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Fujikin Incorporated patents


Recent patent applications related to Fujikin Incorporated. Fujikin Incorporated is listed as an Agent/Assignee. Note: Fujikin Incorporated may have other listings under different names/spellings. We're not affiliated with Fujikin Incorporated, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "F" | Fujikin Incorporated-related inventors


Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device

A piezoelectric linear actuator comprising a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, wherein the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.. . ... Fujikin Incorporated

Concentration measurement device

A concentration measurement device for measuring the concentration of a measured fluid within a measurement cell by detecting transmitted light that has passed through the measurement cell having a light incidence window and a light emission window disposed opposing to each other, comprising a reflected-light detector for detecting reflected light of the light incidence window.. . ... Fujikin Incorporated

Concentration measurement device

A concentration measurement device including at least one light source; a measurement cell for containing a fluid to be measured; a splitter for dividing light from the light source into incident light being incident into the measurement cell and non-incident light not being incident into the measurement cell; a transmitted-light detector for detecting transmitted light that is the incident light having passed through the measurement cell; a non-incident light detector for detecting the non-incident light; and an arithmetic part for correcting a detection signal of the transmitted-light detector using a detection signal of the non-incident light detector.. . ... Fujikin Incorporated

Valve

A valve having a simple configuration that prevents the seat from being damaged by self-excited oscillation of the valve body and thus prevents seat leakage is disclosed. The valve includes a valve casing having a fluid inlet, a fluid outlet, and a valve chamber; the valve chamber including a seat having a seat surface; a stem inserted into the valve casing so that the stem can be vertically movable; and a valve body arranged at a tip of the stem and capable of abutting on the seat surface of the seat due to the vertical movement of the stem such that a tip part of the valve body does not come into contact with the seat surface due to oscillation of the stem.. ... Fujikin Incorporated

Method of forming a pipe joint, pipe joint component, and pipe joint, fluid control device, fluid control unit and semiconductor fabrication apparatus including the pipe joint component

A method of forming a pipe joint includes: preparing a first pipe member, a second pipe member, a casing, and a pressing member to be arranged in the casing to press a second flange portion of the second pipe member against a first flange portion of the first pipe member, the casing having a first opening, a second opening, a third opening, a flange receiving space, and a receiving space in communication with the flange receiving space and adapted to receive the pressing member; inserting the first pipe member from the second opening toward the first opening until the first flange portion comes to rest within the flange receiving space; inserting the second pipe member into the second opening with the second flange portion ahead until the second flange portion comes into contact with the first flange portion.. . ... Fujikin Incorporated

Diaphragm valve

Provided is a diaphragm valve that improves the durability of a diaphragm by focusing on the ratio of the radius of curvature of a pressing surface of a diaphragm presser to the radius of curvature of the diaphragm. Srb/sra=0.4 to 0.6 is satisfied, wherein sra represents the radius of curvature of a diaphragm 5 and srb represents the radius of curvature of a pressing surface of a diaphragm presser 6.. ... Fujikin Incorporated

Fluid control system and joint block used therefor

A fluid control system is provided in which the number of bolts is greatly reduced so that the number of assembling steps can be decreased. The system has first and second joint blocks with engagement portions respectively, a support mechanism having a guide portion engageable with each of the blocks, and a fluid device including a body that defines a fluid channel having first and second channel ports opened on a bottom surface thereof, the blocks are restrained on the support mechanism while being movable in the longitudinal direction when the engagement portions are engaged with the guide portion respectively, and the body of the fluid device is installed on the upper surfaces of the blocks so that the channel ports of the body are communicated with the channel ports on the upper surfaces of the blocks, respectively, and the body is connected with the blocks by fastening members, respectively.. ... Fujikin Incorporated

Fluid controller

Provided is a fluid controller capable of cost reduction and performance improvement. Movable members 12 and 13 moved manually or automatically and for moving the disk 9 are tubular in shape and include a fitting portion 13a to be fitted to an outer periphery of the disk 9. ... Fujikin Incorporated

Valve device

A valve device which improves the operability of a valve for opening and closing a flow path. The valve device includes a valve, an actuator, an actuator support member, an operating portion, and a threaded member wherein the valve is able to open and close a fluid path in a valve body having a fluid inflow passage and a fluid outflow. ... Fujikin Incorporated

Vaporization supply apparatus

A vaporization supply apparatus comprises a vaporizer which heats and vaporize a liquid, a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer, a first control valve interposed in a supply channel of a liquid to the vaporizer, a pressure detector for detecting a pressure of a gas vaporized by the vaporizer, a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and a control device which controls the first control valve to supply a predetermined amount of a liquid to the vaporizer based on the pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detect a liquid in an amount higher than the predetermined amount.. . ... Fujikin Incorporated

Flow control system with build-down system flow monitoring

To provide a flow control system with build-down system flow monitoring that realizes flow monitoring close to real-time monitoring by combining build-down system flow rate measurement with the upstream side of the flow control system without using a thermal type flow sensor by effectively utilizing high pressure fluctuation resistance characteristics of the flow control system, and can be significantly downsized and reduced in cost.. . ... Fujikin Incorporated

Pressure control device

A pressure control device maintains a pressure within a target of pressure control at a set pressure. The pressure control device includes a correction circuit that corrects a pressure signal, which represents the pressure within the target of pressure control that is detected by a pressure sensor, such that the pressure signal approaches a set pressure signal representing the set pressure; a comparison circuit that compares the corrected pressure signal with the set pressure signal; and a valve drive circuit that controls an opening and closing of a flow control valve based on a comparison result from the comparison circuit. ... Fujikin Incorporated

Valve device

. . A valve device includes a body having a fluid passage formed therein, a valve element configured to open and close the fluid passage, a stem arranged to be configured to move toward and away from the valve element to cause the valve element to open and close the fluid passage, an actuator having a casing coupled to the body, and drive unit arranged in the casing to drive the stem by an operating fluid supplied from outside, and a valve mechanism provided at the casing and configured to open and close a passage of the operating fluid to the drive unit.. . ... Fujikin Incorporated

Multistage piston actuator

A multistage piston actuator exerts a driving pressure against a spring pressure into pressure chambers of piston bodies, fitted into a cylinder body, to operate the push rod. Each piston body is combined with a partition fitted into the cylinder body. ... Fujikin Incorporated

09/21/17 / #20170268919

Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container

A liquid level meter includes a first resistive temperature detector; a first temperature measuring body a liquid level detection section a temperature detection section detecting the temperatures of the first resistive temperature detector and the first temperature measuring body; a current control section determining a value of a current to apply to the first resistive temperature detector such that a difference between the temperatures of the first resistive temperature detector and the first temperature measuring body detected by the temperature detection section to be a first constant value; and a power supply unit supplying a current of the determined current value to the first resistive temperature detector; wherein the liquid level detection section determines whether the first resistive temperature detector is present in a liquid or outside of the liquid using the value of the current applied to the first resistive temperature detector.. . ... Fujikin Incorporated

09/07/17 / #20170254430

Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve

A piezoelectric element-driven valve includes a body provided with a fluid channel and a valve seat, a valve element which opens and closes the fluid channel by being in contact with and separated from the valve seat of the body, and piezoelectric actuators which drive the valve element to open and close by means of the extension of the piezoelectric element. In the piezoelectric element-driven valve, at least two piezoelectric actuators are arranged on a straight line via a spacer which allows pulling out of wiring.. ... Fujikin Incorporated

08/17/17 / #20170234455

Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same

A pressure type flow control system with flow monitoring includes an inlet, a control valve including a pressure flow control unit connected downstream of the inlet, a thermal flow sensor connected downstream of the control valve, an orifice installed on a fluid passage communicatively connected downstream of the thermal flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet communicatively connected to the orifice, and a control unit including a pressure type flow rate arithmetic and control unit receiving a pressure signal from the pressure sensor and a temperature signal from the temperature sensor, and a flow sensor control unit to which a flow rate signal from the thermal flow sensor is input.. . ... Fujikin Incorporated

08/17/17 / #20170234439

Fluid controller

Provided is a fluid controller in which reduction of the accuracy caused by the loosening of a screw portion and reduction of the durability caused by torsional stress are prevented. A stem vertical-movement-amount adjustment means 11 is provided with: a handle 41 which has a female screw 41b on an inner periphery thereof and which is rotatably supported by a casing 4; a movable body 42 in which a male screw 46b is provided on an outer periphery thereof and is screwed into the inner periphery of the handle 41; and a guide means 43 which prevents rotation of the movable body 42 relative to the casing 4 and which enables vertical movement of the movable body 42.. ... Fujikin Incorporated

08/17/17 / #20170234438

Fluid controller

Provided is a fluid controller which enables precise flow-rate adjustment while securing the durability. The fluid controller includes a stem vertical-movement-amount upper-limit-value setting means 10 which sets an upper limit value of a vertical movement amount of a stem 8 associated with opening and closing operations. ... Fujikin Incorporated

07/27/17 / #20170212531

Pressure-type flow rate control device

The pressure-type flow controller includes a main body provided with a fluid passage, a control valve for pressure control fixed in a horizontal position to the main body, an on/off valve fixed in a vertical position to the main body on the downstream side of the control valve for pressure control, an orifice provided in the fluid passage on the upstream side of the on/off valve, and a pressure sensor fixed to the main body for detecting the internal pressure of the fluid passage between the control valve for pressure control and the orifice. The fluid passage includes a first passage portion in a horizontal position connected to the control valve for pressure control, a second passage portion in a vertical position connecting the first passage portion to the orifice, and a third passage portion in a horizontal position connecting the second passage portion to the pressure sensor.. ... Fujikin Incorporated

07/13/17 / #20170199117

Inline concentration measurement device

An inline concentration measurement device comprises: a measurement cell main body with a gas flow path formed; a light incident part with a window member connected to the main body; and a light receiving part with a window member connected to the main body, wherein the gas flow path includes a gas flow path for an optical path extending straight between the window members of the light incident part and the light receiving part, a first communication part making a gas inlet formed in the main body communicate with the gas flow path part for the optical path, and a second communication part making a gas outlet formed in the main body communicate with the gas flow path part for the optical path, and the first communication part obliquely extends from the gas inlet towards the window member of the light incident part.. . ... Fujikin Incorporated

06/29/17 / #20170184220

Fluid controller heating apparatus and fluid control apparatus

A fluid controller heating apparatus includes a cylindrical heater unit that surrounds a portion of an opening-and-closing valve to be heated, and a heat insulation jacket that surrounds the heater unit. The heater unit includes a pair of heat-transfer members to which plate-shaped heaters are fixed, respectively. ... Fujikin Incorporated

06/29/17 / #20170184206

Fluid controller

A fluid controller that reduces an increase in cost by additional components or additional processes for setting means, and solves the problem that a set value of an upward movable amount of a stem changes is provided. An upper surface of an outer peripheral edge portion of a diaphragm holder 7 and a lower surface of an inner peripheral edge portion of a holder adapter 15 are formed so as to oppose to each other with a first gap a interposed therebetween. ... Fujikin Incorporated

06/29/17 / #20170184204

Valve element and high-temperature-oriented valve

A valve element significantly improved in rotation preventing performance of an abutting member formed of a synthetic resin by using a caulking structure and a high-temperature-oriented valve provided with such a valve element. A valve element includes: an abutting member formed of a synthetic resin and configured to close a path opening by coming into abutment with a path opening edge, and a holding member having a recessed portion into which the abutting member is fitted, in which the holding member is caulked and thus the abutting member is held by the holding member. ... Fujikin Incorporated

06/01/17 / #20170152954

Diaphragm valve, fluid control device, semiconductor manufacturing apparatus, and semiconductor manufacturing method

The radius of curvature (sr2) of a surface of a diaphragm presser, which surface is in contact with a diaphragm, is at least 30 mm. The taper angle (θ) for a lower surface of a press adapter is no more than 10° relative to a flat portion of a bottom surface of a depression of a body.. ... Fujikin Incorporated

05/11/17 / #20170130848

Diaphragm valve, fluid control device, semiconductor manufacturing apparatus, and semiconductor manufacturing method

A flat portion of a bottom surface of a depression of a body is provided with a spot facing so as to include a portion of a fluid outflow channel, which portion is open to the bottom surface of the depression.. . ... Fujikin Incorporated

04/06/17 / #20170097034

Bolt-locking apparatus, mounting method thereof and mounting jig

A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. ... Fujikin Incorporated

02/16/17 / #20170045164

Fixing device for lower stage members and fluid control device equipped with fixing device

Provided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a lower-stage member is configured such that respective lower-stage members (2) are fixed once and, thereafter, a desired lower-stage member (2) is moved upwardly against an elastic force (21) so as to finely adjust positions of upper surfaces of a plurality of lower-stage members (2). ... Fujikin Incorporated

02/09/17 / #20170037987

Flow passage sealing structure

A flow passage sealing structure for omitting a process of welding or caulking an orifice plate and a filter plate to an orifice base and a filter base as base materials and allowing further miniaturization, includes a main block (1) including main flow passages (1a, 1b), recessed portions (12, 13) provided in side surfaces of the main block and having female screws in inner peripheral surfaces, thin plates (6, 8) abutting against the bottom surfaces of the recessed portions and having through holes, gasket rings (16, 17) abutting against the thin plates (6, 8), pressing pipelines (20, 21) having large-diameter portions and internal flow passages communicable with the main flow passages (1a, 1b) and abutting against the gasket rings, and fastening screws (22) abutting against the large-diameter portions and pressing the pressing pipelines by being inserted around the outside of the pressing pipelines and screwed into the female screws.. . ... Fujikin Incorporated








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