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Veeco Ald Inc patents


Recent patent applications related to Veeco Ald Inc. Veeco Ald Inc is listed as an Agent/Assignee. Note: Veeco Ald Inc may have other listings under different names/spellings. We're not affiliated with Veeco Ald Inc, we're just tracking patents.

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Multi-step atomic layer deposition process for silicon nitride film formation

One or more silicon nitride layers are deposited onto a substrate by exposing the surface of the substrate to radicals to activate the surface of the substrate. A silicon-containing first precursor with a high sticking coefficient is injected onto the substrate. ... Veeco Ald Inc








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