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Zeta Instruments Inc patents


Recent patent applications related to Zeta Instruments Inc. Zeta Instruments Inc is listed as an Agent/Assignee. Note: Zeta Instruments Inc may have other listings under different names/spellings. We're not affiliated with Zeta Instruments Inc, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "Z" | Zeta Instruments Inc-related inventors


Automated 3-d measurement

A method of generating 3D information of a sample using an optical microscope includes: varying the distance between the sample and an objective lens of the optical microscope at predetermined steps, capturing an image at each predetermined step. In one example, the method further includes: determining a characteristic of each... Zeta Instruments Inc

Optical measurement of step size and plated metal thickness

A method of generating 3D information includes: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps, capturing an image at each pre-determined step; determining a characteristic value of each pixel in each captured image; determining, for each captured image, the greatest characteristic... Zeta Instruments Inc

Optical measurement of bump hieght

A method of generating 3D information including: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps; capturing an image at each pre-determined step; determining a characteristic value of each pixel in each captured image; determining, for each captured image, the greatest characteristic... Zeta Instruments Inc

Optical measurement of opening dimensions in a wafer

A method of generating 3D information of a sample using an optical microscope includes: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps, capturing an image at each pre-determined step, determining a characteristic value of each pixel in each captured image, determining... Zeta Instruments Inc

Dual mode inspector

A dual mode inspector includes an optical inspector configured to detect a defect located at a first location on a sample, a microscope configured to capture an image of the defect at the first location on the sample, and a platform that is configured to support the sample. The sample... Zeta Instruments Inc

Method of detecting defect location using multi-surface specular reflection

A method for detecting defects includes directing a scanning beam to a location on a surface of a transparent sample, measuring top and bottom surface specular reflection intensity, and storing coordinate values of the first location and the top and bottom surface specular reflection intensity in a memory. The method... Zeta Instruments Inc

Multi-surface specular reflection inspector

An optical inspector includes a time varying beam reflector, a radiating source that irradiates the time varying beam reflector, a telecentric scan lens configured to direct the radiation reflected by the time varying beam reflector onto a first surface of a transparent sample, a first detector that receives at least... Zeta Instruments Inc

Method and apparatus to detect defects in transparent solids

A method and apparatus to measure specular reflection intensity, specular reflection angle, near specular scattered radiation, and large angle scattered radiation and determine the location and type of defect present in a first and a second transparent solid that have abutting surfaces. The types of defects include a top surface... Zeta Instruments Inc








ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009



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