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Tel Fsi Inc patents


Recent patent applications related to Tel Fsi Inc. Tel Fsi Inc is listed as an Agent/Assignee. Note: Tel Fsi Inc may have other listings under different names/spellings. We're not affiliated with Tel Fsi Inc, we're just tracking patents.

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Magnetically levitated and rotated chuck for processing microelectronic substrates in a process chamber

Cleaning systems and methods for semiconductor fabrication use rotatable and optionally translatable chuck assemblies that incorporate magnetic levitation and rotation functionality to cause chuck rotation. The rotating chuck components do not physically contact other chuck components when levitated and rotating. ... Tel Fsi Inc

Systems and methods for treating substrates with cryogenic fluid mixtures

Disclosed herein are systems and methods for treating the surface of a microelectronic substrate, and in particular, relate to an apparatus and method for scanning the microelectronic substrate through a cryogenic fluid mixture used to treat an exposed surface of the microelectronic substrate. The fluid mixture may be expanded through a nozzle to form an aerosol spray or gas cluster jet (gcj) spray may impinge the microelectronic substrate and remove particles from the microelectronic substrate's surface. ... Tel Fsi Inc

Apparatus for spraying cryogenic fluids

Disclosed herein are systems and methods for treating the surface of a microelectronic substrate, and in particular, relate to an apparatus and method for scanning the microelectronic substrate through a cryogenic fluid mixture used to treat an exposed surface of the microelectronic substrate. In particular, an improved nozzle design used to expand the fluid mixture is disclosed herein. ... Tel Fsi Inc

Systems & methods for metering a dose volume of fluid used to treat microelectronic substrates

The disclosure relates to systems and methods for metering a dose volume of fluid that may be used to treat microelectronic substrates. The system enables precision dispensing of relatively small amounts of a liquid chemical into a chemical bath or processing chamber for microelectronic substrates. ... Tel Fsi Inc








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