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Zygo Corporation patents

Recent patent applications related to Zygo Corporation. Zygo Corporation is listed as an Agent/Assignee. Note: Zygo Corporation may have other listings under different names/spellings. We're not affiliated with Zygo Corporation, we're just tracking patents.

ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "Z" | Zygo Corporation-related inventors

Date Zygo Corporation patents (updated weekly) - BOOKMARK this page
12/15/16Displacement measurement of deformable bodies
04/14/16Interferometric encoder systems
02/18/16Calibration of scanning interferometers
02/18/16Optical evaluation of lenses and lens molds
02/18/16Optical evaluation of lenses and lens molds
01/14/16Interferometric encoders using spectral analysis
10/15/15Double pass interferometric encoder system
10/08/15Photo-masks for lithography
07/09/15Measuring topography of aspheric and other non-flat surfaces
06/04/15Interferometer and measuring asymmetric surface topography
02/26/15In situ calibration of interferometers
02/12/15Interferometric heterodyne optical encoder system
02/12/15Interferometry employing refractive index dispersion
01/01/15Coherence scanning interferometry using phase shifted interferometrty signals
09/18/14Optical defect inspection system
08/14/14Surface topography interferometer with surface color
02/20/14Interferometric encoder systems
10/24/13Non-harmonic cyclic error compensation in interferometric encoder systems
06/20/13Low coherence interferometry with scan error correction
05/23/13Fiber delivery for metrology systems used in lithography tools
05/23/13Thermally stable optical sensor mount
05/09/13Double pass interferometric encoder system
05/09/13Compact encoder head for interferometric encoder system
05/09/13Low coherence interferometry using encoder systems
03/14/13In situ calibration of interferometers
09/13/12Object thickness and surface profile measurements
09/06/12Interferometric metrology of surfaces, films and underresolved structures
08/02/12Interferometric heterodyne optical encoder system
07/05/12Interferometric encoder systems
06/21/12Cyclic error compensation in interferometric encoder systems
06/07/12Non-contact surface characterization using modulated illumination
05/17/12Interferometer with a virtual reference surface
04/12/12Data interpolation methods for metrology of surfaces, films and underresolved structures
03/22/12Interferometric methods for metrology of surfaces, films and underresolved structures
10/20/11Interferometric encoder systems
03/03/11Measurement of changes in surfaces of objects
02/10/11Interferometer for determining overlay errors
01/13/11Equal-path interferometer
09/23/10Error compensation in phase shifting interferometry
08/05/10Interferometer with scan motion detection
05/27/10Compound reference interferometer
05/27/10Fiber-based interferometer system for monitoring an imaging interferometer
05/27/10Scan error correction in low coherence scanning interferometry
05/27/10Interferometric systems and methods featuring spectral analysis of unevenly sampled data
04/15/10Interferometer system for monitoring an object
12/10/09Interferometry for lateral metrology
10/22/09Interferometer for overlay measurements
06/11/09Interferometric analysis of under-resolved features

ARCHIVE: New 2016 2015 2014 2013 2012 2011 2010 2009


This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. is not affiliated or associated with Zygo Corporation in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Zygo Corporation with additional patents listed. Browse our Agent directory for other possible listings. Page by