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Lasertec Corporation patents


Recent patent applications related to Lasertec Corporation. Lasertec Corporation is listed as an Agent/Assignee. Note: Lasertec Corporation may have other listings under different names/spellings. We're not affiliated with Lasertec Corporation, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "L" | Lasertec Corporation-related inventors


Optical apparatus and vibration removing method

An optical apparatus and its vibration removing method capable of stabilizing a place where light is applied are provided. An optical apparatus according to an aspect of the present disclosure includes a light source chamber, an euv light source, an optical system chamber, an optical system configured to guide light entering the optical system chamber to an object through a bellows, an optical sensor configured to detect euv light l2 emitted from the euv light source, a position sensor disposed to detect a relative position of the optical system chamber with respect to the light source chamber, and a second vibration removal unit configured to remove vibrations from the light source chamber based on detection results of the optical sensor and the position sensor.. ... Lasertec Corporation

Measurement apparatus, measurement method, and correction method

A measurement apparatus 1 according to the present invention includes a table 10 that has an axis of rotation 14 and supports a disc-shaped object 40, a first driving unit that rotates the table 10 around the axis of rotation 14, a light source 50 that produces illumination light with which an end portion 45 of the disc-shaped object 40 is illuminated, an objective lens 60 that collects the illumination light reflected from the end portion 45, a second driving unit that moves the objective lens 60 along an optical axis 64, an imaging unit 70 that captures an image of the end portion 45 by detecting the reflected light collected by the objective lens 60, and an autofocus optical system 80 that determines a position of the objective lens 60 where the image of the end portion 45 is brought into focus in the imaging unit 70.. . ... Lasertec Corporation

Q-switched co2-laser material machining system comprising acousto-optic modulators

A q-switched co2 laser material processing system with acousto-optic modulators (aom) is employed, on the one hand, inside the resonator for q-switching the co2 laser and, on the other hand, externally for efficient suppression of the radiation feedback between a laser and workpiece. The frequency shift of the radiation diffracted at the aom is taken into account which exactly corresponds to the excitation frequency of the acoustic wave in the aom crystal under the aspect of the amplification of the radiation in the active medium. ... Lasertec Corporation

Inspection apparatus and its focus adjustment method

An inspection apparatus according to an aspect of the present invention includes an euv light source 11, an illumination optical system 10 provided to apply the euv light to an euv mask 60, a concave mirror and a convex mirror 22 configured to reflect the euv light reflected on the euv mask 60, a camera 32 configured to detect euv light reflected on the convex mirror 22 and thereby take an image of the euv mask 60, an af light source 16 configured to generate af light having a wavelength of 450 nm to 650 nm, first and second detectors 27 and 30 configured to detect the af light reflected on the euv mask 60 through the concave mirror with the hole 21 and the convex mirror 22, and an processing device 31 configured to adjust a focus point of the euv light on the euv mask 60.. . ... Lasertec Corporation

Mask inspection apparatus and mask inspection method

Provided are a mask inspection apparatus and a mask inspection method that can prevent a reduction in a reflectance of a drop-in mirror, which is caused by carbon contaminants. A mask inspection apparatus according to the present invention includes a drop-in mirror including multi-layer film and a reflective surface. ... Lasertec Corporation

Laser ablation and welding method for workpieces

The present invention relates to a laser ablation and welding method for workpieces, in particular, metal sheets, and an automatic laser ablation and welding system, where an ablation procedure and a welding procedure are executed in an automation line.. . ... Lasertec Corporation

Device and method for monitoring work area for laser processing of material

The invention relates to a monitoring apparatus (10) for a processing system for processing a workpiece (w) by means of a high-energy processing beam (38), in particular in a spatially limited processing area, wherein the monitoring apparatus (10) comprises a measurement beam source (16), which is designed to supply a measurement beam (18) and a recording unit (22), which is designed to detect a component (24) of the measurement beam reflected by the surroundings, wherein the monitoring apparatus (10) is designed to input the measurement beam (18) into a processing beam optics (34) of the processing system, so that the measurement beam (18) and the processing beam (38) can be directed at common positions in the surroundings, wherein the monitoring apparatus (10) is also designed to ascertain at least one distance value (d), which enables a conclusion about a distance from the processing beam optics (34) to the region (x) of the surroundings reflecting measurement beam (18), on the basis of the reflected component (24) of the measurement beam (18) thereby detected, and wherein the monitoring apparatus (10) also detects an evaluation unit, which is designed to evaluate whether the distance value (d) thereby ascertained is within an allowed distance value range (z).. . ... Lasertec Corporation

Apparatus and method for producing a tailored sheet metal strip or metal profile

An apparatus for producing a tailored sheet metal strip, comprising at least one welding station, by means of which at least two sheet metal strips can be welded to one another along their longitudinal edges, and at least two strip feeding devices for respectively feeding one of the sheet metal strips into the at least one welding station, wherein the at least two strip feeding devices and the at least one welding station define a production line. A further-processing station for further processing is integrated in the production line downstream of the at least one welding station in the strip running direction and is equipped with tools for applying reinforcing material, to local points of at least one of the sheet metal strips which are connected to one another, for punching holes and/or for forming at least one of the sheet metal strips which are connected to one another.. ... Lasertec Corporation

Folding optics for folding an optical path in a laser pulse arrangement

Folding optics for a laser pulse compressor contain at least two reflecting elements, each having a flat reflecting surface, which reflecting elements are spatially fixed by a retaining device by a frictional connection in such a way that the two reflecting surfaces are arranged at a definable angle with respect to each other. Accordingly, each of the two reflecting elements is oriented along a respective side surface of an angle block, wherein the two side surfaces are arranged at a definable angle with respect to each other and the angle block serves as an abutment in order to achieve the frictional connection to the retaining device.. ... Lasertec Corporation

Machine tool, measurement apparatus, method for generating working data, cladding method, method for setting temperature of a workpiece

The invention relates to a machine tool (10) comprising a machine controller (19), a machine frame (11), a work table (13), a tool holder (14), preferably of a standardized design, multiple translational and/or rotational axes (12a, 12b) for adjusting the relative position of the work table (13) and the work holder (14), a tool magazine (16) for one or more material-removing, in particular machining tools (15), a tool-change mechanism for automatically transporting tools between the tool holder (14) and the tool magazine (16), a deposit-welding head (20) that can be inserted into the tool holder (14) and a storage device (25) for storing the deposit-welding head outside the tool holder (14).. . ... Lasertec Corporation








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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Lasertec Corporation in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Lasertec Corporation with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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