epitaxial wafer
06/17/10Semiconductor substrate for solid-state image sensing device as well as solid-state image sensing device and producing the same
06/17/10Method for smoothing wafer surface and apparatus used therefor
06/17/10Epitaxial wafer and manufacturing the same
06/10/10Method of producing bonded wafer
06/10/10Method for producing bonded wafer
Social Network Patent Pack
05/27/10Silica glass crucible and pulling single-crystal silicon
05/27/10Apparatus and pulling silicon single crystal
05/27/10Silicon single crystal and growing thereof, and silicon wafer and manufacturing thereof
05/27/10Processing uniformizing film thickness distribution of layer having predetermined film thickness formed on surface of silicon wafer and processing uniformizing thickness distribution of silicon wafer
05/06/10Method of manufacturing silicon single crystal, silicon single crystal ingot, and silicon wafer
04/22/10Arc melting high-purity carbon electrode and application thereof
04/22/10Arc discharge apparatus, manufacturing vitreous silica glass crucible, and pulling up silicon single crystal
04/15/10Silica glass crucible and pulling single-crystal silicon
04/08/10Method for reducing crystal defect of simox wafer and simox wafer
04/08/10Laser scattering defect inspection system and laser scattering defect inspection method
03/18/10Method for producing bonded silicon wafer
03/11/10Method for producing wafer for backside illumination type solid imaging device
03/11/10Method of manufacturing semiconductor substrate
03/04/10Silicon wafer and producing the same
03/04/10Semiconductor substrate and manufacturing the same
03/04/10Silicon wafer and producing the same
02/25/10Method for producing wafer for backside illumination type solid imaging device
02/11/10Epitaxial silicon wafer and production method thereof
02/04/10Ion implanting device and method
02/04/10Alkali etching liquid for silicon wafer and etching method using same
02/04/10Wafer for backside illumination type solid imaging device, production method thereof and backside illumination type solid imaging device
02/04/10Susceptor, vapor phase growth apparatus, and manufacturing epitaxial wafer
02/04/10Apparatus and etching semiconductor wafer
01/28/10Wafer manufacturing method and wafer obtained through the method
01/28/10Method for producing high-resistance simox wafer
01/21/10Wafer holding tool for ion implanting apparatus
01/21/10Method for producing bonded wafer
01/14/10Silica glass crucible and pulling up silicon single crystal using the same
01/14/10Ion implantation apparatus and ion implantation method
01/14/10Method of producing semiconductor wafer
Social Network Patent Pack
01/14/10Semiconductor wafer and production method thereof
01/14/10Method of producing semiconductor wafer
01/07/10Method for manufacturing epitaxial wafer
12/31/09Epitaxial wafer and production method thereof
12/31/09Silicon substrate for solid-state imaging device and manufacturing the same
12/31/09Method for manufacturing silicon wafer
12/24/09Ion-implanting apparatus
12/17/09Wafer polishing method and wafer produced thereby
12/17/09Method for producing semiconductor wafer
12/17/09Method for producing semiconductor wafer
12/17/09Method for producing semiconductor wafer
12/17/09Method for producing semiconductor wafer
12/10/09Silicon epitaxial wafer and the production method thereof
12/10/09Epitaxial silicon wafer and producing the same
12/10/09Film thickness measurement method, epitaxial wafer production process and epitaxial wafer
12/10/09Preparation of porous carbon materials using agricultural wastes
12/10/09Soi wafer and manufacturing method thereof
12/03/09Production silicon single crystal
12/03/09Method for cleaning semiconductor wafer
12/03/09Silicon wafer
12/03/09Semiconductor wafer
12/03/09Silicon wafer
12/03/09Semiconductor thin film-attached substrate and production method thereof
12/03/09Method for producing bonded wafer
12/03/09Method of polishing silicon wafer
12/03/09Method of grinding semiconductor wafers, grinding surface plate, and grinding device
12/03/09Method of grinding semiconductor wafers and device for grinding both surfaces of semiconductor wafers
11/26/09Wafer for backside illumination type solid imaging device, production method thereof and backside illumination solid imaging device
11/26/09Semiconductor wafer







ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009



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