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Nikon Corporation patents


Recent patent applications related to Nikon Corporation. Nikon Corporation is listed as an Agent/Assignee. Note: Nikon Corporation may have other listings under different names/spellings. We're not affiliated with Nikon Corporation, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "N" | Nikon Corporation-related inventors


Image sensor and electronic camera

An image sensor includes a first voltage source that supplies a first voltage and a plurality of pixels supplied with the first voltage. The pixel includes a photoelectric conversion unit that photoelectrically converts incident light, an accumulation unit to which an electric charge resulting from photoelectric conversion by the photoelectric conversion unit is transferred and accumulated, a transfer unit that transfers the electric charge from the photoelectric conversion unit to the accumulation unit; a second voltage source that supplies a second voltage, and a supply unit that supplies the transfer unit with a transfer signal based on either the first voltage supplied by the first voltage source or the second voltage supplied by the second voltage source.. ... Nikon Corporation

Image sensor and electronic camera

An image sensor includes a first semiconductor substrate provided with a pixel, including a photoelectric conversion unit that photoelectrically converts incident light to generate an electric charge, an accumulation unit that accumulates the electric charge generated by the photoelectric conversion unit, and a transfer unit that transfers the electric charge generated by the photoelectric conversion unit to the accumulation unit, and a second semiconductor substrate provided with a supply unit for the pixel, the supply unit supplying the transfer unit with a transfer signal to transfer the electric charge from the photoelectric conversion unit to the accumulation unit.. . ... Nikon Corporation

Image sensor and image-capturing device

An image sensor includes: a first image-capturing unit that includes a plurality of first photoelectric conversion units that perform photoelectric conversion for light at a part of wavelength in incident light and at each of which light at another wavelength in the incident light is transmitted; a plurality of lenses at which the light having been transmitted through the first image-capturing unit enters; and a second image-capturing unit that includes a plurality of second photoelectric conversion units, disposed in correspondence to each of the plurality of lenses, that performs photoelectric conversion for incident light.. . ... Nikon Corporation

Temperature controlled heat transfer frame for pellicle

An exposure apparatus for transferring a pattern from a reticle to a workpiece, a pellicle being positioned near the reticle, includes a heat transfer frame, an illuminator, and a temperature controller. The heat transfer frame is configured to be positioned near the pellicle, the heat transfer frame defining a beam aperture. ... Nikon Corporation

Exposure apparatus and exposure method, and flat panel display manufacturing method

In an exposure apparatus, on a substrate holder, a plurality of grating areas is arranged mutually apart in the x-axis direction, and a plurality of heads that irradiates a measurement beam with respect to the grating area and can move in the y-axis direction is arranged outside of the substrate holder. A control system controls movement of the substrate holder in at least directions of three degrees of freedom within an xy plane, based on measurement information of at least three heads of the plurality of heads facing the grating area and measurement information of a measurement device that measures position information of the plurality of heads. ... Nikon Corporation

Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object

A substrate stage device that moves a substrate has: a noncontact holder that supports the substrate in a noncontact manner; a first drive section that moves the noncontact holder; scale plates that serve as a reference of movement of the noncontact holder; a first measurement section that has scale plates and y heads, one of the scale plates and the y heads being provided at the noncontact holder and the other of the scale plates and the y heads being provided between the scale plates and the noncontact holder, and that measures position information of the y heads; a second measurement section that measures position information of the other of the scale plates and the y heads; and a position measurement system that obtains position information of the noncontact holder on the basis of the position information measured by the first and the second measurement sections.. . ... Nikon Corporation

Lithographic thermal distortion compensation with the use of machine learning

Lithographic exposure tool and method for operating thereof that includes modification of the tool (assessed based on the measurements of geometrical distortions caused, in the tool, by the exposure process and used to train the exposure tool) to ensure that such geometrical distortions are reduced for any chosen exposure process. The method includes processing first data (representing distortions caused by initial exposure run(s)) to estimate second data representing distortions that would occur for another exposure run); and forming a modified exposure tool by changing at least one of a) a geometrical path is a path along which the workpiece stage is repositioned during the operation of the exposure tool; b) one or more of a presence, position, orientation, size and shape of an optical component of an optical projection sub-system of the optical system of the exposure tool; and c) a parameter of scanning synchronization of the exposure tool.. ... Nikon Corporation

Broadband catadioptric microscope objective with small central obscuration

A catadioptric microscope objective color-corrected for any wavelength in 190 nm to 1000 nm operational range and containing primary spherical front-surface mirror devoid of a through-hole and rear-surface plane-parallel mirror, each of which mirrors has a corresponding reflective annular coating defining an aperture formed in such coating coaxially with the optical axis. The objective, devoid of a mangin element, is configured such that for any optical field with a diameter smaller than about 50 microns the strehl ratio is no lower than 0.0781, and/or longitudinal spherical aberration is no larger than 0.0008 mm, and/or the astigmatism is smaller than 0.0005 mm, and/or distortion is smaller than 0.012 percent within the operational range.. ... Nikon Corporation

Microscope apparatus

A microscope apparatus including: an illumination optical system that radiates activation light to activate some of fluorescent materials included in a sample and excitation light to excite at least some of the activated fluorescent materials; an image forming optical system that: has an objective lens and an astigmatic optical system that generates astigmatism to at least part of fluorescence from the fluorescent materials; and forms an image of the fluorescence; an image-capturing unit that captures an image formed by the image forming optical system; a drive unit that moves an image-capturing position in the sample along an optical axis-direction of the objective lens; and a control unit, wherein the control unit causes the image-capturing unit to capture images in a plurality of numbers of frames respectively at a first image-capturing position and at a second image-capturing position different from the first image-capturing position.. . ... Nikon Corporation

Electronic apparatus, power supply device, system and apparatus

A power supply device is caused to execute a new program. An electronic apparatus that receives power from a power supply device in a non-contact manner includes: an intra-apparatus circuit that operates with power received via a power transmission path from the power supply device to the electronic apparatus; a program acquiring unit that acquires a program to be executed by the power supply device from outside, and stores the program; and an apparatus-side communicating unit that transmits the program to the power supply device via the power transmission path.. ... Nikon Corporation

Method for improved cd control on 2-phase digital scanner with no loss to image fidelity

Patterns from a phase array are transferred to a substrate such as a series of overlapping patterns and non-overlapping patterns. The overlapping patterns are associated with phase array pixel offsets so as to overlap at the substrate and the necessary overlap is based on substrate scan speed. ... Nikon Corporation

Substrate processing apparatus, processing apparatus, and method for manufacturing device

A substrate processing apparatus includes: a rotary cylindrical member (dr) that includes a cylindrical supporting surface curved with a constant radius from a predetermined center line (ax2) and that feeds a substrate (p) in a length direction of the substrate; a processing mechanism that performs a predetermined process on the substrate at a specific position (pa, el2) of a part of the substrate; a scale member (sd) that rotates about the center line along with the rotary cylindrical member so as to measure a displacement in a circumferential direction of the supporting surface of the rotary cylindrical member or a displacement in a direction of the center line of the rotary cylindrical member and that includes a scale portion (gp) carved in a ring shape; and a reading mechanism (en1, en2) that faces the scale portion, that is disposed in substantially a same direction as the specific position when viewed from the center line, and that reads the scale portion.. . ... Nikon Corporation

Zoom optical system, optical device and method for manufacturing the zoom optical system

A first lens group (g1) having positive refractive power, a front-side lens group (gx), an intermediate lens group (gm) having positive refractive power, and a rear-side lens group (gr) are arranged in order from an object side. The front-side lens group (gx) is composed of one or more lens groups and has a negative lens group at least part of the intermediate lens group (gm) is a focusing lens group (gf). ... Nikon Corporation

Zoom optical system, optical device and method for manufacturing the zoom optical system

A first lens group (g1) having positive refractive power, a front-side lens group (gx), an intermediate lens group (gm) having positive refractive power, and a rear-side lens group (gr) are arranged in order from an object side. The front-side lens group (gx) is composed of one or more lens groups and has a negative lens group at least part of the intermediate lens group (gm) is a focusing lens group (gf). ... Nikon Corporation

09/20/18 / #20180267278

Variable magnification optical system, optical device, and method for producing variable magnification

Comprising, in order from an object side: a first lens group g1 having positive refractive power; a second lens group g2 having negative refractive power; an aperture stop s; a third lens group g3 having positive refractive power; and a fourth lens group g4 having positive refractive power; upon zooming from a wide-angle end state to a telephoto end state, the distance between the first lens group g1 and the second lens group g2, the distance between the second lens group g2 and the aperture stop s, the distance between the aperture stop s and the third lens group g3, and the distance between the third lens group g3 and the fourth lens group g4 being varied, and the distance between the aperture stop s and the fourth lens group g4 being constant; and a predetermined conditional expression being satisfied, thereby providing a variable magnification optical system which is compact in size and has a high variable magnification ratio and high optical performance, an optical apparatus, and a method for manufacturing a variable magnification optical system.. . ... Nikon Corporation

09/20/18 / #20180266916

Apparatus and methods for measuring thermally induced reticle distortion

An apparatus and method for measuring thermo-mechanically induced reticle distortion or other distortion in a lithography device enables detecting distortion at the nanometer level in situ. The techniques described use relatively simple optical detectors and data acquisition electronics that are capable of monitoring the distortion in real time, during operation of the lithography equipment. ... Nikon Corporation

09/06/18 / #20180255217

Image-capturing device

An image-capturing device includes: a plurality of micro-lenses disposed in a two-dimensional pattern near a focal plane of an image forming optical system; an image sensor that includes a two-dimensional array of element groups each corresponding to one of the micro-lenses and made up with a plurality of photoelectric conversion elements which receive, via the micro-lenses light fluxes from a subject having passed through the photographic optical system and output image signals; and a synthesizing unit that combines the image signals output from the plurality of photoelectric conversion elements based upon information so as to generate synthetic image data in correspondence to a plurality of image forming areas present on a given image forming plane of the image forming optical system, the information specifying positions of the photoelectric conversion elements output image signals that are to be used for generating synthetic image data for each image forming area.. . ... Nikon Corporation

09/06/18 / #20180252903

Zoom optical system, optical device and method for manufacturing the zoom optical system

A zoom optical system (zl) comprises a first lens group (g1) having positive refractive power, a second lens group (g2) having negative refractive power, a third lens group (g3) having positive refractive power, a fourth lens group (g4) having negative refractive power, and a fifth lens group (g5) having positive refractive power that are disposed in order from an object. Upon zooming from a wide angle end state to a telephoto end state, the lens groups are moved along an optical axis to change distances between the lens groups. ... Nikon Corporation

09/06/18 / #20180252902

Variable power optical assembly, optical device, and variable power optical assembly fabrication method

Comprising, in order from an object side: a first lens group g1 having positive refractive power; a second lens group g2 having negative refractive power; a third lens group g3 having positive refractive power; a fourth lens group g4; a fifth lens group g5; and a sixth lens group g6; upon zooming from a wide-angle end state to a telephoto end state, a distance between the first lens group g1 and the second lens group g2, a distance between the second lens group g2 and the third lens group g3, a distance between the third lens group g3 and the fourth lens group g4, a distance between the fourth lens group g4 and the fifth lens group g5, and the distance between the fifth lens group g5 and a sixth lens group g6 being varied; and a predetermined conditional expression being satisfied, thereby providing a variable magnification optical system which has a high variable magnification ratio, is compact in size and has high optical performance, an optical apparatus, and a method for manufacturing the variable magnification optical system.. . ... Nikon Corporation

09/06/18 / #20180252520

Method for correcting coordinate measurement machine errors

The invention provides a method for creating or refining a mathematical correction model for correcting dynamic measurement errors in a co-ordinate measurement machine having at least 3 linear machine axes x, y, and z, each comprising a machine linear scale, and provided with a measurement probe. An error model for considering acceleration errors is created and refined using actual measurements of the probe position when accelerating. ... Nikon Corporation

08/23/18 / #20180239266

Exposure apparatus and device manufacturing method

An exposure apparatus includes a projection system provided with a final element which has a first outer surface that is liquid repellent, and a component disposed adjacent to the final element and having a second outer surface which is liquid repellent, the first outer surface and the second outer surface facing each other with a gap between the first and second outer surfaces. A substrate is exposed with exposure light from the projection system through immersion liquid between an end surface of the final element and the substrate, the immersion liquid covering a portion of an upper surface of the substrate. ... Nikon Corporation

08/23/18 / #20180239264

Movable body apparatus, exposure apparatus and device manufacturing method

An exposure apparatus has a substrate holding member, a first supporting member, a second supporting member, and a driving system. The first supporting member supports the substrate holding member from below. ... Nikon Corporation

08/23/18 / #20180239261

Exposure apparatus, exposure method, and method for producing device

An exposure apparatus includes a nozzle member, a nozzle driving system having an actuator by which the nozzle member is moved, and a controller. The nozzle member includes a liquid supply port from which immersion liquid is supplied, a liquid recovery port via which the supplied immersion liquid is recovered, and a gas supply port via which a gas is supplied. ... Nikon Corporation

08/23/18 / #20180239122

Microscope objective lens

A microscope objective lens includes, in order from an object side, a first lens group having positive refractive power, a second lens group having positive refractive power, and a third lens group having negative refractive power, and is configured such that the first lens group includes, on the most object side, a positive meniscus lens whose concave surface is directed to the object side, such that the second lens group includes a diffractive optical element having positive refractive power, and such that the diffractive optical element is arranged at a position closer to the image than a portion at which the diameter of a light flux passing through the first lens group and the second lens group is the largest.. . ... Nikon Corporation

08/23/18 / #20180238803

Structured illumination microscope, observation method, and storage medium

A structured illumination microscope includes: a brancher that includes a first substrate on which a plurality of pixel electrodes are provided; a second substrate opposed to the first substrate; and a ferroelectric liquid crystal disposed between the first substrate and the second substrate, and branches light from a light source into diffracted light beams; an illumination optical system that illuminates a sample with interference fringes formed by at least some of the diffracted light beams; an imaging device that forms an image of the sample irradiated with the interference fringes; a demodulator; and a controller that controls a direction and a phase of the interference fringes. In one frame period during which the imaging device takes the image, the controller applies a first voltage pattern and a second voltage pattern obtained by inverting the first voltage pattern to at least some of the pixel electrodes.. ... Nikon Corporation

08/23/18 / #20180237333

Optical glass, optical element and optical device using optical glass

To provide an optical glass which has a unique combination of anomalous dispersibility in a visible range with that in a near-infrared range. Provided is an optical glass containing respective components of sio2 from 14 to 26% by mass, b2o3 from 9 to 16% by mass, and la2o3 from 10 to 42% by mass as essential components, and containing respective components of zno, y2o3, zro2, ta2o5, li2o, and na2o as optional components, and satisfying respective relationships of sio2+b2o3 from 28 to 36% by mass, zro2+ta2o5 from 6 to 16% by mass, la2o3+y2o3+zno from 43 to 59% by mass, and li2o+na2o from 2 to 14% by mass.. ... Nikon Corporation

08/16/18 / #20180231899

Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror

Fringe-projection autofocus system devoid of a reference mirror. Contributions to error in determination of a target surface profile caused by air non-uniformities are measured based on multiple measurements of the target surface performed at different wavelengths, and/or angles of incidence, and/or grating pitches and subtracted from the measured profile, rendering the system substantially insensitive to presence of air turbulence. ... Nikon Corporation

08/16/18 / #20180231898

Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine

A liquid immersion lithography apparatus and method expose a substrate with an optical beam via an optical assembly and liquid by (i) arranging a stage opposite to the optical assembly such that the liquid is maintained in a local space under the optical assembly, the stage having an upper surface and a surface of a pad member and being configured to support the substrate within the upper surface; and (ii) moving the upper surface and the surface of the pad member in a movement relative to the optical assembly in a state in which the upper surface and the surface of the pad member are adjacent to and substantially coplanar with each other so that the surface of the pad member is arranged opposite to the optical assembly in place of the upper surface while the liquid is maintained in the local space under the optical assembly.. . ... Nikon Corporation

08/16/18 / #20180231755

Microscope

A microscope including an illumination optical system having an objective lens and a fly-eye lens, where: the fly-eye lens having a plurality of lens elements; in the illumination optical system, images of the plurality of lens elements are projected on a pupil of the objective lens; and the number (n1) of the images of the lens elements projected inside the pupil of the objective lens is more than the number (n2) of the images of the lens elements projected on an outer perimeter of the pupil of the objective lens. In the above observation optical system, a first objective lens having a first pupil diameter and a second objective lens having a pupil diameter larger than the first pupil diameter are switchable, and a number n1 may be greater than a number n2 with respect to the first objective lens.. ... Nikon Corporation

08/16/18 / #20180229420

Article having a nanotextured surface with hydrophobic properties

An article having a nanotextured surface with hydrophobic properties, said nanotextured surface comprising an array of pillars (71) defined by a surface fraction (φs) of the pillars, a pitch (p) of the pillars and an aspect ratio (h/2r) of the pillars, wherein: —the surface fraction (s) is equal or greater to 2% and equal or less to 80%; —the pitch (p) is equal or less to 250; —the aspect ratio (h/2r) is equal or less to 2.4, where h is the height of the pillars and r is the radius of the pillars; —the pitch (p), the height (h), the radius (r) are expressed in nanometers (nm); —the nanotextured surface comprises at least partially a hydrophobic material.. . ... Nikon Corporation

08/09/18 / #20180227556

Projection device

A projection device includes: a plate shaped member that is thermally conductive; a light emitting element that is disposed upon the plate shaped member and emits light; a bending member that bends light from the light emitting element into an orientation parallel to the plate shaped member; a modulation element that modulates light bent by the bending member; and a polarized light separation element that bends light modulated by the modulation element into an orientation going away from the plate shaped member.. . ... Nikon Corporation

08/09/18 / #20180227512

Imaging unit, imaging apparatus, and computer readable medium storing thereon an imaging control program

When the amplification ratio is low and strong incident light causes a large charge, the signal retrieved from regions where the incident light is weak is also weak, but when the amplification ratio is high in regions where the incident light is weak, the signal retrieved from regions where the incident light is strong becomes saturated. Therefore, the dynamic range of the imaging unit is narrow. ... Nikon Corporation

08/09/18 / #20180224758

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

A first stage system having a first stage and a first drive system that moves the first stage is configured to hold a mask illuminated with illumination light. A second stage system having a second stage and a second drive system that moves the second stage is configured to hold a substrate. ... Nikon Corporation

08/09/18 / #20180224745

Method for forming pattern and method for producing device

A device manufacturing method includes forming, in a first layer, first line patterns of which longitudinal direction is a first direction; and forming, in a second layer above the first layer, second line patterns of which longitudinal direction is a second direction crossing the first direction, and third line patterns of which longitudinal direction is the second direction and having a etching characteristic different from an etching characteristic of the second line patterns. At least one edge portion of each of the second line patterns and at least one edge portion of each of the third line patterns are adjacent. ... Nikon Corporation

08/09/18 / #20180224627

Lens barrel and optical apparatus

A lens barrel, in one configuration, includes a moving member that has a cam pin and moves in an optical axis direction of a lens while holding the lens; a first barrel; a second barrel; a recess groove that is formed along a circumferential direction around the optical axis in one of a surface, which faces the first barrel, of the second barrel and a surface, which faces the second barrel, of the first barrel; and a biasing portion that faces the recess groove and applies a biasing force in a direction intersecting with the optical axis. The biasing force applied by the biasing portion changes according to a relative rotation between the first barrel and the second barrel.. ... Nikon Corporation

08/09/18 / #20180224333

Image capturing apparatus and image capturing computer program product

An image capturing apparatus includes an image capturing device that captures an image of light from a subject, the light passing through each of wavelength band filters having invisible wavelengths as passbands, in which parts of the passbands of the filters whose center wavelengths are adjacent to each other mutually overlap, and a control unit that causes the image capturing device to capture an image of the light from the subject on which a first irradiation light is irradiated, the first irradiation light having a first spectral distribution in which parts of the respective passbands of the filters overlap with one another, and causes the image capturing device to capture an image of the light from the subject on which a second irradiation light is irradiated, the second irradiation light having a second spectral distribution in which parts of the respective passbands of the filters overlap with one another.. . ... Nikon Corporation

08/02/18 / #20180220393

Electronic device

An electronic device having an attachment part that attaches/detaches the electronic device to/from a predetermined member; a physical quantity sensor detecting a physical quantity affecting the predetermined member according to a movement of a human body; and a communication unit configured to communicate with an external device and transmit the physical quantity detected by the physical quantity sensor to the external device.. . ... Nikon Corporation

08/02/18 / #20180220060

Focus detection device and image-capturing apparatus

A focus detection device includes: a plurality of first pixels having first color filters, via which a pair of first signals, to be used for split-pupil phase detection, are output; a plurality of second pixels having second color filters, via which a pair of second signals, to be used for the split-pupil phase detection, are output; a phase difference detection unit that detects a phase difference manifested by the first signals or a phase difference manifested by the second signals; and a defocus amount calculation unit that calculates a defocus amount by using a first conversion coefficient corresponding to the first color when the phase difference detection unit has detected the phase difference manifested by the first signals and by using a second conversion coefficient corresponding to the second color when the phase difference detection unit has detected the phase difference manifested by the second signals.. . ... Nikon Corporation

08/02/18 / #20180217511

Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium

A liquid immersion exposure apparatus is disclosed. It includes a projection system having a final element and a liquid immersion member that in turn includes a first member, which surrounds the final element and has a liquid supply port and a liquid suction port, and a second member, which is movable with respect to the first member and has a lower part under which a portion of a liquid immersion space is formed. ... Nikon Corporation

08/02/18 / #20180217510

High-resolution position encoder with image sensor and encoded target pattern

A position encoder for monitoring position of an object includes a target pattern, an illumination system, an image sensor, and a control system. The illumination system generates (i) a first illumination beam that is directed toward and impinges on the target pattern, the first illumination beam having a first beam characteristic; and (ii) a second illumination beam that is directed toward and impinges on the target pattern, the second illumination beam having a second beam characteristic that is different than the first beam characteristic. ... Nikon Corporation

08/02/18 / #20180217363

Variable power optical system, optical apparatus, and variable power optical system manufacturing method

A variable magnification optical system includes: a first lens group having a positive refractive power and arranged closest to an object; a negative lens group having a negative refractive power and arranged closer to an image than the first lens group; a positive lens group which has a positive refractive power, which includes at least one lens that moves integrally with an aperture stop, and which is arranged closer to the image than the negative lens group; and a focusing group arranged between the negative lens group and the positive lens group, wherein when varying magnification, a distance between the first lens group and the negative lens group is changed, and a distance between the negative lens group and the positive lens group is changed, wherein when focusing, a distance between the focusing group and a lens arranged at a position to face an object-side of the focusing group is changed, and a distance between the focusing group and a lens arranged at a position to face an image-side of the focusing group is changed, and wherein a predetermined conditional expression is satisfied.. . ... Nikon Corporation

08/02/18 / #20180217298

Optical member, chamber, and light source device

An optical member is provided with a substrate and a cu-proof protective layer formed on or above the substrate.. . ... Nikon Corporation

07/26/18 / #20180213140

Electronic device, imaging device, and imaging element

An electronic device includes: an imaging unit including a region having a pixel group that has a plurality of first pixels, and second pixels that are fewer than the first pixels in the pixel group; and a control unit that reads out the signals based upon exposure of the second pixels during exposure of the plurality of first pixels.. . ... Nikon Corporation

07/26/18 / #20180213130

Imaging device, imaging optical system, method for manufacturing imaging device, and imaging method

An imaging device (10) is configured by being provided with an image pickup element (40) where an imaging surface (41) having a concave surface facing an object side is formed, an imaging optical system (20) which forms an image on the imaging surface (41) in a range smaller than the imaging surface (41), and an oscillating drive section (30) which oscillating-drives the imaging optical system (20) so that a direction of an optical axis z of the imaging optical system changes. The imaging element (40) captures a first formed by the imaging optical system (20) with a direction of the optical axis z set to a first direction and a 2nd formed by the imaging optical system (20) with a direction of the optical axis z set to a 2nd direction, in different regions in the imaging surfaces (41).. ... Nikon Corporation

07/26/18 / #20180210347

Image-forming optical system, exposure apparatus, and device producing method

There is provided a reflective image-forming optical system which is applicable to an exposure apparatus using, for example, euv light and which is capable of increasing numerical aperture while enabling optical path separation of light fluxes. In a reflective imaging optical system (6) forming an image of a first plane (4) onto a second plane (7), the numerical aperture on a side of the second plane with respect to a first direction (x direction) on the second plane is greater than 1.1 times a numerical aperture on the side of the second plane with respect to a second direction (y direction) crossing the first direction on the second plane. ... Nikon Corporation

07/26/18 / #20180210332

Spatial-frequency matched wafer alignment marks, wafer alignment and overlay measurement and processing using multiple different mark designs on a single layer

Alignment patterns that are selected based on device pattern spatial frequencies are defined on a reticle. The alignment patterns can include periodic arrays of lines, spaces, dots, of other pattern elements. ... Nikon Corporation

07/26/18 / #20180210204

Control device, head-mount display device, program, and control method for detecting head motion of a user

It is possible to provide a technique for accurately performing an operation desired by a user. A user's head operation is identified according to information detected by a head motion detection unit. ... Nikon Corporation

07/19/18 / #20180205305

Actuator assembly including magnetic sensor system for vibrationless position feedback

An actuator assembly (16) for moving a device (22) includes a stator component (30), a mover component (32), a measurement system (18), and a signal processor (20). The measurement system (18) includes (i) a magnet assembly (244) that is coupled to and moves with the mover component (32); and (ii) a plurality of spaced apart sensors (246a). ... Nikon Corporation

07/19/18 / #20180204537

Image processing apparatus and program product for calculating luminance and chromaticity related applications

An image processing apparatus includes: a luminance/chromaticity calculation unit that calculates a luminance and a chromaticity for each pixel of pixels making up image data, based upon a value indicated for the pixel; a plane calculation unit that determines through arithmetic operation a plane containing coordinates of the pixel in a raw data space; an intersection point calculation unit that ascertains, through calculation, an intersection point at which an achromatic locus and the plane intersect each other in the raw data space; an intersection point chromaticity calculation unit that calculates a chromaticity at the intersection point; and a conversion unit that converts the chromaticity at the pixel to a chromaticity close to a chromaticity of achromatic color if the chromaticity at the pixel is close to the chromaticity at the intersection point.. . ... Nikon Corporation

07/19/18 / #20180203366

Cleanup method for optics in immersion lithography

In an immersion lithography apparatus, a projection optics having a final surface projects a pattern image onto a workpiece through a liquid immersion area between the final surface and an upper surface of the workpiece during an immersion lithography process in which the immersion liquid is supplied from above the workpiece via the liquid supply port and the supplied immersion liquid is collected from above the workpiece via the liquid recovery port. During a cleanup process, an object different from the workpiece is placed instead of the workpiece, a cleaning liquid is supplied onto the object from above the object via the liquid supply port, and the supplied cleaning liquid is collected from above the object via the recovery port. ... Nikon Corporation

07/19/18 / #20180203363

Controller for optical device, exposure method and apparatus, and method for manufacturing device

An exposure method for exposing a mask pattern, which includes plural types of patterns, with a high throughput and optimal illumination conditions for each type of pattern. The method includes guiding light from a first spatial light modulator illuminated with pulse lights of illumination light to a second spatial light modulator and exposing a wafer with light from the second spatial light modulator, accompanied by: controlling a conversion state of the second spatial light modulator including a plurality of second mirror elements; and controlling a conversion state of the first spatial light modulator including a plurality of first mirror elements to control intensity distribution of the illumination light on a predetermined plane between the first spatial light modulator and the second spatial light modulator.. ... Nikon Corporation

07/19/18 / #20180203332

Camera accessory

An accessory mount can be inserted through the camera body mount without any of the first through third tabs being hindered by any of three camera body-side tabs at the camera body mount, as long as the accessory mount is inserted into the camera body mount at a correct interlock phase. The first, second, and third tabs extend over varying lengths along the circumferential direction. ... Nikon Corporation

07/19/18 / #20180202924

Imaging method, imaging apparatus, imaging system, surgery support system, and a storage medium

An imaging method includes: irradiating breast tissue with infrared light, detecting light in a narrow wavelength band selected from wavelength bands from 1400 nm or more to 1600 nm or less, among light radiated from the tissue irradiated with the infrared light, and generating, based on the detected light in the narrow wavelength band, an image to specify an area in the tissue containing breast cancer cell aggregation or breast cancer tissue.. . ... Nikon Corporation

07/19/18 / #20180202842

Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device

An encoder, which measures a relative moving amount of a second member relative to a first member, includes: a diffraction grating provided on the first member; a light-incident optical member causing a measuring light to come into a grating pattern surface of the diffraction grating substantially perpendicularly; a first reflecting member provided on the second member and reflecting a diffracted light generated from the diffraction grating; a first direction-changing member changing a direction of the diffracted light; a first photo-detector detecting an interference light generated by interference between a double diffracted light and other diffracted light than the double diffracted light or a reference light, the double diffracted light being generated, via diffraction of the diffracted light, from the diffraction grating; and a measuring section which obtains the relative moving amount of the second member relative to the first member by using a detection signal from the first photo-detector.. . ... Nikon Corporation

07/19/18 / #20180202009

Hiv pathology marker and examination method

A technique for detecting intact provirus more simply and at a lower cost is provided. A marker showing hiv pathology, comprising near-full-length hiv provirus. ... Nikon Corporation

07/12/18 / #20180198998

Neighborhood haze density estimation for single-image dehaze

Dehazed images are produced based on an atmospheric light image obtained form an input image as brightest pixels of a predetermined window and white map. The white map is median filtered, morphologically filtered and, in some examples, filtered with a guided filter, and the filtered image combined with the atmospheric light image to produce a dehazed image.. ... Nikon Corporation

07/12/18 / #20180197820

Mark, method for forming same, and exposure apparatus

A mark forming method includes: forming recessed portion on a mark formation area of a substrate; coating the recessed portion with a polymer layer containing a block copolymer, allowing the polymer layer in the recessed portion to form a self-assembled area; selectively removing a portion of the self-assembled area; and forming a positioning mark by using the self-assembled area from which the portion thereof has been removed.. . ... Nikon Corporation

07/12/18 / #20180196359

Exposure apparatus, exposing method, method for manufacturing device, program, and recording medium

An exposure apparatus that exposes a substrate by exposure light via liquid between an optical member and the substrate, the exposure apparatus includes: an apparatus frame, an optical system including the optical member, a liquid immersion member that is configured to form an immersion liquid space and that includes a first member disposed at at least a portion of surrounding of the optical member and a second member disposed at at least a portion of surrounding of the optical member, a driving apparatus configured to relatively move the second member with respect to the first member, and a vibration isolator by which the first member is supported to the apparatus frame.. . ... Nikon Corporation

07/12/18 / #20180196352

Exposure apparatus and method for producing device

A liquid immersion exposure apparatus includes a stage having a holder that holds a substrate, and is movable below a projection system, supply ports via which immersion liquid is supplied, the supply ports facing an upper surface of the substrate held on the holder, recovery ports via which the immersion liquid is collected and arranged such that (i) the upper surface of the substrate held on the holder faces the recovery ports and (ii) the recovery ports encircle a path of exposure light. The recovery ports collect the immersion liquid from the upper surface of the substrate such that only a portion of the upper surface of the substrate is covered with the immersion liquid. ... Nikon Corporation

07/12/18 / #20180196241

Variable power optical system, optical apparatus, and variable power optical system manufacturing method

A variable magnification optical system includes, in order from an object: a first lens group (g1) having a negative refractive power; a second lens group (g2); a third lens group (g3); a fourth lens group (g4) having a negative refractive power; and a fifth lens group (g5) having a positive refractive power, the system performing varying magnification by changing the distance between the first and second lens groups, the distance between the second and third lens groups, the distance between the third and fourth lens groups, and the distance between the fourth and fifth lens groups, and the fourth lens group including a 42nd lens group (g42) configured to be movable so as to have a component in a direction orthogonal to an optical axis and a 41st lens group (g41) disposed at an object-side of the 42nd lens group.. . ... Nikon Corporation

07/12/18 / #20180196240

Zoom lens, optical apparatus, and method for manufacturing the zoom lens

A zoom lens comprises, in order from an object side: a first lens group g1 having negative refractive power; a second lens group g2 having positive refractive power; a third lens group g3 having negative refractive power and a fourth lens group g4 having positive refractive power. Upon varying magnification, a distance between the first lens group g1 and the second lens group g2, a distance between the second lens group g2 and the third lens group g3 and a distance between the third lens group g3 and the fourth lens group g4 are varied. ... Nikon Corporation

07/12/18 / #20180196223

Zoom lens, optical apparatus, and zoom lens production method

A zoom lens includes, in order from an object along an optical axis: a first lens group having a negative refractive power; a second lens group having a positive refractive power; a third lens group having a negative refractive power; a fourth lens group; and a fifth lens group. When the zoom lens performs varying magnification, the distance between the first and second lens groups changes, the distance between the second and third lens groups changes, the distance between the third and fourth lens groups changes, the distance between the fourth and fifth lens groups changes, the second and fourth lens groups move along the same trajectory along the optical axis, and at least the third lens group moves along the optical axis.. ... Nikon Corporation

07/12/18 / #20180196168

Optical system, optical device comprising optical system, and method for manufacturing optical system

An optical system includes, disposed in sequence starting on an object side along an optical axis: a first lens group having a positive refractive power; a second lens group having a negative refractive power; and a third lens group having a positive refractive power, wherein: the second lens group moves along the optical axis upon focusing from an infinity-distance object to a short-distance object; and a following conditional expression is satisfied: 1.00<f/(−f2)<2.40 where: f: a focal length of the optical system in an infinity in-focus state; and f2: a focal length of the second lens group.. . ... Nikon Corporation

07/12/18 / #20180194279

Electronic apparatus, processing system, and processing program

Provided is an electronic apparatus that perform an appropriate process according to a gesture of a subject person, the electronic apparatus including: a first input unit that inputs a detection result of a biosensor detecting a change in biological information of a subject person; a second input unit that inputs a recognition result of a recognition device recognizing an action of the subject person; and a processing unit that performs a process according to the action of the subject person based on input results of the first and second input units.. . ... Nikon Corporation

07/05/18 / #20180191961

Electronic apparatus, method for controlling electronic apparatus, and control program for setting image-capture conditions of image sensor

To check image changes corresponding to changes made to image-capture conditions by causing display unit to display multiple images captured under different image-capture conditions. Digital camera includes: image-capture unit having multiple first image sensors and multiple second image sensors disposed therein, first image sensors configured to capture image under first image-capture conditions, second image sensors configured to capture image under second image-capture conditions different from first image-capture conditions, image-capture unit configured to output first image data generated based on subject image which entered first image sensors and second image data generated based on subject image which entered second image sensors; and control unit configured to display first image based on first image data and second image based on second image data on display unit in such manner that selection can be made between respective recording forms of first image data and second image data.. ... Nikon Corporation

07/05/18 / #20180190113

Signal control apparatus and signal having the same

A signal control apparatus includes a power supply device, a battery, a power switching section, a detector, and a display controller. A first mode is a mode in which electric power is supplied from the power supply device to each component provided in the signal control apparatus and a second mode is a mode in which electric power is supplied from the battery to the each component. ... Nikon Corporation

07/05/18 / #20180188818

Display device and projection device

Provided is a convenient display device including: a display unit capable of projecting a projection image on a domain in accordance with a position of a user; and a judgment unit that judges whether the projection image can be projected on the domain.. . ... Nikon Corporation

07/05/18 / #20180188657

Surface position detection apparatus, exposure apparatus, and exposure method

A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member having first reflective surfaces, and a light receiving system has a light receiving prism member having second reflective surfaces arranged in correspondence with the projection side prism member. ... Nikon Corporation

07/05/18 / #20180188190

Single-projection photon-counting x-ray quantitative phase-contrast measurements

An x-ray-based imaging system and related method for estimation of attenuation and/or phase-contrast and/or dark-field information representing an object between the x-ray source and the detector based on estimate of a position of absorption of a photon in a pixel within the neighborhood of pixels acquired with a single exposure of the object to x-ray beamlets. The use of a photon-counting detector devoid of a detector mask as opposed to integrating detector significantly improves performance of the system.. ... Nikon Corporation

06/28/18 / #20180184034

Backside illumination image sensor, manufacturing method thereof and image-capturing device

. . An image sensor includes a first photoelectric conversion unit that converts light incident through a first opening to an electric charge, a second photoelectric conversion unit that converts light incident through a second opening which is smaller than the first opening to an electric charge, and a signal output wiring that outputs a first signal generated by the electric charge converted by the first photoelectric conversion unit and a second signal generated by the electric charge converted by the second photoelectric conversion unit. The second photoelectric conversion unit is disposed between the second opening and the signal output wiring.. ... Nikon Corporation

06/28/18 / #20180182713

Mark forming method, mark detecting method, and device manufacturing method

A mark forming method includes: exposing a wafer with a mask image to form first and second resist marks that have different shapes than one another based on a portion of the mask image; applying a polymer layer that contains a block copolymer to the wafer by spin-coating; forming self-assembled regions in the applied polymer layer; selectively removing a portion of the self-assembled regions; and forming first and second wafer marks on the wafer using the first and second resist marks. This makes it possible to form the marks when forming circuit patterns using self-assembly of a block copolymer.. ... Nikon Corporation

06/28/18 / #20180182077

Multiple phase method for image deconvolution

A method for deblurring a blurry image (400) includes the steps of: performing a first phase of deconvolution (202) with a first phase regularization spatial mask (300) to reconstruct the main edges and generate a first phase latent sharp image (404) having reconstructed main edges; and performing a second phase of deconvolution (204) with a second phase regularization spatial mask (304) to reconstruct the texture and generate a second phase latent sharp image (406). The second phase regularization spatial mask (304) can be different from the first phase regularization spatial mask (300).. ... Nikon Corporation

06/28/18 / #20180181595

Search supporting system, search supporting method and search supporting program

In a database, product image data is accumulated. A search portion acquires product image data having the image characteristics information that is the same as or similar to the image characteristics information that indicates the characteristics of the image of input image data from the database for the input image data. ... Nikon Corporation

06/28/18 / #20180181010

Array description system for large patterns

A method for describing an array of elements includes the steps of providing an array description system that includes a library of possible alternative designations; and describing the array of elements using at least one of the alternative designations. The library of possible alternative designations includes one or more of the following (i) a line designation, (ii) a column designation, (iii) a square designation, (iv) a rectangle designation, (v) a cross designation, (vi) a diagonal designation, (vii) a complex designation, (viii) a mosaic designation, (ix) an overlap designation, (x) a power designation, (xi) a border designation, (xii) a corner flip designation, (xiii) a mirror image designation, (xiv) a repeat designation, and (xv) a glide designation.. ... Nikon Corporation

06/28/18 / #20180181008

On-board supply system for a stage assembly

A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20a). The supply system (20a) is secured to and positioned on the stage (14). ... Nikon Corporation

06/28/18 / #20180181006

Encoder head with a birefringent lens element and exposure system utilizing the same

An encoder head configured for use with a lithographic exposure tool. The head is devoid of the multiplicity of optical corner-cubes and includes, instead, a single, geometrically substantially perfect cuboid of optically-isotropic material complemented, in operation, with a birefringent lens to form a contraption that, as a unit, splits a single beam of light delivered to the contraption into four measurement (sub-)beams of light (two in xz-plane, two in yz-plane) and causes each of measurement sub-beams to interact with the wafer-stage diffraction grating at the same location twice: upon the first pass by the grating and upon the second pass by the grating. ... Nikon Corporation

06/28/18 / #20180180054

Time lapse shooting apparatus and observation method

A certain material irregularly expressed in an observation area is effectively observed. An observing apparatus includes a first observing unit performing a time lapse shooting of a predetermined observation area, a first discriminating unit discriminating whether or not a first material is expressed in the observation area based on an image obtained by the first observing unit, and a second observing unit starting a time lapse shooting relating to a part where the first material is expressed at a timing when the first material is expressed in the observation area, in which a shooting frequency of the time lapse shooting by the second observing unit is higher than a shooting frequency of the time lapse shooting by the first observing unit.. ... Nikon Corporation

06/21/18 / #20180176458

Electronic device, image capturing device, and image capturing system

An electronic device includes: a display control unit that is configured to display at a display unit a first image generated by capturing an image with light having entered a first area of an image sensor and a second image generated by capturing an image with light having entered a second area at the image sensor different from the first area; and a selection unit that is configured to select either the first area or the second area as an area for image-capturing condition adjustment in reference to the first image and the second image displayed at the display unit.. . ... Nikon Corporation

06/21/18 / #20180175097

Imaging device and imaging unit

An imaging device having a first surface on which light is incident and a second surface on an opposite side of the first surface, includes a photoelectric conversion section including semiconductors having a same conductivity type, in which an impurity concentration on the second surface side is higher than an impurity concentration on the first surface side.. . ... Nikon Corporation

06/21/18 / #20180174884

Substrate holding method, substrate holding apparatus, exposure apparatus and exposure method

A wafer holding apparatus for holding a wafer including a wafer holder on which the wafer is placed; and a lift pin that is configured to be lifted up and down with respect to the wafer holder in a direction along a normal line of a placement surface of the wafer, the lift pin includes a tip part, the tip part includes: a bottom part that forms a suction region for sucking a rear surface of the wafer; and a convex part that supports the rear surface of the wafer in the suction region. When a substrate is placed on a target position, it is possible to prevent a local deterioration of flatness of the substrate even if the substrate is large.. ... Nikon Corporation

06/21/18 / #20180173114

Substrate holding device, exposure apparatus, and device manufacturing method

A substrate holding device is equipped with a substrate holder that adsorbs and holds a substrate, and a plurality of vertical movement pin units that each have, at one end, an adsorption section to adsorb a rear surface of the substrate, and are movable relative to the substrate holder in a state of adsorbing the rear surface of the substrate with the adsorption section. The plurality of vertical movement pin units each have at least part including the adsorption section that is displaced in at least one direction, by an action of a force received from the adsorbed substrate.. ... Nikon Corporation

06/21/18 / #20180173107

Exposure method, exposure apparatus, and method for producing device

A liquid immersion exposure apparatus and method expose a substrate with illumination light via liquid. A projection optical system has plural optical elements that include a lens contacting the liquid and a barrel supporting the optical elements, the lens provided on a front end part of the projection optical system and exposed from the barrel. ... Nikon Corporation

06/21/18 / #20180172442

Measurement probe unit for metrology applications

The present invention provides a dimensional measurement probe unit (100) for attachment to a probe head (200) of a localizer (300), comprising: a measurement probe (150) for dimensional measurement of an object (400); a revolute joint (170) integrated into the measurement probe (150); and a probe unit interface (120) for repeated dismountable connection to a probe head (200) wherein the probe unit interface (120) is revolutely connected to the measurement probe (150) by the revolute joint (170).. . ... Nikon Corporation

06/21/18 / #20180172437

Determination of operability of a digital scanner with shearing interferometry

System and method for monitoring of performance of a mirror array of a digital scanner with a use of a lateral shearing interferometer (operated in either static or a phase-shifting condition) to either simply identify problematic pixels for further troubleshooting or measure the exact magnitude of the mirror's deformation.. . ... Nikon Corporation

06/21/18 / #20180171482

Method for manufacturing wiring pattern, method for manufacturing conductive film, and method for manufacturing transistor

It is an object to provide a technique for obtaining a wiring pattern by electroless plating without using a lift-off process. A method for manufacturing a wiring pattern characteristically includes: a base layer forming step of forming an base layer including a catalyst for electroless plating and a resin; a surface layer removing step of removing at least a part of a surface layer of the base layer; and a plating layer forming step of performing electroless plating and forming a plating layer on the base layer subjected to the surface layer removing step.. ... Nikon Corporation

06/14/18 / #20180167548

Focus detection device, focus adjustment device and camera

A focus detection device includes: a plurality of micro-lenses at which light fluxes through an image forming optical system enter, disposed in a two-dimensional array pattern; a plurality of light receiving elements disposed in correspondence to each of the plurality of micro-lenses; a focus detection unit that executes a detection of a defocus quantity of the image forming optical system by detecting, based upon outputs from the plurality of light receiving elements, a phase difference of a plurality of light fluxes through different areas of the image forming optical system; and a recognition unit that recognizes, based upon the outputs from the plurality of light receiving elements, characteristics of a subject image formed onto the plurality of light receiving elements via the plurality of micro-lenses, wherein: the focus detection unit detects the defocus quantity through a method optimal for the characteristics of the subject image recognized by the recognition unit.. . ... Nikon Corporation

06/14/18 / #20180164703

Environmental system including a transport region for an immersion lithography apparatus

An immersion lithography apparatus includes: an optical assembly including a plano-convex lens as a last optical element, the optical assembly configured to project an image onto a substrate through an immersion liquid; a containment member that surrounds a last portion of the optical assembly, the containment member having a channel via which the immersion liquid recovered from a gap between the containment member and the substrate and/or a stage holding the substrate is removed; an outlet above a bottom surface of the last optical element, via which the immersion liquid is released to a space between the optical assembly and the containment member; and an immersion liquid source apparatus from which the immersion liquid is delivered to the outlet, the immersion liquid source apparatus having a flow controller, and a flow sensor that measures a rate of a flow of the immersion liquid to be delivered to the outlet.. . ... Nikon Corporation

06/14/18 / #20180164692

Exposure apparatus, exposure method, and device manufacturing method

A movement area of a stage includes first-fifth areas. In the first area, three of four heads except for a first head respectively face three of four sections of a scale member except for a first section. ... Nikon Corporation

06/14/18 / #20180164658

Drive apparatus, drive method, and optical device

Noise produced during phase-difference changes is minimized without decreasing the responsiveness of a vibration-wave motor. A lens-side mcu for a lens barrel controls a drive apparatus that applies a drive voltage to the vibration-wave motor by outputting an a-phase drive signal and a b-phase drive signal thereto. ... Nikon Corporation

06/14/18 / #20180164571

Structured illumination microscopy system, method, and non-transitory storage medium storing program

A structured illumination microscopy system including an illumination optical system illuminating excitation light to excite a fluorescent material contained in a sample on the sample with an interference fringe; a controlling part controlling a direction, a phase, and a spatial frequency of the interference fringe; an image-forming optical system forming an image of the sample which is modulated by illumination of the interference fringe; an imaging sensor capturing the image formed by the image-forming optical system; and a demodulating part performing demodulation processing by using a plurality of images captured by the imaging sensor in which the controlling part controls the spatial frequency of the interference fringe in accordance with an illuminating position of the interference fringe.. . ... Nikon Corporation

06/07/18 / #20180160053

Image processing device that changes extent of image altering by first and second image processing

. . An image processing device includes: an image processing unit that alters an image by executing first image processing and second image processing on the image; and a processing change unit that changes an extent to which the image is altered through the first image processing and an extent to which the image is altered through the second image processing. The processing change unit raises the extent to which the image is altered through the second image processing when the extent to which the image is altered through the first image processing is lowered.. ... Nikon Corporation

06/07/18 / #20180158740

Display element manufacturing method and manufacturing apparatus

The display element manufacturing apparatus has a transporting part, which transports a substrate in a first direction, a first alignment system, which detects fiducial marks, a second alignment system, which is arranged at a prescribed distance from the first alignment system in the first direction and detects fiducial marks, calculating parts, which detect the fiducial marks and calculate the expansion/contraction of the substrate in the first direction or the transport speed of the substrate, and a processing part, which processes a prescribed position of the substrate based on at least one of the expansion/contraction of the substrate in the first direction or the transport speed of the substrate and the fiducial marks.. . ... Nikon Corporation

06/07/18 / #20180157182

Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method

In a substrate stage, when a y coarse movement stage moves in the y-axis direction, an x coarse movement stage, a weight cancellation device, and an x guide move integrally in the y-axis direction with the y coarse movement stage, and when the x coarse movement stage moves in the x-axis direction on the y coarse movement stage, the weight cancellation device move on the x guide in the x-axis direction integrally with the x coarse movement stage. Because the x guide is provided extending in the x-axis direction while covering the movement range of the weight cancellation device in the x-axis direction, the weight cancellation device is constantly supported by the x guide, regardless of its position. ... Nikon Corporation

05/31/18 / #20180150063

Lens manufacturing system, lens manufacturing method, computer program, lens design data use management system, lens design data use management device, lens processing management device, lens processing management method, lens processing management system, lens design data use management program, and lens processing management program

A processing device that processes a lens, comprising a design data receiver that receives design data of the lens from an external section. Also included are a memory that stores the received design data, an input section that inputs authentication information which is embedded in or attached to the lens and is used in use permission of design data, and a controller that performs an authentication process whether or not the authentication information corresponds to the design data and controls whether or not a processing of the lens by using the design data is started.. ... Nikon Corporation

05/31/18 / #20180149984

Exposure apparatus, exposure method, and device producing method

A liquid immersion exposure apparatus includes a projection system having a final optical element; a liquid-immersion-area-forming-member having an opening through which an exposure light is projected, the-liquid-immersion-area-forming-member having a removal outlet facing downward and a liquid supply inlet; a substrate stage having a substrate holding portion, which is movable below and relative to the projection system; and a controller. The controller controls movement of the substrate stage, so that when the substrate is moved from a first position to a second position in a plane perpendicular to an optical axis of the final optical element, the controller limits the movement of the substrate stage based on a positional relation between the first position and the second position.. ... Nikon Corporation

05/31/18 / #20180149880

Optical system, optical member, micromirror array, display device, and image-capturing device

An optical system includes: a first optical member having a concave surface that reflects a light having a first circularly polarized light component and transmits a light having a second circularly polarized light component a rotation direction of which is opposite to a rotation direction of the first circularly polarized light component; and a second optical member that transforms the light having the first circularly polarized light component reflected from the first optical member into the light having the second circularly polarized light component to be reflected so as to be incident on the first optical member.. . ... Nikon Corporation

05/24/18 / #20180143539

Exposure apparatus, exposure method, and device manufacturing method

An exposure apparatus transfers a pattern on a wafer by irradiating a reticle with an illumination light, and the pattern is formed on a pattern surface of the reticle. The exposure apparatus is provided with a reticle stage that moves holding the reticle, and a sensor that irradiates a measurement light on the pattern surface of the reticle held by the reticle stage and detects speckles from the pattern.. ... Nikon Corporation

05/24/18 / #20180143444

Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method

An illumination optical apparatus has an optical unit. The optical unit has a light splitter to split an incident beam into two beams; a first spatial light modulator which can be arranged in an optical path of a first beam; a second spatial light modulator which can be arranged in an optical path of a second beam; and a light combiner which combines a beam having passed via the first spatial light modulator, with a beam having passed via the second spatial light modulator; each of the first spatial light modulator and the second spatial light modulator has a plurality of optical elements arranged two-dimensionally and controlled individually.. ... Nikon Corporation

05/24/18 / #20180143413

Variable power optical system, optical apparatus, and variable power optical system manufacturing method

A variable magnification optical system includes: a first lens group (g1) having a positive refractive power and arranged closest to an object; a negative lens group (g2) having a negative refractive power and arranged closer to an image than the first lens group; a positive lens group (g4) which has a positive refractive power, which includes at least one lens that is arranged closer to the image than an aperture stop (s), and which is arranged closer to the image than the negative lens group; and a focusing group (g3) arranged between the negative lens group and the positive lens group, wherein when varying magnification, the first lens group moves with respect to an image plane, a distance between the first lens group and the negative lens group is changed, and a distance between the negative lens group and the positive lens group is changed, wherein when focusing, a distance between the focusing group and a lens arranged at a position to face an object-side of the focusing group is changed, and a distance between the focusing group and a lens arranged at a position to face an image-side of the focusing group is changed, and wherein a predetermined conditional expression is satisfied.. . ... Nikon Corporation

05/17/18 / #20180139435

Image sensor, image-capturing apparatus and image-capturing system

. . To produce both 2d image data and color parallax image data from image data output from a single-plate image sensor, the resolutions of the 2d image data and parallax image data may be both degraded. The image sensor has a primitive lattice that is a group of pixels including (i) at least four types of parallax pixels formed by photoelectric converter elements each of which is associated with one of combinations of two different types of aperture masks and two different types of color filters and (ii) no-parallax pixels configured to guide an incident luminous flux to photoelectric converter elements without limitation. ... Nikon Corporation

05/17/18 / #20180138011

Charged particle beam exposure apparatus and device manufacturing method

An electron beam exposure apparatus which exposes a wafer coated with an electron beam resist with an electron beam is equipped with: a stage that can be moved holding the wafer; an electron beam optical system that irradiates the wafer with an electron beam; and, an opening member, placed facing the wafer via a predetermined gap on the wafer side in the optical arrangement direction of the electron beam optical system, and having an opening through which the electron beam from the electron beam optical system passes.. . ... Nikon Corporation

05/17/18 / #20180136571

Exposure apparatus

An exposure apparatus that can prevent disadvantages due to a leaked liquid is provided. The exposure apparatus includes a substrate holder that includes a peripheral wall portion and supporting portions located on an inside of the peripheral wall portion and that supports a substrate with the supporting portions by negatively pressurizing a space surrounded by the peripheral wall portion, and a recovery mechanism that includes a collection inlets provided on the inside of the peripheral wall portion and a vacuum system connected to the collection inlets, in which a liquid penetrated from an outer periphery of the substrate is sucked and recovered, in the state with an upper surface of the peripheral wall portion and a back surface of the substrate being spaced at a first distance.. ... Nikon Corporation

05/17/18 / #20180136566

Exposure apparatus and exposure method, and device manufacturing method

In corner sections of first to fourth quadrants whose origin point is a center of an upper surface of a stage, three each of two-dimensional heads are provided. The three each of two-dimensional heads include one first head and two second heads. ... Nikon Corporation

05/17/18 / #20180135969

System for measuring the position and movement of an object

The disclosure relates to a system for measuring the position of an object in a measurement volume, including: an optical angular measurement device, disposed with static optics, configured for measurement of the an azimuth and elevation angle of the object in the measurement volume with respect to the optical angular measurement device, a range measurement device, disposed with static component, configured for measurement of the range of the object in the measurement volume. It further relates to a use of the system and a measurement method.. ... Nikon Corporation

05/10/18 / #20180129144

Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method

An alignment system is equipped with: an alignment system having an objective optical system, an irradiation system and a beam receiving system; and a calculation system, the objective optical system including an objective transparent plate that faces a wafer movable in a y-axis direction, the irradiation system irradiating a grating mark provided at the wafer with measurement beams via the objective transparent plate while scanning the measurement beams in the y-axis direction, the beam receiving system receiving diffraction beams from the grating mark of the measurement beams via the objective optical system, and the calculation system obtaining positional information of the grating mark on the basis of the output of the beam receiving system, wherein the objective transparent plate deflects or diffracts the diffraction beams diffracted at the grating mark toward the beam receiving system.. . ... Nikon Corporation

05/10/18 / #20180129026

Variable power optical system, optical apparatus, and variable power optical system manufacturing method

A variable magnification optical system includes: a first lens group having a positive refractive power and arranged closest to an object; a negative lens group having a negative refractive power and arranged closer to an image than the first lens group; and a focusing group arranged between the negative lens group and an aperture stop, wherein when varying magnification, the distance between the first lens group and the negative lens group is changed, and the distance between the negative lens group and the aperture stop is changed, wherein when focusing, the distance between the focusing group and a lens arranged at a position to face an object-side of the focusing group is changed, and the distance between the focusing group and a lens arranged at a position to face an image-side of the focusing group is changed, wherein the focusing group is constituted by one single lens having a positive refractive power, and a predetermined conditional expression is satisfied.. . ... Nikon Corporation

05/10/18 / #20180128653

Transparent-block encoder head with isotropic wedged elements

An encoder head configured for use with a lithographic exposure tool. The head is devoid of a multiplicity of stand-alone optical retroreflectors. ... Nikon Corporation

05/10/18 / #20180128601

Profile measuring apparatus, structure manufacturing system, method for measuring profile, method for manufacturing structure, and non-transitory computer readable medium

There is provided a profile measuring apparatus, including: an irradiation section configured to irradiate a measurement light to a measurement area of the object; an imaging section configured to obtain an image of the measurement area; a table configured to place the object thereon; a coordinate calculation section configured to calculate a position of the measurement area based on an image detected by a detection section; and a positioning mechanism configured to drive and control a relative position of the imaging section and the table. The positioning mechanism calculates a relative position of the imaging section to the table, based on an information with respect to an edge line direction of a convex portion or an extending direction of a concave portion in the measurement area of the object having a repetitive concave-convex shape, to move at least one of the table and the imaging section.. ... Nikon Corporation

05/03/18 / #20180124262

Electronic device, imaging device, image reproduction method, image reproduction program, recording medium with image reproduction program recorded thereupon, and image reproduction device

An electronic device includes: a communication unit that performs communication with an external device; and a control unit that issues a command to the external device via the communication unit, on the basis of at least one of capacity of the external device, and capacity of the electronic device.. . ... Nikon Corporation

05/03/18 / #20180124259

Image display apparatus having image-related information displaying function

A display system has a (1) camera that includes a lens and outputs an image data; (2) a first display that includes a first display screen on which (i) a first image, based on the image data output by the camera, containing a part of a person is displayed and (ii) information indicating a position where the camera has output the image data is displayed; and (3) a second display that includes (i) a receiver which receives the image data transmitted from the camera and (ii) a second display screen that displays a second image based on the image data. The second display can be carried by the person while receiving the image data.. ... Nikon Corporation

05/03/18 / #20180120713

Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method

A reflective mirror is provided with a base and a multilayer film including a first layer and a second layer laminated alternately on the base and capable of reflecting at least a portion of incident light. The multilayer film is provided with a first portion having a first thickness, and with a second portion having a second thickness that is different from the first thickness, and which is provided at a position rotationally symmetric to that of the first portion about an optical axis of the reflective mirror.. ... Nikon Corporation

05/03/18 / #20180120243

Measurement processing device, x-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method

A measurement processing device used for an x-ray inspection device includes: a region information acquisition unit that acquires first region information based on x-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.. . ... Nikon Corporation

04/19/18 / #20180109797

Moving image compression device, moving image decoding device, image compression device, image decoding device, imaging device, and non-transitory medium storage program

A moving image compression device has an obtaining unit, an image conversion unit, and a compression processing unit. The obtaining unit obtains a raw moving image having plural frames associated in an order of imaging, the frames having pixels of three different color components which are disposed periodically according to a color array with two rows and two columns. ... Nikon Corporation

04/19/18 / #20180109768

Image sensor, photographing method, and image-capturing device

An image sensor includes: a plurality of microlenses arranged in a two-dimensional pattern; and a plurality of pixels that are provided in correspondence to each of the microlenses and receive lights of different color components, respectively. Pixels that are provided at adjacent microlenses among the microlenses and that receive lights of same color components, are adjacently arranged.. ... Nikon Corporation

04/19/18 / #20180108539

Method for manufacturing wiring pattern, method for manufacturing transistor, and member for transfer

An object is to provide a novel method in place of the above-described conventional technology, as a technique for obtaining a thin film with a wiring pattern applied. A method for manufacturing a wiring pattern according to the present invention is characterized in that the method includes: a laminate forming step of forming a laminate by bringing a first member that has a resist layer and a metal layer formed on the resist layer into contact with a second member that includes a substrate; a resist layer patterning step of subjecting the resist layer to patterning; and an etching step of selectively removing the metal layer.. ... Nikon Corporation

04/19/18 / #20180107121

Microelectromechanical mirror assembly

An optical element assembly includes a base, and an element unit. The element unit includes (i) an optical element having an element central axis and an element perimeter; and (ii) an element connector assembly that couples the optical element to the base, the element connector assembly including a flexure assembly having an element flexure and a base flexure. ... Nikon Corporation

04/12/18 / #20180102324

Mark forming method and device manufacturing method

A mark forming method includes: a step of forming, on a device layer of a wafer, an intermediate layer to which a polymer layer containing a block copolymer is adherable, the device layer including a shot area and a scribe line area; a step of removing a portion, of the intermediate layer, formed in the scribe line area; a step of exposing an image of a mark on the scribe line area and forming, based on the image of the mark, a mark including recessed portion; and a step of applying the polymer layer containing the block copolymer on the device layer of the wafer. When a circuit pattern is formed by using the self-assembly of the block copolymer, it is possible to form the mark simultaneously with the formation of the circuit pattern.. ... Nikon Corporation

04/12/18 / #20180101104

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

In an exposure operation of a substrate, a controller controls first and second drive systems based on correction information for compensating for a measurement error of an encoder system and measurement information of first and second measurement devices, so that scanning exposure is performed and a measurement error is compensated for. In the scanning exposure, a mask and the substrate are each moved relative to illumination light with a first direction serving as a scanning direction, the measurement error occurring due to a difference between a position of a reference plane and a position of a grating surface of a grating section in a third direction orthogonal to a predetermined plane that includes the first direction, and the reference plane being a reference plane for position control or positioning of a second stage or a reference plane with which the substrate coincides in the exposure operation.. ... Nikon Corporation

04/12/18 / #20180101037

Thin-film alignment layer provided with integrally-formed spacing structures and forming an intermediate layer for an optical article comprising liquid crystals

A thin film forming an intermediate layer for an optical article including liquid crystals, the thin film including a main body limited by a first main surface and by a second main surface opposed to the first main surface, the first and second main surfaces both including a first zone exhibiting alignment properties for aligning liquid crystals along a predetermined alignment direction and a second zone forming spacing structures extending in projection from the first zone.. . ... Nikon Corporation

04/12/18 / #20180100793

Microparticle detection system and microparticle detection program

A microparticle detection system includes a stage unit including a mounting surface on which a fluid device having a flow path through which a sample containing microparticles is movable is capable of being mounted, an emission unit configured to emit illumination light to the flow path, an imaging unit configured to image scattered light generated from microparticles in the sample when illumination light is emitted, an identification unit configured to identify the microparticles included in the image for each of the microparticles on the basis of the image captured by the imaging unit, a particle size determination unit configured to determine a particle size of the microparticle for each of the microparticles identified by the identification unit, a zeta potential determination unit configured to determine a zeta potential of the microparticle for each of the microparticles identified by the identification unit, and a correlation unit configured to associate the particle size for each of the microparticles determined by the particle size determination unit with the zeta potential for each of the microparticles determined by the zeta potential determination unit for each of the microparticles.. . ... Nikon Corporation

04/05/18 / #20180098016

Imaging sensor and imaging device with column adc

An imaging sensor comprising: an imaging chip in which a plurality of pixel are arranged in a matrix; and a signal processing chip that is each provided for one or more pixel columns or one or more pixel rows, has a device that performs signal processing on a pixel signal output from a pixel, and is stacked with the imaging chip is provided. For example, the device that performs signal processing is an a/d converter that converts a pixel signal output from the pixel into a digital signal, and when a pixel signal output from the pixel is converted into a digital signal, at least two or more a/d converters among the a/d converters are controlled in parallel.. ... Nikon Corporation

04/05/18 / #20180097988

Electronic device and computer program product

An electronic device includes: an image-capturing unit that captures an image of a subject with an image sensor, the image sensor being configured to be able to set image-capturing conditions for a plurality of regions on an image-capturing surface; and a control unit that determines the image-capturing conditions varied for each of the regions, based on a subject element detected from the image captured by the image-capturing unit.. . ... Nikon Corporation

04/05/18 / #20180095275

Image-capturing device, multi-lens camera, and method for manufacturing image-capturing device

An image-capturing device includes: a micro-lens array in which a plurality of micro-lenses are arranged in a two dimensional configuration; an image sensor that comprises a plurality of pixel groups each comprising a plurality of pixels, and that receives light with each of the pixel groups that has passed through a respective micro-lens of the micro-lens array; and a drive unit that changes a positional relationship of the image sensor and the micro-lens array to prevent blurring of an image captured by the pixel groups.. . ... Nikon Corporation

03/29/18 / #20180091762

Electronic apparatus, reproduction device, reproduction method, recording medium, and recording method

An electronic apparatus includes: an input unit that inputs data for imaging conditions for each of a plurality of imaging regions included in an image capturing unit, different imaging conditions being set for each of the imaging regions; and a recording control unit that correlates the data for imaging conditions inputted from the input unit with the imaging regions and records correlated data in a recording unit.. . ... Nikon Corporation

03/29/18 / #20180089809

Image deblurring with a multiple section, regularization term

A method for estimating a latent sharp image (15) for a blurry image (14) includes estimating the latent sharp image (15) with a control system (20) that utilizes a latent sharp image estimation cost function having a regularization term (538) that has a linear first section (540) and a linear second section (542) to characterize the pixels (14a) and adjust the pixels (14a) to create the latent sharp image (15) with the adjusted pixels (15a). The first section (540) has a first slope and the second section (542) has a second slope that is different from the first slope. ... Nikon Corporation

03/29/18 / #20180088474

Layout method, mark detection method, exposure method, measurement device, exposure apparatus, and device manufacturing method

On a substrate conforming to a layout method for a plurality of marks for detection using a plurality of mark detection systems of which the detection centers are arranged at a predetermined spacing along an x-axis direction, a plurality of shot areas are formed in both an x-axis direction and a y-axis direction orthogonal thereto in an xy plane, and sets including at least two marks separated in the x-axis direction are repeatedly arranged along the x-axis direction at spacing of a length in the x-axis-direction of each shot area, and the marks belonging to each set are separated from each other in the x-axis direction by a spacing determined based arrangement in the x-axis direction of the plurality of mark detection systems and the length. It is thereby possible to reliably detect a plurality of marks on a substrate-using a plurality of mark detection systems.. ... Nikon Corporation

03/29/18 / #20180088473

Exposure apparatus, exposure method, and device manufacturing method

An exposure apparatus is equipped with a fine movement stage that can hold a liquid with a projection optical system when the stage is at a position facing an outgoing surface of the projection optical system, and a blade that comes into proximity within a predetermined distance of the fine movement stage when the fine movement stage is holding the liquid with the projection optical system, and moves along with the fine movement stage while maintaining the proximity state, and then holds the liquid with the projection optical system after the movement. Accordingly, a plurality of stages will not have to be placed right under the projection optical system interchangeably, which can suppress an increase in footprint of the exposure apparatus.. ... Nikon Corporation

03/29/18 / #20180088472

Exposure system

An exposure system is equipped with: a first row of chambers that are arranged to be adjacent to a c/d provided on a floor surface f on a +x side; a second row of chambers arranged on the −y side facing the first row of chambers; and a first control rack adjacent to the to the second row of chambers on a −x side and is arranged on the −y side facing the c/d. Inside at least a part of the plurality of chambers, exposure chambers where exposure is performed are formed and the first control rack distributes utilities supplied from the below the floor surface to the first and the second rows of chambers.. ... Nikon Corporation

03/29/18 / #20180088441

Lens barrel with shake detection function

A lens barrel with a shake detecting function includes: a lens tube that supports an imaging optical system; a first shake detection sensor that detects a shake along a first detection axis; a second shake detection sensor that detects a shake along a second detection axis; and a flexible printed circuit substrate via which the first shake detection sensor and the second shake detection sensor are attached to the lens tube such that each of the first detection axis and the second detection axis is substantially orthogonal to an optical axis of the imaging optical system and the first detection axis and the second detection axis are substantially orthogonal to each other.. . ... Nikon Corporation

03/29/18 / #20180088381

Liquid-chystal achromatic phase modulator

An achromatic phase modulator (100) adapted to modulate the phase of an incident beam of light (incident light) and to output the thus modulated light, the phase modulator (100) comprising a plurality of liquid crystal elements disposed in series on a light path of the incident light and a control unit (15) comprising a plurality of power sources (14) for applying drive electric signals to the liquid crystal elements, wherein the plurality of liquid crystal elements comprises at least a first and a second liquid crystal element groups (first liquid crystal element group; second liquid crystal element group), each group being composed of a pair of liquid crystal elements, the liquid crystal elements of the first and second group respectively being made of a first and a second liquid crystal material having a first and a second, different, refractive index wavelength dependence characteristic, the thicknesses (d1/2, d2/2) of the liquid crystal elements forming each group being equal.. . ... Nikon Corporation

03/22/18 / #20180081283

Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method

An exposure method and apparatus expose a substrate with illumination light via a projection optical system and a liquid of a liquid immersion area formed under the projection optical system. A second stage on which the substrate is held and a third stage are relatively moved, based on outer periphery positional information of the second stage, in order to cause the second stage to come close, from one side in a first direction, to the third stage that faces the projection optical system. ... Nikon Corporation

03/22/18 / #20180081158

Microscope objective lens

Provided is a microscope objective lens that sufficiently corrects on-axis and off-axis chromatic aberrations and that has a long working distance. A microscope objective lens ol includes, in order from an object side, a first lens group g1 with positive refractive power and a second lens group g2 with negative refractive power. ... Nikon Corporation

03/22/18 / #20180081148

Interchangeable lens, camera body, and camera

An interchangeable lens attachable to a camera body, the interchangeable lens including: a focusing optical system configured to vary a focal position of the interchangeable lens; and a transmitter configured to transmit a first value and a second value to the camera body, the first value indicating a relationship between an amount of movement of the focusing optical system and an amount of movement of an image plane at a position to which the focusing optical system has moved, the second value indicating a relationship between an amount of movement of the focusing optical system and an amount of movement of the image plane, the second value being equal to or smaller than the first value.. . ... Nikon Corporation

03/22/18 / #20180080076

Nucleic acid detection method, detection probe, detection probe set, and nucleic acid quantification method

A method for detecting a target nucleic acid, comprising: (a) contacting a nucleic acid sample comprising a target nucleic acid, comprising a first portion and a second portion, with: (i) a detection probe, wherein the detection probe is labeled with a labeling substance and comprises a nucleic acid sequence that forms a stem-loop structure and having a 5′ protruding end or a 3′ protruding end that is capable of hybridizing to the second portion, and (ii) a capture probe comprising a nucleic acid sequence capable of hybridizing to the first portion, wherein the capture probe is immobilized to a substrate, under conditions to form a target nucleic acid-detection probe-capture probe complex by hybridizing the second portion to the detection probe and hybridizing the first portion to the capture probe; (b) ligating a first end of the detection probe with an end of the target nucleic acid and ligating a second end of the detection probe with an end of the capture probe; and (c) detecting the labeling substance of the nucleic acid-detection probe-capture probe complex formed on the substrate.. . ... Nikon Corporation

03/15/18 / #20180074417

System and method for control of a workpiece and a chuck

An exposure apparatus (10) for transferring one or more features to a workpiece (22) includes an illumination source (44a); (ii) a chuck (40) that retains the workpiece (22); (iii) a chamber housing (28a) that encircles the chuck and the workpiece; and (iv) a temperature controller (32) (34) that adjusts the temperature of at least one of the chuck (40) and the workpiece (22) so that a predetermined temperature differential (309) exists between the chuck (40) and the workpiece (22) before transferring the features to the workpiece (22).. . ... Nikon Corporation

03/15/18 / #20180071987

Apparatus for manufacturing three dimensional shaped object, and method for manufacturing structure

An apparatus for manufacturing a three dimensional shaped object includes: a manufacturing unit that manufactures a three dimensional shaped object in which a plurality of solidified layers are built up together by repeating to manufacture a solidified layer, which is layered, by performing solidification processing upon a material that is positioned in a region set according to a shape of the three dimensional shaped object that is to be manufactured, to supply a new material upon an upper portion of the solidified layer that has been manufactured, to perform the solidification processing upon the new material and thus to manufacture a new solidified layer; and an inspecting unit that inspects the solidified layer that has already been built up, while the plurality of solidified layers are being built up together.. . ... Nikon Corporation

03/08/18 / #20180070027

Image processing device configured to correct an image so as to decrease output data

An image-capturing device includes: a plurality of microlenses arranged in a two-dimensional manner; a plurality of photodetectors arranged to correspond to the plurality of microlenses; an image synthesizing part that synthesizes an image at an optional image plane of a photographic optical system, based on signals from the plurality of photodetectors; and an image processing part that removes signals of other pixels from signals of pixels constituting the image synthesized in the image synthesizing part.. . ... Nikon Corporation

03/08/18 / #20180069991

Digital camera that sends electronic mail with event information

A portable telephone is equipped with a camera and includes an image sensor that is included in the camera and that outputs image data. The portable telephone also includes a processor configured to: (i) associate the image data with position information denoting a position at which the image data is output by the image sensor; (ii) control storage of the image data to a storage medium; (iii) select the image data related to the position information in the storage medium; (iv) acquire information indicating a map based on the position information related to the selected image data; and (v) create textual content to be sent to a destination based on the position information. ... Nikon Corporation

03/08/18 / #20180069968

Image display apparatus having image-related information displaying function

An electronic device includes an image sensor that outputs image data; a display that displays the image data output by the image sensor; an operating unit by which a user of the electronic device selects the image data displayed on the display; and a communication circuit that communicates with other electronic devices that are separate from the electronic device. When the image data is selected by the operating unit and the communication circuit receives an identification information of a first electronic device, which is one of the other electronic devices, the communication circuit transmits an identification information of the electronic device and an information about the image data to the first electronic device.. ... Nikon Corporation

03/08/18 / #20180067406

Exposure apparatus, exposure method, method for manufacturing device

A liquid immersion exposure apparatus in which a substrate is exposed via a projection optical system, includes: a liquid supply flow path; a first flow path which receives a first portion of immersion liquid from the liquid supply flow path; a second flow path which receive a second portion of the immersion liquid from the liquid supply flow path; a supply port via which the first portion of the immersion liquid is supplied; and an adjusting device provided downstream of the liquid supply flow path, which adjusts a quantity of the first portion of the immersion liquid. During the exposure of the substrate, the first portion of the immersion liquid is supplied to form a liquid immersion area covering a portion of an upper surface of the substrate, and the substrate is exposed with an exposure light through the liquid immersion area.. ... Nikon Corporation

03/08/18 / #20180067405

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

A first stage system having a first stage and a first drive system that moves the first stage is configured to hold a mask illuminated with illumination light. A second stage system having a second stage and a second drive system that moves the second stage is configured to hold a substrate. ... Nikon Corporation

03/08/18 / #20180067397

Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method

An exposure apparatus that scans and exposes each of a plurality of areas on a glass substrate, by irradiating the substrate with an illumination light via a projection optical system and relatively driving the substrate with respect to the illumination light, is equipped with: a substrate holder that levitates and supports a first area of the substrate; a substrate carrier that holds the glass substrate levitated and supported by the substrate holder; an x coarse movement stage that drives the substrate holder; an x voice coil motor that drives the substrate carrier; and a controller that controls the x coarse movement stage and the x voice coil motor so that the substrate holder and the substrate carrier are driven, respectively, in scanning exposure. Accordingly, an exposure apparatus with improved position controllability of an object can be provided.. ... Nikon Corporation

03/08/18 / #20180067339

Spectacle lens

Provided is a spectacle lens (1) comprising one multilayer film (3a, 3b) on each surface of a plastic lens base material (2), wherein by setting an average reflection rate in at least the 530-570 nm wavelength range to 2.5-5.5% in at least one of the multilayer films (3a, 3b) disposed on a surface of the plastic lens base material, it is possible to attain, in dim environments, an improvement in vividness and brightness in visibility of objects, particularly those that are red in color, as well as an improvement in visibility of the white in white computer screens and the like, and the lens is thereby suitable for the eyes of elderly people.. . ... Nikon Corporation

03/08/18 / #20180067302

Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method

One embodiment relates to a spatial light modulator unit comprising: a spatial light modulator with a plurality of optical elements; a spatial light modulation element applying spatial light modulation to the incident light and making rays of intensity levels according to positions of the respective optical elements; and a control unit.. . ... Nikon Corporation

03/08/18 / #20180065816

Object carrier device, exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, object carrying method, and exposure method

A carrying method of carrying a substrate with a substrate holder, including: holding a part of the substrate located above the substrate holder using holding pads; controlling and driving downward the holding pads holding the substrate so that the substrate is supported on the support surface of the substrate holder, when releasing the hold of an other part of the substrate by a substrate carry-in hand that holds the other part of the substrate located above the substrate holder. Accordingly, the substrate carriage to the substrate holder can be swiftly performed.. ... Nikon Corporation

03/01/18 / #20180063410

Imaging device

An imaging device includes: a first image sensor comprising first pixels that receive incident light, and that include a first and second photoelectric conversion units that are arranged in a first direction; and a second image sensor including second pixels that receive light that has passed through the first image sensor, and that include a third and fourth photoelectric conversion units that are arranged in a second direction that is different from the first direction.. . ... Nikon Corporation

03/01/18 / #20180063408

Exchangeable lens having a settable aperture and camera body that captures an image by an optical system which has a settable aperture

A lens barrel including: an optical system which includes a focus adjustment optical system; an aperture which limits the light beam which pass through the optical system to predetermined range at the time of detection of the focus state of the optical system; a drive which drives the focus adjustment optical system; a memory which stores a first predetermined value which is a aperture value within the predetermined range; and a transmitter which sends the first predetermined value to the camera body.. . ... Nikon Corporation

03/01/18 / #20180061627

Encoder head with birefringent elements for forming imperfect retroreflection and exposure system utilizing the same

An encoder head configured for use with a lithographic exposure tool. The head is devoid of the multiplicity of optical corner-cubes and includes, instead, a single, geometrically substantially perfect cuboid of optically-isotropic material complemented, in operation, with prismatic elements made of optically anisotropic material to form a contraption that, as a unit, splits a single beam of light delivered to the contraption into four measurement (sub-)beams of light (two in xz-plane, two in yz-plane) and causes each of these sub-beams to interact with the wafer-stage diffraction grating at the same location upon the second pass by the grating as upon the first pass by the grating, thereby solving problems of (i) structural complexity of a conventional encoder head for use in an exposure tool, (ii) burdensome alignment of the multitude of optical prisms in the process of forming such encoder head, and (iii) cyclic non-linear errors associated with measurements involving conventional corner-cubes-based encoder heads while, at the same time, reducing the geometrical footprint of the encoder head.. ... Nikon Corporation

03/01/18 / #20180061035

Electronic camera, image-processing device, and image-processing program

There are provided an imaging section imaging a subject and generating a plurality of images; an evaluating section performing evaluation on the plurality of images generated by the imaging section; a selecting section selecting, based on an evaluation result of the evaluating section, a part of images from among the plurality of images generated by the imaging section; a recognizing section performing scene recognition on a plurality of images selected by the selecting section; and a determining section determining, based on a recognition result of the recognizing section, reproduction order of the plurality of images subjected to the scene recognition.. . ... Nikon Corporation

03/01/18 / #20180059554

Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method

An exposure apparatus exposes a substrate with illumination light via an optical system. A detection system supported in a measurement station detects a mark of the substrate. ... Nikon Corporation








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