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Edwards Limited patents


Recent patent applications related to Edwards Limited. Edwards Limited is listed as an Agent/Assignee. Note: Edwards Limited may have other listings under different names/spellings. We're not affiliated with Edwards Limited, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "E" | Edwards Limited-related inventors


Control of power supplied to a plasma torch to compensate for changes at an electrode

A power supply configured to supply power to a plasma torch in a gas treatment system within a predetermined power limit by periodically receiving at least one input signal indicative of a current power output by the power supply; and in response to the at least one input signal indicating the power output has passed a predetermined value adjusting the power output such that the power output is within the predetermined power limit. Adjusting the power output includes: outputting a control signal to change a flow rate of a source gas supplied to the plasma torch where the change would maintain a source gas flow rate within predetermined gas flow limits; and where the change would not maintain the source gas flow rate within the predetermined gas flow limits, outputting a control signal to change one of a current or voltage output by the power supply unit.. ... Edwards Limited

Abatement system

Venturi scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. ... Edwards Limited

Inlet assembly

An inlet assembly for a an abatement burner includes: an inlet conduit operable to convey an effluent gas stream to be treated from an inlet aperture via a bore to an outlet aperture for treatment; and a lance conduit operable to convey a fuel gas from a gas inlet aperture via a gas bore to a gas outlet aperture positioned within the bore for mixing with the effluent gas stream, a cross-sectional area of the gas bore increasing towards the gas outlet aperture. In this way, the expansion caused by the increasing cross-sectional area of the gas bore enhances the mixing of the fuel gas with the effluent gas stream which provides for improved destruction and removal efficiencies (dre), which enables the inlet assembly to be operated with reduced quantities of fuel gas, while still maintaining required levels of dre.. ... Edwards Limited

Liquid ring pump

Liquid ring pumps are used to pump a variety of fluid types. Corrosive fluids are easily handled by the work fluid but can cause corrosion of pumping mechanisms. ... Edwards Limited

Apparatus for evacuating a corrosive effluent gas stream from a processing chamber

Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.. ... Edwards Limited

Abatement system

Liquid ring pumps are used to pump a variety of fluid types. The present invention provides a two stage liquid ring pump through which an exhaust gas comprising compounds to be destroyed is passed. ... Edwards Limited

Device and method for controlling a phase transition of a fluid between liquid and vapour states

A device and method for changing a fluid from one state to another state, the states comprising a liquid and a vapour state are disclosed. The device comprises: an inlet configured to receive the fluid in a first state; an outlet configured to output the fluid in a second state; and a conduit connecting the inlet to the outlet. ... Edwards Limited

Vacuum pump

An improved split flow vacuum pump is provided with at least two of compound pumps housed in a common housing comprising first, second, third and fourth inlets for receiving gas from a respective first to fourth chamber; said pumps are arranged such that their rotational axis are angled relative to each other in the housing, preferably perpendicular to each other.. . ... Edwards Limited

Radiant burner

A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing processing tool and comprises: a plurality of treatment chambers, each treatment chamber having an effluent stream inlet for supplying a respective portion of said effluent gas stream to that treatment chamber for treatment therewithin. ... Edwards Limited

Vacuum pump lubricants

A vacuum pump may include a rotor and a stator, wherein the rotor is supported by metal bearings (such as steel bearings) to allow relative rotation of the rotor with respect to the stator. A liquid pfpe lubricant compound is provided to lubricate the bearings, wherein the lubricant further comprises a solid lubricant that is in suspension in the liquid lubricant. ... Edwards Limited

Radiant burner

A radiant burner for treating an effluent gas stream from a manufacturing processing tool includes: a porous sleeve at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber; and an electrical energy device coupled with the porous sleeve and operable to provide electrical energy to heat the porous sleeve which heats the treatment materials as they pass through the porous sleeve into the treatment chamber. In this way, electrical energy, rather than combustion, is used to raise the temperature within the treatment chamber in order to treat the effluent gas stream.. ... Edwards Limited

Apparatus for treating gas

Known wet electrostatic precipitators are large and inefficient. The present invention enables the production of smaller, more efficient and long lasting wet electrostatic precipitators by the addition of a central bore in the inner electrode through which a first purge flow is passed and directed into the precipitator chamber, perpendicular to the direction of flow of the gas to be treated through the chamber to urge the particulate into the water curtain. ... Edwards Limited

Pump monitoring apparatus and method

A monitoring apparatus comprises at least one sensor for measuring a current of the electric motor to generate a time-based signal and at least one electronic processor configured to transform the time-based signal into a frequency-based signal and to analyse the frequency-based signal to identify a signal pattern representing a pump fault condition. By monitoring the frequency-based signal, the monitoring apparatus can identify a pump fault condition.. ... Edwards Limited

Gas supply apparatus

An improved purge gas supply that is less susceptible to the shortcomings of known systems. The disclosure aims to reduce backflow or recirculation of pumped gases into the purge supply apparatus by providing an arrangement where the purge ports on a multistage vacuum pump contains purge gas at sufficient pressure to resist the backflow, particularly when the vacuum pump is operating outside of its ultimate pressure regime. ... Edwards Limited

02/01/18 / #20180032419

Processing tool monitoring

A monitoring apparatus may include reception logic operable to receive processing characteristic data generated during the processing of the effluent stream; segregation logic operable to segregate the processing characteristic data into contributing processing characteristic data associated with contributing periods which contribute to a condition of the at least one processing tool and non-contributing processing characteristic data associated with non-contributing periods which fail to contribute to the condition; and fault logic operable to utilise the contributing processing characteristic data and to exclude the non-contributing processing characteristic data when determining a status of the condition.. . ... Edwards Limited

02/01/18 / #20180030990

Pump lubricant supply systems

A pump lubricant supply system has a lubricant reservoir and at least one contactor to engage a lubricant transfer device provided on a rotor shaft of a pump to transfer lubricant from the lubricant reservoir to the lubricant transfer device via the at least one contactor. The lubricant reservoir includes at least a first reservoir portion formed of a first elongate strip of porous material wound to define a first lubricant container body having a longitudinal axis that extends transverse to the longitudinal axis of the elongate strip.. ... Edwards Limited

01/25/18 / #20180023577

Vacuum pump lubricant supply systems

A vacuum pump lubricant supply system has a lubricant reservoir and a wicking element. The body portion has opposed major surfaces and a finger. ... Edwards Limited

01/25/18 / #20180023566

Rotary screw vacuum pumps

A rotary screw vacuum pump 10 comprises a housing 12 that has a lower pressure inlet region 14 and a higher pressure outlet region 16 and two intermeshing screws 18 disposed in the chamber and configured to cooperably rotate to compress a gas in working chambers formed between them and the housing while pumping the gas from the lower pressure inlet region to the higher pressure outlet region. The housing 12 has a least one liquid inlet 20 to admit a sealing liquid to seal the working chambers. ... Edwards Limited

01/04/18 / #20180003178

Vacuum exhaust system and channel-switching valve used in this vacuum exhaust system

A vacuum exhaust system which exhausts gas from chambers and which comprises a plurality of branch channels for the exhaustion of the gas from the chambers, a main pipeline in the form of a confluence of the plurality of branch channels, channel open-close valves fitted to correspond with each of the said plurality of branch channels, a channel-switching valve connecting the main channel and a plurality of selection channels and allowing flow between the main channel and any one of the plurality of selection channels, a first pump which functions as a gas exhaust means in the molecular flow region of the gas and is fitted to one of the plurality of branch channels, and second pumps which function as gas exhaust means in the viscous flow region of the gas and are fitted to the plurality of selection channels.. . ... Edwards Limited

12/07/17 / #20170350395

Improvements in or relating to vacuum pumping arrangement

A vacuum pumping arrangement includes a first primary pump having an inlet and an outlet, and a first common pumping line fluidly connected to the inlet, the first common pumping line including a plurality of first common pumping line inlets each of which is fluidly connectable to at least one vacuum process chamber forming the semiconductor fabrication tool, the first primary pump and the first common pumping line handling deposition process flows. The pumping arrangement further including a second primary pump having an inlet and an outlet, and a second common pumping line fluidly connected to the inlet of the second primary pump, the second common pumping line including a plurality of second pumping line inlets each of which is fluidly connectable to at least one process chamber forming the semiconductor fabrication tool, the second primary pump and the second common pumping line handling cleaning process flows.. ... Edwards Limited

11/09/17 / #20170321893

Radiant burner for noxious gas incineration

A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool, the radiant burner comprises: a sintered metal fibre sleeve through which combustion materials pass for combustion proximate to an inner combustion surface of the sintered metal fibre sleeve; and an insulating sleeve surrounding the sintered metal to fibre sleeve and through which the combustion materials pass. ... Edwards Limited

08/03/17 / #20170218966

Vacuum system

A vacuum pump with dynamic control of cooling fan speed and motor flux is provided to reduce transmitted noise and waste heat and provide a quieter, more efficient pump.. . ... Edwards Limited

07/20/17 / #20170204859

Vacuum pump

The present invention relates to a multi-stage vacuum pump comprising: first and second half-shell stator components and first and second end stator components which when assembled define a plurality of pumping chambers. The half-shell components are assembled together along respective pairs of mutual engaging longitudinal faces and the end stator components are assembled at the ends of the half-shell components at respective pairs of mutual engaging end faces. ... Edwards Limited

07/20/17 / #20170204858

Vacuum pump

The present invention relates to a multi-stage vacuum pump comprising: first and second half-shell stator components and first and second end stator components which when assembled define a plurality of pumping chambers. The half-shell components are assembled together along respective pairs of mutual engaging longitudinal faces and the end stator components are assembled at the ends of the half-shell components at respective pairs of mutual engaging end faces. ... Edwards Limited

07/13/17 / #20170197164

Centrifugal abatement separator

A separator apparatus and method are disclosed. The separator apparatus comprises: an inlet operable to receive an effluent stream comprising a fluid and particles; a centrifugal separator comprising a radial fan and a centrifugal particle separator operable to separate at least some of the particles from the fluid; a fluid outlet for providing the fluid; and a particle outlet for providing the particles separated from the fluid. ... Edwards Limited

03/30/17 / #20170089351

Elongated permanent ring magnet with a plurality of axially directed magnetized zones and magnetic bearing with such a ring magnet

The present invention is directed to a magnet for a magnetic bearing arrangement, a bearing arrangement comprising said magnet, and a vacuum pump comprising said bearing arrangement. In particular the invention can be particularly useful in a magnetic bearing arrangement that reduces stray magnetic fields for a turbomolecular vacuum pump, although it is understood that the invention is not limited to this field and other applications will be understood by the skilled person.. ... Edwards Limited








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