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Inficon Gmbh patents


Recent patent applications related to Inficon Gmbh. Inficon Gmbh is listed as an Agent/Assignee. Note: Inficon Gmbh may have other listings under different names/spellings. We're not affiliated with Inficon Gmbh, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "I" | Inficon Gmbh-related inventors


Detecting test gas fluctuations during sniffer leak searching

A method for detecting fluctuations in the amount of test gas detected by a sniffer probe of a leak detector in the gas flow from around a test piece pressurized with an oxygen-free test gas containing at least an amount of co2, wherein an amount of oxygen in the ambient air is measured.. . ... Inficon Gmbh

Process monitoring using crystal with reactance sensor

Devices, systems and methods for process monitoring are presented. For instance, the device includes a crystal and a reactance sensor. ... Inficon Gmbh

Leak detection upon evacuation of a test chamber or a specimen

Method for detecting a leak in a specimen contained in a test chamber, the method comprising the following steps: positioning the specimen in the test chamber, evacuating the test chamber, measuring the partial pressure in the test chamber as a measuring signal m during the evacuation of the test chamber, forming a difference d from the progress of the signal m(t) over time t and a fitting function f(t) including the term t−n, where n is a positive rational number, and judging the presence of a leak in the specimen based on the differential signal d.. . ... Inficon Gmbh

Chemical analyzer with membrane

A system for analyzing an analyte is described herein. The system includes a chamber having an inlet and a semi-permeable membrane arranged to seal the inlet. ... Inficon Gmbh

Sensor unit including a measuring cell, a housing and at least one access channel

A sensor unit including a measuring cell with a section-wise heat-conducting surface, a housing in which the measuring cell for the most part is contained, and an access channel to the measuring cell. The sensor unit includes a cavity that is confined for the most part by an outer surface of the measuring cell and by a wall of the housing facing towards the surface of the measuring cell. ... Inficon Gmbh

Differential pressure measurement with film chamber

Leak detection device for measuring the differential pressure between a test chamber (10) and a reference chamber, which can be separated from the test chamber (10) gas-tight by a first check valve (24), wherein a differential pressure sensor (34) is connected to the reference chamber and to the test chamber (10) in order to measure the differential pressure between the internal pressure of the reference chamber and the internal pressure of the test chamber (10), characterized in that the test chamber (10) and the reference chamber each have at least one wall region formed from a flexible film, wherein the ratio of the test chamber volume (20) to the surface area of the flexible wall region of the test chamber (10) adjacent to the test chamber volume (20) and the ratio of the reference chamber volume to the surface area of the flexible wall region of the reference chamber adjacent to the reference chamber volume are substantially equal.. . ... Inficon Gmbh

Device and method for calibrating a film chamber for leak detection

A method for calibrating a test chamber, which encloses an interior volume (20), is designed as a film chamber (12) comprising at least one flexible wall region (14, 16), and is connected in a gas-conducting way to a pressure sensor (30), to a vacuum pump (26), and via a calibration valve (34) to a calibration chamber (36) enclosing a calibration volume (37), comprising the following steps: evacuating the film chamber (12); measuring the pressure difference inside of the film chamber (12); after the evacuation has been completed, connecting the calibration volume (37) in a gas-conducting manner to the interior volume (20) of the film chamber (12) while measuring the pressure change, wherein the pressure in the calibration chamber (36) is greater than the pressure in the film chamber (12) before the connection to the film chamber (12). A corresponding device is likewise disclosed.. ... Inficon Gmbh

Film chamber with retaining profile

The invention relates to a film chamber for receiving a test object to be tested for the presence of a leak, including at least two film layers and at least two frame elements, each of which has a sealing surface so that the two frame elements lie against each other in a gas-tight manner in order to hermetically seal the film chamber. Each of the two film layers has at least one retaining profile in a wall region, and each of the two frame elements has at least one retaining groove in the frame element sealing surface in order to receive a retaining profile such that the two film layers are held between the two frame elements substantially by a formfitting connection.. ... Inficon Gmbh

Carpet probe for leak detection

A carpet probe for detecting leaks in underground gas pipes, including a handle (12), a wheel (16) connected to the handle (12), and a flat carpet element (14) connected to the wheel (16) and including a sniffing inlet (28) connected to a gas sensor (18), is characterized in that the wheel (16) is the only wheel (16) of the carpet probe adapted for rolling on a ground surface.. . ... Inficon Gmbh

Leak-tightness test with carrier gas in foil chamber

A method for performing a leak-tightness test on a test object (16) in a foil chamber (10) which has at least one flexible wall region (12, 14), having the steps: using a gas or gas constituent contained in the test object as test gas for the leak-tightness test, introducing the test object into the foil chamber, evacuating the foil chamber to a pressure lower than the test gas pressure within the test object and than atmospheric pressure, introducing a carrier gas into the foil chamber into the region outside the test object, and measuring the test gas concentration of the gas mixture that forms in the foil chamber in the region outside the test object.. . ... Inficon Gmbh

Film chamber with measuring volume for gross leak detection

A film chamber for receiving a test object which is to be tested with respect to the presence of a leak, wherein the film chamber has walls enclosing a film chamber volume, said walls having at least one flexible wall region, wherein a measuring volume adjoining the flexible wall region is arranged on the side of the flexible wall region which is situated opposite the film chamber volume and is hermetically separated from the film chamber volume.. . ... Inficon Gmbh

System and method for optimal chemical analysis

A system and method for chemical analysis are described herein. The system includes a probe, a sample collection cartridge, and a chemical analyzer. ... Inficon Gmbh

Method and device for discrimination between natural gas and swamp gas

Method for determining whether a gas sample originates from biological processes or from a gas installation being tested and containing a utility gas is characterized in that an increased concentration of hydrogen in the sample as compared to that present in the utility gas is used as evidence that the sample originates from biological decay processes and not from the gas installation under test.. . ... Inficon Gmbh

Double-acting refrigeration compressor

A double-acting refrigerant compressor includes a piston freely guided in a fixed mounted cylinder. The cylinder includes an inlet valve plate having an inlet valve. ... Inficon Gmbh

06/01/17 / #20170153162

Test device for flexible, elongated test objects

The invention relates to a test device for carrying out load tests on flexible, elongated test objects, including a first suspension which is movably guided along a closed circulating path for a first end of the test object, a drive for moving the first suspension along the path, a second suspension for fastening another end of the test object, and a mass body that can be attached to the test object between the two suspensions in such a manner that the mass body is movable along the test object.. . ... Inficon Gmbh

04/20/17 / #20170108401

Gas density increase measurement in a film chamber

A method for a tightness test of a test piece (16) in a test chamber (10) whose wall is at least partly made of a flexible material, wherein said test piece is introduced into said test chamber and said test chamber is then evacuated, is characterized in that the tightness test is performed by measuring the gas density inside said test chamber (10) in the area outside said test piece (16).. . ... Inficon Gmbh

04/06/17 / #20170097275

Evacuable flexible leakage test chamber

An evacuable flexible test chamber (10) for a leakage test of a test piece, having a wall (12) surrounding a test chamber volume (36), is characterized in that at least a portion of said wall is made up of two layers (18, 20) of wall material of which at least the layer (20) facing said test chamber volume (36) is made from a flexible material, and that between said two layers (18, 20) an overpressure as compared to the atmosphere surrounding said test chamber (10) is adapted to be created.. . ... Inficon Gmbh

04/06/17 / #20170097273

Creating a mini environment for gas analysis

Systems and methods for in-situ leak detection and endpoint detection of wafer dry etch or chamber clean in chambers, e.g., vacuum chambers used in semiconductor processing. A mini environment is created and a sensor, such as an spoes sensor, can be used in the mini-environment to perform leak detection.. ... Inficon Gmbh








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