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Zygo Corporation patents


Recent patent applications related to Zygo Corporation. Zygo Corporation is listed as an Agent/Assignee. Note: Zygo Corporation may have other listings under different names/spellings. We're not affiliated with Zygo Corporation, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "Z" | Zygo Corporation-related inventors


Precision positioning system using a wavelength tunable laser

A method for determining characteristics of a test cavity, the method includes for each of a plurality of optical frequencies within a bandwidth of a tunable laser, measuring interference signals from the test cavity and a reference cavity having a known characteristic. The method includes determining values for the plurality... Zygo Corporation

Method and optimizing the optical performance of interferometers

Method include using an apparatus to measure a first surface field, at a first surface of the apparatus, of an artifact having one or more surface features with known topography. The method includes determining a first focus metric at the first surface based on at least a portion of a... Zygo Corporation








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