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Tel Fsi Inc patents

Recent patent applications related to Tel Fsi Inc. Tel Fsi Inc is listed as an Agent/Assignee. Note: Tel Fsi Inc may have other listings under different names/spellings. We're not affiliated with Tel Fsi Inc, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "T" | Tel Fsi Inc-related inventors




Date Tel Fsi Inc patents (updated weekly) - BOOKMARK this page
02/02/17Systems & methods for metering a dose volume of fluid used to treat microelectronic substrates
10/20/16Systems and methods for treating substrates with cryogenic fluid mixtures
09/29/16Method for wet stripping silicon-containing organic layers
09/22/16Apparatus and scanning an object through a fluid stream
06/16/16Detection of lost wafer from spinning chuck
06/09/16Methodologies for rinsing tool surfaces in tools used to process microelectronic workpieces
04/07/16Systems and methods for treating substrates with cryogenic fluid mixtures
04/07/16Systems and methods for treating substrates with cryogenic fluid mixtures
04/07/16Systems and methods for treating substrates with cryogenic fluid mixtures
04/07/16Systems and methods for treating substrates with cryogenic fluid mixtures
01/14/16Process for silicon nitride removal selective to sigex
06/18/15Method and treating a workpiece with arrays of nozzles
06/11/15Method of using separate wafer contacts during wafer processing
06/11/15Method of substrate temperature control during high temperature wet processing
03/19/15Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
03/12/15Apparatus and scanning an object through a fluid spray
11/13/14Process comprising water vapor for haze elimination and residue removal
09/18/14Processing providing a heated etching solution
09/18/14Processing providing a heated etching solution
07/24/14Process for removing carbon material from substrates
07/24/14Process for increasing the hydrophilicity of silicon surfaces following hf treatment
08/22/13Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
08/08/13Process for silicon nitride removal selective to sigex
05/09/13Process for removing material from substrates







ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009



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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Tel Fsi Inc in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Tel Fsi Inc with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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