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Materia Inc patents


Recent patent applications related to Materia Inc. Materia Inc is listed as an Agent/Assignee. Note: Materia Inc may have other listings under different names/spellings. We're not affiliated with Materia Inc, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "M" | Materia Inc-related inventors


High performance flow battery

High performance flow batteries, based on alkaline zinc/ferro-ferricyanide rechargeable (“znfe”) and similar flow batteries, may include one or more of the following improvements. First, the battery design has a cell stack comprising a low resistance positive electrode in at least one positive half cell and a low resistance negative electrode in at least one negative half cell, where the positive electrode and negative electrode resistances are selected for uniform high current density across a region of the cell stack. ... Materia Inc

Modified super-hydrophobic material-coated high-nickel cathode material for lithium ion battery and preparation method therefor

A modified super-hydrophobic material-coated high-nickel cathode material for a lithium ion battery and a preparation method therefor. The surface of the high-nickel cathode material for a lithium ion battery is coated with a modified super-hydrophobic material, and particles are bridged with each other by the modified super-hydrophobic material. ... Materia Inc

Light-emission module having cooler and production method for light-emission module having cooler

A light-emitting module with a cooler of the present invention includes a circuit layer which is formed on one surface side of an insulating layer and in which a light-emitting element is mounted, and a metal layer and a cooler which are laminated in order on the other surface side of the insulating layer. The circuit layer is formed of cu, al, or an alloy thereof and has a thickness of 0.1 mm or less. ... Materia Inc

Light-emitting module substrate, light-emitting module, substrate for light-emitting module having cooler, and production method for light-emitting module substrate

A light-emitting module substrate of the present invention includes a circuit layer which is formed on one surface of an insulating layer and in which a light-emitting element is mounted, and a metal layer formed of al or an al alloy and a heat sink which are laminated in order on the other surface side of the insulating layer. In the heat sink, cu is present on at least a bonding surface with respect to the metal layer. ... Materia Inc

Self-aligned process for sub-10nm fin formation

Methods of sub-10 nm fin formation are disclosed. One method includes patterning a first dielectric layer on a substrate to form one or more projections and a first plurality of spaces, and depositing a first plurality of columns in the first plurality of spaces. ... Materia Inc

Method for optimizing dry absorber efficiency and lifetime in epitaxial applications

Increasing efficiency of absorbers is provided herein. In some embodiments, a method of processing a substrate may include determining a quantity of a removal species in an effluent stream flowing from a semiconductor processing chamber, wherein determining comprises: detecting or predicting a quantity of the removal species upstream of a chamber abatement apparatus in the effluent stream flowing from the semiconductor processing chamber; and removing the removal species from the effluent stream with the chamber abatement apparatus if the determined quantity of the removal species exceeds a threshold value of the removal species.. ... Materia Inc

Doping control of metal nitride films

Described are methods for controlling the doping of metal nitride films such as tan, tin and mnn. The temperature during deposition of the metal nitride film may be controlled to provide a film density that permits a desired amount of doping. ... Materia Inc

Slurry for polishing of integrated circuit packaging

A slurry for chemical mechanical planarization includes water, 1-3 wt. % of abrasive particles having an average diameter of at least 10 nm and less than 100 nm and an outer surface of ceria, and ½-3 wt. ... Materia Inc

Hybrid carbon hardmask for lateral hardmask recess reduction

Implementations of the present disclosure relate to improved hardmask materials and methods for patterning and etching of substrates. A plurality of hardmasks may be utilized in combination with patterning and etching processes to enable advanced device architectures. ... Materia Inc

Method and composition for providing pore sealing layer on porous low dielectric constant films

Described herein is a method and composition comprising same for sealing the pores of a porous low dielectric constant (“low k”) layer by providing an additional thin dielectric film, referred to herein as a pore sealing layer, on at least a surface of the porous, low k layer to prevent further loss of dielectric constant of the underlying layer. In one aspect, the method comprises: contacting a porous low dielectric constant film with at least one organosilicon compound to provide an absorbed organosilicon compound and treating the absorbed organosilicon compound with ultraviolet light, plasma, or both, and repeating until a desired thickness of the pore sealing layer is formed.. ... Materia Inc

Surface treatment methods and compositions therefor

The disclosure provides methods and compositions therefor for treating a surface wherein a surface treatment layer is formed on the surface, thereby minimizing or preventing pattern collapse as the surface is subjected to typical cleaning steps in the semiconductor manufacturing process.. . ... Materia Inc

Asymmetrical rf drive for electrode of plasma chamber

Rf power is coupled to one or more rf drive points (50-56) on an electrode (20-28) of a plasma chamber such that the level of rf power coupled to the rf drive points (51-52,55-56) on the half (61) of the electrode that is closer to the workpiece passageway (12) exceeds the level of rf power coupled to the rf drive points (53-54), if any, on the other half (62) of the electrode. Alternatively, rf power is coupled to one or more rf drive points on an electrode of a plasma chamber such that the weighted mean of the drive point positions is between the center (60) of the electrode and the workpiece passageway. ... Materia Inc

Apparatus configured for sputter deposition on a substrate, system configured for sputter deposition on a substrate, and method for sputter deposition on a substrate

The present disclosure provides an apparatus configured for sputter deposition on a substrate. The apparatus includes a cylindrical sputter cathode rotatable around a rotational axis, and a magnet assembly configured to provide a first plasma racetrack and a second plasma racetrack on opposite sides of the cylindrical sputter cathode, wherein the magnet assembly includes two, three or four magnets each having two poles and one or more sub-magnets, wherein the two, three or four magnets are configured for generating both the first plasma racetrack and the second plasma racetrack.. ... Materia Inc

Ferrite magnetic material and ferrite sintered magnet

The present invention produces a ferrite magnetic material having a remarkably higher maximum energy product ((bh)max) than a conventional ferrite magnetic material through the induction of a high saturation magnetization and a high anisotropic magnetic field by simultaneously adding co and zn to substitute some of fe and adjusting the content ratio of zn/co. In addition, the present invention can produce a desired magnetic material at a lower cost than a conventional calaco-based ferrite magnetic material substituted with only co by using zn, which is relatively at least seven times cheaper than co, together with co.. ... Materia Inc

09/27/18 / #20180275064

Raman spectrum plane imaging device

Aspects of raman spectrum plane imaging device(s), belonging to the technical field of raman spectra, are disclosed. In one example, a raman spectrum plane imaging device may comprise a laser generation apparatus capable of adjusting an output wavelength, a light filtering apparatus, and a planar array detector. ... Materia Inc

09/27/18 / #20180275035

Measurement of material properties under local tensile stress through contact mechanics

An apparatus for performing a contact mechanics test in a substrate includes a stylus having at least two contact elements. Each contact element has a contact profile, and the contact elements are disposed in the stylus to define a stretch passage therebetween. ... Materia Inc

09/27/18 / #20180274694

Water-saving electronic valve

Provided herein is a water-saving valve that includes water inlet and outlet passageways, a pressure regulating chamber body and movable valve, a drain assembly and a control assembly. The pressure regulating body and movable valve define one pressure regulating chamber that communicates with the water inlet passageway via water hole on the movable plate. ... Materia Inc

09/27/18 / #20180274686

Water-saving valve

A water-saving valve and a water-spraying toy are provided herein. The water-saving valve can include the following: a water inlet passageway and a water outlet passageway; a pressure regulating chamber body and a movable valve plate, both used to define one pressure regulating chamber, wherein the pressure regulating chamber communicates with the water inlet passageway via a water hole on the movable valve plate, the pressure regulating chamber body is provided with a drain hole, and the drain hole communicates with the pressure regulating chamber, the movable valve plate is configured to move between a first position and a second position by different pressure inside and outside the pressure regulating chamber acting on the movable valve plate to block or open respectively the water outlet passageway; and a drain assembly configured to block or open the drain hole.. ... Materia Inc

09/27/18 / #20180274100

Alternating between deposition and treatment of diamond-like carbon

A method of forming a layer of diamond-like carbon on a workpiece includes supporting the workpiece in a chamber with the workpiece facing an upper electrode, and forming a plurality of successive sublayers to form the layer of layer of diamond-like carbon by alternating between depositing a sublayer of diamond-like carbon on the workpiece in the chamber and treating the sublayer with a plasma of the inert gas or an electron beam from the upper electrode.. . ... Materia Inc

09/27/18 / #20180274099

Apparatus and methods for photo-excitation processes

Embodiments of the disclosure provide a method and apparatus for depositing a layer on a substrate. In one embodiment, the method includes exposing a surface of the substrate disposed within a processing chamber to a fluid precursor, directing an electromagnetic radiation generated from a radiation source to a light scanning unit such that the electromagnetic radiation is deflected and scanned across the surface of the substrate upon which a material layer is to be formed, and initiating a deposition process with the electromagnetic radiation having a wavelength selected for photolytic dissociation of the fluid precursor to deposit the material layer onto the surface of the substrate. ... Materia Inc

09/27/18 / #20180274095

Process kit for a high throughput processing chamber

A processing chamber for processing a substrate is disclosed herein. In one embodiment, the processing chamber includes a liner assembly disposed within an interior volume of the processing chamber, and a c-channel disposed in an interior volume of the chamber, circumscribing the liner assembly. ... Materia Inc

09/27/18 / #20180274089

Deposition or treatment of diamond-like carbon in a plasma reactor

A method of performing deposition of diamond-like carbon on a workpiece in a chamber includes supporting the workpiece in the chamber facing an upper electrode suspended from a ceiling of the chamber, introducing a hydrocarbon gas into the chamber, and applying first rf power at a first frequency to the upper electrode that generates a plasma in the chamber and produces a deposition of diamond-like carbon on the workpiece. Applying the rf power generates an electron beam from the upper electrode toward the workpiece to enhance ionization of the hydrocarbon gas.. ... Materia Inc

09/27/18 / #20180273809

Multi-layered anisotropic conductive adhesive having conductive fabric and preparation thereof

The present disclosure provides a multi-layered anisotropic conductive adhesive including an upper conductive adhesive layer, a conductive fabric layer with two sides and a lower conductive adhesive layer, wherein one side of the conductive fabric layer is plated with metal, and the total thickness of the multi-layered anisotropic conductive adhesive is 40 to 60 μm. In the application of a flexible printed circuit, reinforced parts, formed by laminating multi-layered anisotropic conductive adhesive with steel or polyimide-type stiffener, can effectively prevent the deformation of installed parts due to warping, and ensure the good hole filling, good direct grounding effect, and good shielding performance. ... Materia Inc

09/27/18 / #20180273752

Polyphenylene ether resin composition

Polyphenylene ether resin composition includes 100 parts by weight of polyphenylene ether resin, 25 to 40 parts by weight of copolymer, and 0.01 to 0.02 parts by weight of initiator. The copolymer is (a) copolymer polymerized of (a) mono-functional monomer, (b1) bi-functional monomer, and (c) tri-functional monomer through radical polymerization, (b) copolymer polymerized of (a) mono-functional monomer and (b2) bi-functional monomer through radical polymerization, or (c) a combination thereof.. ... Materia Inc

09/27/18 / #20180273750

Polycarbonate resin composition and molded product produced from same

A polycarbonate resin composition of the present invention comprises: a polycarbonate resin; and a release agent containing a fatty acid ester compound and paraffin wax, wherein the fatty acid ester compound and the paraffin wax are contained in a weight ratio ranging from about 1:about 0.2 to about 1:about 1. The polycarbonate resin composition is excellent in terms of release properties, transparency, heat resistance, hydrolysis resistance, etc.. ... Materia Inc

09/27/18 / #20180273718

Method for preparing foamed structure

The present disclosure relates to a method for preparing a foamed structure, comprising: providing a preform prepared from one or more of thermoplastic materials, in which the preform has corresponding shape of the foamed structure; subjecting the preform to a first treatment with a first supercritical fluid at a first temperature and a first pressure; optionally, subjecting the preform treated with the first supercritical fluid to a second treatment with a second supercritical fluid at a second temperature and a second pressure; and foaming the resulting preform into a structure having predetermined shape and size.. . ... Materia Inc

09/27/18 / #20180273715

Foamed structure

The present disclosure relates to a non-corrugated foamed structure having an average resilience coefficient of greater than 45% as measured by the astm d-2632 method and an average pore size of 99 μm or less.. . ... Materia Inc

09/27/18 / #20180273686

Nano-silica hybrid vinyl phenyl silicon intermediate, preparation method thereof and use thereof in environmentally-friendly insulating varnish

A nano-silica hybrid vinyl phenyl silicon intermediate, a preparation method therefor and a use thereof in an environmentally-friendly insulating varnish are provided. The nano-silica particles are dispersed uniformly and stably; the nana-silica hybrid vinyl phenyl silicon intermediate has the advantages of resisting high temperatures and coronas and being high in activity; the temperature index measured according to a secant method is 200° c.-240° c., the measured corona-resistant time is 18-36h, and the vinyl active sites carried thereon can have a good compatibility with polyesterimide, heat-resistant polyesters, hydrogen-containing siloxane and modified epoxy; the intermediate is particularly suitable for preparing a high-temperature-resistant and corona-resistant solvent-free insulating varnish; and there are on volatile gases during use, thereby causing on pollution to the atmospheric environment.. ... Materia Inc

09/27/18 / #20180273684

Polyoxazolidinone resin, preparation method thereof and use thereof in impregnating varnish

A polyoxazolidinone resin, a preparation method thereof and a use thereof in an impregnating varnish are provided. The polyoxazolidinone resin is prepared by reacting an alicyclic epoxy resin and a diisocyanate in the presence of a catalyst at 150° c. ... Materia Inc

09/27/18 / #20180273671

Polyurethane catalyst and application thereof

A polyurethane catalyst comprises a sodium compound, the sodium compound being 1 to 60 wt % of the polyurethane catalyst by the mass percent, and further comprises a tertiary amine and/or pyridine compound. The sodium compound and the tertiary amine and/or pyridine compound achieve a synergistic effect; during the catalysis of the polymerization of isocyanate and polyalcohol, the speed of the polymerization reaction is increased; and the prepared polyurethane material has excellent physical properties, does not contain any heavy metal element at all, is an environment-friendly catalyst, solves the technical problem of ensuring environmental protection, safety and the catalytic efficiency of the polyurethane catalyst, and is particularly applicable to the preparation of polyurethane synthetic leather resin slurry, a polyurethane elastomer (prepolymer), a polyurethane coating, a polyurethane adhesive, a polyurethane composite material, flexible polyurethane foam, and a rigid polyurethane material.. ... Materia Inc

09/27/18 / #20180273388

A method of making a graphitic carbon sheet

A method of making a graphitic carbon sheet is provided, comprising providing a substrate; providing a coating composition, comprising: a liquid carrier and a mx/graphitic carbon precursor material having a formula (i); disposing the coating composition on the substrate to form a composite; optionally, baking the composite; annealing the composite under a forming gas atmosphere; whereby the composite is converted into an mx layer and a graphitic carbon layer disposed on the substrate providing a multilayer structure; wherein the mx layer is interposed between the substrate and the graphitic carbon layer in the multilayer structure; exposing the multilayer structure to an acid; and, recovering the graphitic carbon layer as the freestanding graphitic carbon sheet.. . ... Materia Inc

09/27/18 / #20180272608

3d printing device for multiple materials and 3d printing method for multiple materials

The present invention relates to a 3d printing device for multiple materials comprising: a material transfer unit comprising at least two lines; a material supply unit to supply at least one type of printing material on each line of the material transfer unit; a thickness control unit to control a thickness of a material supplied by the material supply unit; a 3d printing module to solidify the material controlled with the thickness by the thickness control unit to a predefined shape to solidify the material on one line and to move to the other line so as to solidify the material on the other line; a material processing module to perform washing or drying for the material solidified by the 3d printing module; and a collecting module to collect the printing material unused during the printing.. . ... Materia Inc

09/27/18 / #20180272484

Methods and supports for holding subtrates

A method and a support for holding a substrate, wherein the support is included in a transportation system configured to transport the substrate. The method includes attaching an adhesive to the support, wherein the material of the adhesive is a synthetic setae material and wherein the adhesive is configured to attach the substrate to the support; and attaching the adhesive to the substrate. ... Materia Inc

09/27/18 / #20180272425

Silver-coated copper powder and method for producing same

A silver-coated copper powder obtained by coating the surface of a copper powder, which is obtained by the atomizing method or the like, with 5 wt % or more (with respect to the silver-coated copper powder) of a silver containing layer of silver or a silver compound, is added to a silver supporting solution of a potassium silver cyanide solution (or a potassium silver cyanide solution containing at least one selected from the group consisting of potassium pyrophosphate, boric acid, tripotassium citrate monohydrate, anhydrous citric acid and l-aspartic acid) to cause 0.01 wt % or more (with respect to the silver-coated copper powder) of silver to be supported on the surface of the copper powder coated with the silver containing layer.. . ... Materia Inc

09/27/18 / #20180272390

Batch processing load lock chamber

Embodiments of the disclosure generally relate to an improved batch processing load lock chamber, a cluster tool having the same and a method of using the improved load lock chamber to clean a plurality of substrates disposed within. In one embodiment, a load lock chamber includes a chamber body, a cassette disposed in the chamber body, a remote plasma source, a plurality of inlet nozzles and a plurality of outlet ports. ... Materia Inc

09/27/18 / #20180272386

Cleaning compositions for removing residues on semiconductor substrates

This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one water soluble organic solvent; 3) at least one metal-containing additive; 4) at least one cyclic amine, and 5) water.. . ... Materia Inc

09/27/18 / #20180272276

Waste gas treatment method with application of nano-bubble and waste gas treatment system using the same

A waste gas treatment method with the application of nano-bubbles and a waste gas treatment system using the same are provided. The method includes the steps of: feeding waste gas to an accommodating space; flowing a predetermined body of water in the accommodating space and generating the predetermined body of water including nano-bubbles; directing the waste gas mixed with the predetermined body of water including the nano-bubbles to a swirling unit; and discharging the treated gas waste. ... Materia Inc

09/27/18 / #20180272219

Martial arts equipment, systems and related methods

A martial arts target handle comprising; (a) an accelerometer providing a first data output signal; (b) an altimeter providing a second data output signal; (c) a cpu receiving and storing said first and second data output signals; and (d) a power source providing power said accelerometer, altimeter and cpu.. . ... Materia Inc

09/27/18 / #20180272028

Surgical sealant

A surgical sealant comprising a first agent containing a hydrophobically-modified gelatin derived from a cold-water fish, and a second agent containing a water-soluble molecule for crosslinking, wherein the water-soluble molecule for crosslinking is at least one kind selected from the group consisting of poly acids and acid anhydrides having two or more active ester groups, and aldehyde compounds having two or more aldehyde groups, the hydrophobically-modified gelatin derived from a cold-water fish is a gelatin in which at least a part of amino groups of side chains of a gelatin derived from a cold-water fish has been substituted by hydrophobic groups, and the hydrophobic groups are linear chain aliphatic groups each having 8 to 18 carbon atoms, with a substitution rate (number of moles of hydrophobic groups/(total number of moles of hydrophobic groups and reactive amino groups in gelatin)×100) of 3 to 20 mol %.. . ... Materia Inc

09/27/18 / #20180271569

Orthopedic bone fixation systems and methods

The orthopedic systems are patient-specific and provided with two types of features for positioning and/or fixing the plate to the bone or bone fragments. A method for generating bone plates comprises: generating a model of the bone defect or envisaged osteotomy based on one or more images of the bone and the surgical plan; designing based on said model a model corresponding to the envisioned repair of said bone defect/envisaged result of the osteotomy; generating a bone plate based on the information above, comprising: one or more patient-specific features corresponding to the surface of a bone fragment in the area close to the defect; and one or more fixation features whose position and/or orientation is such that the fixation elements will enter the bone in areas suitable for fixing the bone plate to each bone fragment.. ... Materia Inc

09/20/18 / #20180270910

Electronic device manufacturing systems, methods, and apparatus for heating substrates and reducing contamination in loadlocks

An electronic device manufacturing system may include a loadlock. The loadlock may include a plurality of gas line heaters for providing a heated gas to the loadlock to heat a processed substrate therein. ... Materia Inc

09/20/18 / #20180269475

Silicon oxide composite for lithium secondary battery negative electrode material and method for manufacturing the same

A silicon oxide composite for a secondary battery negative electrode material and a method for manufacturing the same, more particularly, a silicon oxide composite for a secondary battery negative electrode material and a method for manufacturing the same are disclosed. The silicon oxide composite includes mgsio3 (enstatite) crystals and silicon particles, of which crystal size is from 1 to 25 nm, in a silicon oxide (siox, 0<x<2), and a carbon film placed on a surface.. ... Materia Inc

09/20/18 / #20180269098

Electrostatic chuck having thermally isolated zones with minimal crosstalk

A substrate support assembly includes a ceramic puck and a thermally conductive base having an upper surface that is bonded to a lower surface of the ceramic puck. Trenches are formed in the thermally conductive base approximately concentric around a center of the thermally conductive base. ... Materia Inc

09/20/18 / #20180269095

Load port operation in electronic device manufacturing apparatus, systems, and methods

An electronic device manufacturing system may include a factory interface having a controlled environment. The electronic device manufacturing system may also include a load port coupled to the factory interface. ... Materia Inc

09/20/18 / #20180269089

Non-contact temperature calibration tool for a substrate support and method of using the same

Embodiments of the disclosure relate to methods for measuring temperature and a tool for calibrating temperature control of a substrate support in a processing chamber without contact with a surface of the substrate support. In one embodiment, a test fixture with a temperature sensor is removably mounted to an upper surface of a chamber body of the processing chamber such that the temperature sensor has a field of view including an area of the substrate support that is adjacent to a resistive coil disposed in the substrate support. ... Materia Inc

09/20/18 / #20180269083

Finned rotor cover

Embodiments described herein generally relate to a processing apparatus having a cover piece that participates in preheating a process gas. In one implementation, the cover piece includes an annulus. ... Materia Inc

09/20/18 / #20180269065

Aluminum content control of tiain films

Described are methods of depositing a titanium aluminum nitride film on a substrate surface with a controlled amount of carbon. The methods include exposing a substrate surface to a titanium precursor, a nitrogen reactant and an aluminum precursor with purges of the unreacted titanium and aluminum precursors and unreacted nitrogen reactants between each exposure.. ... Materia Inc

09/20/18 / #20180269057

Formulation for deposition of silicon doped hafnium oxide as ferroelectric materials

In one aspect, the invention is formulations comprising both organoaminohafnium and organoaminosilane precursors that allows anchoring both silicon-containing fragments and hafnium-containing fragments onto a given surface having hydroxyl groups to deposit silicon doped hafnium oxide having a silicon doping level ranging from 0.5 to 8 mol %, preferably 2 to 6 mol %, most preferably 3 to 5 mol %, suitable as ferroelectric material. In another aspect, the invention is methods and systems for depositing the silicon doped hafnium oxide films using the formulations.. ... Materia Inc

09/20/18 / #20180269039

Chemistry compatible coating material for advanced device on-wafer particle performance

A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. ... Materia Inc

09/20/18 / #20180269038

Multi-zone gas injection assembly with azimuthal and radial distribution control

A gas injection system includes (a) a side gas plenum, (b) a plurality of n gas inlets coupled to said side gas plenum, (c) plural side gas outlets extending radially inwardly from said plenum, (d) an n-way gas flow ratio controller having n outputs coupled to said n gas inlets respectively, and (e) an m-way gas flow ratio controller having m outputs, respective ones of said m outputs coupled to said tunable gas nozzle and a gas input of said n-way gas flow ratio controller.. . ... Materia Inc

09/20/18 / #20180268971

Highly thermostable rare-earth permanent magnetic material, preparation method thereof and magnet containing the same

Provided are a highly thermostable rare-earth permanent magnetic material, a preparation method thereof and a magnet containing the same. A composition of the rare-earth permanent magnetic material by an atomic percentage is as follows: smxrafe100-x-y-z-amynz, wherein r is at least one of zr and hf, m is at least one of co, ti, nb, cr, v, mo, si, ga, ni, mn and al, x+a is 7-10%, a is 0-1.5%, y is 0-5% and z is 10-14%.. ... Materia Inc

09/20/18 / #20180268539

Technique for measuring overlay between layers of a multilayer structure

A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.. ... Materia Inc

09/20/18 / #20180268099

Method of performing metrology operations and system thereof

There are provided system and method of performing metrology operations related to a specimen. The method comprises: generating an examination recipe in accordance with a metrology application, the examination recipe specifying one or more metrology objects and one or more metrology operations related to the metrology application; obtaining an image-based representation of the specimen and a design-based representation of the specimen; mapping between the design-based representation of at least first metrology object and the image-based representation of at least first metrology object; and performing at least first metrology operation of the one or more metrology operations according to the examination recipe using the mapping, the at least first metrology operation specified as related to the at least first metrology object and to be performed on at least the image-based representation of the specimen.. ... Materia Inc

09/20/18 / #20180268098

Method of performing metrology operations and system thereof

There are provided system and method of performing metrology operations related to a specimen. The method comprises: accommodating definitions of metrology objects and metrology operations, at least one of the group consisting of the metrology objects and the metrology operations being defined using design data; accommodating a design-based representation and an image-based representation of the specimen, the design-based representation of the specimen comprising design-based representation of at least first metrology object, the image-based representation of the specimen comprising image-based representation of the at least first metrology object, the metrology operations including at least first metrology operation defined as related to the at least first metrology object and performed on at least the image-based representation of the specimen; mapping between the design-based representation and the image-based representation of the at least first metrology object; and performing the at least first metrology operation according to definition thereof using the mapping.. ... Materia Inc

09/20/18 / #20180266894

Abnormal temperature detection circuit

An abnormal temperature detection circuit according to the present invention includes: a differential output detection circuit portion c1 having a detection thermistor and a compensation thermistor configured to detect a differential output between an output of the detection thermistor and an output of the compensation thermistor; a threshold setting circuit portion c2 that is an analog circuit configured to change a determination threshold for determining whether a temperature detected by the detection thermistor is an abnormal temperature in accordance with the output of the compensation thermistor and to output the changed determination threshold; and an abnormal temperature determination circuit portion c3 configured to output an abnormal temperature detection signal when the differential output is lower than the determination threshold that has been output.. . ... Materia Inc

09/20/18 / #20180266508

Elastic adjustable brake pad for use in train

An elastic adjustable brake pad for use in a train, comprising a brake pad frame (1) provided with a fourth through hole (18), a brake block assembly, and a spiral compression spring (6); the brake block assembly comprises a brake block (16), a rivet (4), a belleville spring (5), and a rivet sleeve (3), the brake block (16) comprising a friction block (10) and a static sheet steel back (7) fixedly mounted together, the rivet (4) passing through the brake block (16) and being sleeved in turn by the belleville spring (5) and the rivet sleeve (3); the fourth through hole (18) is a stepped counterbore, and the rivet (4) in the brake block (16) penetrates the fourth through hole (18) and extends outward therefrom, the spiral compression spring (6) being sleeved over the outside of the rivet sleeve (3), and the outer side of one end of the rivet sleeve (3) being provided with a clamping groove clamped to an elastic retainer ring (2), one end of the spiral compression spring (6) abutting a step on which a secondary counterbore (20) is located, and the other end thereof abutting the lower end face of the elastic retainer ring (2); a plurality of anti-rotation pins are arranged between the static sheet steel back (7) and the brake pad frame (1). The present brake pad has the advantages of automatically adjusting the brake clearance, ensuring the friction area at all times, improving brake efficiency, extending service life, and low manufacturing costs.. ... Materia Inc

09/20/18 / #20180265973

Plasma resistant coating of porous body by atomic layer deposition

Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a porous chamber component and onto pore walls within the porous chamber component using an atomic layer deposition (ald) process. The porous chamber component may include a porous body comprising a plurality of pores within the porous body, the plurality of pores each comprising pore walls. ... Materia Inc

09/20/18 / #20180265972

Plasma resistant coating of porous body by atomic layer deposition

Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a porous chamber component and onto pore walls within the porous chamber component using an atomic layer deposition (ald) process. The porous chamber component may include a porous body comprising a plurality of pores within the porous body, the plurality of pores each comprising pore walls. ... Materia Inc

09/20/18 / #20180265967

Formulation for deposition of silicon doped hafnium oxide as ferroelectric materials

In one aspect, the invention is formulations comprising both organoaminohafnium and organoaminosilane precursor compounds that allows anchoring both silicon-containing fragments and hafnium-containing fragments onto a given surface having hydroxyl groups to deposit silicon doped hafnium oxide having a silicon doping level ranging from 0.5 to 8 mol %, suitable as ferroelectric material. In another aspect, the invention is methods and systems for depositing the silicon doped hafnium oxide films as ferroelectric materials using the formulations.. ... Materia Inc

09/20/18 / #20180265965

Apparatus and method for loading a substrate into a vacuum processing module, apparatus and method for treatment of a substrate for a vacuum deposition process in a vacuum processing module, and system for vacuum processing of a substrate

The present disclosure provides an apparatus for loading a substrate into a vacuum processing module. The apparatus includes a bernoulli-type holder having a surface configured to face the substrate, and a gas supply configured to direct a stream of gas between the surface and the substrate, wherein the bernoulli-type holder is configured to provide a pressure between the substrate and the surface configured for levitation of the substrate. ... Materia Inc

09/20/18 / #20180265825

Laundry detergent compositions

A liquid laundry detergent composition capable of suspending particles and insoluble materials while remaining readily pourable. The composition is stable over long periods of time. ... Materia Inc

09/20/18 / #20180265696

Additive to prevent phase separation of low profile additive in unsaturated thermoset polyester compositions

The present invention relates to an additive to prevent phase separation between a low profile additive and the other components of the molding composition, said other components comprising at least an unsaturated resin and an unsaturated monomer.. . ... Materia Inc

09/20/18 / #20180265516

Substituted triazolopiperazine parp inhibitor, preparation method therefor and use thereof

The present invention relates to a class of substituted triazolopiperazine compounds, tautomers, enantiomers, diastereomers, racemates, metabolites, metabolic precursors, and pharmaceutically acceptable salts, esters, prodrugs or hydrate thereof, a preparation methods therefor, intermediates and a use thereof in the preparation of drugs for prevention and treatment of diseases associated with parp including various ischemic diseases, neurodegenerative diseases and cancers.. . ... Materia Inc

09/20/18 / #20180265496

Substituted quinolone derivatives, or pharmaceutically acceptable salts or stereoisomers thereof, and pharmaceutical compositions and use thereof

Provided are a substituted quinolone derivative as shown by formula (i), or a pharmaceutically acceptable salt and a prodrug molecule thereof, and a pharmaceutical composition thereof, as well as the use of same in preparing drugs for the prevention and treatment of a tumor. The quinolone derivative, salt, prodrug molecule, and pharmaceutical composition thereof can be used as a protein kinase inhibitor, which is effective in inhibiting the activity of axl protein kinase, and is capable of inhibiting the proliferation, migration and invasion of various tumor cells; and can be used in the preparation of anti-tumor drugs, especially drugs for treating hyperproliferative diseases such as a tumor in human beings and other mammals.. ... Materia Inc

09/20/18 / #20180265415

Preparation of articles comprising graphitic particles

A method of preparation of an article having a sliding surface and comprising graphitic particles, comprises the steps of: i) impregnating open porosity in a porous body with a resin comprising graphitic particles; and ii) hardening said resin.. . ... Materia Inc

09/20/18 / #20180264895

Radio-based vehicular diagnostic system

Embodiments of the present invention relate to tracks and a related monitoring system. In some embodiments of these teachings, the track can include one or more ground contacting elements (“gce”) having rubber. ... Materia Inc

09/20/18 / #20180264623

A non-conductive substrate with tracks formed by sand blasting

A method for forming track(s) on low temperature co-fired ceramic (ltcc) substrate, the method comprising the steps of, forming a layer of coating material on an operative face of the ltcc substrate, disposing a stencil on the layer of coating material thereby covering a selected portion of the layer of coating material while leaving exposed a portion of the layer of coating material corresponding to the track(s) to be formed and forming an assembly of the ltcc substrate, the layer of coating material and the stencil, eroding the exposed portion of the layer of coating material by propelling an abrasive material using a blasting gun towards the assembly on the face on which the layer of coating material is formed and the stencil is disposed and separating the stencil from the abraded assembly, wherein the abrasive material has a composition that is compatible with that of the ltcc substrate.. . ... Materia Inc

09/20/18 / #20180264549

Lamp configuration for additive manufacturing

An additive manufacturing system includes a platform to support an object to be fabricated, a dispenser to deliver a plurality of layers of a feed material over the platform, a controller configured to store digital data representing a pre-defined pattern, a laser configured to generate a laser beam to impinge an outermost layer of the feed material and coupled to the controller to fuse the feed material in the pre-defined pattern, and a plurality of independently controllable infrared lamps, each infrared lamp directed to a different section of an outermost layer of the feed material.. . ... Materia Inc

09/20/18 / #20180264371

Human-powered entertainment device

The present disclosure provides a human-powered entertainment device. The entertainment device includes an inflatable base and a paddling component which is connected with the inflatable base, wherein the paddling component is adapted to swing when a force is imposed thereon, so as to perform paddling in water to make the human-powered entertainment device move on water. ... Materia Inc

09/06/18 / #20180255668

Cover film

The present disclosure provides a cover film, including a conductive adhesive layer, an electromagnetic shielding layer formed on the conductive adhesive layer, and an insulating layer formed on the electromagnetic shielding layer. The electromagnetic shielding layer has a thickness of from 0.01 to 25 micrometers, such that the cover film can shield electromagnetic interference through the thinner interposed electromagnetic shielding layer.. ... Materia Inc

09/06/18 / #20180254208

In-situ temperature measurement for inside of process chamber

Apparatuses and methods for in-situ temperature measurement of a process chamber are described herein. A process chamber includes an infrared (ir) sensor mounted to the chamber wall. ... Materia Inc

09/06/18 / #20180254207

Ambient controlled transfer module and process system

Methods and apparatus for processing a substrate are provided herein. In one implementation, the apparatus includes a load lock chamber coupled to a transfer chamber. ... Materia Inc

09/06/18 / #20180254206

Rotor cover

Implementations described herein generally relate to a processing apparatus having a rotor cover for preheating the process gas. The apparatus includes a chamber body having a side wall and a bottom wall defining an interior processing region. ... Materia Inc

09/06/18 / #20180254203

Apparatus and method to reduce particle formation on substrates in post selective etch process

The present disclosure generally relates to apparatuses and methods for reducing particle contamination on substrate surfaces. In one example, the apparatus is embodied as a load lock chamber including a top heater liner disposed over and coupled to a heater pedestal. ... Materia Inc

09/06/18 / #20180254193

Polishing slurry for cobalt-containing substrate

The invention is an aqueous slurry useful for chemical mechanical polishing a semiconductor substrate having cobalt or cobalt alloy containing features containing co0. The slurry includes 0.1 to 2 wt % hydrogen peroxide oxidizing agent (α), 0.5 to 3 wt % colloidal silica particles (β), a cobalt corrosion inhibitor, 0.5 to 2 wt % complexing agent (γ) selected from at least one of l-aspartic acid, nitrilotriacetic acid, nitrilotri(methylphosphonic acid), ethylenediamine-n,n′-disuccinic acid trisodium salt, and ethylene glycol-bis (2aminoethylether)-n,n,n′,n′-tetraacetic acid, and balance water having a ph of 5 to 9. ... Materia Inc

09/06/18 / #20180254187

Charge-trap layer separation and word-line isolation in a 3-d nand structure

In a 3d nand device, the charge trap region of a memory cell is formed as a separate charge-trap “island.” as a result, the charge-trap region of one memory cell is electrically isolated from charge-trap regions in adjacent memory cells. The charge trap region of one memory cell is separated from the charge trap regions of adjacent memory cells by a dielectric structure, such as a silicon oxide film. ... Materia Inc

09/06/18 / #20180254179

Surface-selective atomic layer deposition using hydrosilylation passivation

Methods for selectively depositing films by atomic layer deposition are disclosed. Substrate surfaces are passivated by hydrosilylation to prevent deposition and allow selective deposition on unpassivated surfaces.. ... Materia Inc

09/06/18 / #20180254171

Method and apparatus for ion energy distribution manipulation for plasma processing chambers that allows ion energy boosting through amplitude modulation

Methods and apparatus for boosting ion energies are contemplated herein. In one embodiment, the methods and apparatus comprises a controller, a process chamber with a symmetrical plasma source configured to process a wafer, one or more very high frequency (vhf) sources, coupled to the process chamber, to generate plasma density and two or more frequency generators that generate low frequencies relative to the one or more vhf sources, coupled to a bottom electrode of the process chamber, the two or more low frequency generators configured to dissipate energy in the plasma sheath, wherein the controller controls the one or more vhf sources to generate a vhf signal and the two or more low frequency sources to generate two or more low frequency signals.. ... Materia Inc

09/06/18 / #20180253006

Silicon-containing underlayers

Wet-strippable underlayer compositions comprising one or more silicon-containing polymers comprising a backbone comprising si—o linkages, one or more organic blend polymers, and a cure catalyst are provided. These compositions are useful in the manufacture of various electronic devices.. ... Materia Inc

09/06/18 / #20180253004

Photosensitive resin composition and organic insulating film prepared therefrom

Disclosed herein are a photosensitive resin composition and an organic insulating film prepared therefrom. By optimizing the weight average molecular weight of a copolymer, and using a specific solvent in the photosensitive resin composition, a coated film obtained therefrom may have high planarity property and patterns with high resolution. ... Materia Inc

09/06/18 / #20180252824

Scintillator, scintillator array, radiation detector, and radiation inspection device

A scintillator comprises a sintered body having a volume of 1 mm3 or less. The sintered body includes a crystal region of a rare earth oxysulfide. ... Materia Inc

09/06/18 / #20180252645

Copolymer and associated layered article, and device-forming method

A copolymer is prepared by the polymerization of monomers that include an ultraviolet absorbing monomer, and a base-solubility-enhancing monomer. The copolymer is useful for forming a topcoat layer for electron beam and extreme ultraviolet lithographies. ... Materia Inc

09/06/18 / #20180251924

Enhanced ice peel resistance/non-woven moldable composite systems with added sound acoustical properties

A nonwoven laminate is provided having multi-purposes. One embodiment is an a-layer having a high surface tension factor to prevent water absorption and can be used for fender liners or underbody surfaces of motor vehicles to prevent water from absorbing into the material as well as ice accumulation. ... Materia Inc

09/06/18 / #20180251909

Method for manufacturing silicon carbide single crystal

The present invention provides a method of manufacturing by the sublimation-recrystallization method more accurately detecting a thermal state of a starting material in a crucible and enabling control of the growth conditions while manufacturing an sic single crystal. The method obtains the high frequency current to be supplied through the induction coil by a converter for converting ac current to dc current and an inverter means for converting the dc current output from the converter to a high frequency to obtain a high frequency current, obtains a grasp, in advance, of a relationship between a variation over time of a dc equivalent resistivity (dcv/dci), calculated from a dc voltage value (dcv) and dc current value (dci) converted by the converter at the time of growth of the silicon carbide single crystal, and a density of micropipes formed in the grown silicon carbide single crystal, and adjusts at least one of the dcv or dci at the converter based on the relationship of the dc equivalent resistivity and micropipe density grasped in advance.. ... Materia Inc

09/06/18 / #20180251711

Tin hard mask and etch residue removal

Composition, method and system for pvd tin hard mask removal from 28/20 nm pattern wafers have been disclosed. The composition uses peroxide as oxidizing agent for pvd tin hard mask removal under slightly basic conditions. ... Materia Inc

09/06/18 / #20180251658

Method for polishing cobalt-containing substrate

The invention is a method for chemical mechanical polishing a semiconductor substrate having cobalt or cobalt alloy containing features containing co0. The method mixes 0.1 to 2 wt % hydrogen peroxide oxidizing agent (α) into a slurry containing 0.5 to 3 wt % colloidal silica particles (β), the colloidal silica particles containing primary particles, 0.5 to 2 wt % complexing agent (γ) selected from at least one of l-aspartic acid, nitrilotriacetic acid, nitrilotri(methylphosphonic acid), ethylenediamine-n,n′-disuccinic acid trisodium salt, and ethylene glycol-bis (2aminoethylether)-n,n,n′,n′-tetraacetic acid, and balance water having a ph of 5 to 9 to create a polishing slurry for the semiconductor substrate. ... Materia Inc

09/06/18 / #20180251640

Conductive nanocomposites

Conductive or semiconductive nanoparticles are modified with conductive ligands so as to be able to obtain conductive or semiconductive layers without requiring a thermal treatment for forming the structures upon application of the layers. A composition can include a matrix polymer for producing conductive composites.. ... Materia Inc

09/06/18 / #20180251604

High-temperature resistant modified silicon-containing cyanate ester resin as well as preparation method and application thereof

The present invention relates to a high-temperature resistant modified silicon-containing cyanate ester resin as well as a preparation method and an application thereof. The preparation method comprises the following steps: adding a mixed solution of hydroxyl silicone oil, a silane coupling agent and an organic solvent into a mixed solution of a tetramethylammonium hydroxide aqueous solution and a polar solvent, performing hydrolytic polycondensation at a temperature of 5-40° c. ... Materia Inc

09/06/18 / #20180251406

Sintered ceramic protective layer formed by hot pressing

Disclosed herein are methods for fabricating layered ceramic materials via hot pressing. A method includes disposing a powder compact or a ceramic slurry onto a surface of an article, wherein the article is a chamber component of a processing chamber. ... Materia Inc

09/06/18 / #20180251370

Method for producing structured surfaces

A process for producing a structured surface, in which a composition comprising nanowires is applied to a surface and structured, especially by partial displacement of the composition. When the solvent is removed, the nanowires aggregate to form structures. ... Materia Inc

09/06/18 / #20180250906

Composite members and methods of manufacturing same

The present application relates to composite members and to methods of manufacturing a composite member. In an aspect, a composite member (10) is formed as a longitudinal structure capable of being coiled about an axis transverse to the longitudinal axis of the member. ... Materia Inc

09/06/18 / #20180250788

Spiral and concentric movement designed for cmp location specific polish (lsp)

A method is provided to minimize travel distance and time between correction locations on a substrate when polishing a local area of a substrate, such as a semiconductor wafer, using a location specific polishing module. A correction profile is determined and a recipe based on the correction profile is used to polish a substrate. ... Materia Inc

09/06/18 / #20180250695

Apparatus for increasing flux from an ampoule

Ampoules for a semiconductor manufacturing precursors and methods of use are described. The ampoules include a container with an inlet port and an outlet port. ... Materia Inc

08/23/18 / #20180241119

Low loss tri-band protective armor radome

A tri-band multiwell radome includes a dense polymeric strike plate that is configured on the outside of the radome, a capture layer and a tuning layer. The polymeric strike plate is a tough polymer, such as a polycarbonate and breaks a bullet into fragments that are more easily captured by the capture layer. ... Materia Inc

08/23/18 / #20180240755

Cobalt manganese vapor phase deposition

Described are semiconductor devices and methods of making semiconductor devices with a barrier layer comprising cobalt and manganese nitride. Also described are semiconductor devices and methods of making same with a barrier layer comprising comn(n) and, optionally, an adhesion layer.. ... Materia Inc

08/23/18 / #20180240706

Critical dimension control for self-aligned contact patterning

Processing methods to create self-aligned contacts are described. A conformal liner can be deposited in a feature in a substrate surface leaving a gap between the walls of the liner. ... Materia Inc

08/23/18 / #20180240692

Selective etch rate monitor

Embodiments include a real time etch rate sensor and methods of for using a real time etch rate sensor. In an embodiment, the real time etch rate sensor includes a resonant system and a conductive housing. ... Materia Inc

08/23/18 / #20180240676

Enhanced spatial ald of metals through controlled precursor mixing

Methods of depositing a film by atomic layer deposition are described. The methods comprise exposing a substrate surface to a first process condition comprising a first reactive gas and a second reactive gas and exposing the substrate surface to a second process condition comprising the second reactive gas. ... Materia Inc

08/23/18 / #20180240666

Variable frequency microwave (vfm) processes and applications in semiconductor thin film fabrications

Methods and apparatus for processing a substrate are described herein. A vacuum multi-chamber deposition tool can include a degas chamber with both a heating mechanism and a variable frequency microwave source. ... Materia Inc

08/23/18 / #20180240655

Methods and apparatus for multi-cathode substrate processing

Methods and apparatus for processing substrates with a multi-cathode chamber. The multi-cathode chamber includes a shield with a plurality of holes and a plurality of shunts. ... Materia Inc

08/23/18 / #20180240654

Systems and methods for internal surface conditioning assessment in plasma processing equipment

In an embodiment, a plasma source includes a first electrode, configured for transfer of one or more plasma source gases through first perforations therein; an insulator, disposed in contact with the first electrode about a periphery of the first electrode; and a second electrode, disposed with a periphery of the second electrode against the insulator such that the first and second electrodes and the insulator define a plasma generation cavity. The second electrode is configured for movement of plasma products from the plasma generation cavity therethrough toward a process chamber. ... Materia Inc

08/23/18 / #20180240648

Multi-layer plasma resistant coating by atomic layer deposition

Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ald) process. The plasma resistant coating has a stress relief layer and a rare earth metal-containing oxide layer and uniformly covers features, such as those having an aspect ratio of about 3:1 to about 300:1.. ... Materia Inc

08/23/18 / #20180240566

Silver powder, manufacturing method therefor, and conductive paste

To provide a silver powder including alkenylsuccinic anhydride and/or alkenylsuccinic acid on a surface of the silver powder.. . ... Materia Inc

08/23/18 / #20180240313

Tactile information providing device

The present invention relates to a tactile information providing device. The tactile information providing device according to the present invention comprises a tactile transmission unit (1:10, 20) formed of a magneto-rheological elastomer (mre) material, wherein the tactile transmission unit (1) provides tactile information through the transformation (10a-10d, 20a-20d) by an external magnetic field.. ... Materia Inc

08/23/18 / #20180238068

Inflatable pool and method for forming the same

The present disclosure provides an inflatable pool and a method for forming an inflatable pool. A pool body includes: an annular body and a bottom wall connected with the annular body, wherein the annular body is configured with a first air chamber, and a pool boundary is disposed on the annular body and the bottom wall; a pair of bases disposed on an end portion of the annular body opposite to the bottom wall and being spaced along a circumferential direction of the annular body; and an elastic component disposed between the pair of bases along the circumferential direction of the annular body to form a shooting device. ... Materia Inc

08/23/18 / #20180237944

Processes for producing iii-n single crystals, and iii-n single crystal

The present invention relates to a iii-n single crystal adhering to a substrate, wherein iii denotes at least one element of the third main group of the periodic table of the elements, selected from the group of al, ga and in, wherein the iii-n single crystal exhibits, within a temperature range of an epitaxial crystal growth, a value (i) of deformation εxx in the range of <0. Additionally or alternatively, the iii-n single crystal exhibits at room temperature a value (ii) of deformation εxx in the range of <0.. ... Materia Inc

08/23/18 / #20180237930

Copper electroplating baths containing compounds of reaction products of amines and quinones

A polymer composed of a reaction product of an amine and a quinone. The quinone is a michael addition receptor. ... Materia Inc

08/23/18 / #20180237929

Copper electroplating baths containing compounds of reaction products of amines and polyacrylamides

Copper electroplating baths include reaction products of amines and polyacrylamides. The reaction products function as levelers and enable copper electroplating baths which have high throwing power and provide copper deposits with reduced nodules.. ... Materia Inc

08/23/18 / #20180237920

Conversion coating composition comprising a dye and a method for coating a metal surface with said conversion coating composition

The invention is directed to a conversion coating composition for coating a metal surface including a water soluble dye, at least one metal compound selected from the group consisting of a zirconium-containing compound, titanium-containing compound and silicon-containing compound; and water, wherein the provides for qualitative characterization of the conversion coating uniformity and thickness by the naked human eye or visible light detecting device; and, a method for coating the metal surfaces using the conversion coating composition.. . ... Materia Inc

08/23/18 / #20180237916

Apparatus to improve substrate temperature uniformity

Apparatus for improving substrate temperature uniformity in a substrate processing chamber are provided herein. In some embodiments, a substrate support processing chamber may include a chamber body having a bottom portion and a sidewall having a slit valve opening to load and unload substrates, a pin lift mechanism, disposed in a pin lift mechanism opening formed in the bottom portion of the chamber body, having a plurality of substrate support pins coupled to the pin lift mechanism, a movable substrate support heater having substrate support portion and a shaft, and a cover plate disposed about the shaft of the movable substrate support, wherein the cover plate covers the pin lift mechanism and pin lift mechanism opening.. ... Materia Inc

08/23/18 / #20180237915

Gas distribution apparatus for processing chambers

Implementations described herein generally relate to a method and apparatus for depositing material on a substrate. In one implementation, a processing chamber for processing a substrate includes a chamber body and a substrate support disposed within the chamber body and adapted to support the substrate thereon. ... Materia Inc

08/23/18 / #20180237901

High purity copper sputtering target material

A high purity copper sputtering target material includes cu at a purity of 99.99998 mass % or more excluding o, h, n and c, wherein an al content is 0.005 mass ppm or less, a si content is 0.05 mass ppm or less, an fe content is 0.02 mass ppm or less, a s content is 0.03 mass ppm or less, cl content is 0.1 mass ppm or less, n o content is 1 mass ppm or less, h content is 1 mass ppm or less, a n content is 1 mass ppm or less, and a c content is 1 mass ppm or less.. . ... Materia Inc

08/23/18 / #20180237882

Austenitic stainless steel foil

Provided is an austenitic stainless steel foil that demonstrates a high degree of stretch formability and little deformation anisotropy with respect to stretch forming despite having a sheet thickness of 60 μm or less. The austenitic stainless steel foil of the present invention has a sheet thickness of 5 μm to 60 μm, a recrystallization rate of 90% to 100%, and a texture in which the total of the area ratio of a crystal orientation in which the difference in orientation from the {112}<111> orientation is within 10°, the area ratio of a crystal orientation in which the difference in orientation from the {110}<112> orientation is within 10°, and the area ratio of a crystal orientation in which the difference in orientation from the {110}<001> orientation is within 10°, in a measuring field thereof, is 20% or less.. ... Materia Inc

08/23/18 / #20180237691

Printing ink and electronic device manufactured by printing with same

A printing ink comprising inorganic nano-materials. The provided printing ink comprises at least one inorganic nano-material, in particular, quantum dots, and at least one aryl ketone-based or aryl ether-based organic solvent. ... Materia Inc

08/23/18 / #20180237649

Printing ink and electronic device

Provided are a printing ink comprising inorganic nano-materials and an electronic device manufactured by printing with the printing ink, in particular, an electroluminescent device. The composition of the provided ink comprises at least one inorganic nano-material, in particular, quantum dots, and at least one ester-based organic solvent.. ... Materia Inc

08/23/18 / #20180237630

Thermoplastic resin composition and molded product comprising same

A thermoplastic resin composition of the present invention contains: a first aromatic vinyl-based resin, which is a copolymer of an aromatic vinyl-based monomer and a maleic acid anhydride; a second aromatic vinyl-based resin, which is a copolymer of an aromatic vinyl-based monomer, a maleic acid anhydride, and a maleimide-based monomer represented by chemical formula 1; a rubber-modified vinyl-based graft copolymer; and a reinforcing filler. The thermoplastic resin composition is excellent in view of heat resistance, rigidity, dimensional stability, and the like.. ... Materia Inc

08/23/18 / #20180237600

Methods of using thermoplastic polyurethanes in fused deposition modeling and systems and articles thereof

The present invention relates to systems and methods for solid freeform fabrication, especially fused deposition modeling, as well as various articles made using the same, where the systems and methods utilize certain thermoplastic polyurethanes which are particularly suited for such processing. The useful thermoplastic polyurethanes are derived from (a) a polyisocyanate component, (b) a polyol component, and (c) an optional chain extender component where the resulting thermoplastic polyurethane has a crystallization temperature above 80° c. ... Materia Inc

08/23/18 / #20180237581

Method and composition for improving adhesion of metathesis compositions to substrates

A method of improving the adhesion of metathesis compositions, such as ring-opening metathesis polymerization (romp) compositions, to a substrate is disclosed, in which an adhesion promoter is added to a polymerizable resin composition in order to improve the adhesion of the polymerizing resin to a substrate material. The addition of the adhesion promoter has been found to provide beneficial improvements in the adhesion of metathesis, especially romp, compositions to substrates, particularly glass surfaces, leading to improved characteristics in romp materials formed therefrom. ... Materia Inc

08/23/18 / #20180237573

Polyester polyols from recycled polymers and waste streams

The present invention relates to polyester polyols made from aromatic polyacid sources such as thermoplastic polyesters. The polyols can be made by heating a thermoplastic polyester such as virgin polyethylene terephthalate, recycled polyethylene terephthalate, or mixtures thereof, with a glycol to give a digested intermediate which is then reacted with a digestible polymer, which can be obtained from various recycle waste streams. ... Materia Inc

08/23/18 / #20180237399

Compounds having agonistic effect against gpr84, preparation method for compounds and use of compounds

The present invention relates to a class of compounds represented by the formula i, or pharmaceutically acceptable salts thereof, methods for their preparation, and application as small molecule tools that function as gpr84 agonists, and their use in preparing a medicament for the treatment of septicemia.. . ... Materia Inc

08/23/18 / #20180237338

High performance fire resistant concrete containing hybrid fibers and nano particles

A high-workability, fire-resistant, anti-spalling concrete composition is provided. The concrete composition has a slump value of at least approximately 150 mm, a fire-resistant period of at least 4 hours, a compressive strength of at least 120 mpa at room temperature, and a compressive strength of at least 20 mpa at 700° c. ... Materia Inc

08/23/18 / #20180237327

Substrate vacuum forming mold and method

A vacuum forming mold includes a cavity and a vacuum suction opening communicating with the cavity. The vacuum suction opening is provided in a sidewall surface of the cavity, such that air inside the cavity below a substrate is sucked out through the sidewall surface. ... Materia Inc

08/23/18 / #20180237309

Method for preparing transparent yttria through hot-press sintering

The present invention relates to a method of manufacturing a light transmitting yttria member by using hot-press sintering. The present invention provides a method of manufacturing light transmitting yttria by performing hot-press sintering on a molded body made of raw material powder including yttria by using a hot-press sintering apparatus, in which the hot-press sintering is performed in a state in which a spacer is interposed between the molded body and a pressing surface of the molded body, and the spacer is made of heat-resistant metal which is substantially unreactive to the molded body at a sintering temperature. ... Materia Inc

08/23/18 / #20180236633

Slurry and slurry delivery technique for chemical mechanical polishing of copper

A method of polishing includes bringing a metal layer of a substrate into contact with a polishing pad, generating relative motion between the substrate and the polishing pad, and while the metal layer is in contact with the polishing pad and the substrate is moving relative to the polishing pad, alternating between supplying a first polishing liquid and a second polishing liquid to an interface between the metal layer. The first polishing liquid is abrasive-free and includes an oxidizer, and the second polishing liquid includes abrasive particles and a complexing compound to complex with ions of the metal of the metal layer.. ... Materia Inc

08/23/18 / #20180236632

Printing chemical mechanical polishing pad having window or controlled porosity

A method of fabricating a polishing pad includes determining a desired distribution of voids to be introduced within a polymer matrix of a polishing layer of the polishing pad. Electronic control signals configured to be read by a 3d printer are generated which specify the locations where a polymer matrix precursor is to be deposited, and specify the locations of the desired distribution of voids where no material is to be deposited. ... Materia Inc

08/23/18 / #20180236568

Drill

A drill has a thinning rake face formed in the front end. An intersection ridgeline between the thinning rake face and the tip flank face is the thinning edge. ... Materia Inc

08/23/18 / #20180236551

Self supporting in additive manufacturing

A system and method for modifying features in designs of objects to make them physically capable of being manufactured using additive manufacturing techniques and machines is provided, carrying out the following steps: determine if one or more surfaces of the object have a surface angle below a threshold angle; designate one or more edges including a first edge, the first edge being between a first surface of the one or more surfaces and a second surface of the one or more surfaces, wherein the first surface has a surface angle below the threshold angle and the second surface has a surface angle equal to or above the threshold angle; and generate one or more additional surfaces along the one or more edges in the design file.. . ... Materia Inc

08/16/18 / #20180233899

Superconducting magnet device and method for limiting current decrease in case of abnormality therein

. . A superconducting magnet device including a superconducting coil formed of a high-temperature superconducting wire, a power supply which supplies current to the superconducting coil, and a protector capable of forming a short-circuit path which short-circuits both ends of the superconducting coil to each other is installed. Current is made to flow from the power supply to the superconducting coil in a superconducting state, and the superconducting coil thereby generates a magnetic field. ... Materia Inc

08/16/18 / #20180233895

Localized application of high impedance fault isolation in multi-tap electrical power distribution system

A high impedance fault isolation system (hifis) identifies, isolates and dissipates high impedance, low current faults which occur within an individual tap, or branch, of an electric power distribution system using only portions of the tap affected. A master meter, or father smart meter (fsm), on the affected tap sends a coded signal to an antenna receiver combined with a microprocessor and chip which operates an electromagnetic control (emc) grounding spring switch which isolates the downed primary conductor by causing the distribution system protecting device, i.e., a high voltage fuse or recloser, to de-energize the downed primary wire. ... Materia Inc

08/16/18 / #20180233676

Organic electroluminescent compound and an organic electroluminescent device comprising the same

The present invention relates to an organic electroluminescent compound and an organic electroluminescent device comprising the same. By using the organic electroluminescent compound according to the present invention, it is possible to produce an organic electroluminescent device having low driving voltage, excellent current and power efficiencies, and noticeably improved driving lifespan.. ... Materia Inc

08/16/18 / #20180233396

Substrate position calibration for substrate supports in substrate processing systems

Methods and apparatus for substrate position calibration for substrate supports in substrate processing systems are provided herein. In some embodiments, a method for positioning a substrate on a substrate support includes: obtaining a plurality of backside pressure values corresponding to a plurality of different substrate positions on a substrate support by repeatedly placing a substrate in a position on the substrate support, and vacuum chucking the substrate to the substrate support and measuring a backside pressure; and analyzing the plurality of backside pressure values to determine a calibrated substrate position.. ... Materia Inc

08/16/18 / #20180233359

Self-aligned nanodots for 3d nand flash memory

A method of forming a 3d nand structure having self-aligned nanodots includes depositing alternating layers of an oxide and a nitride on a substrate; at least partially recessing the nitride layers; and forming sige nanodots on the nitride layers. A method of forming a 3d nand structure having self-aligned nanodots includes depositing alternating layers of an oxide and a nitride on a substrate; at least partially recessing the nitride layers; and forming sige nanodots on the nitride layers by a process including maintaining a temperature of the substrate below about 560° c.; flowing a silicon epitaxy precursor into the chamber; forming a silicon epitaxial layer on the substrate at the nitride layers; flowing germanium gas into the chamber with the silicon epitaxy precursor; and forming a silicon germanium epitaxial layer on the substrate at the nitride layers.. ... Materia Inc

08/16/18 / #20180233356

High deposition rate and high quality nitride

In one implementation, a method comprising depositing one or more silicon oxide/silicon nitride containing stacks on a substrate positioned in a processing chamber is provided. Depositing the one or more silicon oxide/silicon nitride containing stacks comprises (a) energizing a first process gas into a first plasma, (b) depositing a first film layer over the substrate from the first plasma, (c) energizing a second process gas into a second plasma, wherein the second process gas comprises a compound having at least one silicon-nitrogen bond and (d) depositing a second film layer on the first film layer from the second plasma. ... Materia Inc

08/16/18 / #20180233355

Alkyl-alkoxysilacyclic compounds and methods for depositing films using same

A method and composition for producing a low k dielectric film via chemical vapor deposition is provided. In one aspect, the method comprises the steps of: providing a substrate within a reaction chamber; introducing into the reaction chamber gaseous reagents including at least one structure-forming precursor comprising a silacyclic compound, and a porogen; applying energy to the gaseous reagents in the reaction chamber to induce reaction of the gaseous reagents to deposit a preliminary film on the substrate, wherein the preliminary film contains the porogen, and the preliminary film is deposited; and removing from the preliminary film at least a portion of the porogen contained therein and provide the film with pores and a dielectric constant of 2.7 or less.. ... Materia Inc

08/16/18 / #20180233334

Adjustable extended electrode for edge uniformity control

Embodiments described herein generally related to a substrate processing apparatus. In one embodiment, a process kit for a substrate processing chamber disclosed herein. ... Materia Inc

08/16/18 / #20180233327

Apparatus with concentric pumping for multiple pressure regimes

An exhaust module for a substrate processing apparatus having a body, a pumping ring, and a symmetric flow valve, is disclosed herein. The body has a first and second vacuum pump opening formed therethrough. ... Materia Inc

08/16/18 / #20180233317

Apparatus configured for enhanced vacuum ultraviolet (vuv) spectral radiant flux and system having the apparatus

A charge control apparatus for controlling charge on a substrate in a vacuum chamber is described. The apparatus includes a light source emitting a beam of radiation having a divergence; a mirror configured to reflect the beam of radiation, wherein a curvature of a mirror surface of the curved mirror is configured to reduce the divergence of the beam of radiation; and a mirror support configured to rotatably support the curved mirror, wherein a rotation of the mirror varies the direction of the beam of radiation.. ... Materia Inc

08/16/18 / #20180231587

Voltage-current probe for measuring radio-frequency electrical power in a high-temperature environment and method of calibrating the same

A voltage-current sensor enables more accurate measurement of the voltage, current, and phase of rf power that is delivered to high-temperature processing region. The sensor includes a planar body comprised of a non-organic, electrically insulative material, a measurement opening formed in the planar body, a voltage pickup disposed around the measurement opening, and a current pickup disposed around the measurement opening. ... Materia Inc

08/16/18 / #20180231418

Substrate on which multiple nanogaps are formed, and manufacturing method therefor

The present disclosure relates to a substrate with multiple nano-gaps and a manufacturing method therefor, and more particularly to a multiple nano-gaps substrate with high absorption and capable of using light sources in a wide range, and a manufacturing method therefor.. . ... Materia Inc

08/16/18 / #20180230624

Method and apparatus for low temperature selective epitaxy in a deep trench

The present disclosure generally relate to a cluster tool and methods for forming an epitaxial layer on a semiconductor device. In one implementation, the cluster tool includes a transfer chamber, a pre-clean chamber coupled to the transfer chamber, a plasma-cleaning chamber coupled to the transfer chamber, a deposition chamber coupled to the transfer chamber, an etch chamber coupled to the transfer chamber, and a thermal process chamber coupled to the transfer chamber.. ... Materia Inc

08/16/18 / #20180230616

Aluminum plating at low temperature with high efficiency

The present disclosure generally relates to methods of electro-depositing a crystalline layer of pure aluminum onto the surface of an aluminum alloy article. The methods may include positioning the article and an electrode in an electro-deposition solution. ... Materia Inc

08/16/18 / #20180230597

Method and apparatus of remote plasmas flowable cvd chamber

Embodiments disclosed herein generally relate to a plasma processing system. The plasma processing system includes a processing chamber, a chamber seasoning system, and a remote plasma cleaning system. ... Materia Inc

08/16/18 / #20180230587

Plasma erosion resistant thin film coating for high temperature application

An article such as a susceptor includes a body of a thermally conductive material coated by a first protective layer and a second protective layer over a surface of the body. The first protective layer is a thermally conductive ceramic. ... Materia Inc

08/16/18 / #20180230405

Cleaning formulations

This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one organic solvent selected from the group consisting of water soluble alcohols, water soluble ketones, water soluble esters, water soluble sulfones, and water soluble ethers; 3) at least one boron-containing compound selected from the group consisting of boric acid, boronic acids, and salts thereof; and 4) water.. . ... Materia Inc

08/16/18 / #20180230321

Printing ink composition and electronic device

A printing ink composition comprising inorganic nano-materials. The provided printing ink composition comprises at least one inorganic nano-material, in particular, quantum dots, and at least one substituted aromatic-based or substituted heteroaromatic-based organic solvent. ... Materia Inc

08/16/18 / #20180230283

Phenolic resin foam and method of producing same

Provided are a phenolic resin foam that has low environmental impact, can maintain excellent thermal insulation performance over the long-term, and reduces condensation inside walls associated with increased water vapor permeation, and also a method of producing the same. The phenolic resin foam contains a phenolic resin and at least one selected from the group consisting of a chlorinated hydrofluoroolefin, a non-chlorinated hydrofluoroolefin, and a halogenated hydrocarbon. ... Materia Inc

08/16/18 / #20180230259

Fast recovery soft thermoplastic polyurethanes

The thermoplastic polyurethane compositions described herein have very good recovery properties, rebound resilience, or both, while also having good softness (i.e. Low hardness). ... Materia Inc

08/16/18 / #20180230012

Method of producing spherical boron nitride fine particles

A method of producing a spherical boron nitride fine particle includes reacting ammonia with an alkoxide borate at an ammonia/alkoxide borate molar ratio of 1 to 10 in an inert gas stream at 750° c. Or higher within 30 seconds, then applying heat treatment to a reaction product in an atmosphere of ammonia gas or a mixed gas of ammonia gas and an inert gas at 1,000 to 1,600° c. ... Materia Inc

08/16/18 / #20180229485

Reinforced film for unitization of goods

The present invention relates to a non-perforated reinforced stretch film comprising: a base film which has a thickness in the range of 3 μm to 18 μm, and 5 to 100 reinforcing strips fixed on at least one surface of said base film, wherein the width of each reinforcing strip is, independently, in the range of 1 mm to 17 mm.. . ... Materia Inc

08/16/18 / #20180229468

Embossed fabric assembly

In some examples, the disclosure relates to a layered fabric assembly comprising a fabric substrate; a plurality of plates affixed to a top surface of the fabric substrate and arrayed in a pattern such that continuous gaps are defined between adjacent plates; and an embossing support layer affixed to a bottom surface of the fabric substrate, wherein the thickness of the embossing support layer varies to define a plurality of raised portions separated by lower portions. The raised and lower portions each contain multiple plates and define a coarse-grained structure that varies on a size scale larger than the size scale of the plurality of plates and gaps of the flexible substrate. ... Materia Inc








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