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Reno Technologies Inc patents


Recent patent applications related to Reno Technologies Inc. Reno Technologies Inc is listed as an Agent/Assignee. Note: Reno Technologies Inc may have other listings under different names/spellings. We're not affiliated with Reno Technologies Inc, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "R" | Reno Technologies Inc-related inventors


Flow control system, method, and apparatus

In one embodiment, a system for controlling the delivery of process gas has a first mass flow device and a pressure transducer. The first mass flow device has a substrate block with an inlet conduit and an outlet conduit. ... Reno Technologies Inc

Apparatus for controlling flow and method of calibrating same

Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. In one embodiment, a method of calibrating an apparatus for controlling gas flow is disclosed. ... Reno Technologies Inc

Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same

Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. In one embodiment, a method of achieving improved transient response in apparatuses for controlling gas flow is disclosed. ... Reno Technologies Inc

Impedance matching network using heat pipe inductor

In one embodiment, the invention may be an impedance matching network including an input configured to operably couple to a radio frequency source, an output configured to operably couple to a load, and a first variable capacitor. The matching network may further include an inductor formed from a heat pipe that is wound in a three-dimensional shape. ... Reno Technologies Inc

Switching circuit

In one embodiment, an impedance matching network is disclosed that includes a first circuit comprising a first variable component providing a first variable capacitance or inductance, and a second circuit comprising a second variable component providing a second variable capacitance or inductance. Each of the first circuit and the second circuit includes plurality of switching circuits configured to provide the first variable capacitance or inductance and the second variable capacitance or inductance. ... Reno Technologies Inc

Flow control system, method, and apparatus

In one embodiment, a modular method of making mass flow controllers for delivery of a plurality of process gases includes providing a plurality of monolithic bases, each of the monolithic bases having a plurality of flow component mounting regions. A first set of flow components are coupled to the flow component mounting regions of a first of the monolithic bases to form a mass flow controller having a first set of operating characteristics. ... Reno Technologies Inc

Switching circuit

In one embodiment, a switching circuit includes a first switch coupled to a first switch terminal, the first switch comprising at least one gallium nitride high-electron mobility transistor (gan hemt); a second switch coupled in series with the first switch and a second switch terminal, the second switching comprising a gan hemt; and at least one power source configured to provide power to the first switch and the second switch; wherein the second switch is configured to drive the first switch on and off.. . ... Reno Technologies Inc

Enclosure cooling system

In one embodiment, the invention can be a system for cooling an enclosure enclosing electrical components and configured to prevent air and exhaust from escaping the enclosure. The system can include a heat sink comprising a heat exchanger, and a tube extending into and out of the heat exchanger, the tube configured to transport liquid through the heat exchanger. ... Reno Technologies Inc

Capaciatance variation

In one embodiment, the invention can be a variable capacitor that includes a plurality of capacitors operably coupled in parallel, and a plurality of switches coupled in series with corresponding capacitors. The plurality of capacitors can include first capacitors increasing in capacitance, and second capacitors having a substantially similar capacitance. ... Reno Technologies Inc

Switching circuit

In one embodiment, a switching circuit includes a first switch comprising one or more transistors operably coupled in series with a first terminal, wherein each of the one or more transistors has a corresponding diode, a drain of each of the one or more transistors being operably coupled to a cathode of the corresponding diode; and a second switch comprising one or more transistors operably coupled in series with a second terminal, wherein each of the one or more transistors has a corresponding diode, a drain of each of the one or more transistors being operably coupled to a cathode of the corresponding diode; wherein a source of the one or more transistors of the first switch is operably coupled to a source of the one or more transistors of the second switch.. . ... Reno Technologies Inc

Rf impedance matching network

In one embodiment, an rf impedance matching network includes an rf input configured to operably couple to an rf source; an rf output configured to operably couple to a plasma chamber; a first electronically variable capacitor having a first variable capacitance; a second electronically variable capacitor having a second variable capacitance; and a control circuit operably coupled to the first and second electronically variable capacitors. The control circuit is configured to determine the variable impedance of the plasma chamber, determine a first capacitance value for the first variable capacitance and a second capacitance value for the second variable capacitance, and generate a control signal to alter the first and/or second variable capacitance. ... Reno Technologies Inc








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