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| Date |
Ulvac Inc patents (updated weekly) - BOOKMARK this page |
| 08/10/17 | Target assembly |
| 07/27/17 | Rf sputtering apparatus and sputtering method |
| 07/20/17 | Substrate processing apparatus and substrate processing method |
| 07/20/17 | Substrate processing device |
| 06/22/17 | Insulator target |
| 06/15/17 | Plasma etching method, plasma etching device, plasma processing method, and plasma processing device |
| 06/15/17 | Plasma treatment device and wafer transfer tray |
| 05/25/17 | Multi-layered film and manufacturing the same |
| 05/18/17 | Multi-layered film, manufacturing the same, and manufacturing apparatus of the same |
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| 05/11/17 | Method of manufacturing multi-layered film and multi-layered film |
| 04/13/17 | Pzt thin film laminate and manufacturing method thereof |
| 03/16/17 | Method for forming positive electrode for thin film lithium-ion rechargeable battery, positive electrode for thin film lithium-ion rechargeable battery, and thin film lithium-ion rechargeable battery |
| 03/09/17 | Transfer device and vacuum apparatus |
| 03/02/17 | Touch panel, manufacturing touch panel, and optical thin film |
| 02/23/17 | Method for forming carbon electrode film, carbon electrode, and manufacturing phase change memory element |
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| 01/19/17 | Method of manufacturing multi-layered film, and multi-layered film |
| 01/12/17 | Variable-resisance element and production method therefor |
| 01/05/17 | Vacuum melting and casting apparatus |
| 01/05/17 | Film forming apparatus and film forming method |
| 01/05/17 | Lithium-sulfur secondary battery |
| 12/29/16 | Thin substrate processing device |
| 12/08/16 | Positive electrode for lithium-sulfur secondary battery and forming the same |
| 12/01/16 | Metal/ceramic bonded body, diaphragm vacuum gauge, bonding metal and ceramic, and production diaphragm vacuum gauge |
| 10/13/16 | Insulated gate bipolar transistor and production method thereof |
| 09/29/16 | Lithium-sulfur secondary battery |
| 09/29/16 | Lithium-sulfur secondary battery |
| 06/23/16 | Positive electrode for alkali metal-sulfur battery, alkali metal-sulfur battery including the same, and preparing the positive electrode |
| 05/12/16 | Deep ultraviolet led and manufacturing the same |
| 05/05/16 | Device structure and producing the same |
| 04/21/16 | Touch panel, producing the same, optical thin film substrate and producing the same |
| 03/03/16 | Catalytic chemical vapor deposition apparatus |
| 02/11/16 | Semiconductor light emitting element and producing the same |
| 01/14/16 | Ion irradiation device and ion irradiation method |
| 12/03/15 | Articulated robot, and conveying device |
| 11/26/15 | Film formation method and film formation apparatus |
| 11/26/15 | Method of manufacturing radiological image conversion panel and radiological image conversion panel |
| 08/13/15 | Method of, and , forming hard mask |
| 08/13/15 | Mounting device and manufacturing the same |
| 08/06/15 | Method of manufacturing semiconductor device and semiconductor device |
| 07/16/15 | Plasma etching apparatus |
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| 07/16/15 | Method of manufacturing metal hydroxides and manufacturing ito sputtering target |
| 06/25/15 | Ion beam irradiation device |
| 04/30/15 | Organic thin film formation device |
| 04/30/15 | Film formation device |
| 04/23/15 | Hard mask and manufacturing the same |
| 04/23/15 | Hard mask and manufacturing the same |
| 02/26/15 | Deposition method and deposition apparatus |
| 01/15/15 | Ashing device |
| 11/13/14 | Method of manufacturing semiconductor device and semiconductor device |
| 08/07/14 | Vacuum treatment device |
| 06/19/14 | Resistance change element and producing the same |
| 06/12/14 | Vacuum processing device and vacuum processing method |
| 04/17/14 | Method of manufacturing variable resistance element and manufacturing the same |
| 03/20/14 | Silicon purification method and silicon purification device |
| 02/20/14 | Film-forming apparatus |
| 01/30/14 | Evaporating material and manufacturing the same |
| 12/26/13 | Transport apparatus and vacuum system |
| 12/19/13 | Organic thin film forming apparatus |
| 11/21/13 | Radical etching apparatus and method |
| 10/31/13 | Method of manufacturing dielectric device and ashing method |
| 10/31/13 | Method of manufacturing tunneling magnetoresistive element |
| 10/24/13 | Coupling structure for vacuum exhaust device and vacuum exhaust system |
| 10/03/13 | Eccentric circling drive device |
| 09/26/13 | Silicon refining device and silicon refining method |
| 09/19/13 | Vacuum freeze-drying apparatus and frozen particle manufacturing method |
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| 09/19/13 | Film-forming cleaning film-forming apparatus |
| 09/05/13 | Dielectric film forming forming dielectric film |
| 09/05/13 | Protective film forming method, and surface flattening method |
| 08/29/13 | Thin-film forming method and thin-film forming apparatus |
| 08/29/13 | Method for forming dielectric thin film |
| 08/29/13 | Tungsten target and producing same |
| 08/22/13 | Thin film forming method and thin film forming apparatus |
| 08/15/13 | Method for measuring viscoelastic modulus of substance, and measuring viscoelastic modulus of substance |
| 08/15/13 | Positive electrode for lithium-sulfur secondary battery and forming the same |
| 08/08/13 | Leak detector |
| 08/08/13 | Film-forming apparatus, and maintaining film-forming apparatus |
| 08/08/13 | Drive device |
| 07/25/13 | Vacuum film forming apparatus |
| 07/25/13 | Target device, sputtering manufacturing a target device |
| 07/11/13 | Film-forming apparatus |
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| 07/11/13 | Manufacturing method and manufacturing apparatus of device |
| 07/04/13 | Vacuum processing apparatus |
| 06/13/13 | Water-reactive al-based composite material, water-reactive al-based thermally sprayed film, process for production of such al-based thermally sprayed film, and constituent member for film-forming chamber |
| 05/23/13 | Substrate conveyance method and substrate conveyance system |
| 04/25/13 | Sputtering deposition apparatus and adhesion preventing member |
| 04/18/13 | Film-forming device and film-forming method |
| 04/18/13 | Sputter deposition apparatus |
| 03/21/13 | Sputter deposition apparatus |
| 02/28/13 | Sputtering device |
| 02/28/13 | Solar cell manufacturing apparatus and solar cell manufacturing method |
| 01/24/13 | Method for the formation of co film and the formation of cu interconnection film |
| 12/06/12 | Manufacturing licoo2 sintered body and sputtering target |
| 12/06/12 | Manufacturing licoo2, sintered body and sputtering target |
| 11/22/12 | Drive device and conveyance device |
| 11/15/12 | Conveying device and vacuum apparatus |
| 10/18/12 | Method for forming ni film |
| 09/27/12 | Method for forming nisi film, forming silicide film, forming metal film for use in silicide-annealing, vacuum processing and film-forming apparatus |
| 09/13/12 | Organic thin film deposition device, organic el element manufacturing device, and organic thin film deposition method |
| 08/16/12 | Semiconductor device, liquid crystal display device having semiconductor device, and producing semiconductor device |
| 08/02/12 | Method for operating substrate processing apparatus |
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| 08/02/12 | Wiring layer, semiconductor device and liquid crystal display device |
| 08/02/12 | Process for producing thin film lithium secondary battery |
| 07/26/12 | Plasma etching apparatus |
| 07/19/12 | Silicon purification method and silicon purification device |
| 06/28/12 | Gate valve |
| 06/21/12 | Method for manufacturing piezoelectric element |
| 06/14/12 | Self-cleaning catalytic chemical vapor deposition apparatus and cleaning method thereof |
| 05/31/12 | Method of manufacturing a sputtering target and sputtering target |
| 05/31/12 | Dry pump |
| 05/24/12 | Dry etching method |
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| 05/17/12 | Film forming method and film forming apparatus |
| 05/17/12 | Film formation apparatus |
| 05/17/12 | Method for producing electronic device, electronic device, semiconductor device, and transistor |
| 05/17/12 | Coating surface processing method and coating surface processing apparatus |
| 05/10/12 | Film-forming apparatus |
| 05/10/12 | Vacuum processing apparatus and vacuum processing method |
| 05/10/12 | Teaching apparatus of robot and teaching robot |
| 05/03/12 | Vacuum film-forming apparatus and position detection shutter plate of vacuum film-forming apparatus |
| 05/03/12 | Film formation apparatus |
| 04/26/12 | Film formation apparatus and film forming method |
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| 04/26/12 | Magnetron sputtering cathode and film formation apparatus |
| 04/19/12 | Photovoltaic cell manufacturing method and photovoltaic cell manufacturing apparatus |
| 04/05/12 | Vacuum deposition system and vacuum deposition method |
| 03/15/12 | Pressure reduction system and vacuum treatment device |
| 03/15/12 | Film forming apparatus and a barrier film producing method |
| 03/08/12 | Sputtering target and processing a sputtering target |
| 03/08/12 | Target for sputtering |
| 02/23/12 | Vacuum heating device and vacuum heat treatment method |
| 02/16/12 | Sintered body for zno-ga2o3-based sputtering target and producing the same |
| 02/09/12 | Semiconductor device manufacturing method and semiconductor device manufacturing apparatus |
| 02/09/12 | Photoelectric conversion device manufacturing system and photoelectric conversion device manufacturing method |
| 01/26/12 | Method of producing a lead zirconium titanate-based sintered body, lead zirconium titanate-based sintered body, and lead zirconium titanate-based sputtering target |
| 01/19/12 | Photovoltaic cell manufacturing method and photovoltaic cell manufacturing apparatus |
| 01/19/12 | Photoelectric conversion device manufacturing method, photoelectric conversion device, photoelectric conversion device manufacturing system, and using photoelectric conversion device manufacturing system |
| 01/12/12 | Temperature sensing device and heating device |
| 01/05/12 | Method of producing semiconductor device |
| 12/29/11 | Method for manufacturing semiconductor device |
| 12/29/11 | Solar module |
| 12/29/11 | Oxygen detection method, air leakage determination method, gas component detection device, and vacuum processing apparatus |
| 12/22/11 | Solar cell module and manufacturing the same |
| 12/08/11 | Touch panel |
| 12/08/11 | Electrode circuit, film formation device, electrode unit, and film formation method |
| 12/01/11 | Tray for transporting wafers and fixing wafers onto the tray |
| 12/01/11 | Film-forming forming passivation film and manufacturing solar cell element |
| 11/10/11 | Method for manufacturing solar cell, and solar cell |
| 11/03/11 | Ta sputtering target and producing the same |
| 10/20/11 | Method for manufacturing solar cell, etching device, and cvd device |
| 10/13/11 | Ion implanting apparatus |
| 10/06/11 | Method of producing magnetic storage medium, magnetic storage medium and information storage device |
| 09/29/11 | Catalytic chemical vapor deposition apparatus |
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| 09/29/11 | Method for producing a thin film transistor, and a thin film transistor |
| 09/22/11 | Seal mechanism and treatment apparatus |
| 09/01/11 | Print head, printer |
| 09/01/11 | Take-up vacuum processing apparatus |
| 09/01/11 | Print head, printer |
| 09/01/11 | Conveying device and vacuum apparatus |
| 09/01/11 | Manufacturing magnetic recording medium |
| 08/25/11 | Photoelectric conversion device manufacturing method, photoelectric conversion device, and photoelectric conversion device manufacturing system |
| 08/25/11 | Semiconductor device and manufacturing the same |
| 08/25/11 | Method of producing magnetic storage medium, magnetic storage medium and information storage device |
| 08/25/11 | Mask and film formation method using the same |
| 08/18/11 | Discharge unit and discharge apparatus |
| 08/18/11 | Organic thin film deposition device, organic el element manufacturing device, and organic thin film deposition method |
| 08/18/11 | Sputtering apparatus, thin-film forming method, and manufacturing a field effect transistor |
| 08/18/11 | Chalcogenide film and manufacturing method thereof |
| 08/18/11 | Discharge device |
| 08/18/11 | Water-collapsible al composite material, al film and al powder consisting of this material, and methods for preparation thereof, as well as component members for constituting film-forming chambers and the recovery of film-forming materials |
| 08/18/11 | Sputtering apparatus, thin-film forming method, and manufacturing a field effect transistor |
| 08/11/11 | Freeze-drying apparatus and freeze-drying method |
| 08/11/11 | Water-collapsible al composite material, al film and al powder consisting of this material, and methods for preparation thereof, as well as component members for constituting film-forming chambers and the recovery of film-forming materials |
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| 08/11/11 | Sputtering target for forming thin film transistor wiring film |
| 08/11/11 | Film forming antireflection film, antireflection film, and film forming device |
| 08/11/11 | Method of producing magnetic storage medium, magnetic storage medium and information storage device |
| 08/11/11 | Dry pump |
| 08/11/11 | Sputtering apparatus, thin-film forming method, and manufacturing a field effect transistor |
| 08/04/11 | Magnetic recording medium manufacturing device |
| 08/04/11 | Thin-film solar cell manufacturing apparatus |
| 08/04/11 | Evaporating material and manufacturing the same |
| 08/04/11 | Manufacturing solar cell |
| 07/28/11 | Plasma processing method and plasma processing apparatus |
| 07/28/11 | Vacuum processing apparatus |
| 07/21/11 | Melting furnace |
| 07/14/11 | Method of manufacturing photovoltaic cell |
| 07/07/11 | Solar cell and solar cell manufacturing method |
| 07/07/11 | Vacuum evacuation device |
| 06/30/11 | Photoelectric conversion device manufacturing method, photoelectric conversion device, and photoelectric conversion device manufacturing system |
| 06/23/11 | Inkjet ultrasonic cleaning station |
| 06/23/11 | Parallel motion system for industrial printing |
| 06/23/11 | Inkjet printhead module with adjustable alignment |
| 06/23/11 | Photovoltaic cell manufacturing method |
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| 06/16/11 | Vacuum processing apparatus and vacuum processing method |
| 06/09/11 | Silicon purification method |
| 06/09/11 | Photovoltaic cell manufacturing method and photovoltaic cell manufacturing apparatus |
| 06/09/11 | Silicon purification method |
| 06/02/11 | Method for refining metal |
| 05/26/11 | Thin-film solar cell manufacturing apparatus |
| 05/26/11 | Solar cell and manufacturing the same |
| 05/26/11 | Manufacturing magnetic recording medium, magnetic recording medium, and information storage device |
| 05/19/11 | Freeze-drying apparatus |
| 05/19/11 | Freeze-drying apparatus and freeze-drying method |
| 05/19/11 | Thin-film solar battery module manufacturing method and thin-film solar battery module |
| 05/19/11 | Deposition apparatus and deposition method |
| 05/19/11 | Plasma processing method |
| 05/12/11 | Apparatus for manufacturing thin-film solar cell |
| 05/12/11 | Thin-film solar battery module and manufacturing the same |
| 05/12/11 | Solar cell and manufacturing same |
| 05/05/11 | Method for forming cu electrical interconnection film |
| 05/05/11 | Film formation apparatus |
| 05/05/11 | Thin-film solar cell manufacturing apparatus |
| 04/28/11 | Apparatus for manufacturing thin-film solar cell |
| 04/28/11 | Thin-film solar cell manufacturing apparatus |
| 04/21/11 | Method of producing silylated porous insulating film, producing semiconductor device, and silylated material |
| 04/21/11 | Touch panel manufacturing method and film formation apparatus |
| 04/21/11 | Method of forming organic polymer thin film and an forming the organic polymer thin film |
| 04/21/11 | Apparatus for producing multilayer sheet and producing the multilayer sheet |
| 03/24/11 | Method for producing thin film transistor and thin film transistor |
| 03/24/11 | Display device, producing display device, and producing display device |
| 03/24/11 | Thin film transistor and producing thin film transistor |
| 03/03/11 | Substrate transfer processing apparatus |
| 03/03/11 | Switch valve |
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| 03/03/11 | Magnetron sputtering apparatus and magnetron sputtering method |
| 03/03/11 | Film forming method and film forming apparatus |
| 02/24/11 | Water-reactive al composite material, water-reactive al film, process for the production of the al film, and constituent member for film-forming chamber |
| 02/24/11 | Method for the production of water-reactive al film and constituent member for film-forming chamber |
| 02/24/11 | Water-reactive al composite material, water-reactive al film, process for the production of the al film, and constituent member for film-forming chamber |
| 02/24/11 | Method for the production of water-reactive al film and constituent member for film-forming chamber |
| 02/24/11 | Water-reactive al composite material, water-reactive al film, process for the production of the al film, and constituent member for film-forming chamber |
| 02/24/11 | Film forming source, vapor deposition apparatus, and manufacturing an organic el element |
| 02/24/11 | Stage |
| 02/17/11 | Water-reactive al composite material, water-reactive al film, process for the production of the al film , and constituent member for film-forming chamber |
| 02/10/11 | Solar cell |
| 02/10/11 | Substrate for cell adhesion or culture and producing the same |
| 01/27/11 | Method and manufacturing solar cell |
| 01/27/11 | Solar cell, and manufacturing the same |
| 01/20/11 | Film deposition apparatus and film deposition method |
| 01/13/11 | Method and manufacturing solar cell, and solar cell |
| 12/16/10 | Evaporation source and film-forming device |
| 12/16/10 | Chalcogenide film and manufacturing same |
| 12/16/10 | Method for manufacturing semiconductor device |
| 12/09/10 | Take-up type vacuum deposition apparatus |
| 12/09/10 | Magnetic device manufacturing method |
| 12/09/10 | Substrate processing method and substrate processed by this method |
| 12/02/10 | Method of producing thin film transistor and thin film transistor |
| 11/25/10 | Sputtering film forming method and sputtering film forming apparatus |
| 11/25/10 | Process for producing liquid crystal display device |
| 11/25/10 | Touch panel and manufacturing touch panel |
| 11/25/10 | Printable substrate and nozzle alignment system |
| 11/18/10 | Film deposition apparatus and film deposition method |
| 11/04/10 | Movable table and processing stage |
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