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Nanometrics Incorporated patents

Recent patent applications related to Nanometrics Incorporated. Nanometrics Incorporated is listed as an Agent/Assignee. Note: Nanometrics Incorporated may have other listings under different names/spellings. We're not affiliated with Nanometrics Incorporated, we're just tracking patents.

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Scanning white-light interferometry system for characterization of patterned semiconductor features

A white light interferometric metrology device operates in the image plane and objective pupil plane. The interferometric metrology device extracts the electric field with complex parameters and that is a function of azimuth angle, angle of incidence and wavelength from interferometric data obtained from the pupil plane. ... Nanometrics Incorporated

3d target for monitoring multiple patterning process

A metrology target is designed for monitoring variations in a multiple patterning process, such as a self-aligned doubled patterning (sadp) or self-aligned quadruple patterning (saqp) process. The metrology target may include a plurality of sub-patterns. ... Nanometrics Incorporated

Optical critical dimension target design

A measurement target for a semiconductor device is designed. The semiconductor device includes a structure to be measured that has a spectrum response that is comparable to or below system noise level for an optical critical dimension measurement device to be used to measure the structure. ... Nanometrics Incorporated

Interferometric characterization of surface topography

An interferometric metrology device characterizes a surface topography of a sample at different length scales by combining the interferometric data into blocks of different length scales or by filtering the interferometric data at different length scales and then determining statistical moments or surface properties of the surface topography at the different length scales. The interferometric metrology device determines a best focus position for a processing tool based on different length scales and/or based on weighting functions that are based on the structure-dependent focus budget and a variable local topography. ... Nanometrics Incorporated

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