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Intevac Inc patents


Recent patent applications related to Intevac Inc. Intevac Inc is listed as an Agent/Assignee. Note: Intevac Inc may have other listings under different names/spellings. We're not affiliated with Intevac Inc, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "I" | Intevac Inc-related inventors


See through axial high order prism

An optical arrangement for a head mounted display, having optical surface that can be described by standard mathematical equations. A prism element is used having three optical surfaces, and wherein the reference surface of the three optical surfaces are centered at, and have no tilt, relative to the optical axis. ... Intevac Inc

System architecture for combined static and pass-by processing

Disclosed is a substrate processing system which enables combined static and pass-by processing. Also, a system architecture is provided, which reduces footprint size. ... Intevac Inc

Large area energetic ion source

An rf antenna system for a plasma chamber comprises an rf input coupling a trunk to an ro power supply; two main branches electrically connected to the main trunk, each of the two main branches coupled to a plurality of rod antennas; a plurality of tuning devices, each provided between one of the rod antennas and the corresponding main branch.. . ... Intevac Inc

In line fan out system

A system for fan out chip encapsulation processing is provided, wherein a plurality of microchips are encapsulated in molding compound, the system comprising: an atmospheric loading camber, configured to load substrates onto carriers in atmospheric environment; an entry loadlock arrangement configured to introduce the carriers into vacuum environment of the system; a degas chamber positioned downstream of the loadlock arrangement within the vacuum environment, the degas chamber comprising a heating element and a pumping arrangement to remove gases emitted from the molding compound; an etch chamber positioned downstream of the degas chamber and within the vacuum environment, the etch chamber comprising an ion beam generator and an ion neutralizer; a metal sputtering chamber positioned downstream of the etch chamber and inside the vacuum environment; and, an exit loadlock arrangement configured to remove carriers from the vacuum environment.. . ... Intevac Inc

Biocular compact collimation apparatus

A compact, lightweight, multi-wavelength display system which can be used for simultaneous viewing with both eyes is provided. The system utilizes a field flattener lens to remove abrasions introduced by the system's lenses. ... Intevac Inc

Ion implantation for modification of thin film coatings on glass

The use of non-mass analyzed ion implanter is advantageous in such application as it generates ion implanting at different depth depending on the ions energy and mass. This allows for gaining advantage from lubricity offered as a result of the very light deposition on the surface, and at the same time the hardness provided by the intercalated ions implanted below it, providing benefits for cover glass, low e enhancement, and other similar materials. ... Intevac Inc

Ion implant system having grid assembly

An ion implantation system having a grid assembly. The system includes a plasma source configured to provide plasma in a plasma region; a first grid plate having a plurality of apertures configured to allow ions from the plasma region to pass therethrough, wherein the first grid plate is configured to be biased by a power supply; a second grid plate having a plurality of apertures configured to allow the ions to pass therethrough subsequent to the ions passing through the first grid plate, wherein the second grid plate is configured to be biased by a power supply; and a substrate holder configured to support a substrate in a position where the substrate is implanted with the ions subsequent to the ions passing through the second grid plate.. ... Intevac Inc

Ultra-thin corrosion resistant hard overcoat for hard disk media

A magnetic media disk is fabricated by depositing magnetic layers over the disk, then depositing protective later over the magnetic layer, and then performing ion implant process to implant ions into the protective coating. A system for performing the ion implant of the magnetic media disk includes two ion implant chambers. ... Intevac Inc

Smudge, scratch and wear resistant glass via ion implantation

Mechanical properties of a cover glass for a touch screen are improved by ion implanting the front surface. The implant process uses non-mass analyzed ions that physically embed in voids between inter-connected molecules of the glass. ... Intevac Inc

Patterned chuck for substrate processing

A chuck for wafer processing that counters the deleterious effects of thermal expansion of the wafer. Also, a combination of chuck and shadow mask arrangement that maintains relative alignment between openings in the mask and the wafer in spite of thermal expansion of the wafer. ... Intevac Inc

Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates

A physical vapor deposition (pvd) chamber for depositing a transparent and clear hydrogenated carbon, e.g., hydrogenated diamond-like carbon, film. A chamber body is configured for maintaining vacuum condition therein, the chamber body having an aperture on its sidewall. ... Intevac Inc

Wafer plate and mask arrangement for substrate fabrication

A system for processing wafers in a vacuum processing chamber. Carrier comprising a frame having a plurality of openings, each opening configured to accommodate one wafer. ... Intevac Inc

System architecture for vacuum processing

A system for processing substrates in plasma chambers, such that all substrates transport and loading/unloading operations are performed in atmospheric environment, but processing is performed in vacuum environment. The substrates are transported throughout the system on carriers. ... Intevac Inc

Image intensifier with indexed compliant anode assembly

An image intensifier and a method of fabrication are disclosed. The image intensifier contains a photocathode assembly (120) including a vacuum window to generate photoelectrons in response to light, a vacuum package (110) and an anode assembly (130) to receive the photoelectrons. ... Intevac Inc

01/12/17 / #20170009337

Ion implantation for modification of thin film coatings on glass

The use of non-mass analyzed ion implanter is advantageous in such application as it generates ion implanting at different depth depending on the ions energy and mass. This allows for gaining advantage from lubricity offered as a result of the very light deposition on the surface, and at the same time the hardness provided by the intercalated ions implanted below it, providing benefits for cover glass, low e enhancement, and other similar materials. ... Intevac Inc








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