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Ulvac Inc patents

Recent patent applications related to Ulvac Inc. Ulvac Inc is listed as an Agent/Assignee. Note: Ulvac Inc may have other listings under different names/spellings. We're not affiliated with Ulvac Inc, we're just tracking patents.

ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "U" | Ulvac Inc-related inventors




Date Ulvac Inc patents (updated weekly) - BOOKMARK this page
10/05/17Sputtering apparatus and discriminating state thereof
10/05/17Cathode assembly
09/21/17Target assembly
08/10/17Target assembly
07/27/17Rf sputtering apparatus and sputtering method
07/20/17Substrate processing apparatus and substrate processing method
07/20/17Substrate processing device
06/22/17Insulator target
06/15/17Plasma etching method, plasma etching device, plasma processing method, and plasma processing device
06/15/17Plasma treatment device and wafer transfer tray
05/25/17Multi-layered film and manufacturing the same
05/18/17Multi-layered film, manufacturing the same, and manufacturing apparatus of the same
05/11/17Method of manufacturing multi-layered film and multi-layered film
04/13/17Pzt thin film laminate and manufacturing method thereof
03/16/17Method for forming positive electrode for thin film lithium-ion rechargeable battery, positive electrode for thin film lithium-ion rechargeable battery, and thin film lithium-ion rechargeable battery
03/09/17Transfer device and vacuum apparatus
03/02/17Touch panel, manufacturing touch panel, and optical thin film
02/23/17Method for forming carbon electrode film, carbon electrode, and manufacturing phase change memory element
01/19/17Method of manufacturing multi-layered film, and multi-layered film
01/12/17Variable-resisance element and production method therefor
01/05/17Vacuum melting and casting apparatus
01/05/17Film forming apparatus and film forming method
01/05/17Lithium-sulfur secondary battery
12/29/16Thin substrate processing device
12/08/16Positive electrode for lithium-sulfur secondary battery and forming the same
12/01/16Metal/ceramic bonded body, diaphragm vacuum gauge, bonding metal and ceramic, and production diaphragm vacuum gauge
10/13/16Insulated gate bipolar transistor and production method thereof
09/29/16Lithium-sulfur secondary battery
09/29/16Lithium-sulfur secondary battery
06/23/16Positive electrode for alkali metal-sulfur battery, alkali metal-sulfur battery including the same, and preparing the positive electrode
05/12/16Deep ultraviolet led and manufacturing the same
05/05/16Device structure and producing the same
04/21/16Touch panel, producing the same, optical thin film substrate and producing the same
03/03/16Catalytic chemical vapor deposition apparatus
02/11/16Semiconductor light emitting element and producing the same
01/14/16Ion irradiation device and ion irradiation method
12/03/15Articulated robot, and conveying device
11/26/15Film formation method and film formation apparatus
11/26/15Method of manufacturing radiological image conversion panel and radiological image conversion panel
08/13/15Method of, and , forming hard mask
08/13/15Mounting device and manufacturing the same
08/06/15Method of manufacturing semiconductor device and semiconductor device
07/16/15Plasma etching apparatus
07/16/15Method of manufacturing metal hydroxides and manufacturing ito sputtering target
06/25/15Ion beam irradiation device
04/30/15Organic thin film formation device
04/30/15Film formation device
04/23/15Hard mask and manufacturing the same
04/23/15Hard mask and manufacturing the same
02/26/15Deposition method and deposition apparatus
01/15/15Ashing device
11/13/14Method of manufacturing semiconductor device and semiconductor device
08/07/14Vacuum treatment device
06/19/14Resistance change element and producing the same
06/12/14Vacuum processing device and vacuum processing method
04/17/14Method of manufacturing variable resistance element and manufacturing the same
03/20/14Silicon purification method and silicon purification device
02/20/14Film-forming apparatus
01/30/14Evaporating material and manufacturing the same
12/26/13Transport apparatus and vacuum system
12/19/13Organic thin film forming apparatus
11/21/13Radical etching apparatus and method
10/31/13Method of manufacturing dielectric device and ashing method
10/31/13Method of manufacturing tunneling magnetoresistive element
10/24/13Coupling structure for vacuum exhaust device and vacuum exhaust system
Patent Packs
10/03/13Eccentric circling drive device
09/26/13Silicon refining device and silicon refining method
09/19/13Vacuum freeze-drying apparatus and frozen particle manufacturing method
09/19/13Film-forming cleaning film-forming apparatus
09/05/13Dielectric film forming forming dielectric film
09/05/13Protective film forming method, and surface flattening method
08/29/13Thin-film forming method and thin-film forming apparatus
08/29/13Method for forming dielectric thin film
08/29/13Tungsten target and producing same
08/22/13Thin film forming method and thin film forming apparatus
08/15/13Method for measuring viscoelastic modulus of substance, and measuring viscoelastic modulus of substance
08/15/13Positive electrode for lithium-sulfur secondary battery and forming the same
08/08/13Leak detector
08/08/13Film-forming apparatus, and maintaining film-forming apparatus
08/08/13Drive device
Patent Packs
07/25/13Vacuum film forming apparatus
07/25/13Target device, sputtering manufacturing a target device
07/11/13Film-forming apparatus
07/11/13Manufacturing method and manufacturing apparatus of device
07/04/13Vacuum processing apparatus
06/13/13Water-reactive al-based composite material, water-reactive al-based thermally sprayed film, process for production of such al-based thermally sprayed film, and constituent member for film-forming chamber
05/23/13Substrate conveyance method and substrate conveyance system
04/25/13Sputtering deposition apparatus and adhesion preventing member
04/18/13Film-forming device and film-forming method
04/18/13Sputter deposition apparatus
03/21/13Sputter deposition apparatus
02/28/13Sputtering device
02/28/13Solar cell manufacturing apparatus and solar cell manufacturing method
01/24/13Method for the formation of co film and the formation of cu interconnection film
12/06/12Manufacturing licoo2 sintered body and sputtering target
12/06/12Manufacturing licoo2, sintered body and sputtering target
11/22/12Drive device and conveyance device
11/15/12Conveying device and vacuum apparatus
10/18/12Method for forming ni film
09/27/12Method for forming nisi film, forming silicide film, forming metal film for use in silicide-annealing, vacuum processing and film-forming apparatus
09/13/12Organic thin film deposition device, organic el element manufacturing device, and organic thin film deposition method
08/16/12Semiconductor device, liquid crystal display device having semiconductor device, and producing semiconductor device
08/02/12Method for operating substrate processing apparatus
08/02/12Wiring layer, semiconductor device and liquid crystal display device
08/02/12Process for producing thin film lithium secondary battery
07/26/12Plasma etching apparatus
07/19/12Silicon purification method and silicon purification device
06/28/12Gate valve
06/21/12Method for manufacturing piezoelectric element
06/14/12Self-cleaning catalytic chemical vapor deposition apparatus and cleaning method thereof
Social Network Patent Pack
05/31/12Method of manufacturing a sputtering target and sputtering target
05/31/12Dry pump
05/24/12Dry etching method
05/17/12Film forming method and film forming apparatus
05/17/12Film formation apparatus
05/17/12Method for producing electronic device, electronic device, semiconductor device, and transistor
05/17/12Coating surface processing method and coating surface processing apparatus
05/10/12Film-forming apparatus
05/10/12Vacuum processing apparatus and vacuum processing method
05/10/12Teaching apparatus of robot and teaching robot
Patent Packs
05/03/12Vacuum film-forming apparatus and position detection shutter plate of vacuum film-forming apparatus
05/03/12Film formation apparatus
04/26/12Film formation apparatus and film forming method
04/26/12Magnetron sputtering cathode and film formation apparatus
04/19/12Photovoltaic cell manufacturing method and photovoltaic cell manufacturing apparatus
04/05/12Vacuum deposition system and vacuum deposition method
03/15/12Pressure reduction system and vacuum treatment device
03/15/12Film forming apparatus and a barrier film producing method
03/08/12Sputtering target and processing a sputtering target
03/08/12Target for sputtering
02/23/12Vacuum heating device and vacuum heat treatment method
02/16/12Sintered body for zno-ga2o3-based sputtering target and producing the same
02/09/12Semiconductor device manufacturing method and semiconductor device manufacturing apparatus
02/09/12Photoelectric conversion device manufacturing system and photoelectric conversion device manufacturing method
01/26/12Method of producing a lead zirconium titanate-based sintered body, lead zirconium titanate-based sintered body, and lead zirconium titanate-based sputtering target
01/19/12Photovoltaic cell manufacturing method and photovoltaic cell manufacturing apparatus
01/19/12Photoelectric conversion device manufacturing method, photoelectric conversion device, photoelectric conversion device manufacturing system, and using photoelectric conversion device manufacturing system
01/12/12Temperature sensing device and heating device
01/05/12Method of producing semiconductor device
12/29/11Method for manufacturing semiconductor device
12/29/11Solar module
12/29/11Oxygen detection method, air leakage determination method, gas component detection device, and vacuum processing apparatus
12/22/11Solar cell module and manufacturing the same
12/08/11Touch panel
12/08/11Electrode circuit, film formation device, electrode unit, and film formation method
12/01/11Tray for transporting wafers and fixing wafers onto the tray
12/01/11Film-forming forming passivation film and manufacturing solar cell element
11/10/11Method for manufacturing solar cell, and solar cell
11/03/11Ta sputtering target and producing the same
10/20/11Method for manufacturing solar cell, etching device, and cvd device
Patent Packs
10/13/11Ion implanting apparatus
10/06/11Method of producing magnetic storage medium, magnetic storage medium and information storage device
09/29/11Catalytic chemical vapor deposition apparatus
09/29/11Method for producing a thin film transistor, and a thin film transistor
09/22/11Seal mechanism and treatment apparatus
09/01/11Print head, printer
09/01/11Take-up vacuum processing apparatus
09/01/11Print head, printer
09/01/11Conveying device and vacuum apparatus
09/01/11Manufacturing magnetic recording medium
08/25/11Photoelectric conversion device manufacturing method, photoelectric conversion device, and photoelectric conversion device manufacturing system
08/25/11Semiconductor device and manufacturing the same
08/25/11Method of producing magnetic storage medium, magnetic storage medium and information storage device
08/25/11Mask and film formation method using the same
08/18/11Discharge unit and discharge apparatus
08/18/11Organic thin film deposition device, organic el element manufacturing device, and organic thin film deposition method
08/18/11Sputtering apparatus, thin-film forming method, and manufacturing a field effect transistor
08/18/11Chalcogenide film and manufacturing method thereof
08/18/11Discharge device
08/18/11Water-collapsible al composite material, al film and al powder consisting of this material, and methods for preparation thereof, as well as component members for constituting film-forming chambers and the recovery of film-forming materials
Social Network Patent Pack
08/18/11Sputtering apparatus, thin-film forming method, and manufacturing a field effect transistor
08/11/11Freeze-drying apparatus and freeze-drying method
08/11/11Water-collapsible al composite material, al film and al powder consisting of this material, and methods for preparation thereof, as well as component members for constituting film-forming chambers and the recovery of film-forming materials
08/11/11Sputtering target for forming thin film transistor wiring film
08/11/11Film forming antireflection film, antireflection film, and film forming device
08/11/11Method of producing magnetic storage medium, magnetic storage medium and information storage device
08/11/11Dry pump
08/11/11Sputtering apparatus, thin-film forming method, and manufacturing a field effect transistor
08/04/11Magnetic recording medium manufacturing device
08/04/11Thin-film solar cell manufacturing apparatus
08/04/11Evaporating material and manufacturing the same
08/04/11Manufacturing solar cell
07/28/11Plasma processing method and plasma processing apparatus
07/28/11Vacuum processing apparatus
07/21/11Melting furnace
07/14/11Method of manufacturing photovoltaic cell
07/07/11Solar cell and solar cell manufacturing method
07/07/11Vacuum evacuation device
06/30/11Photoelectric conversion device manufacturing method, photoelectric conversion device, and photoelectric conversion device manufacturing system
06/23/11Inkjet ultrasonic cleaning station
Social Network Patent Pack
06/23/11Parallel motion system for industrial printing
06/23/11Inkjet printhead module with adjustable alignment
06/23/11Photovoltaic cell manufacturing method
06/16/11Vacuum processing apparatus and vacuum processing method
06/09/11Silicon purification method
06/09/11Photovoltaic cell manufacturing method and photovoltaic cell manufacturing apparatus
06/09/11Silicon purification method
06/02/11Method for refining metal
05/26/11Thin-film solar cell manufacturing apparatus
05/26/11Solar cell and manufacturing the same
05/26/11Manufacturing magnetic recording medium, magnetic recording medium, and information storage device
05/19/11Freeze-drying apparatus
05/19/11Freeze-drying apparatus and freeze-drying method
05/19/11Thin-film solar battery module manufacturing method and thin-film solar battery module
05/19/11Deposition apparatus and deposition method
05/19/11Plasma processing method
05/12/11Apparatus for manufacturing thin-film solar cell
05/12/11Thin-film solar battery module and manufacturing the same
05/12/11Solar cell and manufacturing same
05/05/11Method for forming cu electrical interconnection film
05/05/11Film formation apparatus
05/05/11Thin-film solar cell manufacturing apparatus
04/28/11Apparatus for manufacturing thin-film solar cell
04/28/11Thin-film solar cell manufacturing apparatus
04/21/11Method of producing silylated porous insulating film, producing semiconductor device, and silylated material
04/21/11Touch panel manufacturing method and film formation apparatus
04/21/11Method of forming organic polymer thin film and an forming the organic polymer thin film
04/21/11Apparatus for producing multilayer sheet and producing the multilayer sheet
03/24/11Method for producing thin film transistor and thin film transistor
03/24/11Display device, producing display device, and producing display device
Social Network Patent Pack
03/24/11Thin film transistor and producing thin film transistor
03/03/11Substrate transfer processing apparatus
03/03/11Switch valve
03/03/11Magnetron sputtering apparatus and magnetron sputtering method
03/03/11Film forming method and film forming apparatus
02/24/11Water-reactive al composite material, water-reactive al film, process for the production of the al film, and constituent member for film-forming chamber
02/24/11Method for the production of water-reactive al film and constituent member for film-forming chamber
02/24/11Water-reactive al composite material, water-reactive al film, process for the production of the al film, and constituent member for film-forming chamber
02/24/11Method for the production of water-reactive al film and constituent member for film-forming chamber
02/24/11Water-reactive al composite material, water-reactive al film, process for the production of the al film, and constituent member for film-forming chamber
02/24/11Film forming source, vapor deposition apparatus, and manufacturing an organic el element
02/24/11Stage
02/17/11Water-reactive al composite material, water-reactive al film, process for the production of the al film , and constituent member for film-forming chamber
02/10/11Solar cell
02/10/11Substrate for cell adhesion or culture and producing the same
01/27/11Method and manufacturing solar cell
01/27/11Solar cell, and manufacturing the same
01/20/11Film deposition apparatus and film deposition method
01/13/11Method and manufacturing solar cell, and solar cell
12/16/10Evaporation source and film-forming device
12/16/10Chalcogenide film and manufacturing same
12/16/10Method for manufacturing semiconductor device
12/09/10Take-up type vacuum deposition apparatus
12/09/10Magnetic device manufacturing method
12/09/10Substrate processing method and substrate processed by this method
12/02/10Method of producing thin film transistor and thin film transistor
11/25/10Sputtering film forming method and sputtering film forming apparatus
11/25/10Process for producing liquid crystal display device
11/25/10Touch panel and manufacturing touch panel







ARCHIVE: New 2017 2016 2015 2014 2013 2012 2011 2010 2009



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