Real Time Touch



new TOP 200 Companies filing patents this week

new Companies with the Most Patent Filings (2010+)




Real Time Touch

Lam Research Ag patents


Recent patent applications related to Lam Research Ag. Lam Research Ag is listed as an Agent/Assignee. Note: Lam Research Ag may have other listings under different names/spellings. We're not affiliated with Lam Research Ag, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "L" | Lam Research Ag-related inventors


Point-of-use mixing systems and methods for controlling temperatures of liquids dispensed at a substrate

A liquid dispensing system for treating a substrate is provided and includes a flow controller, pressure regulator, mixing node, liquid mixer, temperature sensor, n dispensers, and system controller. The flow controller receives and controls a flow rate of a first liquid. ... Lam Research Ag

Spin chuck including edge ring

Apparatus for treating a substrate includes a stationary plate assembly including liquid nozzles to direct liquid at an edge of the substrate during treatment. A chuck assembly includes a chuck body arranged below and radially outside of the stationary plate assembly and rotatable relative to the stationary plate assembly. ... Lam Research Ag

Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (vuv) light in low-oxygen environment

A system for reducing surface and embedded charge in a substrate includes a substrate support configured to support a substrate. A vacuum ultraviolet (vuv) assembly is arranged adjacent to the substrate and includes a housing and a vuv lamp that is connected to the housing and that generates and directs ultraviolet (uv) light at the substrate. ... Lam Research Ag

Apparatus and radiant heating plate for processing wafer-shaped articles

An apparatus for processing wafer-shaped articles includes a rotary chuck adapted to hold a wafer-shaped article of a predetermined diameter thereon. A radiant heating plate faces a wafer-shaped article when positioned on the rotary chuck. ... Lam Research Ag

Method and apparatus for processing wafer-shaped articles

A method for drying wafer-shaped articles comprises rotating a wafer-shaped article of a predetermined diameter on a rotary chuck, and dispensing a drying liquid onto one side of the wafer-shaped article. The drying liquid comprises greater than 50 mass % of an organic solvent. ... Lam Research Ag

Apparatus for processing wafer-shaped articles

An apparatus for processing wafer-shaped articles comprises a rotary chuck having a series of contact elements surrounding a wafer-shaped article when mounted on the rotary chuck. A non-rotating plate is positioned interiorly of the series of contact elements. ... Lam Research Ag

Method and apparatus for liquid treatment of wafer shaped articles

An apparatus for processing wafer-shaped articles comprises a rotary chuck adapted to hold a wafer shaped article thereon. The rotary chuck comprises a peripheral series of pins configured to contact an edge region of a wafer-shaped article. ... Lam Research Ag

Method and apparatus for processing wafer-shaped articles

An apparatus for processing wafer-shaped articles comprises a rotary chuck and a heating assembly that faces a wafer-shaped article when positioned on the rotary chuck. A liquid dispenser positioned so as to dispense liquid onto a surface of a wafer-shaped article that faces away from the rotary chuck when positioned on the rotary chuck. ... Lam Research Ag

Method and apparatus for processing wafer-shaped articles

In an apparatus for treating a wafer-shaped article, a spin chuck is configured to hold a wafer-shaped article of a predetermined diameter. A non-rotating plate is positioned relative to the spin chuck such that the non-rotating plate is beneath and parallel to a wafer-shaped article when positioned on the spin chuck. ... Lam Research Ag

Wet-dry integrated wafer processing system

An apparatus for processing wafer-shaped articles comprises a vacuum transfer module and an atmospheric transfer module. A first airlock interconnects the vacuum transfer module and the atmospheric transfer module. ... Lam Research Ag

Apparatus for liquid treatment of wafer shaped articles

An apparatus for treating a wafer-shaped article comprises a spin chuck configured to hold a wafer-shaped article of a predetermined diameter in a position wherein a lower surface of the wafer-shaped article is spaced a predetermined distance from an upper surface of the spin chuck. A treatment assembly is mounted above the upper surface of the spin chuck and underlying a wafer-shaped article when mounted on the spin chuck. ... Lam Research Ag

Spin chuck with in situ cleaning capability

In a method and apparatus for processing wafer-shaped articles, a spin chuck is positioned inside a process chamber. The spin chuck is configured to hold a wafer-shaped article at a predetermined process position. ... Lam Research Ag

Spin chuck with gas leakage prevention

An apparatus for processing wafer-shaped articles, comprises a process chamber, and a spin chuck positioned inside the process chamber. The spin chuck is configured to hold a wafer-shaped article at a predetermined process position. ... Lam Research Ag

Spin chuck with heated nozzle assembly

An apparatus for processing wafer-shaped articles comprises a process chamber and a spin chuck positioned inside the process chamber. The spin chuck is configured to hold a wafer-shaped article at a predetermined process position. ... Lam Research Ag

05/04/17 / #20170125281

Apparatus for treating surfaces of wafer-shaped articles

A rotary chuck for processing wafer-shaped articles comprises a chuck body having a series of gripping pins that are movable by sliding horizontally and in unison relative to the chuck body from a first position in which the gripping pins are relatively more retracted into the chuck body to a second position in which the gripping pins are relatively more extended from the chuck body and in which the gripping pins are positioned so as to support a wafer-shaped article of a predetermined diameter.. . ... Lam Research Ag

05/04/17 / #20170125266

Apparatus for treating surfaces of wafer-shaped articles

A device for processing wafer-shaped articles comprises a closed process chamber providing a gas-tight enclosure, and a rotary chuck located within the closed process chamber. The closed process chamber comprises an annular duct surrounding the rotary chuck and extending along a first direction radially outwardly of the rotary chuck and obliquely to a rotary axis of the rotary chuck, from an inlet end that communicates with the rotary chuck to an outlet end that communicates with an exhaust duct. ... Lam Research Ag








ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009



###

This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Lam Research Ag in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Lam Research Ag with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

###