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Ims Nanofabrication Ag patents


Recent patent applications related to Ims Nanofabrication Ag. Ims Nanofabrication Ag is listed as an Agent/Assignee. Note: Ims Nanofabrication Ag may have other listings under different names/spellings. We're not affiliated with Ims Nanofabrication Ag, we're just tracking patents.

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Method for compensating pattern placement errors caused by variation of pattern exposure density in a multi-beam writer

A method for compensating pattern placement errors during writing a pattern on a target in a charged-particle multi-beam exposure apparatus including a layout generated by exposing a plurality of beam field frames using a beam of electrically charged particles, wherein each beam field frame has a respective local pattern density, corresponding to exposure doses imparted to the target when exposing the respective beam field frames. During writing the beam field frames, the positions deviate from respective nominal positions because of build-up effects within said exposure apparatus, depending on the local pattern density evolution during writing the beam field frames. ... Ims Nanofabrication Ag








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