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Kelk Ltd patents


Recent patent applications related to Kelk Ltd. Kelk Ltd is listed as an Agent/Assignee. Note: Kelk Ltd may have other listings under different names/spellings. We're not affiliated with Kelk Ltd, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "K" | Kelk Ltd-related inventors


Heating device

A heating device includes: a baseplate; a faceplate provided above the baseplate, the faceplate including a film heater configured to heat a wafer mounted on an upper surface of the faceplate; a sleeve provided between the baseplate and the faceplate, the sleeve including a sleeve body having a vertical through-hole; and a support bolt penetrating the through-hole in the sleeve to support the faceplate on the baseplate, in which a distance from a central axis of the through-hole in the sleeve to a flat surface of an outer portion of the sleeve is less than a distance from the central axis of the through-hole to a locking surface of an inner portion of the sleeve.. . ... Kelk Ltd

Thermoelectric generator

A thermoelectric generator includes: a heat-receiving plate configured to receive heat; a cooling plate kept at a lower temperature than a temperature of the heat-receiving plate; and a thermoelectric generation module interposed between the heat-receiving plate and the cooling plate, the thermoelectric generation module including a plurality of thermoelectric elements, an outer sealing frame surrounding the thermoelectric elements, and a film sheet continuously entirely covering at least a first side of the thermoelectric elements and the outer sealing frame facing the heat-receiving plate; and a first heat insulation layer formed in a space that is defined between the heat-receiving plate and the thermoelectric generation module and that corresponds to the outer sealing frame.. . ... Kelk Ltd

Temperature controller of semiconductor wafer and temperature control method of semiconductor wafer

A plurality of temperature adjusters each independently include a control loop. A manipulated variable calculator is configured to give manipulated variables to the respective temperature adjusters and includes a reference model output generator configured to provide a reference model as a response output for reaching a temperature setpoint when a first control loop having a slowest response speed among the control loops is defined to have a 100% manipulated variable. ... Kelk Ltd

Temperature controller of semiconductor wafer

A temperature controller for a semiconductor wafer is configured to perform a temperature control on a plurality of temperature adjusters including a reference temperature adjuster to perform a temperature adjustment of the semiconductor wafer, in which a manipulated variable calculator to give a manipulated variable to a master loop and a slave loop includes a master-slave switching unit configured to switch between the master loop and the slave loop and a master-slave cancellation unit configured to cancel a setting of the master loop and the slave loop when a temperature setpoint of the slave loop is set to have a temperature gradient against a temperature setpoint of the master loop.. . ... Kelk Ltd

Thermoelectric power generation module

A thermoelectric generation module has a cooling surface formed on one of a front side and a rear side and a heating surface formed on the other thereof. The thermoelectric generation module includes: a plurality of thermoelectric elements; a pair of flexible boards holding the thermoelectric elements therebetween and respectively defining the cooling surface and the heating surface; a plurality of interelement electrodes respectively provided on opposed surfaces of the flexible boards and configured to electrically connect the thermoelectric elements to each other; a lead wire configured to be electrically connected to an interelement electrode to which a terminal element located at an end of an electrical arrangement is connected; and a reinforcing pattern interposed between the flexible boards and being closer to the drawn-out lead wire with respect to the terminal element.. ... Kelk Ltd

Thermoelectric generation unit

A thermoelectric generator unit includes: a case having a heating surface and a cooling surface; first to fourth thermoelectric generator modules housed in the case, the thermoelectric generator modules including a plurality of thermoelectric elements; a multilayer substrate including: a first layer including an interelement electrode for forming an output circuit configured to connect the thermoelectric elements; a second layer provided with a plurality of through holes penetrating therethrough from front to back; and a third layer including a plurality of bypass patterns electrically continuous with the through holes; and lead pins that penetrate through the case inward and outward, the lead pins having base ends connected to both ends of the output circuit on a surface of the first layer, the output circuit being defined in each of the thermoelectric generator modules.. . ... Kelk Ltd

Temperature controller of semiconductor wafer and temperature control method of semiconductor wafer

A manipulated variable calculator having a plurality of control loops and configured to calculate manipulated variables to be respectively given to a plurality of temperature adjusters includes: a reference model output generator configured to generate a reference model that generates a response output until reaching a temperature setpoint when, in the plurality of control loops, a manipulated variable of a control loop having the slowest response speed is defined as 100%; a simulator configured to sequentially search for a switching time to determine a manipulated variable pattern; a reference model configured to generate a reference model output based on the searched switching time; and a reference model selecting unit configured to select the reference model depending on a heating responsiveness and a cooling responsiveness of the temperature adjusters.. . ... Kelk Ltd

Temperature controller of semiconductor wafer and temperature control method of semiconductor wafer

A manipulated variable calculator having a plurality of control loops and configured to calculate manipulated variables to be respectively given to a plurality of temperature adjusters includes: a reference model output generator configured to generate a reference model that is a response output until reaching a temperature setpoint when, in the plurality of control loops, a manipulated variable of a control loop having the slowest response speed is defined as 100%; a simulator configured to sequentially search for a switching time to determine a manipulated variable pattern; a reference model configured to generate a reference model output based on the searched switching time; and a control switching unit configured to switch to a feed-back control using an error between the reference model outlet and the temperature setpoint when the reference model outlet reaches a predetermined time or a predetermined temperature after the reference model outlet starts.. . ... Kelk Ltd

Thermoelectric generator

A thermoelectric generator includes: a heat-receiving plate configured to receive heat; a cooling plate configured to be kept at a lower temperature than a temperature of the heat-receiving plate; and a thermoelectric generation module interposed between the heat-receiving plate and the cooling plate, in which the thermoelectric generation module includes: an opposed surface that is opposed to the cooling plate; a plurality of thermoelectric elements; a terminal configured to electrically conduct to the thermoelectric elements; and a lead member bonded to the terminal, in which the lead member penetrates the opposed surface and extends to the cooling plate.. . ... Kelk Ltd

Thermoelectric generating device and thermoelectric generating method

A thermoelectric generating device includes: a thermoelectric generating element configured to convert thermal energy to electric energy and to output the electric energy; a temperature measuring unit configured to measure hot side temperature of the thermoelectric generating element; and a temperature controller configured to perform control to increase an amount of current returning to the thermoelectric generating element when the hot side temperature becomes higher than predetermined temperature.. . ... Kelk Ltd








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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Kelk Ltd in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Kelk Ltd with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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