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Asm America Inc patents

Recent patent applications related to Asm America Inc. Asm America Inc is listed as an Agent/Assignee. Note: Asm America Inc may have other listings under different names/spellings. We're not affiliated with Asm America Inc, we're just tracking patents.

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System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow

A system and methods are provided for low temperature, rapid baking to remove impurities from a semiconductor surface prior to in-situ deposition. The system is configured with an upper bank of heat elements perpendicular to the gas flow path, such that when the substrate is heated, the temperature across the substrate can be maintained relatively uniform via zoned heating. ... Asm America Inc

Pulsed valve manifold for atomic layer deposition

A vapor deposition device includes a reactor including a reaction chamber and an injector for injecting vapor into the reaction chamber. The device also includes a manifold for delivering vapor to the injector. ... Asm America Inc

Selective etching of reactor surfaces

Compositions, methods, and systems permit selectively etching metal oxide from reactor metal parts (e.g., titanium and/or titanium alloys). The etching composition comprises an alkali metal hydroxide and gallic acid. ... Asm America Inc

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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. is not affiliated or associated with Asm America Inc in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Asm America Inc with additional patents listed. Browse our Agent directory for other possible listings. Page by